JPH03287818A - Thermally bondable fiber and nonwoven fabric - Google Patents
Thermally bondable fiber and nonwoven fabricInfo
- Publication number
- JPH03287818A JPH03287818A JP8866590A JP8866590A JPH03287818A JP H03287818 A JPH03287818 A JP H03287818A JP 8866590 A JP8866590 A JP 8866590A JP 8866590 A JP8866590 A JP 8866590A JP H03287818 A JPH03287818 A JP H03287818A
- Authority
- JP
- Japan
- Prior art keywords
- nonwoven fabric
- fiber
- strength
- component
- fibers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000835 fiber Substances 0.000 title claims abstract description 56
- 239000004745 nonwoven fabric Substances 0.000 title claims abstract description 40
- -1 polyethylene Polymers 0.000 claims description 19
- 239000002131 composite material Substances 0.000 claims description 18
- 239000004743 Polypropylene Substances 0.000 claims description 16
- 229920001155 polypropylene Polymers 0.000 claims description 16
- 239000004698 Polyethylene Substances 0.000 claims description 13
- 229920000573 polyethylene Polymers 0.000 claims description 13
- 239000000155 melt Substances 0.000 claims description 4
- 239000000853 adhesive Substances 0.000 description 17
- 238000000034 method Methods 0.000 description 11
- 238000012545 processing Methods 0.000 description 8
- 230000001070 adhesive effect Effects 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 7
- 229920001903 high density polyethylene Polymers 0.000 description 3
- 239000004700 high-density polyethylene Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 229920000098 polyolefin Polymers 0.000 description 3
- 238000009987 spinning Methods 0.000 description 3
- 230000001771 impaired effect Effects 0.000 description 2
- 229920000092 linear low density polyethylene Polymers 0.000 description 2
- 239000004707 linear low-density polyethylene Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000000704 physical effect Effects 0.000 description 2
- 239000004952 Polyamide Substances 0.000 description 1
- 150000008366 benzophenones Chemical class 0.000 description 1
- 238000009960 carding Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000004049 embossing Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000001125 extrusion Methods 0.000 description 1
- 230000004927 fusion Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000002074 melt spinning Methods 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 238000004080 punching Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000001953 sensory effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000012209 synthetic fiber Substances 0.000 description 1
- 229920002994 synthetic fiber Polymers 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Landscapes
- Nonwoven Fabrics (AREA)
- Artificial Filaments (AREA)
- Yarns And Mechanical Finishing Of Yarns Or Ropes (AREA)
- Multicomponent Fibers (AREA)
Abstract
Description
【発明の詳細な説明】 〔産業上の利用分野〕 本発明は熱接着性繊維および不織布に関する。[Detailed description of the invention] [Industrial application field] The present invention relates to thermally bondable fibers and nonwoven fabrics.
さらに詳しくは、ソフトな風合いと高強度を有する不織
布が得られる熱接着性繊維および不織布に関する。More specifically, the present invention relates to thermoadhesive fibers and nonwoven fabrics that yield nonwoven fabrics with a soft texture and high strength.
不織布の製造において、繊維同士を接着させる方法とし
て、ニードルパンチ法の様な繊維間の交絡による方法、
各種接着剤による方法、あるいは熱接着性繊維による方
法等がある。熱接着性繊維を使用した場合、その接着方
式はサクシロンバンドドライヤーやサクシロンドラムド
ライヤー等によるエアースル一方式と熱ロールによるポ
イントボンド方式とに大別できる。In the production of nonwoven fabrics, methods for adhering fibers to each other include methods such as needle punching that involve intertwining between fibers;
There are methods using various adhesives, methods using heat-adhesive fibers, etc. When heat-adhesive fibers are used, the bonding method can be roughly divided into an air-through method using a SAXILON band dryer, a SAXILON drum dryer, etc., and a point bonding method using a hot roll.
