JPS6326547A - Thermal shock tester using rotary valve - Google Patents

Abstract

PURPOSE:To prevent a main valve body from deforming thermally and being frozen and to reduce the size of a test chamber by making a low and a high temperature heat medium to exchange heat with each other through a by-pass circuit provided in the main valve body and holding the temperature constant. CONSTITUTION:The heat media are circulated into the test chamber from a low-temperature tank 5 equipped with an air blower 7 which moves the low- temperature heat medium cooled by the cooling device 11, and a high- temperature tank 6 equipped with an air blower 8 which moves the heat medium heated by a heater 12. Further, an air blower which moves vapor humidified by a humidity generator 40, and a room temperature air blower 45 which sends air of room temperature are coupled with the bottom part of the test chamber when necessary. Then, a signal is sent from the outside according to necessary conditions to rotate a rotary valve 20 to place the inside of the test chamber 3 in a high and low temperature state, and a low and high temperature and humidified state at need, and further adds a room temperature state according to a condition, thereby taking a desired test.

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention is capable of testing the durability, heat resistance, reliability, etc. of semiconductors such as ICs, LSIs, etc., mounting boards, electronic components, double-tight devices, and film materials. It is configured to apply thermal shock or freezing/thawing stress to the sample by switching to a low-temperature, high-temperature, or constant-temperature atmosphere, or, if necessary, to a room temperature atmosphere, without moving the sample within the test chamber. In particular, this relates to a thermal sink tester that uses a rotary valve in the cooling/heating medium switching section so as to be suitable for small-volume samples.

Conventionally, there are two types of thermal shock tests: an air tank type that uses gas as a heat medium, and a liquid bath type that uses a liquid.The former applies a gentle thermal stain to the sample, while the latter applies a sudden thermal shock to the sample. The test methods for each type are determined and differentiated.

Currently, there are few sample-moving devices in the air tank type, and the mainstream is a damper that uses a sample stationary damper to switch between cold and hot air. Freezing has occurred, causing problems with testing.

At Liquid Sei-ni, samples are still moved between low-temperature and high-temperature tanks (1), which consumes a large amount of heat transfer fluid.Recently, the solubility of heat transfer fluid has been discussed, and sample movement is difficult. This poses a problem as there is a risk that the heat medium vapor may leak outside.

The present invention solves the conventional problems and tests the cooling and heating medium by switching the rotary valve according to an external signal with the sample fixed in the test chamber. It was configured so that Wiml could be installed indoors and tests under the required conditions could be conducted. (For liquid tank type sample stationary type, please refer to 59.
(Patent application filed under No. 000139) The present invention comprises a low-temperature heat medium supply chamber equipped with a cooling means and a blower (pump in the liquid tank type) for moving the low-temperature heat medium cooled by the cooling means; A high-temperature heat medium supply chamber equipped with a blower (pump for liquid 11 type) for moving the heat medium heated by this heating means, and if necessary, a humidifying means and this! A humidification chamber equipped with a pump to move the steam humidified by the IcI humidification means and a mechanism for feeding room temperature gas, which is necessary depending on the test conditions, are connected to a rotary valve opening installed at the bottom of the test chamber. According to the required conditions, a signal is sent from the outside to rotate the rotary valve, and the inside of the test chamber is made low or high temperature. Depending on the conditions, the test chamber is controlled by low temperature, high temperature, or humidification, and depending on the conditions, room temperature is added. The system was designed so that it could be used for testing.

The rotary valve, which is the main part of the present invention, has 2 circuits 4
It consists of a boat or 4 circuits and 8 ports, the former for low temperature and high temperature two-zone testing, and the latter for low temperature, room temperature, high temperature,
Or for the 3-zone test of low temperature, humidification, and high temperature, further low temperature/M
Compatible with 4-zone tests: m, high temperature, and humidification.

The biggest advantage of rotary valves is that they have a bypass circuit inside the valve body, which maintains a constant temperature by exchanging heat between low and high temperature heat medium, preventing thermal deformation and freezing of the valve body. It is.

Furthermore, it is possible to replace conventional dampers, move partition plates, etc. Unlike the monument, the rotary valve method does not require dead space in the test chamber, so the test chamber can be made smaller (minimum φI20).
111Jl) became possible.

Another thing is that we have been able to unify the air tank type and liquid + W type into a common mechanism, creating a thermal shock tester that has not been possible until now, as both types are stationary sample types.

Hereinafter, embodiments of the apparatus of the present invention will be described in detail with reference to the drawings.

Figures 1 to 4 show a typical first embodiment of the device of the present invention, in which a test chamber (3) and a cryostat (5) are placed inside a casing (1) molded to the required dimensions. and high-temperature tank (6) are both housed through the thermal material (2).The upper part is equipped with a temperature controller (
32) and (32)' are installed, and there are three machine rooms (30) at the bottom where cooling devices (+1) and other equipment are installed.

