JP2603330Y2 - Thermostat and thermostat unit - Google Patents

Description

[Detailed description of the invention]

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a thermostat and a thermostat unit, and more particularly to a technique for preventing heat from being released to the outside.

[0002]

2. Description of the Related Art When a test is performed while maintaining a high temperature in a test chamber of a thermostat, it is necessary to cool the inside after the test is completed. At this time, usually, the door of the thermostat is opened to release heat,
In this case, a large amount of heat is released in a short time to raise the ambient temperature and deteriorate the surrounding environmental condition. In addition, this method cannot quickly cool the thermostat. As a device for solving such a problem, a double heat insulating structure, a heating chamber in the inner layer and a water cooling jacket in the outer layer, and air in the heating chamber is discharged and circulated between the inner and outer layers during cooling to cool the heating chamber. There has been proposed a heating furnace that cools the air (see JP-A-5-157461). However, in this case, the device becomes complicated and large in size due to the double wall structure.

On the other hand, when a thermostat is used for burn-in or aging performed during the manufacturing process of semiconductor devices and electronic devices, a DC power supply for operating the semiconductor devices and electronic devices as samples is provided as an accessory device. A DC power supply to be generated, a driver to supply operation signals to the sample, a controller to control a series of these systems, etc. are required, and all or a part of these attached devices together with a thermostat are built in the same box, and burn-in is performed. It is formed as a device or an aging device. In such a device, the sum of the power consumed by these attached devices and the power required to maintain the temperature of the thermostat may reach several tens of kW. This power eventually turns into heat. As a result, when the inside of the box is ventilated by the fan, a large amount of heat is released to the surroundings, which deteriorates the surrounding working environment. In addition, such a rise in the surrounding temperature has an adverse effect on the burn-in device itself and the like, causing a failure.

[0004] In recent years, work environment has been regarded as important, and large-scale cooling facilities are often installed in factories. However,
Cooling facilities are arranged in spots, whereas burn-in devices and the like are usually arranged in a large number in a factory. In such a case, cooling is not sufficiently spread to the heat generated, and many places with high temperature and poor environment are locally generated. In addition, since the number of installed burn-in devices may fluctuate due to an increase in the number of burn-in devices, load fluctuations may occur in each device, etc., it is difficult to plan cooling facilities in consideration of heat generated from these devices. Further, if such heat generation is to be treated, the size of the cooling device is increased and the number of installed cooling devices is increased, so that a large amount of construction cost is required and the effective floor area ratio of the cooling equipment is reduced.

[0005]

SUMMARY OF THE INVENTION An object of the present invention is to solve the above-mentioned problems in the prior art and to provide a thermostatic oven or a thermostatic oven unit in which heat dissipation to the surrounding environment is prevented.

[0006]