ポイントボンド方式に使用される繊維としては、ポリプ
ロピレン繊維、ポリエチレン繊維、ポリエチレン−ポリ
プロピレン複合繊維等のポリオレフィン系繊維、あるい
はポリエステル系繊維、ポリアミド系繊維等の合成繊維
が広く使用され、石油樹脂を添加したポリオレフィン系
熱接着性繊維として特開昭132−2Ei3321号公
報、ベンゾフェノン系化合物を添加したポリオレフィン
系繊維として特開昭GO−E1913号公報、サクショ
ンドラム熱接着後、エンボスロール熱接着する不織布の
製造方法として特公平1−30942号公報、高密度ポ
リエチレン/ポリプロピレンからなる鞘芯型繊維を含む
特定重量の自己接着不織布として特開昭53−1349
[i9号公報、特定ポリエチレン/ポリプロピレンから
なる潜在捲縮性を有しない繊維からの不織布として特公
昭52−12830号公報などが知られている。The fibers used in the point bond method are widely used, such as polyolefin fibers such as polypropylene fibers, polyethylene fibers, and polyethylene-polypropylene composite fibers, or synthetic fibers such as polyester fibers and polyamide fibers. JP-A No. 132-2Ei3321 for polyolefin heat-adhesive fibers, JP-A-1913 for polyolefin fibers containing benzophenone compounds, method for producing nonwoven fabric by heat-bonding with suction drum and then heat-bonding with emboss roll. as Japanese Patent Publication No. 1-30942, and as a self-adhesive nonwoven fabric of a specific weight containing sheath-core type fibers made of high-density polyethylene/polypropylene, Japanese Patent Application Laid-open No. 1349/1986.
[I9 Publication, Japanese Patent Publication No. 12830/1983, etc. are known as nonwoven fabrics made from fibers having no latent crimp properties made of specific polyethylene/polypropylene.
これらの不織布にはソフトな風合い、高強度といった特
性が要求されるが、従来のポリエチレン−ポリプロピレ
ン複合繊維を使用した場合、熱接着加工温度の上昇に伴
い不織布強度は増加するが風合いが著しく損なわれ、逆
に熱接着加工温度が低ければ風合いはソフトであるが不
織布強度が弱いという問題があり、この両者を満足する
ことが困難である。These nonwoven fabrics are required to have properties such as a soft texture and high strength, but when conventional polyethylene-polypropylene composite fibers are used, the strength of the nonwoven fabric increases as the thermal bonding temperature increases, but the texture is significantly impaired. On the other hand, if the thermal bonding temperature is low, the texture will be soft but the strength of the nonwoven fabric will be weak, and it is difficult to satisfy both.
本発明者らは、従来のポリエチレン−ポリプロピレン複
合繊維の上記欠点を改良すべく鋭意研究の結果、密度が
0.930g/cm”以上でメルトフローインデックス
が5〜35のポリエチレンから成る第1成分と結晶性ポ
リプロピレンから成る第2成分とを複合比(第1成分/
第2成分)65〜35/35〜65で鞘芯型、あるいは
並列型に配して得た複合未延伸糸を1.5〜3.0で延
伸して得られる熱接着性繊維、およびこの熱接着性繊維
を熱接着加工した不織布を用いることにより初期の目的
を達せられることを知り本発明を完成するに到った。As a result of intensive research in order to improve the above-mentioned drawbacks of conventional polyethylene-polypropylene composite fibers, the present inventors have discovered that the first component consists of polyethylene having a density of 0.930 g/cm or more and a melt flow index of 5 to 35. and a second component consisting of crystalline polypropylene at a composite ratio (first component/
2nd component) A thermoadhesive fiber obtained by drawing a composite undrawn yarn of 65-35/35-65 in a sheath-core type or parallel type, and stretching it at a rate of 1.5-3.0. The present invention was completed after learning that the initial objective could be achieved by using a nonwoven fabric made by thermally bonding heat-adhesive fibers.
