JPH0327856B2 - - Google Patents
Info
- Publication number
- JPH0327856B2 JPH0327856B2 JP57199106A JP19910682A JPH0327856B2 JP H0327856 B2 JPH0327856 B2 JP H0327856B2 JP 57199106 A JP57199106 A JP 57199106A JP 19910682 A JP19910682 A JP 19910682A JP H0327856 B2 JPH0327856 B2 JP H0327856B2
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- output
- antenna
- synchronizing signal
- control device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000010355 oscillation Effects 0.000 claims description 13
- 238000001514 detection method Methods 0.000 claims description 9
- 230000005540 biological transmission Effects 0.000 claims description 2
- 238000005498 polishing Methods 0.000 description 15
- 235000012431 wafers Nutrition 0.000 description 11
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 229910052710 silicon Inorganic materials 0.000 description 7
- 239000010703 silicon Substances 0.000 description 7
- 238000010897 surface acoustic wave method Methods 0.000 description 7
- 239000013078 crystal Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229910013641 LiNbO 3 Inorganic materials 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005674 electromagnetic induction Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D23/00—Control of temperature
- G05D23/19—Control of temperature characterised by the use of electric means
- G05D23/1902—Control of temperature characterised by the use of electric means characterised by the use of a variable reference value
- G05D23/1905—Control of temperature characterised by the use of electric means characterised by the use of a variable reference value associated with tele control
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Arrangements For Transmission Of Measured Signals (AREA)
- Control Of Temperature (AREA)
- Measuring Temperature Or Quantity Of Heat (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57199106A JPS5990116A (ja) | 1982-11-15 | 1982-11-15 | 温度制御装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57199106A JPS5990116A (ja) | 1982-11-15 | 1982-11-15 | 温度制御装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5990116A JPS5990116A (ja) | 1984-05-24 |
| JPH0327856B2 true JPH0327856B2 (enExample) | 1991-04-17 |
Family
ID=16402217
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57199106A Granted JPS5990116A (ja) | 1982-11-15 | 1982-11-15 | 温度制御装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5990116A (enExample) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7161114B2 (en) | 2003-10-01 | 2007-01-09 | Trumpf Inc. | Laser cutting installation with parts unloading unit |
| JP2012189336A (ja) * | 2011-03-08 | 2012-10-04 | Furuya Kinzoku:Kk | 温度測定装置 |
| JP7601508B2 (ja) * | 2021-03-30 | 2024-12-17 | 東京エレクトロン株式会社 | 温度測定装置及び温度測定方法 |
-
1982
- 1982-11-15 JP JP57199106A patent/JPS5990116A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5990116A (ja) | 1984-05-24 |
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