JPH03271182A - Production of grazed basal plate - Google Patents
Production of grazed basal plateInfo
- Publication number
- JPH03271182A JPH03271182A JP7252790A JP7252790A JPH03271182A JP H03271182 A JPH03271182 A JP H03271182A JP 7252790 A JP7252790 A JP 7252790A JP 7252790 A JP7252790 A JP 7252790A JP H03271182 A JPH03271182 A JP H03271182A
- Authority
- JP
- Japan
- Prior art keywords
- glass paste
- basal plate
- layer
- graze
- glaze layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 5
- 239000011521 glass Substances 0.000 claims abstract description 17
- 238000000034 method Methods 0.000 claims abstract description 7
- 239000000758 substrate Substances 0.000 claims description 20
- 238000002844 melting Methods 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims description 3
- 238000001354 calcination Methods 0.000 abstract 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 5
- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 description 4
- 239000000919 ceramic Substances 0.000 description 3
- WUOACPNHFRMFPN-SECBINFHSA-N (S)-(-)-alpha-terpineol Chemical compound CC1=CC[C@@H](C(C)(C)O)CC1 WUOACPNHFRMFPN-SECBINFHSA-N 0.000 description 2
- LTPBRCUWZOMYOC-UHFFFAOYSA-N Beryllium oxide Chemical compound O=[Be] LTPBRCUWZOMYOC-UHFFFAOYSA-N 0.000 description 2
- 239000001856 Ethyl cellulose Substances 0.000 description 2
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 2
- OVKDFILSBMEKLT-UHFFFAOYSA-N alpha-Terpineol Natural products CC(=C)C1(O)CCC(C)=CC1 OVKDFILSBMEKLT-UHFFFAOYSA-N 0.000 description 2
- 229940088601 alpha-terpineol Drugs 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 229920001249 ethyl cellulose Polymers 0.000 description 2
- 235000019325 ethyl cellulose Nutrition 0.000 description 2
- 229910001597 celsian Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- KZHJGOXRZJKJNY-UHFFFAOYSA-N dioxosilane;oxo(oxoalumanyloxy)alumane Chemical compound O=[Si]=O.O=[Si]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O.O=[Al]O[Al]=O KZHJGOXRZJKJNY-UHFFFAOYSA-N 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 229910003465 moissanite Inorganic materials 0.000 description 1
- 229910052863 mullite Inorganic materials 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
Abstract
Description
【発明の詳細な説明】 （産業上の利用分野） 本発明はグレーズド基板の製造法に関する。[Detailed description of the invention] (Industrial application field) The present invention relates to a method for manufacturing a glazed substrate.
（従来の技術）
従来グレーズド基板に凹部を形成する方法としてエツチ
ングによう形成する方法が一般に知られている。(Prior Art) Conventionally, etching is generally known as a method for forming recesses in a glazed substrate.
（発明が解決しようとする課題）
しかしながら上記の方法では、グレーズ層の形成、レジ
スト膜の形成、露光、エツチング、レジスト膜の剥離、
必要に応じて再焼成を行うため工程が複雑でろシ、コス
ト高となる欠点がある。(Problem to be Solved by the Invention) However, in the above method, formation of a glaze layer, formation of a resist film, exposure, etching, peeling of the resist film,
Since re-firing is performed as necessary, the process is complicated and the cost is high.
本発明は上記の欠点のないグレーズド基板の製造法を提
供することを目的とするものである。The object of the present invention is to provide a method for manufacturing glazed substrates that does not have the above-mentioned drawbacks.
（！１題を解決するための手段）
本発明は基板上に溝を形成しながら結晶質ガラスペース
トを印刷し、焼成して第１のグレーズ層を形威し、さら
にその上面及び溝内に該結晶質ガラスペーストより溶融
温度の高い非晶質ガラスペーストを印刷し、焼成して凹
部を有する第２のグレーズ層を形成するグレーズド基板
の製造法に関する。(Means for Solving Problem 1) The present invention prints a crystalline glass paste while forming grooves on a substrate, bakes it to form a first glaze layer, and further forms a first glaze layer on the top surface and in the grooves. The present invention relates to a method of manufacturing a glazed substrate, in which an amorphous glass paste having a higher melting temperature than the crystalline glass paste is printed and fired to form a second glaze layer having recesses.
本発明にかいて、基板としてはアルミナ、ベリリア、ム
ライト、ジルコニア、 ＳｉＣ等のセラミック基板が用
いられ特に制限はない。なお実施例ではアルミナセラミ
ックス基板を用いた例で説明するが、他のセラミンク基
板を用いても同様の効果が得られる。In the present invention, a ceramic substrate such as alumina, beryllia, mullite, zirconia, SiC, etc. can be used as the substrate, and there are no particular limitations. In the embodiment, an example using an alumina ceramic substrate will be described, but similar effects can be obtained even if other ceramic substrates are used.
非晶質ガラスペーストとしては、軟化点が７００〜９６
０℃のガラスを用いることが好１しく、″また第１のグ
レーズ層の厚さは２５μｍ以下であれば下地のセラミッ
ク基板と反応して表面が結晶化し易いので好筐しい。As an amorphous glass paste, the softening point is 700-96.
It is preferable to use glass at 0° C., and it is preferable that the first glaze layer has a thickness of 25 μm or less because it reacts with the underlying ceramic substrate and the surface is likely to crystallize.
（実施例） 以下本発明の詳細な説明する。(Example) The present invention will be explained in detail below.
