JPH0329104A - Thin-film magnetic head - Google Patents

Abstract

PURPOSE:To simplify stages and to improve a recording capacity and reproducing efficiency by using two layers of laminated films consisting of a specific high saturation magnetic flux density material of an amorphous alloy or multilayered magnetic alloy and a specific alloy for an upper or lower magnetic pole and exposing only the specific high saturation magnetic flux material on the medium facing surface. CONSTITUTION:The two layers of the films 9, 10 formed by laminating the high saturation magnetic flux density film 10 having >=1.2T, more preferably >=1.3T saturation magnetic flux density, <=1.00e coercive force, >=700 magnetic permeability measured at 5MHz, and <=+ or -5X10<-7> magneto-restriction and the magnetic film 9 having <=1.0T saturation magnetic flux density, >=1500 magnetic permeability measured at 5MHz, and<=+ or -5X10<-7> magneto-restriction are used for the magnetic pole 3. Further, only the high saturation magnetic flux density film 10 having >=1.2T, more preferably>=1.3T saturation magnetic flux density among the magnetic films constituting the magnetic pole 3 is exposed on the medium-facing surface 11 of the thin-film head. The thin-film head with which the generation of wiggling is obviated and which has the excellent reproducing effect is obtd. in this way and the recording capacity is improved.

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to a thin magnetic head suitable for high-density magnetic recording, and in particular, a thin magnetic head that uses a high saturation magnetic flux density material and has excellent writing ability; Regarding the head. [Prior Art] In recent years, there has been remarkable progress in increasing the density and performance of magnetic recording. Particularly in the field of magnetic disk drives for large computers, large capacity improvements have been made due to significant improvements in recording density. In magnetic disk drives, some thin-film magnetic heads have been commercialized that have lower inductance, higher frequency permeability, and are capable of narrower track widths than conventional ferrite heads. Conventionally, as seen in Japanese Patent Laid-Open No. 55-87323, a #film magnetic head has been fabricated using a Ni-Fa (permalloy) alloy with a saturation magnetic east density IT. In the 3rd v4,
An example of a thin film magnetic head formed using a Ni-Fe alloy is shown below. In the same figure, A Ii gos −
TiC ceramic #AmxOs-'1'i0a (A sputtered AIltOa film 2 is formed on an insulating substrate l made of ceramics, SiC, Zn ferrite, Ni-Zn ferrite, Mn-Zn ferrite, etc.. Next,
The lower magnetic pole 3 is formed by Ni-}'a alloy sputtering method. Next, AjlsOs constituting the magnetic gap 4 is formed by sputtering. Further, the conductor coil 5 was formed using Cu by the spatter method. As the insulating layer 6 of the coil conductor, heat-resistant polyimide resin or resist is used. Next, the upper magnetic pole 7 is formed of Ni-Fa alloy by the sputtering method in the same manner as the lower magnetic pole 3. In addition.
A typical composition of Ni-Fe alloy is 19 where the magnetostriction is 0.
wt%-81wt%Fe. Furthermore, about 20 μm of AjlzOa protection [8 is formed. Here, the patterning of the lower magnetic pole 3, magnetic gap 4, coil conductor 5, and upper magnetic pole 7 is performed by ion milling. By the way, #1 In order to improve the N degree, it is necessary to increase the coercive force of the medium, and in order to cope with this, it is necessary to increase the thickness of the magnetic pole so that more magnetic field can be emitted from the tip of the head magnetic pole. ．． However, increasing the thickness of the magnetic pole causes a problem in that the reproduction resolution decreases. In order to deal with both the problems of higher coercive force of media and lower reproduction resolution due to improved recording density in the future, it is necessary to
It is said that i-Fe alloy is insufficient and that it is necessary to use a high saturation magnetic flux density magnetic material for the pole magnetic film. As such a high saturation magnetic flux magnetic film, 4 5/5 5Ni-
Fa alloys are known. However, 45/55Ni-Fa
Since the alloy has a large positive magnetostriction, the reproduction output of a thin-film head using it will fluctuate greatly, and the magnetic permeability is 130.
Since it is small from 0 to 1400, the playback output is also 8 1
/19Ni There is a problem in that it is smaller than a thin film magnetic head that uses Fe (permalloy). To solve this problem, Japanese Patent Application Laid-open No. 10410/1983 discloses a 45/5 saturated flux density in only the tip region of the magnetic pole.
Use a 5Ni-Fe alloy, and use an 81/19Ni-Fe alloy with high magnetic permeability and negative and small magnetostriction for other parts that essentially determine the reproduction output. I am dealing with this. In addition, CoZr-based amorphous alloy films are known as materials with high saturation magnetic flux density. CoZr-based amorphous alloys have a large anisotropic magnetic field immediately after sputtering, and their magnetic permeability ranges from 700 to 8.
00, so a thin film magnetic head using this has a problem of low reproduction output. Regarding this problem, Japanese Patent Application Laid-Open No. 58-ti8211
o-Fe-B amorphous film and high permeability magnetic film
This is dealt with by combining r-amorphous films. In addition, in consideration of the concentration of magnetic flux near the gap between the magnetic poles, JP-A No. 58-68211 discloses that the magnetic pole is formed of two types of magnetic films, and the saturation magnetic flux density of the magnetic expansion near the gap is made larger. I am dealing with this. [IIIM to be solved by the invention] However, the #WA magnetic head of JP-A-60-10410 has the drawback that the manufacturing process is complicated because a high saturation magnetic flux density material is applied only to the tip of the magnetic pole. there were. In addition, in the case of JP-A No. 58-68211, the manufacturing process is simple, but the a-strain of the CoZr amorphous alloy is 3×10
``''8 is a large positive value, and when a CoZr amorphous alloy is used on the entire surface of the magnetic pole, there is a problem in that a wiggle phenomenon occurs in which the reproduction output fluctuates and the reproduction waveform becomes distorted. Furthermore, in JP-A-58-6821-1, a magnetic film with a low saturation magnetic flux density appears at the tip of the magnetic pole, that is, the area facing the medium of a thin-film magnetic head, so a high saturation magnetic flux density material appears over the entire area facing the medium. The problem was that the magnetic poles needed to be thicker than those with conventional magnetic poles, making it impossible to obtain high recording density. SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problems and to obtain a thin film magnetic head that can be manufactured using an oil-based manufacturing process, has excellent recording ability, and has excellent reproduction efficiency.

