JPH03218844A - Manufacture of ink jet recording head - Google Patents

Abstract

PURPOSE:To prevent bubbles from being entrained during manufacturing process by coating a base with an active energy ray curable material and junctioning a lid plate and the base together in a decompressed atmosphere. CONSTITUTION:An active energy ray curable material layer 2 is laminated on a base having a formed solid layer 8 in a decompressed atmosphere so that the solid layer 8 is covered by the layer 2. A lid plate 4 is junctioned to the active energy ray curable material layer 2 of the base 1 in a decompressed atmosphere. A recessed part 5 for obtaining a specified liquid chamber volume is provided in an area for forming a common liquid chamber, if necessary. Thus a laminated body consisting of the base 1, the solid layer 8, the active energy ray curable material layer 2 and the lid plate 4 laminated sequentially. A mask 52 is laminated on the lid plate 4 which allows transmission of active energy ray, then an active energy ray 11 is projected and an active energy ray curable material in the irradiated area becomes cured into a curable resin layer. Subsequently, the base 1 and the lid plate 4 are junctioned together. A liquid flow path and a common liquid chamber are formed by removing the solid layer 8 and the active energy ray curable material 2 which is not yet cured from the laminated body.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of manufacturing an inkjet recording head for performing recording by discharging recording droplets.

[Prior art and problems to be solved by the invention] An inkjet recording head applied to an inkjet recording method (liquid jet recording method) has fine recording liquid ejection ports (1M).
(hereinafter referred to as an orifice), a liquid flow path, and a liquid ejection energy generating section provided in a part of the liquid flow path. Conventionally, as a method for manufacturing such an inkjet recording head, for example, a plate made of glass or metal is used, fine grooves are formed on this plate by processing means such as cutting or etching, and then a plate with these grooves formed is used. A method is known in which a liquid flow path or the like is formed by joining the plate with another appropriate plate.

However, in inkjet recording heads manufactured using such conventional manufacturing methods, the inner wall surface of the liquid flow path formed by cutting may be too rough, or the liquid flow path may be distorted due to the difference in etching rate. However, there is a problem in that it is difficult to obtain a liquid flow path with constant resistance, and the recording liquid ejection characteristics of the inkjet recording head after manufacture tend to vary.

In addition, there was also the problem that the plate was easily chipped or cracked during cutting, resulting in poor manufacturing yield.

Further, when etching is performed, there is a disadvantage that there are many manufacturing steps, leading to an increase in manufacturing costs.

Furthermore, a problem common to the above conventional methods is that the grooved plate forming the liquid flow path and the drive element such as a piezoelectric element that generates ejection energy to eject recording droplets or an electrothermal transducer element are required. When bonding the lid plate with
There was also the problem that alignment of these plates was difficult and mass production was lacking.

In contrast to the conventional manufacturing method described above, a manufacturing method as shown in FIG. 4 has been used.

As shown in FIG. 4(a), an energy generating element 7 such as an electrothermal transducer is provided on the substrate l, and as shown in FIG. 4(b), the substrate is 1, an orifice opening 13, a liquid channel groove 14 communicating with the opening 13, and a common liquid chamber groove 15 common to each liquid channel groove are formed, and then as shown in FIG. , the cover plate 4 on which the liquid supply port 6 is formed and the base body 1 are joined via the adhesive layer 3.

This manufacturing method is relatively effective when the recording head is small, but when the recording head is large, for example, the orifices are arranged at a predetermined pitch over a length corresponding to the recording width of the recording medium. In the case of a so-called full multi-type recording head, the base or cover plate may be warped,
The surface precision of the bonding surface, such as surface roughness, deteriorated, making it difficult to bond the base and the lid plate itself.

Furthermore, since film formation and patterning steps are introduced into the manufacturing process of the substrate, considerable surface precision can be achieved, but the substrate is likely to warp due to the internal stress of the deposited film. Furthermore, in order to improve the surface precision of the lid plate, polishing is required, which poses a problem in that it becomes expensive.

The manufacturing method shown in FIG. 5 shows another conventional example of the manufacturing method, and includes the steps shown below.

(1) Dissolve and remove along the shape of the area where the liquid flow path is to be formed and the area where the common liquid chamber is to be formed on the base body 1 provided with the element 7 for generating energy used to discharge the liquid. Step of providing solid layer 8 (Fig. 5(a))
).

(2) A step of coating active energy ray-curable material 2 on base 1 provided with solid layer 8 (FIG. 5(b)).