SUMMARY OF THE INVENTION The present invention is to solve the above problems, the invention of claim 1, in a constant temperature bath circulating gas in the circulation path pressurized <br/> heated by the circulation path bar
And a sample chamber in which in-boards are mounted in multiple layers
The gas is introduced into one surface of the
The air duct on one side that extends
An anti-gas is extended to the opposite side to discharge the gas.
An air duct on the opposite side and the opposite side
Between the air duct on one side and the air duct on the one side
A heater in the air duct on the opposite side.
A cooling means provided along the opposite surface and supplied with a liquid heat medium, for cooling the gas; and a supply pipe system for supplying the liquid heat medium for cooling the gas to the cooling means. a discharge pipe system for discharging the heating medium from the cooling means, the supply
Provided in a pipe system to release the heat medium from the supply pipe system
A branch pipe system and an intake pipe system for introducing air into the discharge pipe system
Supply opening and closing means for opening and closing the supply pipe system;
A branch opening / closing means for opening / closing the manifold system, and opening the discharge pipe system;
A discharge opening / closing means for closing, and a suction opening / closing means for opening / closing the intake pipe system.
Air opening / closing means, the supply pipe system and the discharge by a first input signal
Opening the pipe system, closing the branch pipe system and the intake pipe system, closing the supply pipe system and the discharge pipe system with the second input signal
Open the supply so as to open the branch pipe system and the intake pipe system.
Closing means, the branch opening / closing means, the discharge opening / closing means, and the suction
Control means for controlling the air opening / closing means . The invention of claim 2 is a thermostat and an ancillary device for testing a sample to be tested in the thermostat, which generates heat and a cover that at least partially covers the thermostat and covers the ancillary device. A thermostat unit provided with a member, an air inlet and an air outlet provided in the cover member, a blowing means provided inside the cover member, and an air outlet provided in the vicinity of the air outlet to cover the exhausted air. A cooling unit for cooling to approximately the same temperature as the outside temperature of the member, and a supply unit for supplying a liquid heating medium to the cooling unit, wherein the constant temperature bath heats and circulates gas in a circulation path . A thermostatic bath, wherein the circulation path is a burn-in board;
The sample chamber in which the layers are mounted in multiple stages and the one side of the sample chamber
The surface is extended so that the gas is introduced through a perforated plate.
Air duct on one side and the opposite side of the one side
On the opposite surface, which is extended to discharge the gas
An air duct and air on the opposite side.
A heater between the duct and the air duct on one side
Having the opposite surface in the air duct on the opposite surface
Cooling means for cooling the gas, the cooling medium being supplied along with a liquid heat medium, a supply pipe system for supplying a liquid heat medium for cooling the gas to the cooling means, and the heat medium from the cooling means A discharge pipe system for discharging water and the supply pipe system
A branch pipe system for allowing the heat medium to escape from the supply pipe system
An intake pipe system for introducing air into the discharge pipe system;
Opening and closing means for opening and closing the supply pipe system, and opening the branch pipe system;
A branch opening / closing means for closing, and a drain for opening / closing the discharge pipe system.
Outlet opening and closing means, and intake opening and closing means for opening and closing the intake pipe system
When the supply pipe system and said exhaust pipe system opens the first input signal
And closing the supply pipe system and the discharge pipe system with a second input signal to close the branch pipe system and the intake pipe system.
The supply opening and closing means and the front so as to open the system and the intake pipe system.
Branch opening / closing means, said discharge opening / closing means, and said intake opening / closing means
And control means for controlling the above.

[0007]

According to the present invention , in the same gas circulation path as during heating.
And a liquid heat medium is supplied to cool the gas.
That a cooling unit, a supply pipe system and the discharge pipe system and the branch pipe system intake pipe
System, supply opening / closing means, branch opening / closing means, discharge opening / closing means, suction
Air opening / closing means and control means are provided, and the control means opens the supply pipe system and the discharge pipe system by the first input signal to open the branch pipe system and the intake pipe system.
Since each opening / closing means is controlled so as to close the pipe system, when lowering the temperature of the thermostat, for example, by giving a human operation or an operation signal of the thermostat as the first input signal, the temperature in the thermostat is reduced. The gas can be rapidly cooled by the cooling means in the gas circulation path, and the dissipation of heat to the outside can be prevented. Further, when operating the constant temperature bath, a second input signal is given to the control means so that the supply pipe system can be connected to the control means.
Close the discharge pipe system and open the branch pipe system and the intake pipe system.
By controlling each opening / closing means, the heat medium can be replaced with air and discharged from the cooling means to the branch pipe system via the discharge pipe system . As a result, even if cooling means is installed in the circulation path of the gas to be heated, the heat medium and the air are replaced.
As a result, there is no danger that the temperature rise will not be hindered and no heat loss will occur, and there is no danger that the liquid heat medium evaporates or the internal pressure of the cooling means rises. If the cooling means can be installed in the circulation path of the gas to be heated as described above, the structure of the thermostat is simplified and the size does not increase. In addition, since a liquid heat medium is used, for example, water has a higher specific gravity and specific heat than a gas, so that a small amount of heat can be obtained, and heat exchange between the gas and the liquid occurs. The heat exchange efficiency is improved, and the size of the cooling device can be reduced. As a result, an increase in the size of the thermostat is prevented.
Also, the cooling means should be connected to the air duct on the opposite side of the gas circulation path.
Inside, reducing the effective internal volume of the sample chamber
It can be secured without. In addition, the cooling means is reversed
Since it is provided along the side surface, the direction perpendicular to that surface is
Since it is in the thickness direction of the cooling means, the opposite side from the sample chamber
The gas that has passed toward the surface
In the direction of
The body flows smoothly with less passage resistance, improving its circulation
be able to.

