JPS6326547A - Thermal shock tester using rotary valve - Google Patents

Thermal shock tester using rotary valve

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Publication number
JPS6326547A
JPS6326547A JP61170183A JP17018386A JPS6326547A JP S6326547 A JPS6326547 A JP S6326547A JP 61170183 A JP61170183 A JP 61170183A JP 17018386 A JP17018386 A JP 17018386A JP S6326547 A JPS6326547 A JP S6326547A
Authority
JP
Japan
Prior art keywords
temperature
low
test chamber
rotary valve
test
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP61170183A
Other languages
Japanese (ja)
Inventor
Shozo Ito
伊藤 昭三
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Priority to JP61170183A priority Critical patent/JPS6326547A/en
Publication of JPS6326547A publication Critical patent/JPS6326547A/en
Pending legal-status Critical Current

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Abstract

PURPOSE:To prevent a main valve body from deforming thermally and being frozen and to reduce the size of a test chamber by making a low and a high temperature heat medium to exchange heat with each other through a by-pass circuit provided in the main valve body and holding the temperature constant. CONSTITUTION:The heat media are circulated into the test chamber from a low-temperature tank 5 equipped with an air blower 7 which moves the low- temperature heat medium cooled by the cooling device 11, and a high- temperature tank 6 equipped with an air blower 8 which moves the heat medium heated by a heater 12. Further, an air blower which moves vapor humidified by a humidity generator 40, and a room temperature air blower 45 which sends air of room temperature are coupled with the bottom part of the test chamber when necessary. Then, a signal is sent from the outside according to necessary conditions to rotate a rotary valve 20 to place the inside of the test chamber 3 in a high and low temperature state, and a low and high temperature and humidified state at need, and further adds a room temperature state according to a condition, thereby taking a desired test.

Description

【発明の詳細な説明】 本発明は、IC,LSl、、等の半導体を始め、実装基
板、電子部品、W密機器及び−膜素材の耐久性、耐熱性
、及び信頼性等の試験を、試験室内にて試料の移動を行
なわずに、低温・高温、或は恒温の雰囲気に、又必要に
よっては室温の雰囲気に切換えて、試料に熱衝撃や凍結
・融解のストレスを加えるよう構成し、特に小容量の試
料に適合させるよう、冷・熱媒切換部にロータリーバル
ブを使用したサーマルシ1ンクテスターに関するもので
ある。
DETAILED DESCRIPTION OF THE INVENTION The present invention is capable of testing the durability, heat resistance, reliability, etc. of semiconductors such as ICs, LSIs, etc., mounting boards, electronic components, double-tight devices, and film materials. It is configured to apply thermal shock or freezing/thawing stress to the sample by switching to a low-temperature, high-temperature, or constant-temperature atmosphere, or, if necessary, to a room temperature atmosphere, without moving the sample within the test chamber. In particular, this relates to a thermal sink tester that uses a rotary valve in the cooling/heating medium switching section so as to be suitable for small-volume samples.

従来、サーマルショック試験には、熱媒体に気体を使用
した気槽式と、液体を使用した液槽式があり、前者はゆ
るやかなサーマルシミツクを、後者は急激なサーマルシ
ョックを試料に与える為のもので、個々その試験法が定
められ、区別されている。
Conventionally, there are two types of thermal shock tests: an air tank type that uses gas as a heat medium, and a liquid bath type that uses a liquid.The former applies a gentle thermal stain to the sample, while the latter applies a sudden thermal shock to the sample. The test methods for each type are determined and differentiated.

気槽式は、現在では試料移動式の装置は少なく、試料静
止型のダンパーによる冷・熱風切換方式が主流を占めて
いるが、冷・熱風吐出部の構造に問題だ多く、熱変形や
、凍結等が生じ、試験に支障をもたらしている。
Currently, there are few sample-moving devices in the air tank type, and the mainstream is a damper that uses a sample stationary damper to switch between cold and hot air. Freezing has occurred, causing problems with testing.

