JPS5990116A - 温度制御装置 - Google Patents

温度制御装置

Info

Publication number
JPS5990116A
JPS5990116A JP57199106A JP19910682A JPS5990116A JP S5990116 A JPS5990116 A JP S5990116A JP 57199106 A JP57199106 A JP 57199106A JP 19910682 A JP19910682 A JP 19910682A JP S5990116 A JPS5990116 A JP S5990116A
Authority
JP
Japan
Prior art keywords
temperature
frequency
antenna
rotor
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57199106A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0327856B2 (enExample
Inventor
Shigefumi Morishita
森下　繁文
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP57199106A priority Critical patent/JPS5990116A/ja
Publication of JPS5990116A publication Critical patent/JPS5990116A/ja
Publication of JPH0327856B2 publication Critical patent/JPH0327856B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/1902—Control of temperature characterised by the use of electric means characterised by the use of a variable reference value
    • G05D23/1905—Control of temperature characterised by the use of electric means characterised by the use of a variable reference value associated with tele control

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Arrangements For Transmission Of Measured Signals (AREA)
  • Control Of Temperature (AREA)
  • Measuring Temperature Or Quantity Of Heat (AREA)
JP57199106A 1982-11-15 1982-11-15 温度制御装置 Granted JPS5990116A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57199106A JPS5990116A (ja) 1982-11-15 1982-11-15 温度制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57199106A JPS5990116A (ja) 1982-11-15 1982-11-15 温度制御装置

Publications (2)

Publication Number Publication Date
JPS5990116A true JPS5990116A (ja) 1984-05-24
JPH0327856B2 JPH0327856B2 (enExample) 1991-04-17

Family

ID=16402217

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57199106A Granted JPS5990116A (ja) 1982-11-15 1982-11-15 温度制御装置

Country Status (1)

Country Link
JP (1) JPS5990116A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7161114B2 (en) 2003-10-01 2007-01-09 Trumpf Inc. Laser cutting installation with parts unloading unit
JP2012189336A (ja) * 2011-03-08 2012-10-04 Furuya Kinzoku:Kk 温度測定装置
JP2022154649A (ja) * 2021-03-30 2022-10-13 東京エレクトロン株式会社 温度測定装置及び温度測定方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7161114B2 (en) 2003-10-01 2007-01-09 Trumpf Inc. Laser cutting installation with parts unloading unit
JP2012189336A (ja) * 2011-03-08 2012-10-04 Furuya Kinzoku:Kk 温度測定装置
JP2022154649A (ja) * 2021-03-30 2022-10-13 東京エレクトロン株式会社 温度測定装置及び温度測定方法

Also Published As

Publication number Publication date
JPH0327856B2 (enExample) 1991-04-17

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