JPH0328281Y2 - - Google Patents

Info

Publication number
JPH0328281Y2
JPH0328281Y2 JP1984095204U JP9520484U JPH0328281Y2 JP H0328281 Y2 JPH0328281 Y2 JP H0328281Y2 JP 1984095204 U JP1984095204 U JP 1984095204U JP 9520484 U JP9520484 U JP 9520484U JP H0328281 Y2 JPH0328281 Y2 JP H0328281Y2
Authority
JP
Japan
Prior art keywords
cold box
temperature valve
valve
low
conduit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984095204U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6113281U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9520484U priority Critical patent/JPS6113281U/ja
Publication of JPS6113281U publication Critical patent/JPS6113281U/ja
Application granted granted Critical
Publication of JPH0328281Y2 publication Critical patent/JPH0328281Y2/ja
Granted legal-status Critical Current

Links

JP9520484U 1984-06-27 1984-06-27 コ−ルドボツクス Granted JPS6113281U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9520484U JPS6113281U (ja) 1984-06-27 1984-06-27 コ−ルドボツクス

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9520484U JPS6113281U (ja) 1984-06-27 1984-06-27 コ−ルドボツクス

Publications (2)

Publication Number Publication Date
JPS6113281U JPS6113281U (ja) 1986-01-25
JPH0328281Y2 true JPH0328281Y2 (enrdf_load_html_response) 1991-06-18

Family

ID=30654213

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9520484U Granted JPS6113281U (ja) 1984-06-27 1984-06-27 コ−ルドボツクス

Country Status (1)

Country Link
JP (1) JPS6113281U (enrdf_load_html_response)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS561534A (en) * 1979-06-15 1981-01-09 Nec Corp Manufacture of photomask

Also Published As

Publication number Publication date
JPS6113281U (ja) 1986-01-25

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