[Means to solve the problem]

In order to achieve the above object, the present invention has a saturation magnetic flux density of 1. 2'r or more, more preferably 1.3T or more, and has a coercive force of 1. 0 0 a or less. 5MHz
Magnetic permeability measured at 700 or more, magnetostriction ±5×10-7
The following high saturation magnetic flux density magnetic films and saturation magnetic flux density 1. O
T or more, magnetic permeability measured at 5MHZ is 1500 or more,
A two-layer film consisting of a magnetic film with a magnetostriction of ±5XIO-' or more was used for the magnetic pole. Furthermore, the surface of the thin film head facing the medium has a saturation magnetic flux density of 1 within the magnetic layer that constitutes the magnetic pole.
．． 2T or more, preferably 1. Only the magnetic film with a saturation magnetic flux density of 3'r or higher is exposed. By adopting this structure, it became possible to obtain a thin film head with excellent reproduction characteristics.In addition, by using a high saturation magnetic flux density material in the part that protrudes against the medium, the recording ability can be improved. This is an improvement over the conventional head that uses only permalloy for the magnetic pole. [Function] According to this invention, by combining a low magnetic permeability low 6J & distorted saturation magnetic flux density material and a low magnetic permeability low magnetostriction low saturation magnetic flux density material, a thin film with excellent writing ability and excellent reproduction characteristics can be created. A magnetic head is obtained. [Example] The present invention will be explained in detail below using Examples. (Example 1) Fig. 1 shows the cross-sectional structure of a magnetic head made of silk according to an example of the present invention. AQzOa-'riC ceramic, AQzOa-'l'
i 0 *ceramics, SiC, Zn ferrite,
A spatter AjlzOaM is formed on an insulating substrate 1 made of Ni--Zn ferrite, Mn--Zn ferrite, or the like. Next, as the lower magnetic pole 19, Ni-? 'e After forming by alloy sputtering method, it is processed into magnetic poles by ion milling method. Next, as the lower magnet I4III10, Cosz'l'a
After shaping the aZra amorphous alloy sputtered film, it is processed into a magnetic pole by ion milling.