(3) A step of covering the part of the active energy ray curable material 2 where the common liquid chamber is to be formed with the mask 12, and irradiating the part other than this part with the active energy ray 1l to cure it (
Figure 5(b)).

(4) Step of dissolving and removing the uncured portion of the active energy ray curable material 2 to which the mask 12 has been applied to form the common liquid chamber groove 15 (FIG. 5(C)).

(5) Step of bonding the lid plate 4 onto the cured portion of the active energy ray-curable material 2 with the adhesive 3 to form the common liquid chamber 9 (FIG. 5(d)).

(6) Step of dissolving and removing the solid layer 8 provided on the substrate l (FIG. 5(d)).

However, this manufacturing method had the following problems.

Conventionally, all steps were performed at atmospheric pressure, which caused air bubbles to get mixed in between the substrate and the liquid active energy ray curable material or inside the liquid active energy ray curable material in step (2). There were times when I ended up.

Further, in step (5), air bubbles may also be mixed in when bonding the lid plate. The inclusion of such bubbles causes deformation of the liquid flow path, which seriously impedes the droplet ejection performance. In addition, the base body and the lid plate may peel off due to the expansion of the mixed air bubbles.

Furthermore, in the above manufacturing method, when bonding the lid plate, since the active energy ray-curable material has already been cured, it is necessary to significantly improve the warpage and surface accuracy of the lid plate in advance. For this reason, as mentioned above, the price of the cover plate has increased.

Another conventional example is a method of injecting liquid crystal under reduced pressure, which is a method often used in manufacturing liquid crystal displays. Using this as a reference, a method is also being considered in which the base and the cover plate are first bonded, the inside of the base is reduced in pressure, and a liquid active energy ray-curable material is injected.

However, in the case of this method (11), dust, foreign matter, etc. are likely to enter the liquid flow path when the base and the lid plate are joined.

(2) A process of sealing around the base and lid plate is required.

(3) A considerable amount of active energy ray-curable material is clogged in the part that will become the common liquid chamber, and when removing the same uncured material from the common liquid chamber in the subsequent process, it is removed because a considerable amount is clogged. However, a lot of the same material is wasted. There were some problems.

[Purpose of the invention]

The present invention has been made to solve the above-mentioned problems, and by applying an active energy ray-curable material to a substrate and bonding the lid plate and the substrate in a reduced pressure atmosphere, it is possible to reduce the pressure during the manufacturing process. This prevents the inclusion of air bubbles in the process, prevents the influence of air bubbles on the ejection characteristics of recording droplets, and prevents the substrate from peeling off from the cover plate.Furthermore, it does not take into account warping of the substrate or cover plate, and surface precision. It is an object of the present invention to provide a method for manufacturing an inkjet recording head that does not require the above.

[Means to solve the problem]

To this end, the present invention provides a method for manufacturing an inkjet recording head that includes an ejection energy generating element in a part of the liquid flow path and uses the ejection energy generated by the element to eject recording droplets and perform recording. , a step of providing a solid layer that can be dissolved and removed in a pattern corresponding to at least the liquid flow path on a substrate on which the element is disposed; applying an active energy ray-curable material under reduced pressure on the substrate provided with the solid layer; a step of coating in an atmosphere, a step of bonding the substrate coated with the active energy ray curable material and a lid plate in a reduced pressure atmosphere, and a step of irradiating the active energy ray curable material to cure the active energy ray curable material. The method is characterized by comprising a step of curing at least a portion of the coated region constituting the liquid flow path, and a step of removing the solid layer in a pattern corresponding to the liquid flow path.

[For use] According to the above configuration, since the coating of the active energy ray-curable material on the substrate and the bonding of the cover plate and the substrate are performed in a reduced pressure atmosphere, it is possible to prevent air bubbles from being mixed in during the manufacturing process. .

In addition, since the bonding between the cover plate and the base is performed using the active energy ray-curable material before it is cured, warpage and poor surface accuracy of the cover plate and the base are alleviated, making it possible to bond easily. can.

〔Example〕

Embodiments of the present invention will be described in detail below with reference to the drawings.

FIGS. 1(a) to 1(f) show a method of manufacturing an inkjet journal head according to an embodiment of the present invention in order of steps.

Step (a) (FIG. 1(a)) The substrate 1 functions as part of the liquid flow path and common liquid chamber constituent material, and also serves as a support when laminating a solid layer and an active energy ray-curable material, which will be described later. It can be used without any particular limitations on its shape, material, etc.

