JPH06191037A - Liquid jet recording head, liquid jet recording apparatus using the same and production of head - Google Patents

Abstract

PURPOSE:To obtain an inexpensive and precise novel liquid jet recording head of high reliability by constituting a liquid emitting surface of a bonded member of a hydrophobic material of the same quality and constituting the peripheral part of an orifice of the hydrophobic material of the same quality. CONSTITUTION:A substrate 1 having a hydrophobic liquid emitting surface forming member 11 formed thereto is cut along an orifice forming position to form a liquid emitting surface 12. An orifice surface is formed using a dicing method, a laser beam processing method or an ultrasonic processing method. Subsequently, a solid layer 5 is removed from the substrate having the orifice surface formed thereto to form a liquid passage 13 and an orifice 14. The orifice surface 12 having desired hydrophobicity, the liquid passage 13 having hydrophllicity and the orifice surface 14 are formed to the substrate 1 provided with an emitting energy generating element 2 at desired positions to constitute a liquid jet recording head.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a liquid jet recording head for discharging a recording liquid used in an ink jet recording system, a liquid jet recording apparatus using the same, and a method for manufacturing the head.

[0002]

2. Description of the Related Art A liquid jet recording head applied to an ink jet recording system (liquid jet recording system) generally has a fine recording liquid discharge port (hereinafter referred to as an orifice), a liquid flow path and a part of the liquid flow path. And a liquid ejection energy generation unit provided. As a conventional method for producing such a liquid jet recording head, the present applicant has already disclosed in JP-A-61-161.
154947, JP-A-62-253457, JP-A-2-3318, etc., a method for manufacturing a liquid jet recording head using an active energy ray-curable material as a liquid flow path forming member (referred to as method A). Proposed.

Further, in the liquid jet recording head, a recording liquid often accumulates at the peripheral portion of the orifice, so that stable ejection cannot be performed, and this tendency tends to occur when high-definition recording is performed or at high speed. When aiming for recording,
In view of the problem that it appears very significantly, the applicant has
Already disclosed in JP-A-1-290438 and JP-A-2-48.
In Japanese Patent Laid-Open No. 953, there has been proposed a method (referred to as method B) of forming a water-repellent layer that repels ink by performing so-called water-repellent treatment on at least the peripheral portion of the orifice. Also,
In the Japanese Patent Application No. 1-327291, the same applicant has proposed a method (referred to as method C) in which the orifice surface is formed of a water-repellent discharge port forming member and the orifice is opened by a punching method.

[0004]

However, these methods A to C are not always sufficient in terms of manufacturing yield and durability of the hydrophobic material. The specific problems are listed below. (1) Since the orifice surface (also referred to as the liquid ejection surface) is made of a different material composed of an inorganic material and an organic material,
The wettability of the liquid flow path is different, and as a result, the ejection becomes unstable when the ink is ejected (method A). (2) Since the water repellent surface, that is, the peripheral portion of the orifice, is formed of different kinds of materials composed of an inorganic material and an organic material, the adhesion strength of the water repellent tends to be different, resulting in non-uniform product , Decrease the manufacturing yield (method B). (3) Since the water-repellent layer obtained by applying the water-repellent agent is a thin film, the durability against friction is not sufficient (method B). (4) Since the water repellent treatment is performed after the liquid flow path is formed, it is impossible to prevent the water repellent agent from entering the orifice (method B). (5) Since the orifice is opened by a punching method, the orifice is easily scratched and the manufacturing yield is reduced (method C).

The above problems are all important problems related to the deterioration of printing quality.

It is an object of the present invention to provide a novel method for manufacturing a liquid jet recording head which is inexpensive, precise, and highly reliable in order to solve the above-mentioned conventional problems. is there.

Another object of the present invention is to provide a method of manufacturing a liquid jet recording head having a liquid path which is finely processed with high accuracy, precision and yield.

Still another object of the present invention is to provide a novel method for manufacturing a liquid jet recording head, which has little mutual influence with a recording liquid and can obtain a liquid jet recording head excellent in mechanical strength and chemical resistance. To do.

It is another object of the present invention to provide a method for manufacturing a liquid jet recording head which is excellent in printing quality.

