JPH0325074Y2 - - Google Patents

Info

Publication number

JPH0325074Y2

JPH0325074Y2 JP19336686U JP19336686U JPH0325074Y2 JP H0325074 Y2 JPH0325074 Y2 JP H0325074Y2 JP 19336686 U JP19336686 U JP 19336686U JP 19336686 U JP19336686 U JP 19336686U JP H0325074 Y2 JPH0325074 Y2 JP H0325074Y2

Authority

JP

Japan

Prior art keywords

area

hepa filter

work area

ceiling

process area

Prior art date

1986-12-16

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

Links

• Espacenet
• Global Dossier
• Discuss

• 238000000034 method Methods 0.000 claims description 28
• 238000007664 blowing Methods 0.000 claims description 14
• 230000007423 decrease Effects 0.000 claims description 4
• 210000000744 eyelid Anatomy 0.000 description 9
• 238000011109 contamination Methods 0.000 description 2
• 238000012864 cross contamination Methods 0.000 description 2
• 230000003749 cleanliness Effects 0.000 description 1
• 230000003247 decreasing effect Effects 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 239000000428 dust Substances 0.000 description 1
• 230000000694 effects Effects 0.000 description 1
• 238000005516 engineering process Methods 0.000 description 1
• 238000009434 installation Methods 0.000 description 1
• 238000004519 manufacturing process Methods 0.000 description 1