本発明に使用されるポリエチレンの密度は0.930g
/cm”以上であり、通常の高密度ポリエチレンの他線
状低密度ポリエチレン及びこれらの混合物を使用するこ
とができる。密度が0.930g/cm”未満では、繊
維表面の摩擦が高くなりカード通過性が悪化する、さら
に不織布加工後ではぬめり感が出て表面の滑らかさを損
なう等の問題が生じる。また、ポリエチレンのメルトフ
ローインデックスは5〜35好ましくは8〜30である
。The density of the polyethylene used in the present invention is 0.930g
/cm" or more, and ordinary high-density polyethylene, linear low-density polyethylene, and mixtures thereof can be used. If the density is less than 0.930 g/cm", the friction on the fiber surface will be high and the card will not pass through. Problems arise such as the properties of the nonwoven fabric deteriorate, and after processing the nonwoven fabric, it becomes slimy and the smoothness of the surface is impaired. Moreover, the melt flow index of polyethylene is 5-35, preferably 8-30.
5未溝では紡糸時に糸切れを起こし易(,35を超える
と不織布の接着点強度が弱く破断し易くなポリプロピレ
ンは一般の繊維用に使用されるものから適宜選択するこ
とができるが、ポリエチレンと複合化した場合の繊維断
面形状を考慮して適当な溶融粘度を有するものを使用す
る必要がある。If the groove is not 5, thread breakage is likely to occur during spinning (if the groove is over 35, the adhesive point strength of the nonwoven fabric is weak and it is likely to break.Polypropylene can be selected as appropriate from those used for general fibers, but polypropylene and It is necessary to use a material having an appropriate melt viscosity in consideration of the fiber cross-sectional shape when composited.
上記ポリエチレンとポリプロピレンの複合比(ポリエチ
レン/ポリプロピレン)は65〜35/35〜65であ
る。ポリエチレンの成分比が65%を超えると複合繊維
の強度が低下するため、熱接着加工後、接着点の強度が
強くても不織布は破断してしまう。また35%未満では
融着成分が少ないため接着点が十分な強度を有すること
ができず適さない。The composite ratio of polyethylene and polypropylene (polyethylene/polypropylene) is 65-35/35-65. When the component ratio of polyethylene exceeds 65%, the strength of the composite fiber decreases, so that after thermal bonding, the nonwoven fabric will break even if the strength at the bonding point is strong. Moreover, if it is less than 35%, the bonding point will not have sufficient strength due to the small amount of the fusion bonding component, which is not suitable.
以上のような条件で鞘芯型あるいは並列型に溶融紡糸し
て得られた複合未延伸糸を延伸倍率1.5〜3.0、好
ましくは1.8〜2.5で延伸することにより本発明の
熱接着性複合繊維を得ることができる。延伸倍率が 1
.5未満であると熱接着加工後の接着点強度は強いが繊
維自体の強度が弱い、3.0を超えると繊維強度は十分
でも接着点強度が弱いため、それぞれ高強度の不織布を
得ることはできない。The composite undrawn yarn obtained by melt-spinning in a sheath-core type or parallel type under the above conditions is stretched at a draw ratio of 1.5 to 3.0, preferably 1.8 to 2.5. The thermoadhesive conjugate fiber of the invention can be obtained. Stretching ratio is 1
.. If it is less than 5, the adhesive point strength after thermal bonding processing is strong but the strength of the fiber itself is weak, and if it exceeds 3.0, the fiber strength is sufficient but the adhesive point strength is weak, so it is difficult to obtain a high-strength nonwoven fabric. Can not.
本発明の不織布は、本発明の熱接着複合繊維を使用し、
カード機を用い整綿し、このウェブを比較的低温の熱ロ
ールによって熱接着加工する。この加工温度とは、従来
の加工温度より、比較的低い温度で不織布が加工される
。この熱接着加工温度は、ロール速度が速ければ高く設
定される。より具体的には、接着点となる外皮の密度が
0.930g/am”の線状低密度ポリエチレンでは、
115から130 ’C,密度が0.970 g/ c
m”の高密度ポリエチレンでは、120から140℃が
好ましい。この加工温度が設定温度より高いと、不織布
の接着点強度は強いが風合いがひくい不織布となる、逆
に加工温度が設定温度低いと、ソフトな風合いであるが
不織布の接着点強度は弱い。The nonwoven fabric of the present invention uses the thermally bonded composite fiber of the present invention,
The web is sized using a card machine, and then thermally bonded using a relatively low-temperature heat roll. This processing temperature means that the nonwoven fabric is processed at a relatively lower temperature than the conventional processing temperature. This thermal bonding processing temperature is set higher if the roll speed is faster. More specifically, in linear low-density polyethylene whose outer skin, which serves as the bonding point, has a density of 0.930 g/am,
115-130'C, density 0.970 g/c
120 to 140°C is preferable for high-density polyethylene with a temperature of 120°C to 140°C. If the processing temperature is higher than the set temperature, the nonwoven fabric will have strong adhesive point strength but will have a weak texture. Conversely, if the processing temperature is lower than the set temperature, the nonwoven fabric will have a weak texture. Although it has a soft texture, the adhesive point strength of the nonwoven fabric is weak.