Liquid ejection energy generating elements 7 such as electrothermal transducers or piezoelectric elements are arranged on the base 1 in correspondence with the number of ejection ports (hereinafter referred to as orifices). The liquid ejection energy generating element 7 applies ejection energy to the recording liquid to eject the recording liquid, thereby performing printing.

For example, when an electrothermal conversion element is used as the liquid ejection energy generating element 7, this element generates bubbles in the recording liquid by heating the nearby recording liquid, and as the bubbles change, Ejection is performed by pressure fluctuations in the recording liquid. Furthermore, for example, when a piezoelectric element is used, ejection is performed by pressure fluctuations in the recording liquid due to mechanical vibrations of the element.

Incidentally, these elements 7 are connected to electrodes for manual control signals (not shown) for operating these elements. In addition, various functional layers such as a protective layer are generally provided for the purpose of improving the durability of these ejection energy generating elements, but of course there is no problem in providing such functional layers in the present invention. .

Next, a solid layer 8 shown in FIG. 1(a) is laminated along the shape of the liquid flow path forming area on the base body 1 including the liquid ejection energy generating element 7 and the common liquid chamber forming area communicating therewith. do.

In addition, in the present invention, it is not necessarily necessary to provide a solid layer at both the liquid flow path and the common liquid chamber formation site.
The solid layer may be provided at least in the liquid flow path forming region.

Further, although the explanation will be complicated, as shown in FIG. 1(c) etc., the cover plate 4 is configured in advance to have a recess 5 and two recording liquid supply ports 6 in the area where the liquid chamber is planned to be formed. There is.

The solid layer 8 is removed after passing through each process described below, and a liquid flow path and a common liquid chamber are formed in the removed portion. of course,
The shapes of the liquid flow path and the common liquid chamber can be made into desired shapes, and the solid layer 8 can also be shaped according to the shapes of the liquid flow path and the common liquid chamber. Incidentally, the common liquid chamber is communicated with each of the liquid flow paths so that recording liquid can be supplied to each of the liquid flow paths.

Specific examples of materials and means used to construct such a homogeneous layer 8 include those listed below.

■ Using a photosensitive dry film, a solid layer is formed according to a so-called dry film image forming process.

(2) A solvent-soluble polymer layer and a photoresist layer of desired thickness are sequentially laminated on the substrate 1, and after patterning of the photoresist layer, the solvent-soluble polymer layer is selectively removed.

■ Print resin.

As for the photosensitive dry film listed in (2), both positive type and negative type can be used. In the case of a dry film or a negative type dry film, a negative type dry film which is photopolymerizable but can be dissolved or peeled off with methylene chloride or a strong alkali is suitable.

Specifically, as a positive dry film, for example, r
OZATEc R225J [Product name, Hoechst Japan Co., Ltd.], etc., and as negative dry films, rOZATE (: T Series J [Product name, Hoechst Japan Co., Ltd.], rPHOTEc PIT series) [Product name, Hitachi Chemical Co., Ltd.] Co., Ltd.], rRIsTON
J [Product name: Du Bonn de Nemours Col
etc. are used.

Of course, not only these commercially available materials, but also resin compositions that act positively, such as resin compositions mainly composed of naphquinone diad derivatives and novolac type phenolic resins,
and negatively acting resin compositions, such as compositions mainly consisting of an acrylic oligomer having an acrylic ester as a reactive group, a thermoplastic polymer compound, and a sensitizer, or a composition consisting of a polythiol, a polyene compound, and a sensitizer. etc. can be used similarly.

As the solvent-soluble polymer mentioned in (2), any polymer compound can be used as long as it has a solvent that dissolves it and can be coated to form a film. The photoresist layers that can be used here are typically positive-type liquid photoresists made of novolac-type phenolic resin and naphthoquinone diazide, negative-type liquid photoresists made of polyvinyl cinnamate, and negative-type liquid photoresists made of cyclized rubber and bisazide. Examples include photoresists, negative photosensitive dry films, thermosetting and ultraviolet curing inks, and the like.

Materials for forming solid layers using the printing methods listed in (2) include, for example, flat plate inks used in evaporative drying, thermosetting, or ultraviolet curing drying methods;
Screen ink, transfer type resin, etc. are used.

Among the above-mentioned material groups, from the viewpoint of processing accuracy, ease of removal, workability, etc., method using a photosensitive dry film is preferable. is particularly preferred. In other words, positive-type photosensitive materials have, for example, better resolution than negative-type photosensitive materials, relief patterns with vertical and smooth sidewall surfaces, or tapered or inverted tapered cross-sectional shapes that are easily formed. 《It has the characteristic of being able to flow easily, making it ideal for forming liquid flow paths.

