JPH0325751Y2 - - Google Patents

Info

Publication number
JPH0325751Y2
JPH0325751Y2 JP10924387U JP10924387U JPH0325751Y2 JP H0325751 Y2 JPH0325751 Y2 JP H0325751Y2 JP 10924387 U JP10924387 U JP 10924387U JP 10924387 U JP10924387 U JP 10924387U JP H0325751 Y2 JPH0325751 Y2 JP H0325751Y2
Authority
JP
Japan
Prior art keywords
chamber
display
board
substrate
coating material
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP10924387U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6414395U (cg-RX-API-DMAC10.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10924387U priority Critical patent/JPH0325751Y2/ja
Publication of JPS6414395U publication Critical patent/JPS6414395U/ja
Application granted granted Critical
Publication of JPH0325751Y2 publication Critical patent/JPH0325751Y2/ja
Expired legal-status Critical Current

Links

JP10924387U 1987-07-16 1987-07-16 Expired JPH0325751Y2 (cg-RX-API-DMAC10.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10924387U JPH0325751Y2 (cg-RX-API-DMAC10.html) 1987-07-16 1987-07-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10924387U JPH0325751Y2 (cg-RX-API-DMAC10.html) 1987-07-16 1987-07-16

Publications (2)

Publication Number Publication Date
JPS6414395U JPS6414395U (cg-RX-API-DMAC10.html) 1989-01-25
JPH0325751Y2 true JPH0325751Y2 (cg-RX-API-DMAC10.html) 1991-06-04

Family

ID=31345308

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10924387U Expired JPH0325751Y2 (cg-RX-API-DMAC10.html) 1987-07-16 1987-07-16

Country Status (1)

Country Link
JP (1) JPH0325751Y2 (cg-RX-API-DMAC10.html)

Also Published As

Publication number Publication date
JPS6414395U (cg-RX-API-DMAC10.html) 1989-01-25

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