ポイントボンド方式によって得られる不織布の強度は、
接着点の強度とその接着点を結ぶ繊維の強度によって支
配される。本発明の熱接着複合繊維は、ポイントボンド
方式によって不織布加工した場合の接着点強度が強く、
かつ繊維自体が適度な強度を有することを特徴とし、さ
らに従来のポリエチレンーポリプロピレン複合繊維と比
較し、低温の熱ロールによって加工することができるの
で、ソフトな風合いの不織布となり得る。The strength of the nonwoven fabric obtained by the point bond method is
It is governed by the strength of the bonding point and the strength of the fibers connecting the bonding points. The thermally bonded composite fiber of the present invention has strong adhesion point strength when processed into a nonwoven fabric using the point bond method.
Moreover, the fiber itself is characterized by having appropriate strength, and furthermore, compared to conventional polyethylene-polypropylene composite fibers, it can be processed using low-temperature hot rolls, so it can be made into a nonwoven fabric with a soft texture.
本発明の熱接着性繊維は、特定なポリエチレンおよび特
定な配合比率の複合繊維なので、繊維自体が適度な強度
であった。Since the heat-adhesive fiber of the present invention is a composite fiber made of a specific polyethylene and a specific blending ratio, the fiber itself had appropriate strength.
従来のポリエチレン−ポリプロピレン複合繊維を比較的
低温で熱接着加工すると充分な接着点強度はない。しか
し本発明の熱接着性繊維は低延伸なので、比較的低温の
熱接着加工しても、接着点強度は強固であり、不織布強
度があった。When conventional polyethylene-polypropylene composite fibers are thermally bonded at relatively low temperatures, they do not have sufficient bonding point strength. However, since the heat-adhesive fiber of the present invention has low stretching, even when heat-adhesively processed at a relatively low temperature, the adhesive point strength was strong and the nonwoven fabric strength was high.
さらに本発明の熱接着性繊維は、不織布とする場合、比
較的低温で熱接着加工しても強固な接着点強度となるの
で、低温で熱接着加工できる。この比較的低温の熱接着
加工ため、本発明の熱接着性繊維からなる不織布は、ソ
フトな風合いであった。Furthermore, when the heat-adhesive fiber of the present invention is made into a nonwoven fabric, it has a strong adhesion point strength even when heat-bonded at a relatively low temperature, so it can be heat-bonded at a low temperature. Because of this relatively low-temperature thermal bonding process, the nonwoven fabric made of the thermally bondable fibers of the present invention had a soft texture.
このように本発明の熱接着性繊維は、特定な複合繊維を
低延伸したので、カード機を用いて所望のウェブとした
後、比較的低温の熱ロール等によリボインドボンド加工
することができる。このため従来困難であった、繊維自
体が適度な強度を有し、高強度の接着性と、ソフトな風
合いとのすべてを兼ね備えた不織布が得られる熱接着繊
維であった。As described above, since the heat-adhesive fiber of the present invention is a specific composite fiber that has been subjected to low stretching, it is possible to form the desired web using a carding machine and then perform ribbon bond processing using a relatively low-temperature heat roll or the like. can. For this reason, the thermal bonding fiber was able to produce a nonwoven fabric that had all of the characteristics of the fiber itself having appropriate strength, high strength adhesiveness, and a soft texture, which had been difficult to achieve in the past.
この本発明の熱接着性繊維および不織布は、生理用ナプ
キン、紙おむつ等の衛生材料の表面材、あるいは手術着
等の医療用として広く利用することができる。The thermoadhesive fibers and nonwoven fabrics of the present invention can be widely used as surface materials for sanitary materials such as sanitary napkins and disposable diapers, or for medical purposes such as surgical gowns.
