JPH032787Y2 - - Google Patents

Info

Publication number
JPH032787Y2
JPH032787Y2 JP1635185U JP1635185U JPH032787Y2 JP H032787 Y2 JPH032787 Y2 JP H032787Y2 JP 1635185 U JP1635185 U JP 1635185U JP 1635185 U JP1635185 U JP 1635185U JP H032787 Y2 JPH032787 Y2 JP H032787Y2
Authority
JP
Japan
Prior art keywords
valve
chamber
gas flow
diaphragm
port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1635185U
Other languages
English (en)
Japanese (ja)
Other versions
JPS61133171U (pm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1635185U priority Critical patent/JPH032787Y2/ja
Publication of JPS61133171U publication Critical patent/JPS61133171U/ja
Application granted granted Critical
Publication of JPH032787Y2 publication Critical patent/JPH032787Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Details Of Valves (AREA)
  • Lift Valve (AREA)
JP1635185U 1985-02-07 1985-02-07 Expired JPH032787Y2 (pm)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1635185U JPH032787Y2 (pm) 1985-02-07 1985-02-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1635185U JPH032787Y2 (pm) 1985-02-07 1985-02-07

Publications (2)

Publication Number Publication Date
JPS61133171U JPS61133171U (pm) 1986-08-20
JPH032787Y2 true JPH032787Y2 (pm) 1991-01-24

Family

ID=30503043

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1635185U Expired JPH032787Y2 (pm) 1985-02-07 1985-02-07

Country Status (1)

Country Link
JP (1) JPH032787Y2 (pm)

Also Published As

Publication number Publication date
JPS61133171U (pm) 1986-08-20

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