JP2710983B2 - Method for manufacturing liquid jet recording head - Google Patents

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a liquid jet recording head for generating small droplets of a recording liquid (recording liquid) used in a liquid jet recording system.

[Conventional technology]

2. Description of the Related Art A liquid jet recording head applied to a liquid jet recording system (liquid jet recording system) generally has a discharge port (hereinafter, referred to as an orifice) for a fine recording liquid, a liquid path, and a liquid discharge provided in a part of the liquid path. An energy generating unit.
Conventionally, as a method of producing such a liquid jet recording head, for example, using a plate of glass or metal, after forming a fine groove in the plate by processing means such as cutting or etching, the groove was formed It is known to join a plate with another suitable plate to form a fluid path.

However, in the liquid jet recording head prepared by such a conventional method, the roughness of the inner wall of the liquid path to be cut is too large, or the liquid path is distorted due to a difference in etching rate, and the flow path resistance is reduced. There is a problem that it is difficult to obtain a constant liquid path, and the recording liquid ejection characteristics of the manufactured liquid jet recording head tend to vary. In addition, there is a disadvantage that the plate is liable to be chipped or cracked at the time of cutting, and the production yield is poor.

In addition, when etching is performed, there are disadvantages in that the number of manufacturing steps is large and the manufacturing cost is increased.

On the other hand, as a drawback common to the above-mentioned conventional methods, a driving element such as a piezoelectric element or an electrothermal transducer for generating a discharge energy for discharging a recording liquid droplet is provided on a grooved plate having a liquid path formed therein. When bonding the cover plate, there is a problem that it is difficult to align these plates and lack mass productivity.

Further, the liquid jet recording head is usually used under a usage environment with a recording liquid (generally, an ink liquid mainly composed of water and often not neutral, or an ink liquid mainly composed of an organic solvent). Always in contact. Therefore, the head structure material constituting the liquid jet recording head does not cause a decrease in strength due to the influence of the recording liquid, and conversely, harmful components such as reducing the suitability of the recording liquid in the recording liquid. However, in the above-mentioned conventional method, it was not always possible to select a material suitable for these purposes, due to restrictions such as a processing method.

As a technique for solving the problems of the conventional method,
The present applicant has previously filed a method of manufacturing a liquid jet recording head using an active energy ray-curable material as a liquid path wall constituting member (Japanese Patent Application No. 59-274689).

However, this method has not always been satisfactory in making the liquid chamber freely, such as the size and height of the liquid chamber communicating with the liquid path. In particular, in a multi-array type liquid jet recording head in which orifices and liquid paths communicating with the orifices are arranged at a high density, and simultaneously discharges over the entire width of the recording paper, the liquid supply speed is increased and the recording is performed. It is important to increase the volume of the liquid chamber in order to stably and uniformly discharge the liquid, and it is strongly desired to develop a head manufacturing method suitable for mass production of such a high-density multi-array type liquid jet recording head. ing.

[Problems to be solved by the invention]

In order to solve these problems, the present applicant has provided a solid layer for forming at least a liquid path on the first substrate, an active energy ray-curable material layer used for forming at least a wall of the liquid path, After sequentially stacking the second substrate, a mask is stacked on the second substrate, and an active energy ray is irradiated from above the mask to form at least a liquid path wall of the active energy ray-curable material layer. A method for forming at least a liquid path by curing the portion and further removing the uncured portion of the solid layer and the active energy ray-curable material layer from between the two substrates (see Japanese Patent Application Laid-Open No. Sho 62-253457). .

However, in this method, since a mask is laminated on the second substrate, it hardens due to the diffraction of active energy rays and the influence of oblique light components in the active energy rays during the passage through the second substrate. In some cases, the edge portion of the pattern became unclear, and a liquid path or the like having a desired shape could not be obtained.

Furthermore, this method requires an alignment device for aligning the second substrate and the mask.

In addition, in this method, if a misalignment occurs in the alignment operation, the accuracy of the dimension of the liquid path deteriorates. In addition, there is a problem that accurate alignment requires a skillful skill and a lot of time.

The present invention utilizes a process in which a member serving as a mold for forming a liquid path and the like is finally removed from between two substrates, and a space portion serving as a liquid path and a liquid chamber portion is formed between these substrates. It is an object of the present invention to provide a novel method for manufacturing a liquid jet recording head which solves the above-mentioned problem in the method for manufacturing a liquid jet recording head.

