JPH0328515B2 - - Google Patents

Info

Publication number
JPH0328515B2
JPH0328515B2 JP61111947A JP11194786A JPH0328515B2 JP H0328515 B2 JPH0328515 B2 JP H0328515B2 JP 61111947 A JP61111947 A JP 61111947A JP 11194786 A JP11194786 A JP 11194786A JP H0328515 B2 JPH0328515 B2 JP H0328515B2
Authority
JP
Japan
Prior art keywords
vacuum
oxide film
aluminum layer
purity aluminum
purity
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61111947A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62267482A (ja
Inventor
Yutaka Kato
Eizo Isoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Altemira Co Ltd
Original Assignee
Showa Aluminum Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Showa Aluminum Corp filed Critical Showa Aluminum Corp
Priority to JP11194786A priority Critical patent/JPS62267482A/ja
Publication of JPS62267482A publication Critical patent/JPS62267482A/ja
Publication of JPH0328515B2 publication Critical patent/JPH0328515B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Laminated Bodies (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
JP11194786A 1986-05-15 1986-05-15 真空用金属部品 Granted JPS62267482A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11194786A JPS62267482A (ja) 1986-05-15 1986-05-15 真空用金属部品

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11194786A JPS62267482A (ja) 1986-05-15 1986-05-15 真空用金属部品

Publications (2)

Publication Number Publication Date
JPS62267482A JPS62267482A (ja) 1987-11-20
JPH0328515B2 true JPH0328515B2 (cs) 1991-04-19

Family

ID=14574134

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11194786A Granted JPS62267482A (ja) 1986-05-15 1986-05-15 真空用金属部品

Country Status (1)

Country Link
JP (1) JPS62267482A (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8642187B2 (en) 2006-12-28 2014-02-04 National University Corporation Tohoku University Structural member to be used in apparatus for manufacturing semiconductor or flat display, and method for producing the same

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6156277A (ja) * 1984-08-27 1986-03-20 Hitachi Ltd 成膜装置

Also Published As

Publication number Publication date
JPS62267482A (ja) 1987-11-20

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