実施例１
５ｉＯｚ、 Ａｌｔｏｓ、 Ｂ＆Ｏ，ＳｒＯ，Ｃａｂ、
ＺｒＯ２及びＺｎＯの成分からなり、軟化点８３０℃
で結晶化温度が９２０℃のガラス粉末１００重量部に、
エチルセルロース（和光紬薬製）３重量部及びα−テル
ピネオール（和光紬薬製）１０重量部を加え。Example 1 5iOz, Altos, B&O, SrO, Cab,
Composed of ZrO2 and ZnO components, softening point 830℃
To 100 parts by weight of glass powder with a crystallization temperature of 920°C,
3 parts by weight of ethyl cellulose (manufactured by Wako Tsumugi Pharmaceutical Co., Ltd.) and 10 parts by weight of α-terpineol (manufactured by Wako Tsumugi Pharmaceutical Co., Ltd.) were added.
これらを混練して結晶質ガラスペーストを得た。These were kneaded to obtain a crystalline glass paste.
ついで第１図に示すようにアルミナセラミックス基板ｌ
上に１ｍｍ＠の溝５を形成しながら上記で得た結晶質ガ
ラスペーストをスクリーン印刷し。Next, as shown in Fig. 1, an alumina ceramic substrate l
The crystalline glass paste obtained above was screen printed while forming grooves 5 of 1 mm on top.
９７０℃の温度で４０分間焼成して厚さ１５μｍの第１
のグレーズＮｉ２を形成した。形成された第１のグレー
ズ層２をｘＨ回折にようセルシアン（溶融？１度１７６
０℃）の結晶ピークを確認した。The first layer was baked at a temperature of 970°C for 40 minutes to a thickness of 15 μm.
A glaze of Ni2 was formed. The formed first glaze layer 2 is measured by xH diffraction using Celsian (melting? 1 degree 176
A crystal peak at 0° C.) was confirmed.
次にＳｔｏ、、 ｋｌｚ０３． Ｂａｄ、 ＳｒＯ，Ｃ
ａｂ、 ＺｎＯ及びＢ、 ０３の成分からなり、軟化点
が８６５℃のガラス粉末１００重量部に、エチルセルロ
ース（和光紬薬製）３重量部及びα−テルピネオール（
和光紬薬製）１０重量部を加え、これらを混練して非晶
質ガラスペーストを得、ついで第１のグレーズ層２の上
面及び＃５内に上記で得た非晶質ガラスペーストをスク
リーン印刷し、１２５０℃の温度で４０分間焼成して幅
が０．７−で、深さが１２μｍの凹部４を有し、かつ厚
さが６０μｍの第２のグレーズ層３を形成したグレーズ
ド基板を得た。Next, Sto,, klz03. Bad, SrO,C
3 parts by weight of ethyl cellulose (manufactured by Wako Tsumugi Co., Ltd.) and α-terpineol (
10 parts by weight (manufactured by Wako Tsumugi Pharmaceutical Co., Ltd.) were added and kneaded to obtain an amorphous glass paste, and then the amorphous glass paste obtained above was screen printed on the top surface of the first glaze layer 2 and in #5. Then, the glazed substrate was baked at a temperature of 1250° C. for 40 minutes to obtain a glazed substrate having a recess 4 with a width of 0.7 mm and a depth of 12 μm, and a second glaze layer 3 with a thickness of 60 μm. Ta.
（発明の効果）
本発明になるグレーズド基板は、簡単な作業で凹部を形
成することができるため、コスト低減が図れ、工業的に
極めて好適なグレーズド基板である。(Effects of the Invention) The glazed substrate according to the present invention is a glazed substrate that is industrially very suitable because the recesses can be formed with a simple operation, and thus the cost can be reduced.
第１図は本発明の実施例になるグレーズド基板の部分断
面図である。
符号の説明
１・・・アルミナセラミック基板
２・・・第１のグレーズ層 ３・・・第２のグレーズ
層４・・・凹部 ５・・・溝４
アルミナセラミック基板
第１のグレーズ層
第２のグレーズ層
凹部
溝FIG. 1 is a partial cross-sectional view of a glazed substrate according to an embodiment of the present invention. Explanation of symbols 1... Alumina ceramic substrate 2... First glaze layer 3... Second glaze layer 4... Concavity 5... Groove 4 Alumina ceramic substrate first glaze layer second Glaze layer concave groove
Claims (1)
印刷し、焼成して第１のグレーズ層を形成し、さらにそ
の上面及び溝内に該結晶質ガラスペーストより溶融温度
の高い非晶質ガラスペーストを印刷し、焼成して凹部を
有する第２のグレーズ層を形成することを特徴とするグ
レーズド基板の製造法。1. Print a crystalline glass paste while forming grooves on the substrate, bake it to form a first glaze layer, and then apply an amorphous glass paste with a higher melting temperature than the crystalline glass paste on the top surface and inside the grooves. A method for manufacturing a glazed substrate, comprising printing a glass paste and baking it to form a second glaze layer having recesses.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7252790A JPH03271182A (en) | 1990-03-22 | 1990-03-22 | Production of grazed basal plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7252790A JPH03271182A (en) | 1990-03-22 | 1990-03-22 | Production of grazed basal plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03271182A true JPH03271182A (en) | 1991-12-03 |
Family
ID=13491898
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7252790A Pending JPH03271182A (en) | 1990-03-22 | 1990-03-22 | Production of grazed basal plate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03271182A (en) |
-
1990
- 1990-03-22 JP JP7252790A patent/JPH03271182A/en active Pending
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