It also has the advantage of being able to dissolve and remove the relief pattern with a developer or an organic solvent, making it preferable as the solid layer forming material in the present invention. In particular, for example, the above-mentioned positive-type photosensitive material using naphquinone diazide and novolac-type phenolic resin can be completely dissolved in a weak alkaline aqueous solution or alcohol, so it can be easily dissolved without causing any damage to the ejection energy-generating element. Removal during the process is also extremely rapid. Among such positive type photosensitive materials, those in dry film form are
This is the most preferable material because it allows a film with a thickness of 0 μm to be obtained.

Step (b) (FIG. 1(b)) On the substrate 1 on which the solid layer 8 is formed, the active energy ray curable material layer 2 is laminated in a reduced pressure atmosphere so as to cover the solid layer 8.

As the active energy ray-curable material, any material that can cover the above-mentioned solid layer can be suitably used.
This material forms the liquid flow path and common liquid chamber and serves as the structural material of the inkjet recording head, so it has excellent adhesion to the substrate, mechanical strength, dimensional stability, and corrosion resistance. It is preferable to select and use. Furthermore, it is necessary to have the property of not corroding the solid layer. In addition, since active energy ray-curable materials are used in a reduced pressure atmosphere, if the material contains a solvent, it will foam and cause defects in the liquid flow path. There needs to be.

Specifically, such materials are suitable as liquid materials that are curable with active energy rays such as ultraviolet rays and electron beams, and among them, epoxy resins, acrylic resins,
Diglycol dialkyl carbonate resin, unsaturated polyester resin, polyurethane resin, polyimide resin, melamine resin, phenol resin, urea resin, etc. are used.

In particular, epoxy resins that can initiate cationic polymerization with light, acrylic oligomers with acrylic ester groups that can be radically polymerized with light, photoaddition polymerizable resins using polythiol and polyene, unsaturated cycloacetic resins, etc. It has a high polymerization rate and excellent physical properties, making it suitable as a structural material.

Lamination method of active energy ray curable material 2 and lid plate 4
The step of joining the substrate 1 to the substrate 1 is carried out using an apparatus as described below with reference to FIG.

Step (C) (FIG. 1(C)) Next, the cover plate 4 is bonded onto the active energy ray-curable material layer 2 of the base 1 in a reduced pressure atmosphere.

Note that the pressure of the reduced pressure atmosphere described in FIGS. 1(b) and 1(C) is preferably 10 Torr or less. This is because, at this pressure, even if microbubbles are introduced in both processes, when the pressure is returned to atmospheric pressure, the microbubbles will be small enough not to cause defects. Moreover, if the air bubbles are kept in the reduced pressure atmosphere for a certain period of time, they will burst and disappear.

At this time, as described above, the recess 5 for obtaining a desired liquid chamber volume is provided in the common liquid chamber forming portion of the cover plate 4 as necessary. Since the cover plate 4 is irradiated with active energy rays from the cover plate 4 side, it is necessary that the cover plate 4 is transparent to active energy rays. Further, the lid plate 4 is provided with a liquid supply port 6 for supplying recording liquid in advance.

In addition, when joining the cover plate 4, in order to make the active energy ray-curable material layer have the required thickness, for example, a spacer may be provided between the cover plate and the base, or a convex portion may be formed at the end of the cover plate 4. You may take measures such as providing a

In this way, a laminate is obtained in which the substrate 1, the solid layer 8, the active energy ray-curable material layer 2, and the lid plate 4 are sequentially laminated.

Step (d) (FIG. 1(d)) A mask 52 is laminated on the lid plate 4 that is transparent to active energy rays so as to shield the area where the common liquid chamber is to be formed from the active energy rays 11. Active energy rays 11 are irradiated from above the mask 52 .

By irradiating the active energy rays l1, the active energy ray-curable material in the irradiated portion is cured to form a cured resin layer, and the base 1 and the cover plate 4 are also bonded together by this curing.

As active energy rays, ultraviolet rays, electron beams, visible light, etc. can be used, but ultraviolet rays and visible rays are preferable because the exposure is performed through the cover plate 4, and ultraviolet rays are most suitable in terms of polymerization rate. .