At the front of the test chamber (3), there is a thermal insulation n(
4) is installed, a rotary valve (2o) is installed at the bottom, and the low + m Il! It communicates with the discharge port (21) and suction port (22) of (5) and the discharge port (23) and suction port (24) of the high temperature tank (6), and is connected to the drive unit (
28), the rotary valve (20) is operated to switch the test chamber between low and high temperatures, or vice versa, to create the required stress on the sample.

The low @ tank (5) is equipped with a cooler (work 0) to generate a low temperature, a heater (9) to maintain the required temperature, and a blower (7), and a temperature detection end (34). ) and a temperature regulator (32) to send the low-temperature gas to the required temperature through the discharge port (21) into the test M (3). The low-temperature gas sent into the test chamber applies stress to the sample, returns to the low-temperature chamber through the suction port (22), is cooled by the cooler (10), and circulates.

High temperature fl! (61 includes a heater for generating high temperature (
12) and a blower fi (8), and a temperature detection end (3
5) and the high-temperature gas whose temperature is controlled to the required temperature by the temperature controller (32)' is sent into the test M (3) through the discharge port (23). The high-temperature gas sent into the test chamber applies stress to the sample, returns to the high-i tank through the suction port (24), is heated by the heater (12), and circulates.

The rotary valve (20) has a 2-circuit, 4-boat structure, and moves one section according to an external signal sent to the drive unit (28), and sends low-temperature gas into the test chamber (3) when the test is at a low temperature. , exposing the sample to a low temperature atmosphere. At that time, the high temperature gas exchanges heat with each other through the bypass circuit inside the valve, preventing freezing. Circulate the hJ hot tub (6).

If the test is at a high temperature, the rotary valve (20) moves one section from the low temperature side, sends the high temperature gas into the test chamber (3), and passes the low temperature gas through the bypass circuit inside the valve to prevent overheating while moving the rotary valve (20) one section from the low temperature side to the low temperature flll (5). cycle. By repeating this operation for the required number of cycles, thermal shock 2
Zone testing can be performed.

Figure 5 and I! Figure 6 shows a second embodiment of the device of the present invention, which is configured so that a three-zone test can be performed by adding one more section to the two-zone test described above. By installing a room temperature blower (45) and using a rotary valve with a 3-zone structure with 4 circuits and 8 ports, the sample was exposed to the 3-zone atmosphere of low temperature, room temperature and high temperature, and a thermal shock 3-zone test was performed. can do.

Also, a humidity generator (40) is used instead of the room temperature blower (45).
By installing a room temperature blower and supplying humidified steam, the 3-zone test of low temperature, humidification, and high temperature can be performed using the room temperature blower (4
5) By installing 4) low temperature, room temperature, high temperature, and humidification
It is configured so that zone tests can be conducted.

7 and 8 show a third embodiment of the device of the present invention, in which a rotary valve (20
), each dedicated to discharge and suction, incorporates a large test chamber (3), and is configured to be able to test large samples.

Figures 1g9 and 10 are a compilation of the fourth example of the device of the present invention, in which two sets of the test M (3) and rotary valve (20) of the first example were incorporated into the housing (1). , each is controlled by its own counter, so that tests with two cycles can be conducted under the same conditions.

Fig. 12 and Fig. 12 show the fifth embodiment of the device of the present invention, in which a test M (3) was conducted using a liquid bath type thermal shock tester using a liquid (for example, Fluorinert liquid FC77/Fe12, etc.) as a heat medium. “Low temperature fI! (5)
A high temperature tank (6) is installed inside the housing (1) through a heat insulating material (2), an operation door (14) is provided on the front, and a heat insulating door (4) is installed in the space inside the door. By opening these, the sample can be placed in the test chamber (3) 11.
) A rotary valve (20) is attached to the bottom of 1'.
The heat medium liquid is stored in a cooler (lO) installed in a low meter tank (5)°.
The temperature is controlled by the heater (9)' and the temperature detection end (34).
) and temperature controller (32), and the pump (7
1 (3)" through the discharge port (21)" and expose the sample to low temperature, and then return to the low temperature tank (5)' through the suction port (22) and circulate.

To switch to high temperature, open the intake valve (50) and exhaust valve (5I) and forcefully feed pressurized gas from the intake pulp (50) into the test chamber (3), and then transfer the low temperature heat medium liquid to the cryostat (5I). 5) The heating medium liquid can be exchanged by switching back and switching the rotary valve (20) and closing the intake pulp (50) and exhaust valve (5).

The high-temperature heat transfer liquid is tsrtasm in the high-temperature tank (6) 1, and the sample in the test M (3) 1' is pumped through the discharge port (23)' and the suction port (24)' by the pump (8). By applying stress and circulating.This operation was repeated for the required number of cycles to enable a liquid bath type thermal shock test*a.

