JPH0322905Y2 - - Google Patents

Info

Publication number
JPH0322905Y2
JPH0322905Y2 JP1986001498U JP149886U JPH0322905Y2 JP H0322905 Y2 JPH0322905 Y2 JP H0322905Y2 JP 1986001498 U JP1986001498 U JP 1986001498U JP 149886 U JP149886 U JP 149886U JP H0322905 Y2 JPH0322905 Y2 JP H0322905Y2
Authority
JP
Japan
Prior art keywords
electron beam
target
rays
wafer
aperture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986001498U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62114439U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986001498U priority Critical patent/JPH0322905Y2/ja
Publication of JPS62114439U publication Critical patent/JPS62114439U/ja
Application granted granted Critical
Publication of JPH0322905Y2 publication Critical patent/JPH0322905Y2/ja
Expired legal-status Critical Current

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Landscapes

  • X-Ray Techniques (AREA)
JP1986001498U 1986-01-08 1986-01-08 Expired JPH0322905Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986001498U JPH0322905Y2 (enrdf_load_stackoverflow) 1986-01-08 1986-01-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986001498U JPH0322905Y2 (enrdf_load_stackoverflow) 1986-01-08 1986-01-08

Publications (2)

Publication Number Publication Date
JPS62114439U JPS62114439U (enrdf_load_stackoverflow) 1987-07-21
JPH0322905Y2 true JPH0322905Y2 (enrdf_load_stackoverflow) 1991-05-20

Family

ID=30779459

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986001498U Expired JPH0322905Y2 (enrdf_load_stackoverflow) 1986-01-08 1986-01-08

Country Status (1)

Country Link
JP (1) JPH0322905Y2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62155516A (ja) * 1985-12-27 1987-07-10 Mitsubishi Electric Corp Ｘ線露光装置

Also Published As

Publication number Publication date
JPS62114439U (enrdf_load_stackoverflow) 1987-07-21

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