According to the second aspect of the present invention, since the intake port, the air blowing means, and the exhaust port are provided, it is possible to take in and discharge outside air into the cover member. Since the cooling means is provided in the vicinity of the exhaust port, even if the taken-in outside air absorbs heat inside and rises in temperature, it can be cooled. In this case, the cooling means cools the discharged air to a temperature substantially equal to the temperature of the outside air, so that the external environmental temperature does not increase. Further, since the liquid heating medium is supplied to the cooling means, the size of the cooling means can be reduced. As a result, even if the cooling means is provided, the size of the thermostat unit does not increase.
In addition, the thermostat to be put into the thermostat unit is the same as that of the invention of claim 1.
Before opening the water bath, lower the internal high temperature.
Prevents the temperature inside the cover member from rising excessively
As well as preventing the cooling means in the unit from becoming large.
Can be That is, the cooling means and the unit in the thermostat
By adopting a dual cooling system with cooling means inside,
Optimizing design conditions and improving environmental sustainability
it can.

[0009]

FIG. 1 shows an entire configuration of a thermostat of an embodiment. The constant temperature bath is surrounded by a heat insulating wall 1 and contains a motor 2 inside.
a, a heater 3, a perforated plate 4 provided to form an air duct, a sample chamber 5, and a circulation path in which heated air is circulated by the blower 2. And a fin coil heat exchanger 6 as cooling means for cooling the air. When the fin coil heat exchanger 6 is provided in the circulation air passage as described above, the effective internal volume of the sample chamber 5 does not decrease.

Cooling water is supplied to the fin coil heat exchanger 6 from a water supply pipe 7 for pressurized industrial water or the like via the ports 8a and 8b of the three-way solenoid valve 8. After passing through the heat exchanger 6, the cooling water is sent to the return pipe 10 via the ports 9 b and 9 a of the three-way solenoid valve 9. In the three-way solenoid valves 8 and 9,
This is the direction of communication when energized. The port 8 c of the three-way solenoid valve 8 is connected to the drain groove 11. The inlet 9c of the three-way solenoid valve 9 is connected to an intake pipe 12 having an open end. The intake port 12 a of the intake pipe 12 is lifted to a position higher than the fin coil heat exchanger 6. When compressed air such as factory air is obtained, compressed air may be supplied from the compressed air pipe 13 to the intake pipe 12 via the solenoid valve 14 and the flow control valve 15. In this case, the solenoid valve 14 is opened when energized.

In such an apparatus, the cooling water is an example of a liquid heat medium, and the water supply pipe 7, the three-way solenoid valve 8, the three-way solenoid valve 9, the return pipe 10 and the like are provided with a supply pipe system for supplying the heat medium , a discharge pipe, and the like. You
Supply opening and closing means for opening and closing the discharge pipe system
It is an example of a discharge opening / closing means for opening / closing an outlet pipe system . Also, a three-way solenoid valve 8, a three-way solenoid valve 9, an intake pipe 12, a drain groove 11,
In the case where piping from the three-way solenoid valve 8 to the drain groove 11 and compressed air are used, a compressed air pipe 13 is additionally provided.
Solenoid valve 14, flow control valve 15, etc. are branch pipes for releasing heat medium
Open the intake pipe system and branch pipe system that introduce air into the system and exhaust pipe system.
Branch opening / closing means to close and intake opening to open / close the intake pipe system
An example of the closing means is configured. The liquid heat medium may be one that utilizes latent heat of vaporization, such as a refrigerant. A pump or the like may be used for the supply pipe system . In addition , a drain pump or the like may be used for the drain pipe system .

The supply line system and the discharge line system are opened by the first input signal.
And supply with the second input signal by closing the branch pipe system and the intake pipe system
The supply opening / closing means, the branch opening / closing means, the discharge opening / closing means and the suction pipe are closed so as to close the pipe system and the discharge pipe system and open the branch pipe system and the intake pipe system.
An electromagnetic valve controller 16 is provided as control means for controlling the air opening / closing means . The solenoid valve controller 16 has, for example, a switch 16a that is incorporated in a part of the operation unit of the thermostat main body and that supplies first and second input signals. By operating the switch 16a, the solenoid valves 8, 9 and 14 are operated. Turn on / off the power to (if fitted). However, by supplying the operating signal of the thermostat, the ON / OFF signal of the heater 3 and the like to the electromagnetic valve controller 15 as the first and second input signals, the electromagnetic valve is automatically operated, and the water supply and drainage is automated. You may do so.

