JPH03253551A - レーザ溶射方法及び装置 - Google Patents

レーザ溶射方法及び装置

Info

Publication number
JPH03253551A
JPH03253551A JP2048991A JP4899190A JPH03253551A JP H03253551 A JPH03253551 A JP H03253551A JP 2048991 A JP2048991 A JP 2048991A JP 4899190 A JP4899190 A JP 4899190A JP H03253551 A JPH03253551 A JP H03253551A
Authority
JP
Japan
Prior art keywords
thermal spraying
plasma
laser beam
laser
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2048991A
Other languages
English (en)
Japanese (ja)
Other versions
JPH055893B2 (enExample
Inventor
Futoshi Uchiyama
内山　太
Koichi Tsukamoto
塚本　孝一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP2048991A priority Critical patent/JPH03253551A/ja
Publication of JPH03253551A publication Critical patent/JPH03253551A/ja
Publication of JPH055893B2 publication Critical patent/JPH055893B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating By Spraying Or Casting (AREA)
JP2048991A 1990-02-28 1990-02-28 レーザ溶射方法及び装置 Granted JPH03253551A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2048991A JPH03253551A (ja) 1990-02-28 1990-02-28 レーザ溶射方法及び装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2048991A JPH03253551A (ja) 1990-02-28 1990-02-28 レーザ溶射方法及び装置

Publications (2)

Publication Number Publication Date
JPH03253551A true JPH03253551A (ja) 1991-11-12
JPH055893B2 JPH055893B2 (enExample) 1993-01-25

Family

ID=12818692

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2048991A Granted JPH03253551A (ja) 1990-02-28 1990-02-28 レーザ溶射方法及び装置

Country Status (1)

Country Link
JP (1) JPH03253551A (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006132001A (ja) * 2004-11-02 2006-05-25 Sulzer Metco Ag 溶射装置及び溶射方法
JP2019183273A (ja) * 2018-04-02 2019-10-24 東京エレクトロン株式会社 金属膜の形成方法

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3918379B2 (ja) 1999-10-20 2007-05-23 トヨタ自動車株式会社 溶射方法、溶射装置及び粉末通路装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006132001A (ja) * 2004-11-02 2006-05-25 Sulzer Metco Ag 溶射装置及び溶射方法
JP2019183273A (ja) * 2018-04-02 2019-10-24 東京エレクトロン株式会社 金属膜の形成方法

Also Published As

Publication number Publication date
JPH055893B2 (enExample) 1993-01-25

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term