液清弐では、現在でも試料を低温1、高温槽の(を移動
させており、その為に熱媒液の消費が激しく、又最近で
は熱媒液の溶性が取上げられており、試料の移動する度
に熱媒蒸気が外部え洩れる危険があり問題となっている
At Liquid Sei-ni, samples are still moved between low-temperature and high-temperature tanks (1), which consumes a large amount of heat transfer fluid.Recently, the solubility of heat transfer fluid has been discussed, and sample movement is difficult. This poses a problem as there is a risk that the heat medium vapor may leak outside.

本発明は従来の問題点を解決して、気槽式、液槽式を間
t〕ず試料を試験室内に定置した状態で、外部よりの信
号によりロータリーバルブを切換えて冷・熱媒を試験室
内にWimlさせ、所要条件の試験が行なえるよう構成
したのである。 (液槽式の試料静止型に関しては59
−000139にて特許出願済)本発明は、冷却手段及
びこの冷却手段により冷却された低温の熱媒体を移動さ
せる送風機(液槽式ではポンプ)を備えた低温熱媒体供
給室と、加熱手段及びこの加熱手段により加熱された熱
媒体を移動させる送風機(液11式ではポンプ)を備え
た高温熱媒体供給室と、必要によっては加湿手段及びこ
の!IcI湿手段により加湿された蒸気を移動させる送
3喝を備えた加湿室と、試験条件によっては必要である
室温の気体を送り込む機構とを、試験室底部に装着した
ロータリーバルブ開口部に連結い 所要条件に従って外
部より信号を送ってロータリーバルブを回転させ、試験
室内を低温・高温に、必要によっては低温・高温・加湿
の法蝮に、斐に条件によっては室温の状態を加えて、所
要条件の試験が行なえるよう構成したのである。
The present invention solves the conventional problems and tests the cooling and heating medium by switching the rotary valve according to an external signal with the sample fixed in the test chamber. It was configured so that Wiml could be installed indoors and tests under the required conditions could be conducted. (For liquid tank type sample stationary type, please refer to 59.
(Patent application filed under No. 000139) The present invention comprises a low-temperature heat medium supply chamber equipped with a cooling means and a blower (pump in the liquid tank type) for moving the low-temperature heat medium cooled by the cooling means; A high-temperature heat medium supply chamber equipped with a blower (pump for liquid 11 type) for moving the heat medium heated by this heating means, and if necessary, a humidifying means and this! A humidification chamber equipped with a pump to move the steam humidified by the IcI humidification means and a mechanism for feeding room temperature gas, which is necessary depending on the test conditions, are connected to a rotary valve opening installed at the bottom of the test chamber. According to the required conditions, a signal is sent from the outside to rotate the rotary valve, and the inside of the test chamber is made low or high temperature. Depending on the conditions, the test chamber is controlled by low temperature, high temperature, or humidification, and depending on the conditions, room temperature is added. The system was designed so that it could be used for testing.

本発明の主要部であるロータリーバルブは、 2回路4
ボート、又は4回路8ポート、にて構成され、前者は低
温・高温の2ゾーン試験に、後者は低温・室温・高温、
又は低温・加湿・高温の3ゾーン試験に、更に低温・M
m・高温・加湿の4ゾーン試験にそれぞれ適合させてい
る。
The rotary valve, which is the main part of the present invention, has 2 circuits 4
It consists of a boat or 4 circuits and 8 ports, the former for low temperature and high temperature two-zone testing, and the latter for low temperature, room temperature, high temperature,
Or for the 3-zone test of low temperature, humidification, and high temperature, further low temperature/M
Compatible with 4-zone tests: m, high temperature, and humidification.

ロータリーバルブの最大の利点は、バルブ本体内にバイ
パス回路を持っていて、低・高温熱媒体が亙いに熱交換
することにより恒温化され、バルブ本体の熱変形や凍結
を防止している事である。
The biggest advantage of rotary valves is that they have a bypass circuit inside the valve body, which maintains a constant temperature by exchanging heat between low and high temperature heat medium, preventing thermal deformation and freezing of the valve body. It is.

