JPH0328281Y2 - - Google Patents
Info
- Publication number
- JPH0328281Y2 JPH0328281Y2 JP1984095204U JP9520484U JPH0328281Y2 JP H0328281 Y2 JPH0328281 Y2 JP H0328281Y2 JP 1984095204 U JP1984095204 U JP 1984095204U JP 9520484 U JP9520484 U JP 9520484U JP H0328281 Y2 JPH0328281 Y2 JP H0328281Y2
- Authority
- JP
- Japan
- Prior art keywords
- cold box
- temperature valve
- valve
- low
- conduit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007789 gas Substances 0.000 claims description 26
- 239000001307 helium Substances 0.000 claims description 12
- 229910052734 helium Inorganic materials 0.000 claims description 12
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 claims description 12
- 238000000034 method Methods 0.000 claims description 8
- 230000000694 effects Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000012530 fluid Substances 0.000 description 2
- 238000009434 installation Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9520484U JPS6113281U (ja) | 1984-06-27 | 1984-06-27 | コ−ルドボツクス |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9520484U JPS6113281U (ja) | 1984-06-27 | 1984-06-27 | コ−ルドボツクス |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6113281U JPS6113281U (ja) | 1986-01-25 |
| JPH0328281Y2 true JPH0328281Y2 (ko) | 1991-06-18 |
Family
ID=30654213
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9520484U Granted JPS6113281U (ja) | 1984-06-27 | 1984-06-27 | コ−ルドボツクス |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6113281U (ko) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS561534A (en) * | 1979-06-15 | 1981-01-09 | Nec Corp | Manufacture of photomask |
-
1984
- 1984-06-27 JP JP9520484U patent/JPS6113281U/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS561534A (en) * | 1979-06-15 | 1981-01-09 | Nec Corp | Manufacture of photomask |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6113281U (ja) | 1986-01-25 |
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