In addition, the liquid chamber can be formed freely, and is inexpensive.
It is an object of the present invention to provide a novel liquid jet recording head manufacturing method capable of supplying a liquid jet recording head that is precise and highly reliable.

It is another object of the present invention to provide a novel method of manufacturing a liquid jet recording head capable of supplying a liquid jet recording head having a configuration in which a liquid path is finely processed with high accuracy and high yield.

It is another object of the present invention to provide a novel method of manufacturing a liquid jet recording head capable of supplying a liquid jet recording head which has little interaction with a recording liquid and has excellent mechanical strength and chemical resistance.

[Means and actions for solving the problem]

A method for manufacturing a liquid jet recording head according to the present invention that achieves the above object, comprises a liquid jet recording head having a liquid path communicating with a discharge port for discharging a liquid, and a liquid chamber communicating with the liquid path. At least a convex portion for forming the liquid path is provided on the first substrate, and the active portion covers the convex portion and occupies at least a portion of the side surface of the convex portion that forms a side wall of the liquid path. Laminating a filling member layer having photosensitivity to energy rays, having a surface serving as a ceiling of the liquid chamber, and providing a blocking layer for the active energy rays having a pattern of the liquid chamber on the surface serving as the ceiling. The second substrate thus obtained is placed on the filling member layer, with the blocking layer on the lower side, and a portion serving as a liquid chamber on the first substrate, and a pattern of the liquid chamber on the second substrate. Obtaining a laminated configuration at a position corresponding to Irradiating the filling member layer with active energy rays in a pattern using the blocking layer to cure a portion of the filling member layer irradiated with the active energy rays; and the convex portion and the filler layer Removing the uncured portion of the above to form the liquid path and the liquid chamber.

〔Example〕

Hereinafter, the present invention will be described in detail with reference to the drawings as necessary.

In the following examples, a material that is cured by irradiation with active energy rays is used as the filling member, but the present invention is not limited to this.

FIGS. 1 to 7 are schematic views for explaining the basic aspects of the present invention. Each of FIGS. 1 to 7 shows the structure of a liquid jet recording head according to the method of the present invention. And an example of its manufacturing procedure.

In this example, a liquid jet recording head having two orifices is shown, but of course, even in the case of a high density multi-array liquid jet recording head having more orifices or in the case of a liquid jet recording head having one orifice. It goes without saying that it is the same.

In the present invention, two substrates made of, for example, glass, ceramics, plastic, or metal, at least one of which is active energy ray transmissive, are used. FIG. 1 is a schematic perspective view of an example of a first substrate before forming a convex portion occupying at least a portion serving as a liquid path (flow path of a recording liquid).

The first substrate 1 functions as a part of a liquid path and a liquid chamber constituting material, and also as a support at the time of laminating a filling member composed of a convex portion and an active energy ray curable material described later.

It should be noted that the step of irradiating active energy rays described below is performed in the first
When the irradiation is performed from the side of the substrate 1, the first substrate needs to be active energy ray transmissive. However, when the irradiation of the active energy ray is not performed from the side of the first substrate 1, The material and the like are not particularly limited.

A desired number of liquid ejection energy generating elements 2 such as electrothermal transducers or piezoelectric elements are arranged on the first substrate 1 (two in FIG. 1). The ejection energy for ejecting the small droplets of the recording liquid is given to the recording liquid by such a liquid ejection energy generating element 2, and the recording is performed.

For example, when an electrothermal transducer is used as the liquid discharge energy generating element 2, this element generates discharge energy by heating a nearby recording liquid. Also, when a piezoelectric element is used, for example, ejection energy is generated by mechanical vibration of the element.

These elements 2 are connected to control signal input electrodes (not shown) for operating these elements. In general, various functional layers such as a protective layer are provided for the purpose of improving the durability of the ejection energy generating element, and of course, the provision of such a functional layer in the present invention is inevitable. .

Next, a liquid path forming portion on the first substrate 1 including the liquid discharge energy generating element 2 and a liquid chamber forming portion communicating therewith are provided with a liquid path and a liquid chamber as shown in FIG. A projection 3 serving as a wall mold is provided.

In the present invention, it is not always necessary to provide convex portions in both the liquid path and the liquid chamber forming portion, and the convex portion may be provided at least in the liquid path forming portion.