更に従来のダンパーの換や仕切板移動等のlI!碑と異
なり、ロータリーバルブ方式では試験室にデッドスペー
スを必要シしないため、試験室の小型化(最小φI20
111Jl)が可能となったのである。
Furthermore, it is possible to replace conventional dampers, move partition plates, etc. Unlike the monument, the rotary valve method does not require dead space in the test chamber, so the test chamber can be made smaller (minimum φI20).
111Jl) became possible.

そしてもう一つ、気槽式・液+W式を共通機構に統一シ
、シかもどちらも試料静止型と言う現在まで実現できな
かったサーマルショックテスターと成し得たのである。
Another thing is that we have been able to unify the air tank type and liquid + W type into a common mechanism, creating a thermal shock tester that has not been possible until now, as both types are stationary sample types.

以下本発明装置について、実施例を図面により詳述すれ
ば次の通りである。
Hereinafter, embodiments of the apparatus of the present invention will be described in detail with reference to the drawings.

第1図乃至第4図は、本発明装置の代表的な第1実施例
を示したもので、所要寸法に成形した筐体(1)の内部
に試験室(3)と低温槽(5)及び高温槽(6)を何れ
も斯熱材(2)を介して収納い 上部には温度調節器(
32)・(32) ’を装着した配電盤(31)を、下
部には冷却装置(+1)等を設置する機械室(30)を
3置している。
Figures 1 to 4 show a typical first embodiment of the device of the present invention, in which a test chamber (3) and a cryostat (5) are placed inside a casing (1) molded to the required dimensions. and high-temperature tank (6) are both housed through the thermal material (2).The upper part is equipped with a temperature controller (
32) and (32)' are installed, and there are three machine rooms (30) at the bottom where cooling devices (+1) and other equipment are installed.

試験室(3)の前面には、試料を出し入れする断熱n(
4)を取付け、下部にはロータリーバルブ(2o)が装
着され、低+m Il!(5)の吐出口(21)及び吸
込口(22)、高温槽(6)の吐出口(23)及び吸込
口(24)と連通されており、外部信号により駆動部(
28)を介してロータリーバルブ(20)を作動させ試
験室内を低温・高温、或はその逆に切換えて、試料に所
ゝ要のストレスを工える。
At the front of the test chamber (3), there is a thermal insulation n(
4) is installed, a rotary valve (2o) is installed at the bottom, and the low + m Il! It communicates with the discharge port (21) and suction port (22) of (5) and the discharge port (23) and suction port (24) of the high temperature tank (6), and is connected to the drive unit (
28), the rotary valve (20) is operated to switch the test chamber between low and high temperatures, or vice versa, to create the required stress on the sample.

低@槽(5)には、低温を発生させるための冷却器(工
0)と、所要温度を保持するための加熱器(9)、及び
送風類(7)が備えられ温度検出端(34)及び温度調
節器(32)にて所要温度に調温された低温気体を吐出
口(21)を通じて試験M(3)に送り込む。試験室内
に送り込まれた低温気体は試料にストレスを加え、吸込
口(22)より再び低温槽内に戻り、冷却器(10)に
て冷却され循環する。
The low @ tank (5) is equipped with a cooler (work 0) to generate a low temperature, a heater (9) to maintain the required temperature, and a blower (7), and a temperature detection end (34). ) and a temperature regulator (32) to send the low-temperature gas to the required temperature through the discharge port (21) into the test M (3). The low-temperature gas sent into the test chamber applies stress to the sample, returns to the low-temperature chamber through the suction port (22), is cooled by the cooler (10), and circulates.

