JPH0322847Y2 - - Google Patents
Info
- Publication number
- JPH0322847Y2 JPH0322847Y2 JP18764985U JP18764985U JPH0322847Y2 JP H0322847 Y2 JPH0322847 Y2 JP H0322847Y2 JP 18764985 U JP18764985 U JP 18764985U JP 18764985 U JP18764985 U JP 18764985U JP H0322847 Y2 JPH0322847 Y2 JP H0322847Y2
- Authority
- JP
- Japan
- Prior art keywords
- ion pump
- cooling fan
- air cooling
- current
- power supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001816 cooling Methods 0.000 claims description 22
- 108010083687 Ion Pumps Proteins 0.000 claims description 21
- 238000004544 sputter deposition Methods 0.000 claims description 11
- 238000001514 detection method Methods 0.000 claims description 5
- 238000007689 inspection Methods 0.000 description 3
- 238000012423 maintenance Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
Landscapes
- Electron Tubes For Measurement (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18764985U JPH0322847Y2 (enrdf_load_stackoverflow) | 1985-12-04 | 1985-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18764985U JPH0322847Y2 (enrdf_load_stackoverflow) | 1985-12-04 | 1985-12-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6294552U JPS6294552U (enrdf_load_stackoverflow) | 1987-06-16 |
| JPH0322847Y2 true JPH0322847Y2 (enrdf_load_stackoverflow) | 1991-05-17 |
Family
ID=31138301
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18764985U Expired JPH0322847Y2 (enrdf_load_stackoverflow) | 1985-12-04 | 1985-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0322847Y2 (enrdf_load_stackoverflow) |
-
1985
- 1985-12-04 JP JP18764985U patent/JPH0322847Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6294552U (enrdf_load_stackoverflow) | 1987-06-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US10876540B2 (en) | Electromagnetic rotating device and vacuum pump equipped with electromagnetic rotating device | |
| JP2004286045A (ja) | 磁気軸受装置及び該磁気軸受装置を搭載したポンプ装置 | |
| KR101552747B1 (ko) | 모터 드라이버 회로 및 그 모터 드라이버 회로를 탑재한 진공 펌프 | |
| US20080036975A1 (en) | Projector and temperature control method used in the projector | |
| JPH02231218A (ja) | 制御装置の冷却装置 | |
| JP2001037962A (ja) | パチンコ台の電源装置及びパチンコ台 | |
| JPH0322847Y2 (enrdf_load_stackoverflow) | ||
| JP2004286365A (ja) | 電子機器収容用ラック、空気調和システム、これに用いる制御ボックス及び空気調和システムの制御方法 | |
| JPH07121242A (ja) | 電子機器の冷却装置及びその冷却方法 | |
| JP2002285993A (ja) | ターボ分子ポンプ | |
| JPH10243507A (ja) | 高圧受配電装置 | |
| JP7595554B2 (ja) | 真空ポンプ及び制御装置 | |
| JP2537681Y2 (ja) | 連動負荷制御装置 | |
| JPH08247562A (ja) | 冷凍機の保護装置 | |
| JPS59160095A (ja) | 複数送風機の起動回路 | |
| JPH06133590A (ja) | インバータエアコンの保護運転方法 | |
| JP2025117615A (ja) | 真空ポンプ、及び磁気軸受装置 | |
| JPH0729278Y2 (ja) | 磁気軸受式タ−ボ分子ポンプのロ−タ制動装置 | |
| JPS6335195A (ja) | リラクタンスモ−タの駆動装置 | |
| JPH07322677A (ja) | ブラシレスモータの駆動装置 | |
| JP3088589B2 (ja) | 電界放出型電子銃用電源装置 | |
| KR20050081108A (ko) | 전기기구의 소비전력 절감장치 | |
| JPH0686401A (ja) | 電気車の制御装置 | |
| JPH03289345A (ja) | 超電導回転電機の集電装置 | |
| JPS6078564U (ja) | 電子顕微鏡等の排気装置 |