JPH01212333A - Thermal shock testing apparatus - Google Patents

Abstract

PURPOSE:To prevent discharged hot air from going to the protective device such as the fire alarm mounted to a ceiling, by arranging a wind altering plate capable of arbitrarily altering the discharge direction of exhaust gas to the exhaust gas discharge port of an exhaust duct. CONSTITUTION:The change-over dampers 10, 11 of a testing apparatus 1 are opened and the high temp. air heated by the heater 16 in a high temp. tank 3 is sent into a testing chamber 1 to heat a specimen. When a high temp. test is finished, the dampers 10, 11 are closed and the high temp. tank 2 enters preheating operation. Then, change-over dampers 21, 23 are opened and the testing chamber 1 is exposed to the open air. At this time, the air sucked in from an open air intake port 26 passes through a blower 24 and an air feed port 20 to reach the testing chamber 1. The high temp. air present in the testing chamber 1 is discharged through a discharge port 22, a discharge duct 27 and an exhaust gas discharge port 28. A support stand 32 is mounted to the discharge port 28 and a wind altering plate 29 supported in a freely revolvable manner by a pin 33 is mounted to the upper part of the support stand 32. By changing the direction of said altering plate 29, the flow direction of discharged air can be changed arbitrarily.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a cold S*a-S test device for performing low-temperature tests, room-temperature tests, and high-temperature tests on semiconductors, etc., and particularly relates to a cold S*a-S test device for performing low-temperature tests, normal-temperature tests, and high-temperature tests on semiconductors, etc., and particularly for the transition from low-temperature tests to normal-temperature tests. The present invention relates to a cooling/heating #table testing device suitable for shortening the temperature return time during the transition from a high temperature test to a room temperature test.

[Conventional technology]

The conventional cooling/heating #Hayabusa test device is based on patent application No. 59-110397.
As stated in the above issue, in order to shorten the temperature recovery time, air outside the equipment is removed during the room temperature test that is performed during the transition from a low temperature test to a high temperature test, and the room temperature test that is performed during the transition from a high temperature test to a low temperature test. It is configured to introduce air into the test chamber and exhaust the internal air from the test chamber to the outside of the device.For safety reasons, the exhaust air outside the device is guided through an exhaust duct to the exhaust outlet at the top of the device and released. Was.

[Problem to be solved by the invention]

In the above-mentioned conventional technology, no consideration is given to the direction of the cold air and hot air released from the exhaust duct, and the hot air released only in a specific direction can cause protection devices such as fire alarms installed on the ceiling of the equipment installation location to be damaged. There were cases where the device malfunctioned, and a solution was desired.

An object of the present invention is to solve the problems of the prior art described above.

[Rounding method to solve the problem]

The above object is achieved by installing a wind direction changing plate that can arbitrarily change the direction of exhaust air discharge at the exhaust outlet of the exhaust duct that guides and discharges the exhaust air from the test chamber to the upper part of the apparatus.

[Effect]

The above-mentioned wind direction change plate changes the direction of exhaust air from the exhaust duct according to the conditions of the equipment installation location, so that the hot air released is directed toward protective devices such as fire alarms on the ceiling of the equipment installation location. This prevents the protection device from erroneously operating.

〔Example〕

An embodiment of the present invention will be described below with reference to FIGS. 1 and 2.

Figure I@1 shows a longitudinal section of the thermal shock test device according to the invention. This test device is a thermal shock test device that places a sample such as a semiconductor in a test chamber and alternately blows cold air and hot air into the test chamber. ing. The wall that partitions the test chamber 1 and the cryostat 2 has a supply port 4 that sends cold air to the test chamber 1 and a discharge port 5 that discharges air from the test chamber 1 to the cryostat 2, and the supply port 4 is opened and closed. A switching damper 6 and a switching damper 7 for opening and closing the discharge port 5 are provided. The cryostat 2 includes a cooler 12 that cools the air in the cryostat 2, a temperature control heater 13 that adjusts and holds the cooled air at a predetermined temperature, and in the test preparation stage, cooled air is passed through a bypass 30 to a low temperature. Cooling air is circulated in chamber 2, and during low-temperature tests, cooling air is supplied to test chamber 1.
A blower 14 is installed to send air to. 15 is the blower 14
This is an electric motor for driving.