高温fl!(61には、高温を発生するための加熱器(
12)及び送風fi(8)が備えられ、温度検出端(3
5)及び温度調節器(32)’にて所要温度に調温され
た高温気体を吐出口(23)を通じて試験M(3)に送
り込む。試験室内に送り込まれた高温気体は試料にスト
レスを工え吸込口(24)より再び高i槽内に戻り、加
熱器(12)にて昇温され循環する。
High temperature fl! (61 includes a heater for generating high temperature (
12) and a blower fi (8), and a temperature detection end (3
5) and the high-temperature gas whose temperature is controlled to the required temperature by the temperature controller (32)' is sent into the test M (3) through the discharge port (23). The high-temperature gas sent into the test chamber applies stress to the sample, returns to the high-i tank through the suction port (24), is heated by the heater (12), and circulates.

ロータリーバルブ(20)は、2回路4ボート仕様の構
造で、駆動部(28)に送られた外部信号に従って1セ
クシヨン移動し、試験が低温の場合は低温気体を試験室
(3)内に送り込み、試料を低温の雰囲気にさらす。そ
の時高温気体は、バルブ内バイパス回路を通って互いに
熱交換をし、凍結を防ぎながら?hJ温槽(6)を循環
する。
The rotary valve (20) has a 2-circuit, 4-boat structure, and moves one section according to an external signal sent to the drive unit (28), and sends low-temperature gas into the test chamber (3) when the test is at a low temperature. , exposing the sample to a low temperature atmosphere. At that time, the high temperature gas exchanges heat with each other through the bypass circuit inside the valve, preventing freezing. Circulate the hJ hot tub (6).

試験が高温の場合ロータリーバルブ(20)は低温側よ
り1セクシヨン移動し、高温気体を試験室(3)内に送
り込み、低温気体にバルブ内バイパス回路を通って過熱
を防ぎながら低温fll(5)を循環する。この動作を
所要サイクル数繰返すことにより、サーマルショック2
ゾーン試験を実施することができる。
If the test is at a high temperature, the rotary valve (20) moves one section from the low temperature side, sends the high temperature gas into the test chamber (3), and passes the low temperature gas through the bypass circuit inside the valve to prevent overheating while moving the rotary valve (20) one section from the low temperature side to the low temperature flll (5). cycle. By repeating this operation for the required number of cycles, thermal shock 2
Zone testing can be performed.

第5図及びI!6図は、本発明装置の第2実施例を示し
たもので、上述した2ゾーン試験に更に一つのセクショ
ンを加え、3ゾーン試験を実施できるよう構成したもの
で、機械M (30)内に室温送風機(45)を設置し
、ロータリーバルブを4回路8ポートの3ゾーン構造の
ものを使用することにより、試料を低温・室温−高温の
3ゾーンの雰囲気にさらし、サーマルショック3ゾーン
試験を実施することができる。
Figure 5 and I! Figure 6 shows a second embodiment of the device of the present invention, which is configured so that a three-zone test can be performed by adding one more section to the two-zone test described above. By installing a room temperature blower (45) and using a rotary valve with a 3-zone structure with 4 circuits and 8 ports, the sample was exposed to the 3-zone atmosphere of low temperature, room temperature and high temperature, and a thermal shock 3-zone test was performed. can do.

又、室温送風機(45)の代わりに湿度発生器(40)
を設置し、加湿蒸気を送り〜込むことにより、低温・加
湿・高温の3ゾーン試験が、更に前述の室温送風機(4
5)を併設することにより低温・室温・高温・加湿の4
ゾーン試験が実施できるよう構成したものである。
Also, a humidity generator (40) is used instead of the room temperature blower (45).
By installing a room temperature blower and supplying humidified steam, the 3-zone test of low temperature, humidification, and high temperature can be performed using the room temperature blower (4
5) By installing 4) low temperature, room temperature, high temperature, and humidification
It is configured so that zone tests can be conducted.

第7図及び第8図は、本発明装置の第3実施例を示した
もので、第1実施例の構成に、ロータリーバルブ(20
)を2個使用し、それぞれ吐出、吸込、専用にすること
により、大型試験室(3)”を組込み、大型試料の試験
ができるよう構成したものである。
7 and 8 show a third embodiment of the device of the present invention, in which a rotary valve (20
), each dedicated to discharge and suction, incorporates a large test chamber (3), and is configured to be able to test large samples.