本発明を実施例及び比較例を用いて説明する。 The present invention will be explained using Examples and Comparative Examples.
各側において以下の物性評価方法を用いた。The following physical property evaluation method was used on each side.
紡糸性: ポリプロピレン及びポリエチレンを複合紡糸
用押出機に供給し、350個の孔を有する鞘芯型もしく
は並列型の紡糸口金を用いて、 約150g/min
の押出量で紡糸した際の1時間当りの糸切れ回数を以下
の基準で評価する。Spinnability: Feed polypropylene and polyethylene to a composite spinning extruder and use a sheath-core type or parallel type spinneret with 350 holes to produce approximately 150 g/min.
The number of yarn breakages per hour when spinning at an extrusion rate of is evaluated based on the following criteria.
O:0回、 △: 1〜3回、 ×:4回以上繊維繊度
1強度、伸度: 紡糸された未延伸糸と第2表記載の延
伸倍率で延伸された繊維の物性をJIS 1015(
化学繊維ステープル試験方法)に準じて測定する。O: 0 times, △: 1 to 3 times, ×: 4 times or more Fiber fineness 1 Strength, elongation: The physical properties of the spun undrawn yarn and the fibers drawn at the draw ratio listed in Table 2 were determined according to JIS 1015 (
Measure according to the chemical fiber staple test method).
不織布強カニ試料熱接着性繊維をミニチュアカード機を
用い整綿し、得られた約20g/♂のウェブを所定の温
度に加熱した直径185 ms、 圧力20kg/c
mO’)金WAロール(上: 凸部面積25%のエン
ボスロール、下: フラットロール)の間をEim/m
inの速度で熱接着加工して不織布化する。得られた試
料不織布の機械流れ方向(以下Ml)と略す)とそれと
垂直な方向(以下CDと略す)について5cm幅の弓張
り強力を測定する。Non-woven fabric strong crab sample Heat-adhesive fiber was sized using a miniature card machine, and the obtained web of approximately 20 g/m was heated to a predetermined temperature, diameter 185 ms, pressure 20 kg/c.
mO') Eim/m between gold WA rolls (top: embossing roll with 25% convex area, bottom: flat roll)
It is made into a non-woven fabric by thermal bonding at a speed of in. The bowing strength of the obtained sample nonwoven fabric in a width of 5 cm was measured in the mechanical flow direction (hereinafter abbreviated as Ml) and in the direction perpendicular thereto (hereinafter abbreviated as CD).
感触: 試料不織布の肌触りを5人のパネラ−による官
能テストで判定する。Feel: The feel of the sample nonwoven fabric is judged by a sensory test conducted by five panelists.
5人がソフト感があり滑らかでサラサラした肌触りと判
断したものを0゜
2Å以下がぬめり感がある、あるいは硬いと判断したも
のを△。5 people judged the texture to be soft, smooth, and smooth, while 0°2Å or less was judged to be slimy or hard.
3Å以上がぬめり感がある、あるいは硬いと判断したも
のを×で表示する。Items judged to be slimy or hard with a thickness of 3 Å or more are marked with an x.
従来のポリエチレン−ポリプロピレン複合繊維を使用し
た場合比較例7のように高温の熱接着加工では、不織布
強度は充分であるが、感触は硬く実用上問題であり、熱
接着加工温度を下げると、比較例5のように感触は良く
ても、不織布強度がなくこの両者を満足できない。延伸
倍率の低い比較例6、ポリエチレン比率を満たさない比
較例1、比較例2、メルトフローインデックスの満たさ
ない比較例3は、不織布強度が不十分であり、ポリエチ
レン比重を溝たさない比較例4は、感触はヌメリ感があ
り、不織布強度もない。When conventional polyethylene-polypropylene composite fibers are used, as in Comparative Example 7, the nonwoven fabric has sufficient strength when thermally bonded at high temperatures, but the feel is hard, which is a practical problem. Although the feel is good as in Example 5, the nonwoven fabric lacks strength and cannot satisfy both requirements. Comparative Example 6 with a low stretching ratio, Comparative Example 1 and Comparative Example 2 that do not satisfy the polyethylene ratio, and Comparative Example 3 that does not satisfy the melt flow index, have insufficient nonwoven fabric strength and Comparative Example 4 that does not satisfy the polyethylene specific gravity. The nonwoven fabric has a slimy feel and lacks strength.
