JPH0329320Y2 - - Google Patents

Info

Publication number
JPH0329320Y2
JPH0329320Y2 JP1984196847U JP19684784U JPH0329320Y2 JP H0329320 Y2 JPH0329320 Y2 JP H0329320Y2 JP 1984196847 U JP1984196847 U JP 1984196847U JP 19684784 U JP19684784 U JP 19684784U JP H0329320 Y2 JPH0329320 Y2 JP H0329320Y2
Authority
JP
Japan
Prior art keywords
vapor deposition
jig
present
metal
tape
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984196847U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61116760U (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984196847U priority Critical patent/JPH0329320Y2/ja
Publication of JPS61116760U publication Critical patent/JPS61116760U/ja
Application granted granted Critical
Publication of JPH0329320Y2 publication Critical patent/JPH0329320Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1984196847U 1984-12-28 1984-12-28 Expired JPH0329320Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984196847U JPH0329320Y2 (cs) 1984-12-28 1984-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984196847U JPH0329320Y2 (cs) 1984-12-28 1984-12-28

Publications (2)

Publication Number Publication Date
JPS61116760U JPS61116760U (cs) 1986-07-23
JPH0329320Y2 true JPH0329320Y2 (cs) 1991-06-21

Family

ID=30754748

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984196847U Expired JPH0329320Y2 (cs) 1984-12-28 1984-12-28

Country Status (1)

Country Link
JP (1) JPH0329320Y2 (cs)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59140373A (ja) * 1983-01-28 1984-08-11 Pentel Kk 物理的蒸着法による被膜形成方法

Also Published As

Publication number Publication date
JPS61116760U (cs) 1986-07-23

Similar Documents

Publication Publication Date Title
US4915057A (en) Apparatus and method for registration of shadow masked thin-film patterns
US2392429A (en) Piezoelectric crystal apparatus
US4746548A (en) Method for registration of shadow masked thin-film patterns
JPH0329320Y2 (cs)
JP4038679B2 (ja) 半導体レーザーバーの固定用治具
CA1304772C (en) Reference and support system for flat crt tension mask
CN215757590U (zh) 一种用于真空镀膜装置的工装夹具
JPS5842441Y2 (ja) 蒸着装置
JPH0249710Y2 (cs)
JPH02271550A (ja) ウエハ基板の固定方法
JPH0273973A (ja) スパッタリング装置
JPH019152Y2 (cs)
KR940008241Y1 (ko) 웨이퍼 홀더
JPS644584B2 (cs)
JPS609241Y2 (ja) 真空蒸着装置
JPS584921Y2 (ja) 蒸着におけるウエハ固定装置
US4372055A (en) Thermal insulation end panel mounting bracket assembly for paper machine dryer cylinder
JPH0233389Y2 (cs)
JPS5928033Y2 (ja) スパツタリング装置
JPS60260343A (ja) 圧電小管を位置固定しかつ接点形成するための装置
JPS6475677A (en) Film forming device
JPH0126766Y2 (cs)
SU659641A1 (ru) Устройство дл нанесени покрытий в вакууме
JPH08748Y2 (ja) 貫通コンデンサの実装構造
JPS5832287Y2 (ja) 電気部品取付板