1g9図及び第10 図は、本発明装置の第4実1例を
丞したもので、第1実施例の試験M(3)及びロータリ
ーバルブ(20)を筐体(1)内に2セット組込み、各
々独宜したカウンターで制御することにより、2つのサ
イクルの興った試験を同一条件にて実施できるよう構成
したものである。
Figures 1g9 and 10 are a compilation of the fourth example of the device of the present invention, in which two sets of the test M (3) and rotary valve (20) of the first example were incorporated into the housing (1). , each is controlled by its own counter, so that tests with two cycles can be conducted under the same conditions.

gll 図及び第12 図は、本発明装置の第5実施例
を示したもので、熱媒体に液体(例えばフロリナート液
FC77・Fe12等) を使用した液槽式サーマルシ
ョックテスターで試験M (3) ”低温fI!(5)
’高温槽(6)゛を筐体(1)内に断熱材(2)を介し
−で配設し、前面には操作扉(14)を設け、同扉内空
間部に断熱扉(4)lを取付をブ、これ等を開くことに
より試料を試験室(3)11内に定置でき、試験室(3
)1′底部にはロータリーバルブ(20)が装着され、
熱媒液は低m漕(5)°内に起設された冷却器(lO)
”及び加熱器(9)′にて調温され、温度検出端(34
)及び温度調節器(32)にて開園されて、ポンプ(7
)lより吐出口(21)”を径で試験!!1(3)”に
入り試料を低温にさらして吸込口(22) ’より低温
槽(5)′内に戻り循環する。
Fig. 12 and Fig. 12 show the fifth embodiment of the device of the present invention, in which a test M (3) was conducted using a liquid bath type thermal shock tester using a liquid (for example, Fluorinert liquid FC77/Fe12, etc.) as a heat medium. “Low temperature fI! (5)
A high temperature tank (6) is installed inside the housing (1) through a heat insulating material (2), an operation door (14) is provided on the front, and a heat insulating door (4) is installed in the space inside the door. By opening these, the sample can be placed in the test chamber (3) 11.
) A rotary valve (20) is attached to the bottom of 1'.
The heat medium liquid is stored in a cooler (lO) installed in a low meter tank (5)°.
The temperature is controlled by the heater (9)' and the temperature detection end (34).
) and temperature controller (32), and the pump (7
1 (3)" through the discharge port (21)" and expose the sample to low temperature, and then return to the low temperature tank (5)' through the suction port (22) and circulate.

高温えの切換えは、吸気バルブ(50)及び排気バルブ
(5I)を開き加圧気体を吸気パルプ(50]より試験
室(3)l内に圧送することにより、低温熱媒液を低温
槽(5)′え戻し、ロータリーバルブ(20)を切換え
て吸気パルプ(50)及び排気バルブ(5りを閉じるこ
とにより熱媒液を入換えることがで自る。
To switch to high temperature, open the intake valve (50) and exhaust valve (5I) and forcefully feed pressurized gas from the intake pulp (50) into the test chamber (3), and then transfer the low temperature heat medium liquid to the cryostat (5I). 5) The heating medium liquid can be exchanged by switching back and switching the rotary valve (20) and closing the intake pulp (50) and exhaust valve (5).

高温熱媒液は高温槽(6)1内にてtsrtasmされ
、ポンプ(8)“により吐出口(23) ’及び吸込口
(24) ’を径で試験M(3)1′内の試料にストレ
スを加えて循環する。この動作を所要サイクル数繰返す
ことにより液槽式サーマルショック試験を実施できるよ
う*aしたのである。
The high-temperature heat transfer liquid is tsrtasm in the high-temperature tank (6) 1, and the sample in the test M (3) 1' is pumped through the discharge port (23)' and the suction port (24)' by the pump (8). By applying stress and circulating.This operation was repeated for the required number of cycles to enable a liquid bath type thermal shock test*a.

