JPH0329035B2 - - Google Patents

Info

Publication number
JPH0329035B2
JPH0329035B2 JP61124281A JP12428186A JPH0329035B2 JP H0329035 B2 JPH0329035 B2 JP H0329035B2 JP 61124281 A JP61124281 A JP 61124281A JP 12428186 A JP12428186 A JP 12428186A JP H0329035 B2 JPH0329035 B2 JP H0329035B2
Authority
JP
Japan
Prior art keywords
solid
boat
liquid interface
heater
reaction tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP61124281A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62278186A (ja
Inventor
Keiichiro Fujita
Shinji Yoshitake
Yoshihiro Adachi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP61124281A priority Critical patent/JPS62278186A/ja
Publication of JPS62278186A publication Critical patent/JPS62278186A/ja
Publication of JPH0329035B2 publication Critical patent/JPH0329035B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP61124281A 1986-05-28 1986-05-28 半導体単結晶の製造方法及び装置 Granted JPS62278186A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61124281A JPS62278186A (ja) 1986-05-28 1986-05-28 半導体単結晶の製造方法及び装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61124281A JPS62278186A (ja) 1986-05-28 1986-05-28 半導体単結晶の製造方法及び装置

Publications (2)

Publication Number Publication Date
JPS62278186A JPS62278186A (ja) 1987-12-03
JPH0329035B2 true JPH0329035B2 (enExample) 1991-04-22

Family

ID=14881454

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61124281A Granted JPS62278186A (ja) 1986-05-28 1986-05-28 半導体単結晶の製造方法及び装置

Country Status (1)

Country Link
JP (1) JPS62278186A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103649380A (zh) * 2011-03-15 2014-03-19 Gtat公司 用于晶体生长装置的自动检视系统

Also Published As

Publication number Publication date
JPS62278186A (ja) 1987-12-03

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