JPH0322579B2 - - Google Patents

Description

[Detailed Description of the Invention] The present invention relates to small precision equipment, equipment parts thereof, or
Heat atmosphere for constant temperature tests, cold resistance tests, moisture resistance tests, temperature cycle tests, etc. of electronic components such as ICs and LSIs,
Alternatively, the present invention relates to a thermal atmosphere testing device that allows testing of durability against a humid atmosphere, strong soil, etc. in a test chamber by switching the range from a high temperature range to an extremely low temperature range or a constant temperature range.

Conventionally, in equipment that conducts thermal atmosphere tests or humidity atmosphere tests on precision instruments and electronic components, the refrigerant flowing through the air conditioning cooler installed in the test room decomposes at around 150°C. The area near the temperature was considered to be the critical high temperature range. Therefore, temperature cycle tests from extremely low temperatures to high temperatures or humidity tests are conducted using a high temperature testing machine, depending on the conditions where the temperature exceeds 150°C. For this purpose, two tanks are required to perform continuous automatic tests, and temperature cycle tests are performed using thermal shock testers, etc. However, it is difficult to perform automatic cycle tests when humidity tests are also used. be.

Therefore, conventionally, for example, Japanese Patent Publication No. 36-14442 discloses a structure in which the gas flow between the heating chamber and the cooling chamber is switched using a combination of a piston and a damper in the shape of a door, and Japanese Utility Model Publication No. 54-121659 and Unexamined Japanese Patent Publication 1983-
A configuration in which switching is performed using a damper is known, such as in Japanese Patent No. 58437.

However, in the former configuration, the measurement chamber is placed in the center, and the cooling chamber and heating chamber are arranged on both sides, which increases the size of the device itself, and requires a piston to push the gas toward the side to be measured, making the structure complicated. There are drawbacks.

In addition, although the latter two structures allow for miniaturization, they have the disadvantage that gas cannot be circulated within each room when the chamber is closed with a damper, and temperature and humidity changes cannot be made efficiently. .

This invention was devised in view of the above circumstances, and its main problem is to arrange a low temperature/humidity controlled gas supply chamber and a high temperature gas supply chamber equipped with a heating means on one side of a test chamber into a single insulation chamber. In addition, each chamber is equipped with a fan and a partition to circulate the gas in each chamber regardless of whether the insulating door is opened or closed, thereby maintaining the temperature and humidity of the gas. The purpose is to improve the efficiency of maintaining and changing temperature and humidity by preventing them from becoming uniform.

In order to achieve the above object, the present invention provides a low-temperature/humidity-controlled gas supply chamber equipped with a cooling means and a humidity control means, and a high-temperature gas supply chamber equipped with a heating means. The two gas supply chambers are lined up on one side of the test chamber and have a single insulating structure so that the air inlets are common, and both gas supply chambers are connected to each other via external control. In a wide-area temperature/humidity atmosphere testing device each equipped with an insulated door that can be changed to close one side of the gas supply chamber, (a) low-temperature gas cooled by a cooling means or (b) providing a fan for moving the gas whose humidity has been controlled by the humidity control means; (b) providing a first partition that circulates the gas within the room when the low temperature/humidity controlled gas supply chamber is sealed with an insulating door; (c) A fan is provided in the high-temperature gas supply chamber to move the high-temperature gas heated by the heating means; (d) A fan is provided in the high-temperature gas supply chamber to circulate the gas within the chamber when the high-temperature gas supply chamber is sealed with an insulating door. A technical measure has been taken to provide two partitions.

Therefore, gas is supplied to the test chamber by controlling the opening and closing of the insulating wall, but regardless of whether the insulating door is opened or closed, the high-temperature gas supply chamber and the low-temperature/humidity-controlled gas supply chamber are Since the annular gas circulation path is formed by the partition, the temperature and humidity in the room can be made uniform, and the atmosphere in the test room can be quickly and evenly changed to and maintained at the set temperature and humidity.

Embodiments of the apparatus of the present invention will be described in detail below with reference to the drawings.

What is shown in FIGS. 1 to 3 is a typical specific example of the device of the present invention. A test chamber 3 with a required volume is provided in the front position, and a high temperature gas supply chamber 5 is partitioned at the rear of the test chamber 3 by a heat insulating partition wall 4, and further partitioned by a heat insulating partition wall 6 at the rear thereof. A low-temperature gas and constant-humidity gas supply chamber 7 is arranged, and a large sample entrance 8 is provided at the front of the test chamber 1, to which a door 9 having heat insulation properties is attached. This test room 1
Inside there is an air outlet 1 equipped with rectifier plates 11 that are vertically and horizontally crossed and have approximately the same width as the sample inlet/outlet.
Suction port 12 with 0 on the top and a similar horizontal horizontal plate
is attached to the lower part to separate it from the wind tunnel sections 13 and 13' at the rear.