第13 図乃至N15図は、ロータリーバルブの原理を
示したもので、図は2回路4ボートバルブの低温時の状
態を表わしている。
Figures 13 to N15 show the principle of a rotary valve, and each figure shows the state of a 2-circuit, 4-boat valve at low temperatures.

底板(60)は試験室(3)の底部に取付けられ、バル
ブシーh(64)はケーシング(66)内に収納し、0
リング(67)(68) (69)にてシールされ、化
ビス(7o)にて取付けられる。バルブシート(64)
は2つのポート(61) (621を持ち、回転軸(6
5)に駆動部(28)を接続し、外部信号にて制御する
ことによりポートのa換えを行なう。
The bottom plate (60) is attached to the bottom of the test chamber (3), the valve seat h (64) is housed in the casing (66), and the
It is sealed with rings (67), (68), and (69), and attached with screws (7o). Valve seat (64)
has two ports (61) (621) and a rotating shaft (6
5) is connected to the drive unit (28) and controlled by an external signal to change the port a.

図に従って詳述すると、低温熱媒の吐出口(2りはポー
ト(6I)及び底板吐出口(211”と、吸込口(22
)はボーh(62)及び底板吸込口(22) ”とそれ
ぞれ達通し、低温熱媒を循環させる。一方高塩熱媒吐出
口(23)及び吸込口(24)はバイパス路(63)と
連通し、高温熱媒を循環させる。その時底板吐出口(2
3) ”及び底板吸込口c24)1′はバルブシート(
64)にて閉じられ試験室(3)えの高温熱媒の流出を
速量している。第15 ll!!Itはその状態を示し
ている。
To explain in detail according to the figure, the low-temperature heat medium discharge port (2 is port (6I), the bottom plate discharge port (211"), and the suction port (22")
) communicate with the bow h (62) and the bottom plate suction port (22), respectively, to circulate the low-temperature heat medium.On the other hand, the high salt heat medium discharge port (23) and the suction port (24) are connected to the bypass path (63). The high temperature heat medium is circulated through the bottom plate outlet (2).
3) ” and the bottom plate suction port c24) 1' are the valve seat (
64), and the outflow of the high-temperature heating medium from the test chamber (3) is monitored. 15th ll! ! It indicates the state.