FIG. 2B shows an example of the second substrate. In this example, the second substrate 4 is configured to have a concave portion 5 and two liquid supply ports 6 at a portion where a liquid chamber is to be formed.
FIGS. 3A to 6A respectively show schematic cross-sectional views of the first and second substrates taken along the line AA ′ in FIG. 2, and FIGS. (B) shows a schematic cross-sectional view of the first and second substrates taken along the line BB 'in FIG.

The convex portion 3 is removed after each of the steps described below,
The remaining space becomes at least a liquid path.

In addition, when a liquid chamber or the like is formed at the same time as necessary in addition to the liquid path, the convex portion 3 is provided so as to occupy a portion where the liquid chamber or the like is formed.

Of course, the shape of the liquid path, the liquid chamber, and the like can be made as desired, and the convex portion 3 can also be made to conform to the shape of the liquid path, the liquid chamber.

In this example, the liquid path is 2 so that a recording liquid droplet can be discharged from each of two orifices (discharge ports) provided corresponding to the two discharge energy generating elements.
And the liquid chambers communicate with these so as to supply the recording liquid to each of the flow paths.

Specific examples of materials and means used for forming such a convex portion 3 include those listed below.

Using a photosensitive dry film, an uneven member is formed according to a so-called dry film image forming process.

A solvent-soluble polymer layer and a photoresist layer having a desired thickness are sequentially laminated on the substrate 1, and after forming the pattern of the photoresist layer, the solvent-soluble polymer layer is selectively removed.

Print resin.

As the photosensitive dry film described in (1), a positive type or a negative type can be used. For example, a positive type dry film which is solubilized in a developing solution by irradiation with active energy rays can be used. As a film or a negative dry film, a negative dry film which is a photopolymerizable type but can be dissolved or peeled off with methylene chloride or a strong alkali is suitable.

Specific examples of the positive dry film include “OZATEC R225” (trade name, Hoechst Japan K.K.)
And negative type dry films include “OZATEC T Series” (trade name, Hoechst Japan K.K.), “PHOT
EC PHT series "(trade name, Hitachi Chemical Co., Ltd.),
"RISTON" [Product name, du Pont de Nemo earth C
o] etc. are used.

Of course, not only these commercially available materials, but also a resin composition that acts positively, for example, a resin composition mainly composed of a naphquinone diad derivative and a novolak type phenol resin, and a resin composition that acts negatively, for example, an acrylic ester as a reactive group A composition mainly composed of an acrylic oligomer and a thermoplastic polymer compound and a sensitizer, or a composition composed of a polythiol, a polyene compound and a sensitizer can be used in the same manner.

As the solvent-soluble polymer described in the above, any solvent can be used as long as it has a solvent that dissolves the polymer and can form a film by coating. As the photoresist layer that can be used here, typically, a positive type liquid photoresist composed of novolak type phenol resin and naphthoquinone diazide, a negative type liquid photoresist composed of polyvinyl cinnamate, a negative type liquid photoresist composed of cyclized rubber and bisazide Examples include a photoresist, a negative photosensitive dry film, a thermosetting type and an ultraviolet curable type ink.

Examples of the material for forming the convex portion by the printing method described above include, for example, a flat ink used in each drying method such as an evaporative drying type, a thermosetting type or an ultraviolet curing type,
Screen ink, transfer type resin and the like are used.

Among the above-listed materials, from the viewpoint of processing accuracy and ease of removal or workability, a means using a photosensitive dry film is preferable, and among them, a positive dry film is particularly preferable. . That is, for example, the positive photosensitive material has a higher resolution than the negative photosensitive material, the relief pattern has a vertical and smooth side wall surface, or a tapered or reverse tapered cross-sectional shape can be easily formed. It is the most suitable for forming a liquid channel. Further, it has a feature that the relief pattern can be dissolved and removed with a developing solution or an organic solvent, and is preferable as a material for forming a convex portion in the present invention. In particular, for example, in the positive photosensitive material using the naphquinonediazide and the novolak-type phenol resin mentioned above, since it can be completely dissolved with a weak alkaline aqueous solution or alcohol, it does not cause any damage to the ejection energy generating element, and Removal in the process is also very quick. Among such positive-type photosensitive materials, a dry film-like material can be obtained in a thickness of 10 to 100 μm,
It is the most preferred material.