A heater 14 and a fan 15 are arranged inside the high-temperature gas supply chamber 5 at the back of the test chamber 1, with the fan discharge port 15' facing the upper wind tunnel section 13.

A high-temperature gas circulation path 2 is provided with an appropriate interval between the discharge port 15' of the fan 15, the inner surface of the heat insulating partition wall 4, and the fan 15 and heater 14 arrangement section.
24A of partition plates are provided so that 4 is formed.

Further, inside the low temperature gas and constant humidity gas supply chamber 7 located behind the high temperature gas supply chamber 5, there are evaporators of a cooler (a cooling evaporator 16 and a humidity control evaporator 16').
, a temperature control heater 17 and a humidity control humidifier 1
8 are arranged, and the fan 19 is arranged with the discharge port 19' facing the upper outlet 7', and the fan 19 has a suction port 19'' facing the inner surface of the heat insulating partition wall 6 and the evaporators 16, 16. A partition plate 21 is provided at an appropriate interval between the fan 1 and the heater 17 installation part so that a cold air circulation path 20 is formed.
A temperature detection end 22 and a humidity detection end 23 are arranged near the discharge port 19' of 9, so that the inside of the low temperature and constant humidity gas supply chamber 7 is always maintained at a constant temperature and humidity regardless of whether the shutoff door is opened or closed. It has been taken into consideration.

The upper air supply port 7' and the lower air intake port 7'' of the heat insulating partition wall 6 have a heat insulating structure capable of switching between the high temperature gas supply chamber 5 and the low temperature (constant humidity) gas supply chamber 7. A blocking door 25, 25' is provided,
These shields 25, 25' have their base ends fixed to operating shafts 26, 26', respectively, and have one end protruding outside the heat insulating wall, and are connected to a reciprocating linear drive body (for example, an air cylinder) 27 disposed outside the main body 1. , 27' and link mechanisms 28, 28', each connected at 90°.
By rotating the door 25, 26', the doors 25, 26' can be opened and closed. Each of these blocking doors 25, 2
5' is designed to rotate on the side of the heat insulating partition wall 6 of the wind tunnel section of the test chamber 1, as shown in FIG. (for high-temperature operation). Therefore, even when operating at a high temperature, the temperature inside the low-temperature/constant-humidity gas supply body 7 can be maintained at the set temperature.

The lower part of the main body 1 is partitioned by a heat insulating wall to form a machine room 30, in which the cooling motor unit of the low-temperature/constant-humidity gas supply chamber 7, its condenser, etc. are housed.
Control electrical equipment is installed on the side of the main body so that it can be connected to and operated with various devices in the test room.

According to the apparatus of the present invention configured as described above, the front door 9 of the test chamber 3 is opened, a sample is placed inside the door, and the sample is allowed to stand still in accordance with the test requirements for the sample. Alternatively, energize the motorized parts of the equipment from the outside (by providing a power outlet (heat-resistant and moisture-resistant) in an appropriate place in the test room in advance, or by extending the lead wires to the outside and sealing the lead wire insertion holes).
A thermal atmosphere test, a moisture resistance test, and a temperature cycle test are performed. For example, to perform a temperature cycle test, the sample is placed in the test chamber 3, and then to be exposed to a high temperature (for example, 350°C), it is placed in the high temperature gas supply chamber 5. In order to isolate the low temperature and constant humidity gas supply chamber 7 from the
7', the high temperature gas heated by the heater 14 is blown into the test chamber 3 through the wind tunnel section by the fan 15, rectified by the rectifier plate 11 from the outlet 10, and is blown into the test chamber 3. The hot air is sucked in from the port 12 and enters the high temperature supply chamber 5 again to form a heated flow, and by continuing this circulation for a required period of time, the sample is maintained at a set temperature atmosphere. At this time, low temperature/constant temperature gas supply chamber 7
Since the outlet and inlet of the chamber are closed by the shutoff doors 25, 25', the interior of the chamber is kept at a low temperature by the drive of the cooler and is not affected by the inflow of high-temperature air.

Therefore, in order to expose the sample to a low temperature range (for example, -70°C) immediately after the set time in the high temperature range has elapsed, first, in order to cut off the communication with the high temperature gas supply chamber 5, the outlet 5' and the inlet 5'' are closed. Each cutoff door 25, 25' is closed by external operation (by the reciprocating linear drive body 27, 27' in the opposite operation to the high temperature operation), and the low temperature
Open the outlet 7′ and inlet 7″ of the constant humidity gas supply chamber 7,
The low-temperature gas, which has already reached the required temperature by operating the cooler, is sent into the test chamber 3 by the fan 19,
By suctioning through the suction port 12 and circulating it as in the case of high-temperature gas for a required period of time, it is possible to maintain the sample in a low-temperature atmosphere at the set temperature and perform the required test.

