JPH0328016B2 - - Google Patents

Info

Publication number
JPH0328016B2
JPH0328016B2 JP60249689A JP24968985A JPH0328016B2 JP H0328016 B2 JPH0328016 B2 JP H0328016B2 JP 60249689 A JP60249689 A JP 60249689A JP 24968985 A JP24968985 A JP 24968985A JP H0328016 B2 JPH0328016 B2 JP H0328016B2
Authority
JP
Japan
Prior art keywords
image
point
electronic probe
scanning
mode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60249689A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62110247A (ja
Inventor
Katsumi Ura
Hiroshi Fujioka
Koji Nakamae
Susumu Takashima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Osaka University NUC
Original Assignee
Nippon Telegraph and Telephone Corp
Osaka University NUC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp, Osaka University NUC filed Critical Nippon Telegraph and Telephone Corp
Priority to JP60249689A priority Critical patent/JPS62110247A/ja
Publication of JPS62110247A publication Critical patent/JPS62110247A/ja
Publication of JPH0328016B2 publication Critical patent/JPH0328016B2/ja
Granted legal-status Critical Current

Links

JP60249689A 1985-11-07 1985-11-07 電子プロ−ブ装置の高精度位置決め方法及び装置 Granted JPS62110247A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60249689A JPS62110247A (ja) 1985-11-07 1985-11-07 電子プロ−ブ装置の高精度位置決め方法及び装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60249689A JPS62110247A (ja) 1985-11-07 1985-11-07 電子プロ−ブ装置の高精度位置決め方法及び装置

Publications (2)

Publication Number Publication Date
JPS62110247A JPS62110247A (ja) 1987-05-21
JPH0328016B2 true JPH0328016B2 (enrdf_load_stackoverflow) 1991-04-17

Family

ID=17196737

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60249689A Granted JPS62110247A (ja) 1985-11-07 1985-11-07 電子プロ−ブ装置の高精度位置決め方法及び装置

Country Status (1)

Country Link
JP (1) JPS62110247A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001069643A1 (fr) * 2000-03-13 2001-09-20 Hitachi, Ltd. Dispositif de balayage a faisceau de particules chargees

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5918554A (ja) * 1982-07-22 1984-01-30 Toshiba Corp 走査型電子顕微鏡の電子ビ−ム位置決め制御装置

Also Published As

Publication number Publication date
JPS62110247A (ja) 1987-05-21

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term