On the first substrate 1 on which the convex portions 3 are formed, for example, as shown in FIGS. 3A and 3B, a filling member 7 is laminated so as to cover the convex portions. The filling member 7 occupies at least portions of the side surfaces of the convex portion 3 that become the side walls of both the liquid path and the liquid chamber. The filling member 7
May be directly laminated on the convex portion, or may be laminated on the surface of the first substrate on which the convex portion is provided in a state of being applied to the second substrate side described later, and a predetermined portion on the side surface of the convex portion may be formed. May be occupied by the layer of the filling member.

As the filling member 7, any material capable of covering the above-mentioned convex portion can be suitably used, but this material forms a liquid path and a liquid chamber and becomes a structural material as a liquid jet recording head. Therefore, it is preferable to select and use one excellent in terms of adhesion to a substrate, mechanical strength, dimensional stability, and corrosion resistance. If you show these materials specifically,
Materials that are liquid and that can be cured by active energy rays such as ultraviolet curing, visible light curing, X-ray curing, infrared curing, and electron beam curing are suitable. Among them, epoxy resin, acrylic resin, diglycol dialkyl carbonate resin, and unsaturated polyester Resins, polyurethane resins, polyimide resins, melamine resins, phenol resins, urea resins, and the like are used. In particular, epoxy resins capable of initiating cationic polymerization by light, acrylic oligomers having an acrylic ester group capable of radical polymerization by light, photoaddition polymerization type resins using polythiols and polyenes, unsaturated cycloacetal resins, etc. The polymerization rate is high, and the physical properties of the polymer are excellent, and it is suitable as a structural material.

Specific examples of the method of laminating the filling member 7 include a method of laminating by means such as a discharge device using a nozzle conforming to a substrate shape, an applicator, a curtain coater, a roll coater, a spray coater, and a spin coater. In addition, when laminating a liquid curable material, it is preferable to perform degassing of the material and then avoid mixing of air bubbles.

Next, as shown in FIGS. 4 (A) and 4 (B), at least a part of a second substrate 4 described later on a surface facing the first substrate is capable of curing the filling member 7. A blocking layer 8 made of a material having a property of blocking energy rays is partially provided.

In the present embodiment, the blocking layer 8 is laminated only on at least a portion of the concave portion which is provided on the second substrate and which is provided above the ink liquid chamber and which forms at least the ceiling surface of the liquid chamber.
The blocking layer is not limited to the concave portion, and can be provided at a position corresponding to a portion where the filling member 7 in the second substrate 4 is unnecessary in view of the design of the liquid path and the liquid chamber.

In addition, as a method of laminating the blocking layer 8 on the second substrate in a desired shape, screen printing, flexographic printing, a transfer method, or a method such as sputtering, plating, printing, or the like using a metal or the like on the entire surface of the second substrate 4 Then, various methods such as a method of etching an unnecessary portion or a lift-off method can be adopted. Further, the second substrate 4 is placed in the solution of the blocking layer 8.
Is also effective. A method of dip-coating and removing a portion outside a predetermined portion such as a concave portion, or a method of applying a masking tape to a portion where the blocking layer 8 is unnecessary and then dip-coating the above solution.

Next, heat treatment, active energy ray irradiation, and the like are performed on the blocking layer 8 as necessary, and after the second layer 4 is fixed on the second substrate 4,
As shown in FIGS. 5A and 5B, the second substrate 4 is laminated on the filling member 7 of the first substrate.

At this time, the second substrate 4 may be provided with a concave portion for obtaining a desired liquid chamber volume at a liquid chamber forming portion as necessary. Of course, similarly to the first substrate 1, the second substrate 4 can be made of a desired material such as glass, plastic, photosensitive resin, metal, ceramics or the like. When the process is performed from the side of the substrate 4, it is necessary that the substrate be transparent to active energy rays. The second substrate 4 may be provided with a liquid supply port for supplying a recording liquid in advance. By the irradiation of the active energy ray, the irradiated portion (the hatched portion indicated by reference numeral 10 in the figure) of the filling member 7 is cured to form a cured resin layer, and the first substrate 1 and the first substrate 1 are cured by the curing. The bonding of the two substrates 4 is also performed.