Similarly, to conduct a humidity test, the inside of the low-temperature and constant-humidity gas supply chamber 7 is set to a constant temperature and humidity state (in this case, the operation of the cooling evaporator 16 is primarily stopped, and the humidifier 18 and temperature control heater 17 are ),
If the shutoff doors 25 and 25' are used to circulate the air flow with the outlet and inlet of the high temperature gas supply chamber 7 closed, the sample can be maintained in a predetermined atmosphere for testing.

Various data during these tests are measured using the lead wires of the measuring equipment directly connected to the sample and instruments installed in the equipment, and external results of the sample caused by temperature differences, etc. are also measured. You can check it out.

In addition, in order to perform a temperature cycle test, a preset program is used to drive the heaters and coolers for each temperature and atmosphere setting, and to switch the shutoff door so that cold air is supplied with high-temperature gas. or hot air flow into the cold, constant humidity gas supply chamber to heat the evaporator and decompose the refrigerant, respectively, without causing disturbance to the gas supply source; This also made it easier to exchange temperature conditions. Of course, heat transfer between the two gas supply chambers can be prevented by the heat insulating effect of the insulating partition wall and the shutoff door. In addition, the circulation space 20 or 24 in each supply chamber forms a gas insulation layer, which can help prevent heat transfer and ensure reliable operation.

As described above, according to the present invention, a sample is placed in a test chamber, hot air is sent into the test chamber and circulated to raise the temperature, cold air is sent into the test chamber to lower the temperature, and a humid gas is heated. Tests can be carried out by exposing each to a constant humidity condition, and in order to keep them in their respective atmospheres, the gas supply chamber shuts off the outlet and inlet, and by opening and closing the door, the desired gas is immediately released into the test chamber. In this case, the heat source on the unused side is always unaffected by the temperature atmosphere on the used side, so the set temperature can be quickly reached, and there is no possibility of causing trouble, especially to equipment on the low temperature side. This makes it possible to test up to a high temperature range of around 350°C with a single test device, and it has become possible to perform tests by creating test programs for various conditions, without using a program setting device or This system has many advantages such as automatic control based on input from a computer.

By the way, in program control, the high temperature/low temperature switching shutoff door can be switched between the high temperature side and the low temperature side according to the input signal, and cold and hot air are alternately sent into the test chamber according to the temperature gradient of the program, allowing operation according to the required program. You can also do it. It goes without saying that manual fixed value control can also be performed.

[Brief explanation of drawings]

The drawings show an embodiment of the apparatus of the present invention, in which FIG. 1 is a longitudinal cross-sectional view excluding the machine storage section, FIG. 2 is an external side view, and FIG. 3 is an enlarged cross-sectional view of the main parts. 1...Main body, 2...Insulating wall, 3...Test chamber,
4, 6...Insulating partition wall, 5...High temperature gas supply chamber,
7...Low temperature/constant humidity gas supply room, 9...Door, 10...
...Air outlet, 12...Suction port, 14...Heater,
15, 19...fan, 16...cooling evaporator,
16'... Evaporator for humidity control, 17... Heater for temperature control, 18... Humidifier for humidity control, 20... Cold air circulation path, 24... High temperature gas circulation path, 25, 25'...
...Block door, 27, 27'... Reciprocating linear drive body for door operation, 28, 28'... Link mechanism.

Claims (1)

[Scope of Claims] 1. A low-temperature/humidity-controlled gas supply chamber equipped with a cooling means and a humidity control means and a high-temperature gas supply chamber equipped with a heating means have a common blow-off port and suction port for the gas circulating in the test chamber. The two gas supply chambers are arranged in a test chamber with a single heat insulating structure, and are connected to one of the gas supply chambers under external control at the respective intake ports and air supply ports of both gas supply chambers. In a wide-area temperature/humidity atmosphere testing device each equipped with an insulated door that can be switched to close the side, low-temperature gas cooled by a cooling means or gas whose humidity is controlled by a humidity control means is placed in a low-temperature/humidity-controlled gas supply chamber. In addition to providing a fan to move the gas, a partition body is provided to circulate the above-mentioned gas within the low temperature/humidity controlled gas supply chamber when the chamber is sealed with an insulating door, and the gas heated by the heating means is provided in the high temperature gas supply chamber. In addition to installing a fan to move high-temperature gas,
A wide-area temperature/humidity atmosphere testing device characterized by being provided with a partition that circulates the gas within the high-temperature gas supply chamber when the high-temperature gas supply chamber is sealed with a heat insulating door.