JPH0328029Y2 - - Google Patents
Info
- Publication number
- JPH0328029Y2 JPH0328029Y2 JP1985081487U JP8148785U JPH0328029Y2 JP H0328029 Y2 JPH0328029 Y2 JP H0328029Y2 JP 1985081487 U JP1985081487 U JP 1985081487U JP 8148785 U JP8148785 U JP 8148785U JP H0328029 Y2 JPH0328029 Y2 JP H0328029Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- suction
- conical member
- reference bar
- cap
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 235000012431 wafers Nutrition 0.000 description 52
- 238000000034 method Methods 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 230000003313 weakening effect Effects 0.000 description 2
- 241000239290 Araneae Species 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000002826 coolant Substances 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 239000006260 foam Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- Sheets, Magazines, And Separation Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985081487U JPH0328029Y2 (US20100223739A1-20100909-C00005.png) | 1985-05-30 | 1985-05-30 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1985081487U JPH0328029Y2 (US20100223739A1-20100909-C00005.png) | 1985-05-30 | 1985-05-30 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61197035U JPS61197035U (US20100223739A1-20100909-C00005.png) | 1986-12-09 |
JPH0328029Y2 true JPH0328029Y2 (US20100223739A1-20100909-C00005.png) | 1991-06-17 |
Family
ID=30628314
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1985081487U Expired JPH0328029Y2 (US20100223739A1-20100909-C00005.png) | 1985-05-30 | 1985-05-30 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0328029Y2 (US20100223739A1-20100909-C00005.png) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03117584U (US20100223739A1-20100909-C00005.png) * | 1990-03-16 | 1991-12-04 | ||
JP2014227260A (ja) * | 2013-05-22 | 2014-12-08 | 株式会社ハーモテック | 搬送装置 |
JP2018122381A (ja) * | 2017-01-31 | 2018-08-09 | ブラザー工業株式会社 | 部品保持装置 |
JP2022112660A (ja) * | 2021-01-22 | 2022-08-03 | 株式会社コガネイ | 非接触搬送装置 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60124836A (ja) * | 1983-12-09 | 1985-07-03 | Nec Corp | 半導体集積回路装置の製造装置 |
JPS61254437A (ja) * | 1985-04-27 | 1986-11-12 | Fujitsu Ltd | ウエハ−チヤツク |
-
1985
- 1985-05-30 JP JP1985081487U patent/JPH0328029Y2/ja not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60124836A (ja) * | 1983-12-09 | 1985-07-03 | Nec Corp | 半導体集積回路装置の製造装置 |
JPS61254437A (ja) * | 1985-04-27 | 1986-11-12 | Fujitsu Ltd | ウエハ−チヤツク |
Also Published As
Publication number | Publication date |
---|---|
JPS61197035U (US20100223739A1-20100909-C00005.png) | 1986-12-09 |