As the active energy ray, ultraviolet rays, electron beams, visible rays, infrared rays, X-rays and the like can be used. However, ultraviolet rays and visible rays are preferable because the exposure is carried out through a substrate, and ultraviolet rays are most preferable in terms of polymerization rate. Are suitable. As the ultraviolet ray source, a light source having a high energy density such as a high-pressure mercury lamp, an ultra-high-pressure mercury lamp, a halogen lamp, a xenon lamp, a metal halide lamp, and a carbon arc is preferably used. Light from the light source can be processed with higher accuracy as less heat is generated, but it can be used in general as long as it is an ultraviolet light source that is generally used for printing plate making, printed wiring board processing, or curing of photo-curable paint. It is.

Then, for example, when the orifice end face is not exposed, such as by a dicing saw using a diamond blade, if necessary, cut the laminate having been cured by the active energy ray irradiation at a required position, cut the orifice end face Expose. However, such a cutting operation is not always necessary for the practice of the present invention. For example, a liquid curable material is used, a mold is used when laminating the material, and the orifice tip is closed and covered. This cutting step is unnecessary when the tip of the orifice is molded smoothly without being damaged.

Next, the uncured portions of the projections 3 and the filling member 7 are removed from the laminate having been irradiated with the active energy rays as shown in FIGS. 6 (A) and 6 (B). Form 12.

In the present invention, the active member is not irradiated with the active energy ray on the filling member at the liquid chamber forming portion and is removed without being cured.
By controlling the thickness of the filling member laminated on the convex portion as desired, it is possible to freely form the liquid chamber independently of the liquid path.

The means for removing the uncured portion of the convex portion 3 and the filling member is not particularly limited, but specifically, for example, immersion in a liquid that dissolves, swells, or peels off the convex portion 3 and the uncured portion of the filling member A preferred method is a method of removing by removing. At this time, if necessary, ultrasonic treatment,
Spraying, heating, stirring, shaking, pressurized circulation, and other means for promoting removal can also be used.

Examples of the liquid used for the removal means include halogen-containing hydrocarbons, ketones, esters, aromatic hydrocarbons, ethers, alcohols, N-methylpyrrolidone,
Examples include dimethylformamide, phenol, water, water containing an acid or alkali, and the like. A surfactant may be added to these liquids as needed. In addition, when a positive dry film is used as the uneven member, it is preferable to newly irradiate the convex portion with ultraviolet rays in order to facilitate removal, and when another material is used, the liquid is heated to 40 to 60 ° C. It is preferred to warm.

FIGS. 6 (A) and 6 (B) show the convex portions 3 as described above.
The state after removing the uncured portion of the filling member and the filling member is shown. In the case of this example, the convex portion 3 and the uncured portion of the filling member are immersed in a liquid for dissolving the same. Are dissolved and removed through the orifice of the head and the liquid supply port 6.

In this embodiment, the blocking layer 8 remains even after the completion of the head.

However, the barrier layer does not necessarily need to be left after completion of the head. For example, when it is desired to remove this layer when it is necessary to observe the inside of the liquid path and the liquid chamber, it is necessary to form the layer. The blocking layer can be removed at the same time as removing the uncured portion of the projection and the filling member by using a soluble material with respect to the solution for removing the uncured portion of the uneven member and the filling member. Further, a step of dissolving the blocking layer may be separately provided.

FIG. 7 is a schematic perspective view of the liquid jet recording head obtained through the above steps. After the above steps are completed, the tip of the orifice may be cut, polished, or smoothed as necessary in order to optimize the distance between the liquid discharge energy generating element 2 and the orifice 13.

The industrial value of the method for manufacturing a liquid jet recording head of the present invention includes the following items.

Precise processing is possible.

There are few processing restrictions on the shape of the flow path and the shape of the liquid chamber.

It does not require special skills in processing and is excellent in mass productivity.

The selection range of the active energy ray-curable material is wide, and a material having an excellent function as a structural material can be used.

It is cheap.

A large liquid chamber required for a high-density multi-array type recording head can be easily formed, and the processing steps are simple and suitable for mass production.

Since the active energy ray blocking layer has a function as a mask, a mask is not required when irradiating active energy rays during pattern exposure.

Since the active energy ray blocking layer as a mask exists adjacent to the filling member, the influence of the diffraction of the irradiated active energy and the pattern exposure of the oblique light component is extremely small,
Accurate pattern exposure can be performed without using an expensive active energy ray irradiation device with high parallelism.

The pattern edge of the pattern obtained by patterning the filling member becomes clear, and a head with high precision in the ink liquid path can be obtained.