上述の如く本発明は、ロータリーバルブを使用すること
により気槽式・液槽式の何れも試料を静止したまま、サ
ーマルショック試験を行なうことb〜でき、小容量の試
験、−槽及び二種、或いは多槽の配置も可能であり、ま
た低温・高温を始め、加湿、加圧、減圧、ガス置換等も
容易に装備できるため、多目的用途の装置として数多く
の利点をJJ&備したものとなし得たのである。
As mentioned above, the present invention allows thermal shock tests to be performed with the sample stationary in either the air tank type or the liquid tank type by using a rotary valve. , or multiple tanks can be arranged, and it can be easily equipped with low and high temperature, humidification, pressurization, depressurization, gas replacement, etc., so it has many advantages as a multipurpose device. I got it.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明装置第1実厖例の本体平断面図、第2図
は横断面図、第3図、第4図は縦断面図。 @5図は本発明装置111第2実施例の本体平断面図、
第6図は縦断面図。 第7図は本発明装置第3実施例の本体平断面図、第8図
は横断面図。 第9図は本発明装置W、4実施例の本体平断面図、第1
0 図は横断面図。 第11 区は本発明装置第5実施例の本体平断面図、M
12図は縦断面図。 第13 図は本発明装置ロータリーバルブの平面図、第
14 図は第13 図の11−m1i所面χ、第15 
図は第13 図の■−■視縦所面図。 (1)・・・・・・・・・・・・筐   体  (2)
・・・・・・・・・・・・断 熱 材(3) (31’
 (31”・・試験室 (41(4) ’・・・・・・
・・断熱扉(51(5)’・・・・・・・・底部槽 (
6)(6)’・・・・・・・高温槽(7) (8)・・
・・・・・・送風機 (7) ’ (81”・・・・・
・ポンプ(9)(9)”(I2)・・・・加熱器 (1
0)(+ol ’・・・・・・冷却器(11)・・・・
・・・・・・冷却装置1  (14)・・・・・・・・
・・操作扉(20)・・・・・・・・ロータリーバルブ
 (2+) (21) ’ (211”吐出O(低温)
(22) (22) ’ (22) ゛吸込口(低温)
  (23) (23)“(23) ”吐出口(高温)
(24) (24) ’ (24) ”  吸込口(高
温)  (28)・・・・・・・・・・駆 動 部(3
0)・・・・・・・・・・機械室 (31)・・・・・
・・・・・配S盤(32) (32) ’・・・・・・
温度調節器  (34) (35)・・・・・・温度検
出端(40)・・・・・・・・・・湿度発生器  (4
5)・・・・・・・・・・室温送風機(50)・・・・
・・・・・・吸気バルブ  (51)・・・・・・・・
・・排気バルブ(60)・・・・・・・・・・底  板
 (611(621・・・・・・ボー ト(63)・・
・・・・・・・・バイパス路  (64)・・・・・・
・・バルブシート(65)・・・・・・・・・・回 転
 軸  (66)・・・・・・・・・・ケーシング(6
7)(68) (69)・・0リング (70)・・・
・・・・・・・止ビス特許出厘人   伊 藤 昭 三 第1図 第2図 第3図 第5図 第6図 第7図 第8図 第9図 第10図 第11図 第13図 第14図 第15図
FIG. 1 is a plan cross-sectional view of the main body of a first practical example of the apparatus of the present invention, FIG. 2 is a cross-sectional view, and FIGS. 3 and 4 are longitudinal cross-sectional views. @Figure 5 is a plan cross-sectional view of the main body of the second embodiment of the present invention device 111,
Figure 6 is a longitudinal cross-sectional view. FIG. 7 is a plan sectional view of the main body of the third embodiment of the device of the present invention, and FIG. 8 is a cross sectional view. FIG. 9 is a plan sectional view of the main body of the device W of the present invention, the fourth embodiment, and the first
0 The figure is a cross-sectional view. Section 11 is a plan cross-sectional view of the main body of the fifth embodiment of the device of the present invention, M
Figure 12 is a longitudinal cross-sectional view. Fig. 13 is a plan view of the rotary valve of the present invention, Fig. 14 is a plan view of the rotary valve of the present invention;
The figure is a vertical view taken from ■-■ in FIG. 13. (1)・・・・・・・・・Housing (2)
・・・・・・・・・・・・Insulation material (3) (31'
(31”...Examination room (41(4) '......
...Insulation door (51(5)'...Bottom tank (
6) (6)'... High temperature tank (7) (8)...
...Blower (7) '(81"...
・Pump (9) (9)" (I2)... Heater (1
0)(+ol'...Cooler (11)...
......Cooling device 1 (14)...
...Operation door (20) ...Rotary valve (2+) (21) '(211"Discharge O (low temperature)
(22) (22) ' (22) ゛Suction port (low temperature)
(23) (23) “(23)” Discharge port (high temperature)
(24) (24) ' (24) '' Suction port (high temperature) (28)...... Drive section (3
0)・・・・・・・・・Machine room (31)・・・・・・
・・・・・・S board (32) (32) '・・・・・・
Temperature controller (34) (35) Temperature detection end (40) Humidity generator (4
5)・・・・・・Room temperature blower (50)・・・・
・・・・・・Intake valve (51)・・・・・・・・・
... Exhaust valve (60) ... Bottom plate (611 (621 ... Boat (63) ...
......Bypass path (64)...
...Valve seat (65) ...Rotation shaft (66) ...Casing (6
7) (68) (69)...0 ring (70)...
...... Stop screw patent agent Shozo Ito Fig. 1 Fig. 2 Fig. 3 Fig. 5 Fig. 6 Fig. 7 Fig. 8 Fig. 9 Fig. 10 Fig. 11 Fig. 13 Figure 14 Figure 15