As the ultraviolet ray source, a light source with high energy density such as a high-pressure mercury lamp, an ultra-high-pressure mercury lamp, a halogen lamp, a xenon lamp, a metal halide lamp, and a carbon arc is preferably used. The more parallel the light rays from the light source, the less heat it generates, the more accurate the processing can be. If available, it is generally available.

Examples of masks against active energy rays, especially when using ultraviolet rays or visible rays, include metal masks, silver salt emulsion masks, diazo masks, etc. In addition, black ink may simply be printed on the common liquid chamber forming area.
You may also use a method such as pasting a sticker.

Next, if necessary, for example, if the orifice end face is not exposed, the laminate that has been cured by the single line of active energy irradiation is cut at a desired position using a guising saw using a diamond blade to expose the orifice end face. let

However, such a cutting operation is not necessarily necessary for carrying out the present invention. For example, when a liquid curable material is used and a mold is used when laminating the material, the orifice tip is closed and covered. Cutting is not necessary if the orifice tip is molded so that it does not break and the orifice tip is smooth.

Step (e). (f) (Figure 1 (e). (f)
) Then, the active energy ray irradiation is completed. The solid layer 8 and the uncured active energy ray curable material 2, that is, the active energy ray curable material in the common liquid chamber portion are removed from the completed laminate to form a liquid flow path and a common liquid chamber.

In this example, the active energy ray curable material in the common liquid chamber formation area is not irradiated with active energy rays and is removed uncured, so the layer thickness of the active energy ray curable material laminated on the solid layer is By arbitrarily controlling
It is possible to freely form the liquid chamber regardless of the liquid flow path.

The means for removing the solid layer 8 and the uncured active energy ray curable material is not particularly limited, but specifically, for example, the solid layer 8 and the uncured active energy ray curable material may be dissolved or swollen. Alternatively, methods such as immersion in a peeling liquid and the like are preferred. At this time, ultrasonic treatment, spraying, heating,
Stirring, shaking, pressurized circulation, and other methods of promoting removal may also be used.

Examples of the liquid used for the above removal means include halogen-containing hydrocarbons, ketones, esters, aromatic hydrocarbons, ethers, alcohols, N-methylpyrrolidone, dimethylformamide, phenol, water, water containing acids or alkalis, etc. can be mentioned. A surfactant may be added to these liquids if necessary.

FIG. 1(f) shows the state after the solid layer 8 and the uncured active energy ray-curable material have been removed as described above, but in the case of this example, the solid layer 8 and The uncured active energy ray-curable material is immersed in a liquid that dissolves it, and is dissolved and removed through the orifice of the head and the liquid supply port 6, as shown by the arrow in FIG. 1(e).

Note that after completing each of the above steps, the tip of the orifice may be cut, polished, or smoothed as necessary in order to optimize the distance between the liquid ejection energy generating element 7 and the orifice 13.

FIG. 2 shows step (b) of the above manufacturing method. FIG. 3(c) is a schematic perspective view of a device that enables the process.

In FIG. 2, 20 is a vacuum chamber, 21 is a dispenser head for applying liquid active energy ray-curable material 2 to substrate 1, and has a built-in valve for controlling ON/OFF of the application. 22 is a storage tank for the village fee 2, which is connected to the dispenser head 2 via a tube etc.
The village fee 2 is pumped to l.

In addition, as a method of coating the substrate 1 with the coating material 2, in addition to the coating method using the dispenser head 2l, an applicator, curtain coater, roll coater, spray coater, etc.
There are methods such as Subinko Yu.

First, after reaching a set pressure, the substrate 1 is sent under the dispenser head 2l, and a liquid active energy ray-curable material 2 is applied thereto. At this time, the relative positioning of the dispenser head 2l and the base 1 is determined by the ball screw 3l and the motor 32 that rotationally drives it in the X direction, and the ball screw 33 and the motor (not shown) that rotationally drives it in the Y direction.
It is done by.

After the active energy ray-curable material 2 is applied to a predetermined position on the base 1, it is sent to a joining mechanism section 34 for joining the base 1 and the cover plate 4.

In the joining mechanism section 34 , the lid plate 4 is chucked by a clamp member 36 and moved up and down by a cylinder 35 . Furthermore, if the cover plate 4 is small, it may be attached to a jig or the like and moved up and down.

After the bonding between the base 1 and the cover plate 4 is completed in the bonding mechanism section 34, the pressure is returned to atmospheric pressure and the pressure is returned to the step (d), where the device is moved to the apparatus for irradiating active energy rays as described above.