Claims (1)
インデックス(g/10min,190℃)が5〜35
のポリエチレンから成る第1成分と、結晶性ポリプロピ
レンから成る第2成分を複合比(第1成分/第2成分)
65〜35/35〜65で鞘芯型あるいは並列型に配し
て得た複合未延伸糸を、延伸倍率1.5〜3.0で延伸
して得られる熱接着性繊維。 2)第1請求項の熱接着性繊維を熱接着加工した不織布
。[Claims] 1) The density is 0.930 g/cm^3 or more and the melt flow index (g/10 min, 190°C) is 5 to 35.
A first component consisting of polyethylene and a second component consisting of crystalline polypropylene are combined at a composite ratio (first component/second component).
65-35/Thermoadhesive fiber obtained by stretching composite undrawn yarn obtained by arranging 35-65 in a sheath-core type or parallel type at a stretching ratio of 1.5 to 3.0. 2) A nonwoven fabric obtained by thermally bonding the thermally bondable fiber of claim 1.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8866590A JP3124017B2 (en) | 1990-04-03 | 1990-04-03 | Thermal adhesive fibers and nonwovens |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8866590A JP3124017B2 (en) | 1990-04-03 | 1990-04-03 | Thermal adhesive fibers and nonwovens |
Publications (2)
Publication Number | Publication Date |
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JPH03287818A true JPH03287818A (en) | 1991-12-18 |
JP3124017B2 JP3124017B2 (en) | 2001-01-15 |
Family
ID=13949118
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Application Number | Title | Priority Date | Filing Date |
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JP8866590A Expired - Fee Related JP3124017B2 (en) | 1990-04-03 | 1990-04-03 | Thermal adhesive fibers and nonwovens |
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JP (1) | JP3124017B2 (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5876840A (en) * | 1997-09-30 | 1999-03-02 | Kimberly-Clark Worldwide, Inc. | Crimp enhancement additive for multicomponent filaments |
JP2000119946A (en) * | 1998-10-16 | 2000-04-25 | Kuraray Co Ltd | Nonwoven fabric of high elongation and its production |
US6410138B2 (en) | 1997-09-30 | 2002-06-25 | Kimberly-Clark Worldwide, Inc. | Crimped multicomponent filaments and spunbond webs made therefrom |
JP2011047098A (en) * | 2009-08-25 | 2011-03-10 | Toray Saehan Inc | Multilayered nonwoven fabric of conjugate spun-bonded filament having improved characteristic, and method for producing the same |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP4369325B2 (en) | 2003-12-26 | 2009-11-18 | 東京エレクトロン株式会社 | Development device and development processing method |
JP4414753B2 (en) | 2003-12-26 | 2010-02-10 | 東京エレクトロン株式会社 | Development device and development processing method |
-
1990
- 1990-04-03 JP JP8866590A patent/JP3124017B2/en not_active Expired - Fee Related
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5876840A (en) * | 1997-09-30 | 1999-03-02 | Kimberly-Clark Worldwide, Inc. | Crimp enhancement additive for multicomponent filaments |
US6410138B2 (en) | 1997-09-30 | 2002-06-25 | Kimberly-Clark Worldwide, Inc. | Crimped multicomponent filaments and spunbond webs made therefrom |
JP2000119946A (en) * | 1998-10-16 | 2000-04-25 | Kuraray Co Ltd | Nonwoven fabric of high elongation and its production |
JP2011047098A (en) * | 2009-08-25 | 2011-03-10 | Toray Saehan Inc | Multilayered nonwoven fabric of conjugate spun-bonded filament having improved characteristic, and method for producing the same |
Also Published As
Publication number | Publication date |
---|---|
JP3124017B2 (en) | 2001-01-15 |
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