With the above configuration, the thermostat is operated as follows. When the thermostat is used for burn-in or aging, when these processes are completed, the sample is cooled and then taken out of the thermostat. This is called a so-called reparative failure due to the semiconductor element in order to prevent the risk of human being burned during work, etc., and turning off the power supply and operation signal of the sample in a high temperature state within a short time This is to prevent the defective product from returning to the non-defective product status and failing to remove the defective product in the final test. Such a sample is cooled by cooling the sample chamber 5, but needs to be cooled in a short time in order to improve the operation rate. At this time, it is necessary to prevent a large amount of heat radiated from the thermostat from being radiated to the surroundings.

Therefore, when the heater 3 is turned off after the processing such as burn-in of the sample is completed, the switch 16a of the solenoid valve controller 16 is turned on. Thereby, the energization to the three-way solenoid valves 8, 9 is turned on, and the respective ports 8a, 8
The cooling water flows through the fin-coil heat exchanger 6 through communication between b, 9a, and 9b. In the constant temperature bath, an air path is formed in the forward direction in the direction of the arrow by the blower 2 for circulating hot air, so that the hot air is cooled by exchanging heat with cooling water when passing through the fin coil heat exchanger 6, and is cooled in the test chamber. The temperature in 5 drops rapidly.

Next, when the high-temperature operation is performed again in the constant temperature bath, the energization of the three-way solenoid valves 8 and 9 is turned off by the switch 16a before the temperature in the sample chamber 5 rises. Thereby, the mouth 8
a and 9a are electrically connected between the closing ports 8b and 8c and between the ports 9b and 9c, and the water in the fin coil heat exchanger 6 is naturally drained into the drain groove 11 by gravity while sucking outside air from the inlet port 12a. If the water in the heat exchanger 6 is drained in this way, 10
Boiling and pressure increase of the water in the fin coil heat exchanger 6 can be prevented at the time of high temperature operation of 0 ° C. or more, the temperature rise in the tank is not hindered, and heat loss due to heating the water is also prevented. You. The intake port 12a is located higher than the fin coil heat exchanger 6 so that the water in the heat exchanger 6 does not flow backward during drainage. On the other hand, when compressed air is obtained, in addition to the above operations, the energization of the solenoid valve 14 is turned on, compressed air is introduced into the heat exchanger 6 from the intake pipe 12, and water is forcibly drained. This eliminates the need for the intake port 12a to have a certain height or higher, and
The residual water in the heat exchanger 6 can be quickly discharged.

FIG. 2 shows the entire configuration of the thermostatic oven unit of the embodiment. The thermostat unit includes a driver board 30 and a DC power supply device 31 as an example of an attached device for testing a sample to be tested in the thermostat 20 and the thermostat, and a DC power supply 31 and at least a thermostat. A box outer shell 40 as a cover member for covering and covering the attached device, porous intake ports 41 to 43 and an exhaust port 44 provided in the box outer shell 40, and provided inside the box outer shell 40. A blower 50 as a blowing means, a fin coil heat exchanger 60 as a cooling means provided near the exhaust port 44, and a chilled water supply pipe 70 as a supplying means for supplying cold water as a liquid heating medium to the cooling means. And a cold water return pipe 71.

The thermostat 20 has a structure as shown in FIG. 1, for example. In the sample chamber 5 of the thermostat 20, burn-in boards 21 and electronic circuit boards on which a large number of semiconductor elements as samples are mounted are stacked and arranged at predetermined intervals.
These are electrically connected to the driver board 30 arranged outside the tank via the connector 22 and the relay board 23. Inside the instrumentation rack 32 disposed adjacent to the thermostat 20, a large number of controllers, display devices, and other electronic devices (not shown) are housed in addition to the DC power supply device 31.

The blower 50 and the fin coil heat exchanger 60 are mounted on the back of the instrument rack 32 as an integrated fan coil unit. Cold water supply pipes and return pipes 70, 7 for cooling the fin coil heat exchanger 60
Reference numeral 1 denotes, for example, a cold water pipe usually laid in a factory. In cooling and heating of factories, etc., cold water (about 10 ° C.) or hot water (80 to 9
(Approximately 0 ° C.) or superheated steam is produced and distributed to various parts of the factory via a pipeline to be used as a high / cold heat source. The chilled water supplied to the unit is also circulated by a chilled water producing machine (not shown) and a circulation pump, and is supplied at a temperature of, for example, about 15 ° C. Next, in the present embodiment, a water control valve 72 is provided on the return side of the cold water. The water control valve 72 is provided with a temperature-sensitive cylinder 73 in which a fluid having a large expansion rate is sealed, and is disposed on the exhaust port 44 side of the fin coil heat exchanger 60 so that the temperature of the discharged air is constant. The amount of circulating cold water is adjusted so that As the liquid heat medium, in addition to such cold water, industrial water, a refrigerant utilizing latent heat of evaporation, or the like can be used.