Figures 13 to N15 show the principle of a rotary valve, and each figure shows the state of a 2-circuit, 4-boat valve at low temperatures.

The bottom plate (60) is attached to the bottom of the test chamber (3), the valve seat h (64) is housed in the casing (66), and the
It is sealed with rings (67), (68), and (69), and attached with screws (7o). Valve seat (64)
has two ports (61) (621) and a rotating shaft (6
5) is connected to the drive unit (28) and controlled by an external signal to change the port a.

To explain in detail according to the figure, the low-temperature heat medium discharge port (2 is port (6I), the bottom plate discharge port (211"), and the suction port (22")
) communicate with the bow h (62) and the bottom plate suction port (22), respectively, to circulate the low-temperature heat medium.On the other hand, the high salt heat medium discharge port (23) and the suction port (24) are connected to the bypass path (63). The high temperature heat medium is circulated through the bottom plate outlet (2).
3) ” and the bottom plate suction port c24) 1' are the valve seat (
64), and the outflow of the high-temperature heating medium from the test chamber (3) is monitored. 15th ll! ! It indicates the state.

As mentioned above, the present invention allows thermal shock tests to be performed with the sample stationary in either the air tank type or the liquid tank type by using a rotary valve. , or multiple tanks can be arranged, and it can be easily equipped with low and high temperature, humidification, pressurization, depressurization, gas replacement, etc., so it has many advantages as a multipurpose device. I got it.

[Brief explanation of the drawing]

FIG. 1 is a plan cross-sectional view of the main body of a first practical example of the apparatus of the present invention, FIG. 2 is a cross-sectional view, and FIGS. 3 and 4 are longitudinal cross-sectional views. @Figure 5 is a plan cross-sectional view of the main body of the second embodiment of the present invention device 111,
Figure 6 is a longitudinal cross-sectional view. FIG. 7 is a plan sectional view of the main body of the third embodiment of the device of the present invention, and FIG. 8 is a cross sectional view. FIG. 9 is a plan sectional view of the main body of the device W of the present invention, the fourth embodiment, and the first
0 The figure is a cross-sectional view. Section 11 is a plan cross-sectional view of the main body of the fifth embodiment of the device of the present invention, M
Figure 12 is a longitudinal cross-sectional view. Fig. 13 is a plan view of the rotary valve of the present invention, Fig. 14 is a plan view of the rotary valve of the present invention;
The figure is a vertical view taken from ■-■ in FIG. 13. (1)・・・・・・・・・Housing (2)
・・・・・・・・・・・・Insulation material (3) (31'
(31”...Examination room (41(4) '......
...Insulation door (51(5)'...Bottom tank (
6) (6)'... High temperature tank (7) (8)...
...Blower (7) '(81"...
・Pump (9) (9)" (I2)... Heater (1
0)(+ol'...Cooler (11)...
......Cooling device 1 (14)...
...Operation door (20) ...Rotary valve (2+) (21) '(211"Discharge O (low temperature)
(22) (22) ' (22) ゛Suction port (low temperature)
(23) (23) “(23)” Discharge port (high temperature)
(24) (24) ' (24) '' Suction port (high temperature) (28)...... Drive section (3
0)・・・・・・・・・Machine room (31)・・・・・・
・・・・・・S board (32) (32) '・・・・・・
Temperature controller (34) (35) Temperature detection end (40) Humidity generator (4
5)・・・・・・Room temperature blower (50)・・・・
・・・・・・Intake valve (51)・・・・・・・・・
... Exhaust valve (60) ... Bottom plate (611 (621 ... Boat (63) ...
......Bypass path (64)...
...Valve seat (65) ...Rotation shaft (66) ...Casing (6
7) (68) (69)...0 ring (70)...
...... Stop screw patent agent Shozo Ito Fig. 1 Fig. 2 Fig. 3 Fig. 5 Fig. 6 Fig. 7 Fig. 8 Fig. 9 Fig. 10 Fig. 11 Fig. 13 Figure 14 Figure 15

Claims (1)

[Claims] The sample is placed inside a test chamber that is equipped with a box-shaped (or cylindrical) heat-insulating door surrounded by a heat-insulating wall, and a rotary valve that switches the passage by rotation on the other side. At the rear (or lower part) of the unit, there is a low temperature generating part, a high temperature generating part, a humidity generating part if necessary, etc. surrounded by an insulating wall, and the cool air (or cooling liquid) whose temperature is controlled inside the generating part is installed.
Hot air (or heated liquid) or humidified steam, etc. is discharged by a blower (or pump) installed in the generator, communicated with a rotary valve, and circulated within the test chamber, and the rotary valve is switched by a signal from the setting device. The test chamber was designed to subject the sample to thermal shock or freezing/thawing conditions by exposing it to a low-temperature, high-temperature, or humidified atmosphere, or, if necessary, introducing outside air and exposing it to a room-temperature atmosphere. Thermal shock tester using a rotary valve.