As mentioned above, the degree of vacuum (pressure) in the vacuum chamber is preferably 10 Torr or less, and the active energy ray-curable material 2, the solid layer 8, and other various film materials on the substrate 1 or materials in the vacuum chamber are gasified. As long as the degree of vacuum does not cause such deterioration, the higher the degree of vacuum, the greater the effect on bubble inclusion.

FIGS. 3(a) to 3(e) relate to other embodiments of the present invention,
A method for manufacturing an inkjet recording head of a type in which ejection ports are provided in a direction perpendicular to a base is shown in the order of steps.

In step (a), similarly to FIG. 1(a), a solid layer 8 that can be dissolved and removed in a subsequent step is provided on a substrate 1 provided with a recording liquid supply port 6, an ejection energy generating element 7, etc. Figure 3(a)).

In step (b), similarly to FIG. 1(b), liquid active energy ray-curable material 2 is coated in a reduced pressure atmosphere (FIG. 3(b)).

In step (c), a cover plate 4 provided with an orifice 51 for ejecting recording droplets is bonded onto the coating material 2 in a reduced pressure atmosphere. However, the cover plate 4 is made of a material through which active energy rays can pass (FIG. 3(C)).

In step (d), active energy rays that harden the active energy ray curable material 2 are irradiated through the mask 52 to harden the active energy ray curable material in the areas hit by the active energy rays, and the liquid flow path is form a wall. The discharge port portion is essential as a portion that blocks active energy rays, and the flow path becomes wider in the height direction by blocking the liquid flow path portion (FIG. 3(d)).

In step (e), the uncured active energy ray-curable material 2 and the solid layer 8 are dissolved and removed. For example, by immersing the substrate in a dissolving solution and applying an external force such as ultrasonic waves, the dissolution and removal time can be shortened (FIG. 3(e)).

〔Effect of the invention】

As explained above, according to the present invention, since the application of the active energy ray-curable material to the substrate and the bonding of the cover plate and the substrate are performed in a reduced pressure atmosphere, it is possible to prevent air bubbles from being mixed in during the manufacturing process.

In addition, since the bonding between the cover plate and the base is performed using the active energy ray-curable material before it is cured, warpage and poor surface accuracy of the cover plate and the base are alleviated, making it possible to bond easily. can.

As a result, defects in the liquid flow path were eliminated because there was no inclusion of air bubbles.

In addition, the peeling of the base and lid plate due to volume expansion due to temperature changes of air bubbles has disappeared.

Further, even if the substrate or the lid is warped or has low surface accuracy, it can be easily joined, and as a result, an inexpensive recording head can be obtained.

[Brief explanation of drawings]

1(a) to (f) are schematic perspective views showing a method for manufacturing an inkjet recording head according to an embodiment of the present invention, and FIG. 2 is a schematic perspective view showing a method for manufacturing an inkjet recording head according to an embodiment of the present invention. A schematic perspective view of the apparatus used; FIGS. 3(a) to (e) are schematic perspective views showing a method of manufacturing an inkjet recording head according to another embodiment of the present invention; FIGS. 4(a) to ( c) and FIGS. 5(a) to 5(d) are schematic perspective views showing a conventional method of manufacturing an inkjet recording head. DESCRIPTION OF SYMBOLS 1...Base body, 2...Liquid flow path constituent member (active energy ray curable material), 4...Lid plate, 8...Solid layer, 9...Common liquid chamber, 13. 51... Orifice, 20... Vacuum chamber 2l... Dispenser head, 34... Joining mechanism section, 52... Mask. Figure 4 Figure 1 (a 6 Figure 3)

Claims (2)

[Claims] (1) A part of the liquid flow path has a discharge energy generating element,
In a method of manufacturing an inkjet recording head for performing recording by ejecting recording droplets using ejection energy generated by the element, a pattern corresponding to at least the liquid flow path is formed on a substrate on which the element is disposed, a step of providing a solid layer, a step of coating an active energy ray curable material in a reduced pressure atmosphere on a substrate provided with the solid layer, a step of coating the substrate coated with the active energy ray curable material and a lid plate. a step of bonding in a reduced pressure atmosphere, a step of curing at least a portion forming the liquid flow path of a portion covered with the active energy ray-curable material by irradiating the active energy ray, and a step of curing the portion forming the liquid flow path by irradiating the active energy ray curable material. A method for manufacturing an inkjet recording head, comprising the step of removing the solid layer in a corresponding pattern. (2) The method for manufacturing an inkjet recording head according to claim 1, wherein the active energy ray-curable material is a solvent-free material.