JPH0325508B2 - - Google Patents

Info

Publication number
JPH0325508B2
JPH0325508B2 JP60209839A JP20983985A JPH0325508B2 JP H0325508 B2 JPH0325508 B2 JP H0325508B2 JP 60209839 A JP60209839 A JP 60209839A JP 20983985 A JP20983985 A JP 20983985A JP H0325508 B2 JPH0325508 B2 JP H0325508B2
Authority
JP
Japan
Prior art keywords
ion plating
crucible
electron beam
evaporation source
evaporation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60209839A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6270576A (ja
Inventor
Masao Iguchi
Ujihiro Nishiike
Yasuhiro Kobayashi
Kazuhiro Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JFE Steel Corp
Original Assignee
Kawasaki Steel Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kawasaki Steel Corp filed Critical Kawasaki Steel Corp
Priority to JP20983985A priority Critical patent/JPS6270576A/ja
Publication of JPS6270576A publication Critical patent/JPS6270576A/ja
Publication of JPH0325508B2 publication Critical patent/JPH0325508B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP20983985A 1985-09-21 1985-09-21 大量蒸気流発生用蒸発源装置 Granted JPS6270576A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20983985A JPS6270576A (ja) 1985-09-21 1985-09-21 大量蒸気流発生用蒸発源装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20983985A JPS6270576A (ja) 1985-09-21 1985-09-21 大量蒸気流発生用蒸発源装置

Publications (2)

Publication Number Publication Date
JPS6270576A JPS6270576A (ja) 1987-04-01
JPH0325508B2 true JPH0325508B2 (esLanguage) 1991-04-08

Family

ID=16579469

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20983985A Granted JPS6270576A (ja) 1985-09-21 1985-09-21 大量蒸気流発生用蒸発源装置

Country Status (1)

Country Link
JP (1) JPS6270576A (esLanguage)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0653531U (ja) * 1991-01-25 1994-07-22 前田建設工業株式会社 ベルトコンベヤ

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3286117A (en) * 1963-01-07 1966-11-15 Stauffer Chemical Co Linearly expandable filament for electron gun structure
US4035574A (en) * 1974-10-11 1977-07-12 Jersey Nuclear-Avco Isotopes, Inc. Mixed phase evaporation source
US3996469A (en) * 1975-01-06 1976-12-07 Jersey Nuclear-Avco Isotopes, Inc. Floating convection barrier for evaporation source
DE3330092A1 (de) * 1983-08-20 1985-03-07 Leybold-Heraeus GmbH, 5000 Köln Verfahren zum einstellen der oertlichen verdampfungsleistung an verdampfern in vakuumaufdampfprozessen
JPS6194240A (ja) * 1984-10-16 1986-05-13 Fuji Photo Film Co Ltd 磁気記録媒体の製造方法

Also Published As

Publication number Publication date
JPS6270576A (ja) 1987-04-01

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