By making the shapes of the lower magnetic pole I and the lower magnetic pole 11 as shown in FIG. 2 (a) and (b), the medium resistance r6rl
1, only the Co@zTasZra amorphous alloy spatter film was exposed. In addition, the magnetic permeability of the (; oez'rasZra amorphous alloy sputtered film immediately after sputtering is 700 (measured at 5 MHz),
The coercive force is 1. OOe (coercive force in difficult direction), Ni-F
The magnetic permeability of the e-alloy was 1500 (measured at 5MHz). In addition, the magnetostriction of (;osz'l'a1Zra amorphous alloy sputtering!) was -IXIO1, and the magnetostriction of Ni-Fa alloy was -IXIO-7.
The magnetostriction of the l'aaZra amorphous alloy sputtered film varies by about ±2XlO-7 depending on the thermal history during the head manufacturing process. Next, AQxOsk 4, which constitutes the magnetic gap 4, is formed by the cylindrical method. Is Cu used for coil conductor 5? It is formed using the spatter method. As the insulating layer of the coil conductor 6, heat-resistant polyimide resin or resist is used. The upper magnetic pole 1 (1 2) has a saturation magnetic flux density of 1.3 L.
・C. 9. After forming a TasZra amorphous alloy film by sputtering, it is processed into a magnetic pole by ion milling.
Furthermore, the saturation magnetic flux density is 11' as the magnetic pole (13).
A Ni-do θ is formed using a sputtering method, and similarly processed into a magnetic pole using an ion milling method. The magnetic pole shapes of the upper magnetic pole 112 and the lower magnetic pole 1113 are shown in FIG. 2(b).
By doing as shown in (a), Coe
Only the zTaaZra amorphous alloy spatter film is exposed. Furthermore, about 20 μm of A 11 z O a
form a protective order 8. In addition, C o @i'l' a aZ immediately after sputtering,
The magnetic permeability of the ra amorphous alloy spatter film is ゛700 (5M
(measured in Hz), coercive force is 1. OOe (coercive force in the M-axis direction), the magnetic permeability of the Ni-Fe alloy is 1500 (
It was 'IJ45,) at 5MHz. Also, C o sz
'ra sZr s The magnetostriction of the amorphous alloy sputter film is -I
XIO-', the magnetostriction of Ni-Fa alloy is -IXI
Furthermore, the magnetostriction of the Co*zTaaZra amorphous alloy sputtered film changes by ±2×10−″7 degrees depending on the thermal history during the head fabrication process. Partial magnetic pole 1
9. The patterning of the lower magnetic pole ljlO, the a-gap 4, the coil conductor 5, the upper magnetic pole l12, and the upper magnetic pole ul3 was formed by ion milling. For comparison, the head structure is the same, and the saturation magnetic flux density of the Coi'aZr amorphous alloy sputtered film is 1. 3'1
' was fixed, and a head with different agi was created by changing the composition ratio of 'l' a and Zr. Also, Go'l'
The aZr amorphous alloy sputtered film can be heat-treated in a magnetic field to reduce the anisotropic magnetic field and improve its magnetic permeability. Therefore, for comparison, a thin film magnetic head with a magnetic pole in which the magnetic permeability of a G o '1' a Z r amorphous alloy sputter film was changed by heat treatment in a magnetic field was also fabricated. Furthermore, for comparison, the composition ratio of '11 and Zr of the Go'l'aZr amorphous alloy sputtered film was kept constant, and the magnetostriction was kept below ±2X10-7. We prototyped a thin-film magnetic head in which the saturation magnetic flux density of the magnetic pole was changed by changing the Co composition. The thin film head produced as described above had a coercive force of 4000e. Using a γ-Fears coating medium with a film thickness of 0.4 μm. The reproduction characteristics and overwrite characteristics were evaluated with a spacing of 0.25 μm. Figure 4 shows the relationship between the magnetostriction of the Co'1'a'lr amorphous alloy spatter film used for the magnetic pole and the reproduction characteristics (reproduction output, wiggle generation rate). This is shown in magnetostriction below.The reproduction output is based on the reproduction output of a thin-film magnetic head with the same structure but using only permalloy.
Relative playback output. On the other hand, the wiggle occurrence rate is the number of thin film magnetic heads in which wiggles occurred out of 100 # film magnetic heads formed under the same conditions, and is expressed as a percentage. The playback output tends to increase as the magnetostriction becomes positive and larger, but in order for the magnetostriction to be 5 x 10-''7 or higher, the output is comparable to that of a permalloy head, and the wiggle generation rate is below 10%, Go' The magnetostriction of the l'aZr amorphous alloy sputter film is preferably ±5XIO''''7 or less. Figure 5 shows the magnetic permeability and reproduction characteristics (reproduction output) of a head whose magnetic permeability has been changed by heat treatment in a magnetic field. , Uigur generation skewer).The reproduction output tends to increase as the magnetic permeability increases, but when the magnetic permeability increases to 40
When the number exceeds 00, the Uighur incidence increases rapidly.
Also, if the magnetic permeability is about 700 or more, a reproduction output comparable to that of a permalloy head can be obtained. The above results were measured by changing the magnetostriction of permalloy in the range of ±5XIO-'.
It didn't change. FIG. 6 shows the relationship between the saturation magnetic flux density and overwrite SN of the Co'l'aZr amorphous alloy sputtered film. The overwrite SN of the head using only permalloy is. It was 20dB* C o 'ra Z r
The saturation magnetic flux density of the amorphous alloy sputtered film is 1. 0 T
~1. At 1 ``l'', the overwrite SN was almost the same as that of a head using only permalloy.When the saturation magnetic flux density exceeded 1.2'r, the effect of increasing the overwrite SN due to the increase in saturation and magnetic flux density became large. It starts to appear, and becomes noticeable above 1.3"l'. This result also shows that Go '1' a・Hf amorphous alloy, Co'ra
Similar results were obtained for amorphous alloys with high saturation magnetic flux density, such as HfPd-based amorphous alloys. Also. F
'eSiRu alloy and permalloy alloy multi-layered, or? Similar results were obtained for crystalline materials such as multilayer films of C alloy and permalloy alloy. [Effects of the Invention] As described above, in the present invention, the saturation magnetic flux density is 1.2T.
From the above, it is preferable that the coercive force is 1.3T or more. OOe
Hereinafter, a high saturation magnetic flux density magnetic film with a magnetic permeability of 700 or more and a magnetostriction of ±5X10-7 or less measured at 5 MHz and a saturation magnetic flux density of 1. We decided to use a two-layer film for the magnetic pole, consisting of a magnetic film with a magnetic permeability of 0'1' or less, a magnetic permeability of 1500 or more measured at 5MHz, and a magnetostriction of ±5X10-' or less. Furthermore, for the #film head against the medium, the saturation magnetic flux density in the magnetic absorption constituting the magnetic pole is 1.2T or more, preferably 1.3T.
- Only the magnetic film with a high saturation magnetic flux density of 1 or more is exposed.