In the above-described embodiment, the active energy ray 9 is irradiated from above the second substrate 4; however, it is not always necessary to irradiate from the second substrate side. You may. In this case, the blocking layer 8 is formed on the first substrate 1
It is needless to say that they are stacked on the surface facing the filling member 7.

Further, in this case, when the ejection energy generating element 2 or an electrode for supplying energy to the element or the like blocks the active energy ray 9, the ejection energy generating element 2 or the electrode is arranged at an appropriate position. Is necessary.
It is also an extremely effective method to provide the above-mentioned ejection energy generating element 2 and electrodes on the second substrate side.

Note that active energy rays may be irradiated from both the first and second substrates. In that case, the blocking layer 8 is provided at a position corresponding to each of the two substrates. In any case, the barrier layer is provided inside between the first and second substrates.

〔The invention's effect〕

In the present invention, when a filling member made of a material having photosensitivity to active energy rays is patterned by irradiation with active energy rays in the form of a pattern, the first Rather than irradiating active energy rays by placing a mask above the substrate or the second substrate, blocking the active energy rays functioning as an exposure mask on the surface of the first substrate or the second substrate facing the filling member. The layer is provided and exposure is performed.

As a result, the work of aligning the mask and the layer made of the photosensitive material with the first substrate or the second substrate and the equipment required for the work are not required, and the accuracy of the ink liquid path can be improved and the work time can be shortened.

Further, the pattern edge obtained by patterning the filling member becomes clear without being affected by the oblique light component or diffraction of the active energy ray, and the accuracy of the ink liquid path is improved.

In addition, an expensive active energy ray irradiating device having particularly high parallelism becomes unnecessary.

[Brief description of the drawings]

1 to 7 are schematic views for explaining the basic steps of the method of the present invention. FIG. 1: a schematic perspective view of the first substrate before the formation of the projections, FIG. 2 (A): a schematic plan view of the first substrate after the formation of the projections, FIG. 2 (B): the second 3 (A) and (B): a schematic cutaway view of the first substrate after the formation of the projections and the filling member, and FIGS. 4 (A) and (B): 5 (A) and 5 (B) are schematic cross-sectional views of the second substrate after providing an active energy ray blocking layer on the second substrate, FIGS. 5 (A) and 5 (B): first substrate, convex portion, filling member, blocking layer, FIG. 6 (A) and (B): a schematic cross-sectional view of the laminate after removing the protrusions and a part of the filling member, FIG. : Schematic perspective view of the liquid jet recording head in a completed state. 3 (A) to 3 (A), (A) is a sectional view taken along a line AA 'in FIG. 2, and (B) is a BB' in FIG. FIG. 4 is a sectional view taken at a position corresponding to a line. DESCRIPTION OF SYMBOLS 1 ... 1st board | substrate 2 ... Liquid discharge energy generation element 3 ...... uneven | corrugated member, 4 ... 2nd board | substrate 5 ... recessed part, 6 ... Liquid supply port 7 ... Filling member 8 ... Blocking layer 9 … Activity energy beam 10… Hardened filling member part 11… Liquid channel, 12… Liquid chamber 13… Orifice

Claims (2)

(57) [Claims] A liquid passage communicating with a discharge port for discharging a liquid;
In a method for manufacturing a liquid jet recording head having a liquid chamber communicating with the liquid path, at least a convex part for forming the liquid path is provided on a first substrate, the convex part is covered, and the convex part is formed. Laminating a filling member layer having photosensitivity to active energy rays so as to occupy at least a part of the side surface of the liquid path forming the side wall of the liquid path; and A second substrate provided with a blocking layer for the active energy rays having a pattern of the liquid chamber on a surface to be formed, on the filling member layer, with the blocking layer facing down, the first substrate A step of obtaining a configuration in which a portion serving as an upper liquid chamber and a pattern of the liquid chamber of the second substrate are laminated at a corresponding position; and the active energy is patterned in the filling member layer using the blocking layer. Irradiates the active material of the filling member layer. Curing the portion irradiated with the energy rays, and removing the uncured portion of the convex portion and the filler layer to form the liquid path and the liquid chamber. A method for manufacturing a liquid jet recording head. 2. The liquid crystal display device according to claim 2, wherein the second substrate has a concave portion forming an upper portion of the liquid chamber, and a blocking layer for the active energy ray is provided on a bottom surface of the concave portion serving as a ceiling of the liquid chamber. Item 2. The method for manufacturing a liquid jet recording head according to Item 1.