Although not shown, intake ports 41 to 43
An appropriate number is provided at an appropriate position in addition to the one shown in FIG. The intake port, the blower 50, and the exhaust port 44 are provided at positions related to each other so that the air flow formed by these components well absorbs internal heat generation. As a result, in this embodiment, an airflow as indicated by an arrow is obtained.

In such a device, the heat quantity Q ₁ from the electronic devices such as the driver board 30, the DC power supply device 31, the relay board 23, and a controller (not shown), and the constant temperature The amount of heat Q ₂ leaking from the tank 20 through the heat insulating wall 1 is generated. Therefore, the fin coil heat exchanger 60 takes approximately the same amount of heat as the calorific value Q ₁ + Q ₂ from the air blown by the air blower 50,
It has a heat exchange capacity enough to cool until the temperature of the outlet air of the exhaust port 44 becomes substantially equal to the external temperature. However, through insulating wall 1 of the thermostatic oven which is not enclosed in a box outside the body shell 40, the heat quantity Q ₃ from leaking to the outside, the outside temperature increases when left by this heat. Therefore, in order not to give exactly the thermal effects in the external environment, removal also heat corresponding to Q ₃ in the fin coil heat exchanger 60, the exhaust air for example be the outside temperature -1 ° about C desirable.
In the above description, an example in which the thermostat 20 is partially covered with the box outer shell 40 has been described, but the whole may be covered. In that case, the size of the entire device increases, but the effect of heat radiation on the external environment is almost eliminated.

In the above-mentioned constant-temperature bath units, since the small-capacity fin coil heat exchanger 60 to which a liquid heat medium is supplied is incorporated in each unit, the size is reduced. Therefore, the size of the thermostat unit does not increase. On the other hand, in the oven unit,
It balances the heat balance by itself and does not release the generated heat to the outside. Therefore, in a factory where many such thermostat units are provided, when an air conditioner is provided, its capacity,
The number of units can be reduced, the environment of the entire factory can be maintained in a well-balanced state without air-conditioning unevenness, and the area occupied by the entire air-conditioning facility in the factory can be reduced. In addition, according to such a constant-temperature bath unit, since a device requiring a large space such as a mechanical refrigeration device is not mounted, the unit becomes compact, and maintenance for failure or the like of the refrigeration device becomes unnecessary. In addition, even when a chilled water producing machine or a circulation pump (not shown) breaks down and the supply of chilled water is cut off, by operating the blower 50, the amount of air required for cooling the heat-generating equipment is secured. Testing is possible.

It is desirable that the thermostat 20 be provided with a fin coil heat exchanger 6 and cooling water supply / discharge equipment as shown in FIG. In that case, not only during the high temperature test, but also when cooling the sample after the end of the test,
There is no dissipation of heat to the outside, and a good external environment can always be maintained.

[0023]

As described above, according to the present invention, according to the first aspect of the present invention, the inside of the tank is quickly cooled to prevent heat from being radiated outside without increasing the size or complexity of the apparatus. ,
The external environment can be favorably maintained. In addition, since the heat medium can be discharged from the cooling means during the operation of the constant temperature bath, it does not hinder a rise in the temperature inside the bath and can prevent evaporation of the heat medium.

According to the second aspect of the present invention, it is possible to prevent heat radiation to the external environment without increasing the size of the device. As a result, when an air conditioner is provided in a factory, the capacity and number of the air conditioners can be reduced, air conditioning unevenness can be eliminated, the area occupied by the entire air conditioner in the factory can be reduced, and the effective area can be increased. . Further, even in the case of adding a constant temperature bath unit, there is no need to add a cooling facility.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram showing an entire configuration of a thermostat of an embodiment.

FIG. 2 is an explanatory diagram showing an overall configuration of a thermostat unit of the embodiment.