By using such a small structure, it has become possible to obtain a thin film head that does not suffer from the Uiggle phenomenon and has excellent reproduction effects. Furthermore, by using a high saturation magnetic flux density material for the magnetic pole that protrudes between the media and the medium, the recording performance is also improved compared to the conventional head that uses only permalloy for the magnetic pole. Furthermore, in this head structure, the process is relatively simple because the magnetic film is sputtered over the entire surface of the substrate to form the magnetic poles.

[Brief explanation of drawings]

FIG. 1 is a blood cut diagram of a thin film magnetic head according to an embodiment of the present invention.
Fig. 2 is a plan view showing the magnetic pole shape of an embodiment of the present invention, Fig. 3 is a sectional view of a conventional # film magnetic head using only permalloy for the magnetic pole, and Fig. 4 is a plan view of the magnetic pole shape of an embodiment of the present invention. A diagram showing the magnetostriction and reproduction characteristics of the magnetic pole of a thin film magnetic head. FIG. 5 is a diagram showing the relationship between magnetic permeability and reproduction characteristics of the magnetic pole of a thin film magnetic head according to an embodiment of the present invention. FIG. FIG. 6 is a diagram showing the relationship between the saturation magnetic flux density of the magnetic pole of the example thin general magnetic head and the overwrite SN. l...Substrate, 2...AQxOs, 3...Lower magnetic pole, 4...Magnetic gap, 5:...Conductor coil, 6...
・Insulating layer, 7゜Top magnetic pole, 8... Protective film, 9...
Lower magnetic poles 1, 10...Lower magnetic pole ■, 11...Medium opposing surface, 12... Upper magnetic pole ■, 13... Upper magnetic pole U. Box VJ 2 Product (α) (ν) 3rd group name S ■ wo (xto3) Goose face blood cup (X tO') Name b 1st son's name (α) (v)

Claims (1)

[Claims] 1. A magnetic core consisting of a lower magnetic pole and an upper magnetic pole on a substrate;
In a thin film magnetic head comprising an insulating layer that magnetically and electrically isolates the two magnetic poles, and a coil that inputs and outputs signals within the insulating layer, the upper magnetic pole or the lower magnetic pole is made of an amorphous material. A high saturation magnetic flux density material of a high quality alloy or a multilayer magnetic alloy with a saturation magnetic flux density of 1.2 T or more, more preferably 1.3 T or more, and N with a saturation magnetic flux density of 1 T.
A two-layer laminated film made of i-Fe (permalloy) alloy is used, and the surface facing the medium has a saturation magnetic flux density of 1.2 T or more.
More preferably, a thin film magnetic head characterized in that only a material with a high saturation magnetic flux density of 1.3 T or more is exposed. 2. The magnetostriction of the high saturation magnetic flux density material is ±5×10^-^7
The thin film according to claim 1, wherein the magnetic permeability is 700 or more, the magnetostriction of the Ni-Fe alloy is ±5×10^-^7 or less, and the magnetic permeability is 1500 or more. magnetic head. 3. The amorphous alloy film is made of CoTaZr, -CoTaHf
, CoTaHfPd-based amorphous alloy. 4. The multilayer magnetic film is made of FeSiRu alloy or F
3. The thin film magnetic head according to claim 1, wherein the thin film magnetic head is a multilayer film of an e-C alloy and a Ni-Fe (permalloy) alloy.