JPH0326114B2 - - Google Patents
Info
- Publication number
- JPH0326114B2 JPH0326114B2 JP59137545A JP13754584A JPH0326114B2 JP H0326114 B2 JPH0326114 B2 JP H0326114B2 JP 59137545 A JP59137545 A JP 59137545A JP 13754584 A JP13754584 A JP 13754584A JP H0326114 B2 JPH0326114 B2 JP H0326114B2
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- zone
- rotating
- workpiece
- rotating body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13754584A JPS6115782A (ja) | 1984-07-02 | 1984-07-02 | 機械加工物品の洗浄装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13754584A JPS6115782A (ja) | 1984-07-02 | 1984-07-02 | 機械加工物品の洗浄装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6115782A JPS6115782A (ja) | 1986-01-23 |
JPH0326114B2 true JPH0326114B2 (enrdf_load_stackoverflow) | 1991-04-09 |
Family
ID=15201191
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13754584A Granted JPS6115782A (ja) | 1984-07-02 | 1984-07-02 | 機械加工物品の洗浄装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6115782A (enrdf_load_stackoverflow) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2558698Y2 (ja) * | 1990-05-31 | 1997-12-24 | 鬼頭工業 株式会社 | 加工部品の洗浄装置 |
JP3061186B1 (ja) | 1999-11-26 | 2000-07-10 | 株式会社野村鍍金 | 連続鋳造用鋳型及びその製造方法 |
JP5622440B2 (ja) * | 2010-05-19 | 2014-11-12 | 川崎重工業株式会社 | 回転型高圧水噴射式洗浄方法と同装置 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS524877A (en) * | 1975-07-01 | 1977-01-14 | Citizen Watch Co Ltd | Digital electronic clock |
-
1984
- 1984-07-02 JP JP13754584A patent/JPS6115782A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6115782A (ja) | 1986-01-23 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US5259407A (en) | Surface treatment method and apparatus for a semiconductor wafer | |
KR100852952B1 (ko) | 기판 양면 처리장치 | |
JP3321635B2 (ja) | 洗浄装置 | |
JP5911444B2 (ja) | インデックス洗浄装置 | |
US4281031A (en) | Method and apparatus for processing workpieces | |
WO1998002904A1 (en) | Wafer cleaning apparatus | |
US4850381A (en) | Machine for stripping wafers | |
JPH0326114B2 (enrdf_load_stackoverflow) | ||
JP2947631B2 (ja) | 回転洗浄乾燥装置 | |
JP2002326063A (ja) | 洗浄装置 | |
JP3788899B2 (ja) | 液中洗浄装置 | |
CN220678739U (zh) | 一种基于清洗舱的双重旋转式清洗设备 | |
JPH07297155A (ja) | 基板処理装置 | |
US6286523B1 (en) | Parts transport mechanism for a rotary style parts treating machine | |
JPH06154713A (ja) | 洗浄装置 | |
JPH07335599A (ja) | 基板処理装置及び基板処理方法 | |
JPH09207046A (ja) | 洗浄装置 | |
JP2704694B2 (ja) | 洗浄装置 | |
JPS6386177A (ja) | 洗浄装置 | |
JPH09309038A (ja) | 洗浄装置付きパレット取扱装置 | |
US3194416A (en) | Rotary positioning device | |
US2832461A (en) | Turret apparatus for power washing equipment | |
KR960014875B1 (ko) | 플렉시블 생산 시스템의 자동세척장치 | |
KR200252737Y1 (ko) | 반도체웨이퍼세정장치 | |
KR100415406B1 (ko) | 폴리싱장치 |