[Description of Signs] 3 Heater 4 Perforated plate 5 Sample chamber 6 Fin coil heat exchanger (cooling means) 7 Water supply pipe (supply pipe system ) 8, 9 Three-way solenoid valve (supply pipe system , discharge pipe system, branch pipe)
System, an intake pipe system, the supply opening closing means, the branch-off means, the discharge switching means, the intake opening and closing means) 10 return pipe (discharge pipe system) 12 intake pipe (intake pipe system) 16 solenoid valve controller (control means) 20 thermostatic Vessel 21 Burn-in board 30 Driver board (Attached device) 31 DC power supply (Attached device) 40 Box outer shell (Cover member) 41 to 43 Intake port 44 Exhaust port 50 Blower (Blower means) 60 Fin coil heat exchanger (Cooling) Means) 70 Cold water supply pipe (supply means) 71 Cold water return pipe (supply means)

──────────────────────────────────────────────────続 き Continuation of the front page (56) References JP-A-5-157461 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) F27B 17/00

Claims (2)

(57) [Scope of request for utility model registration] 1. A thermostat for heating and circulating a gas in a circulation path , wherein the circulation path has burn-in boards stacked and mounted in multiple stages.
Sample chamber and one side surface of the sample chamber through a perforated plate.
The air duct on one side is extended so that gas can be introduced.
And the gas is discharged to the surface opposite to the one side.
And an air duct on the opposite side that is extended
And the air duct on the opposite side and the one side
And a heater between the air duct and the opposite surface.
A liquid liquid is provided along the opposite surface in the air duct.
Cooling means to which the heat medium is supplied to cool the gas, a supply pipe system for supplying a liquid heat medium for cooling the gas to the cooling means, and a discharge pipe system for discharging the heat medium from the cooling means , Provided in the supply pipe system, from the supply pipe system
Air to the branch pipe system for releasing the heat medium and the exhaust pipe system.
The intake pipe system to be introduced and the supply opening to open and close the supply pipe system
Closing means, branch opening and closing means for opening and closing the branch pipe system,
Discharge opening and closing means for opening and closing the discharge pipe system, and the intake pipe
An intake opening / closing means for opening and closing the system, and opening the supply pipe system and the discharge pipe system by a first input signal to open the branch pipe system and the suction pipe system.
The supply opening / closing means and the branch opening / closing so as to close a trachea system and close the supply piping system and the exhaust piping system with a second input signal to open the branch piping system and the intake piping system. Means and said discharge
Control means for controlling the opening and closing means and the intake opening and closing means ,
A thermostat comprising: 2. A thermostat and an attached device for testing a sample to be tested in the thermostat, which generates heat, and a cover member which covers at least the thermostat and partially covers the attached device. In the thermostat unit provided, an air inlet and an air outlet provided in the cover member, a blowing means provided inside the cover member, and air discharged near the air outlet provided by the cover member. A cooling means for cooling to a temperature substantially equal to the external temperature; and a supply means for supplying a liquid heating medium to the cooling means, wherein the thermostatic chamber heats and circulates gas in a circulation path. In the circulation path, burn-in boards are stacked and mounted in multiple stages.
Sample chamber and one side surface of the sample chamber through a perforated plate.
The air duct on one side is extended so that gas can be introduced.
And the gas is discharged to the surface opposite to the one side.
And an air duct on the opposite side that is extended
And the air duct on the opposite side and the one side
And a heater between the air duct and the opposite surface.
A liquid liquid is provided along the opposite surface in the air duct.
Cooling means to which the heat medium is supplied to cool the gas, a supply pipe system for supplying a liquid heat medium for cooling the gas to the cooling means, and a discharge pipe system for discharging the heat medium from the cooling means , Provided in the supply pipe system, from the supply pipe system
Air to the branch pipe system for releasing the heat medium and the exhaust pipe system.
The intake pipe system to be introduced and the supply opening to open and close the supply pipe system
Closing means, branch opening and closing means for opening and closing the branch pipe system,
Discharge opening and closing means for opening and closing the discharge pipe system, and the intake pipe
An intake opening / closing means for opening and closing the system, and opening the supply pipe system and the discharge pipe system by a first input signal to open the branch pipe system and the suction pipe system.
The supply opening / closing means and the branch opening / closing so as to close a trachea system and close the supply piping system and the exhaust piping system with a second input signal to open the branch piping system and the intake piping system. Means and said discharge
Control means for controlling the opening and closing means and the intake opening and closing means ,
A thermostatic oven unit characterized by having