Claims (1)

【特許請求の範囲】[Claims] 断熱壁体にて囲まれた箱形(又は円筒形)の一面に断熱
扉を、他の一面には回転によって通路が切換えられるロ
ータリーバルブを備えた試験室の内部に試料を定置させ
、試験室の後部(又は下部)には断熱壁体で囲まれた低
温発生部・高温発生部・必要によっては湿度発生部・等
を内設し、発生部内で調温された冷風(又は冷却液)・
熱風(又は加熱液)或は加湿蒸気・等を、発生部内に装
備された送風機(又はポンプ)で吐出、ロータリーバル
ブと連通して試験室内に循環させ、ロータリーバルブを
設定機器からの信号により切換えて、試験室内の試料を
低温・高温、或は加湿の雰囲気に、又、必要によっては
外気を導入して室温の雰囲気にさらして、試料に熱衝撃
や凍結・融解の条件を与えるよう構成したロータリーバ
ルブ使用のサーマルショックテスター。
The sample is placed inside a test chamber that is equipped with a box-shaped (or cylindrical) heat-insulating door surrounded by a heat-insulating wall, and a rotary valve that switches the passage by rotation on the other side. At the rear (or lower part) of the unit, there is a low temperature generating part, a high temperature generating part, a humidity generating part if necessary, etc. surrounded by an insulating wall, and the cool air (or cooling liquid) whose temperature is controlled inside the generating part is installed.
Hot air (or heated liquid) or humidified steam, etc. is discharged by a blower (or pump) installed in the generator, communicated with a rotary valve, and circulated within the test chamber, and the rotary valve is switched by a signal from the setting device. The test chamber was designed to subject the sample to thermal shock or freezing/thawing conditions by exposing it to a low-temperature, high-temperature, or humidified atmosphere, or, if necessary, introducing outside air and exposing it to a room-temperature atmosphere. Thermal shock tester using a rotary valve.
JP61170183A 1986-07-18 1986-07-18 Thermal shock tester using rotary valve Pending JPS6326547A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61170183A JPS6326547A (en) 1986-07-18 1986-07-18 Thermal shock tester using rotary valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61170183A JPS6326547A (en) 1986-07-18 1986-07-18 Thermal shock tester using rotary valve

Publications (1)

Publication Number Publication Date
JPS6326547A true JPS6326547A (en) 1988-02-04

Family

ID=15900224

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61170183A Pending JPS6326547A (en) 1986-07-18 1986-07-18 Thermal shock tester using rotary valve

Country Status (1)

Country Link
JP (1) JPS6326547A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108717028A (en) * 2018-05-30 2018-10-30 西南石油大学 A kind of rotating disc type low temperature impact test device
CN109012766A (en) * 2018-05-17 2018-12-18 杭州伊弗欧质量检测有限公司 High-low temperature test chamber
CN112697630A (en) * 2020-12-18 2021-04-23 西安中车永电捷力风能有限公司 Local cold and hot impact device of generator stator

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109012766A (en) * 2018-05-17 2018-12-18 杭州伊弗欧质量检测有限公司 High-low temperature test chamber
CN108717028A (en) * 2018-05-30 2018-10-30 西南石油大学 A kind of rotating disc type low temperature impact test device
CN108717028B (en) * 2018-05-30 2020-07-10 西南石油大学 Rotating disc type high-low temperature impact test device
CN112697630A (en) * 2020-12-18 2021-04-23 西安中车永电捷力风能有限公司 Local cold and hot impact device of generator stator
CN112697630B (en) * 2020-12-18 2023-06-06 西安中车永电捷力风能有限公司 Local cold and hot impact device for generator stator

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