JPH0328515B2 - - Google Patents
Info
- Publication number
- JPH0328515B2 JPH0328515B2 JP61111947A JP11194786A JPH0328515B2 JP H0328515 B2 JPH0328515 B2 JP H0328515B2 JP 61111947 A JP61111947 A JP 61111947A JP 11194786 A JP11194786 A JP 11194786A JP H0328515 B2 JPH0328515 B2 JP H0328515B2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum
- oxide film
- aluminum layer
- purity aluminum
- purity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Other Surface Treatments For Metallic Materials (AREA)
- Laminated Bodies (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11194786A JPS62267482A (ja) | 1986-05-15 | 1986-05-15 | 真空用金属部品 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11194786A JPS62267482A (ja) | 1986-05-15 | 1986-05-15 | 真空用金属部品 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62267482A JPS62267482A (ja) | 1987-11-20 |
| JPH0328515B2 true JPH0328515B2 (enrdf_load_html_response) | 1991-04-19 |
Family
ID=14574134
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11194786A Granted JPS62267482A (ja) | 1986-05-15 | 1986-05-15 | 真空用金属部品 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62267482A (enrdf_load_html_response) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8642187B2 (en) | 2006-12-28 | 2014-02-04 | National University Corporation Tohoku University | Structural member to be used in apparatus for manufacturing semiconductor or flat display, and method for producing the same |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6156277A (ja) * | 1984-08-27 | 1986-03-20 | Hitachi Ltd | 成膜装置 |
-
1986
- 1986-05-15 JP JP11194786A patent/JPS62267482A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62267482A (ja) | 1987-11-20 |
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