In the wall that separates the test room 1 and the high temperature tank 3, there is a supply port 8 that sends hot air to the test room 1 and a supply port 8 that sends hot air to the test room 1 and a wall that separates the test room 1 and the high temperature tank 3.
A switching damper 10 that opens and closes the supply port 8 and a switching damper 11 that opens and closes the discharge port 9 are provided. The high temperature tank 3 includes a heater 16 that heats the air in the high temperature tank 3, a heat storage body 17 that stores the heat generated by the heater 160 and maintains the heated air at a predetermined temperature, and a heat storage body 17 that stores the heated air at a predetermined temperature in the test preparation stage. A blower 18 is installed that circulates the inside of the high temperature tank 3 through a bypass 31 and sends heated air to the test chamber 1 during high temperature tests. 19 is an electric motor for driving the blower 18.

In addition, an air supply port 2 for introducing outside air is provided on the peripheral wall of the test chamber 10.
A switching damper 21 that opens and closes the air supply port 20 and an air supply port 20, an exhaust port 22 for discharging one yen of air from the test chamber to the outside of the apparatus, and a switching damper 23 that opens and closes the exhaust port 22 are provided. 24 is a blower that sends outside air to the test chamber 1, and 25 is a motor for driving the blower 24. 26 is the outside air intake, 27
29 is an exhaust duct that guides the exhaust from the exhaust port 22 to the exhaust discharge port 28 located at the top of the device;
This is the wind direction changing board installed at 8.

Next, the operation of this embodiment will be explained.

The present invention is characterized in that the direction in which cold air and hot air are released from the exhaust outlet 28 can be changed arbitrarily. Only the action will be explained, and the explanation of the action when cold air is discharged will be omitted.

During the high temperature test, the switching damper 10. It is opened and high temperature air heated by the heater 16 in the high temperature chamber 3 is sent into the test chamber 1 to heat the sample. When the high temperature test is completed, the switching damper 10.11 is closed and the high temperature bath 3 enters preheating operation. Then, the switching dampers 21 and 23 are opened, exposing 1 liter of the test chamber to the outside air. At this time, the outside air intake 26
The air sucked in from the air passes through the blower 24 and the air supply port 20,
Reach test room 1. On the other hand, the high temperature air in the test chamber 1 is exhausted through the exhaust port 22, the exhaust duct 27, and the exhaust outlet 28. If a protective device such as a fire alarm is installed at a location where the hot air emitted from the exhaust outlet 28 hits, the hot air will be detected and the protective device will malfunction.

In order to prevent this, a wind direction changing plate 29 is provided so that the emitted hot air can be directed in any direction.

FIG. 2 shows an example of the mounting structure of the wind direction changing plate 29.

, the support stand 32 is attached to the exhaust outlet 28, and the support stand 32 is attached to the exhaust outlet 28.
A wind direction changing plate 29 rotatably supported by a bin 33 is attached to the upper part of the wind direction changing plate 29. Depending on the installation conditions of the device, that is, the installation position of the protective device, the orientation of the wind direction changing plate 29 is changed to change the direction in which the exhaust air flows. FIG. 2(a) shows a case where the protection device is on the right side of the exhaust outlet 28, and the exhaust air is flowing to the left side. Φ) shows the case where the protective device is on the left side of the exhaust outlet 28, and (C) shows the case where the protective device is directly above the exhaust outlet 28, in which case the exhaust air is flowing in a direction avoiding the protective device. . The wind direction changing plate 29 is held in any direction shown in FIGS. 2(a), Φ), and (C) by friction of the support portion or the like.

〔Effect of the invention〕

According to the present invention, the direction of cold air and hot air discharged from the exhaust outlet at the top of the device can be changed arbitrarily, so the wind direction changing plate of the exhaust outlet can be oriented in an inappropriate direction depending on the conditions of the location where the device is installed. This prevents the fire alarm and other protection devices installed on the ceiling of the device installation location from malfunctioning.
Able to operate equipment.

[Brief explanation of the drawing]

FIG. 1 is a longitudinal cross-sectional view of an embodiment of the thermal shock testing apparatus according to the present invention, and FIG. 2 is a diagram showing an example of the mounting structure of the wind direction changing plate of the exhaust outlet portion.

Claims (1)

[Claims] 1. A test chamber and a high temperature tank that produces hot air to be sent to the test chamber.
A cryostat that produces cold air to be sent to the test chamber, an air supply port installed on the peripheral wall of the test chamber for introducing outside air, an exhaust port for discharging indoor air to the outside of the device, and an exhaust port located at the top of the device from the exhaust port. A thermal shock testing device comprising an exhaust duct that guides exhaust gas to a discharge port, characterized in that a wind direction changing plate that can arbitrarily change the direction of exhaust gas discharge is installed at the exhaust discharge port of the exhaust duct. .