[0010]

This and other objects are achieved by the means described below. That is, the present invention provides a liquid jet recording head having at least a liquid flow path, a liquid discharge energy element provided in a part of the liquid flow path, and a liquid discharge surface provided with an orifice for discharging ink on a substrate. In the above liquid jet recording head, the liquid ejection surface is composed of a combined body of hydrophobic materials of the same quality, and the peripheral portion of the orifice is composed of the hydrophobic material of the same quality.

Further, the present invention comprises at least the above liquid jet recording head provided with an orifice for ejecting ink facing a recording surface of a recording medium, and a member for mounting the head. A liquid jet recording apparatus characterized by the above.

The present invention also provides a method of manufacturing the liquid jet recording head, comprising the step of forming a groove for forming a liquid ejection surface on a substrate, and providing a hydrophobic liquid ejection surface forming member in the groove. A step of providing a solid layer on the substrate provided with the hydrophobic liquid ejection surface forming member in accordance with a pattern of a liquid flow path, a liquid ejection surface formation planned site on the substrate provided with the solid layer, and A step of covering the entire surface of the hydrophilic liquid flow path forming member excluding a liquid supply port planned site; a step of providing a hydrophobic liquid discharge plane forming member at the liquid discharge plane forming planned site; A method of manufacturing a liquid jet recording head, comprising: a step of removing the substrate from above; and a step of cutting the substrate at a portion of the liquid ejection surface forming member.

According to the present invention, since the periphery of the orifice is made of the same hydrophobic material, it is possible to prevent nonuniformity and instability of ink ejection due to the difference in wettability.
Further, since the hydrophobicity is a property of the material itself and is not due to the coating treatment, it is extremely excellent in friction durability and has no chemical reaction with the ink. Further, since the structure of the liquid ejection surface is formed by bonding and integrating hydrophobic materials without depending on punching or the like, it is possible to eliminate the adverse effects of the manufacturing process and to simplify the process.

Hereinafter, the present invention will be described in detail with reference to the drawings as necessary.

FIGS. 1 to 10 are schematic views for explaining the basic aspect of the present invention. In each of FIGS. 1 to 10, the structure of a liquid jet recording head according to the method of the present invention and its configuration are shown. An example of the fabrication procedure is shown. In this example,
A liquid jet recording head having two orifices is shown, but it goes without saying that the same applies to a high density multi-array liquid jet recording head having more orifices or a liquid jet recording head having one orifice. Yes.

First, in this embodiment, a substrate 1 made of glass, ceramic, plastic, metal or the like as shown in FIG. 1 is used. 1 is a schematic perspective view of the substrate before forming the groove.

The substrate 1 having such a shape as long as it can function as a part of the liquid flow path forming member and can also function as a support for laminating the group layer and the liquid flow path forming member described later, The material can be used without any particular limitation. A desired number of liquid ejection energy generating elements 2 such as electrothermal converters or piezoelectric elements are arranged on the substrate 1 (two in FIG. 1). By the liquid ejection energy generating element 2 as described above, the ejection energy for ejecting the recording liquid droplets is given to the ink liquid, and recording is performed. Incidentally, for example, the liquid ejection energy generating element 2
When an electrothermal converter is used as the element, the element heats the recording liquid in the vicinity to generate ejection energy. Also, for example, when a piezoelectric element is used, ejection energy is generated by mechanical vibration of this element.

It is to be noted that a control signal input electrode (not shown) for operating these elements 2 is connected to these elements 2. Further, generally, various functional layers such as a protective layer are provided for the purpose of improving the durability of these ejection energy generating elements, but it goes without saying that providing such a functional layer is also acceptable in the present invention. Also,
In this example, the ejection energy generating element is arranged on the substrate before the liquid flow path is formed, but the arrangement timing may be desired.

First, as shown in FIG. 1, a groove 3 is formed in a substrate 1 on which an ejection energy generating element is formed, as shown in FIGS. 2 (A) and 2 (B). As a method of forming the groove 3, a dicing method usually used for separating a silicon wafer in semiconductor manufacturing, a processing method using a laser beam, an ultrasonic processing method, or the like can be used. Here, the ejection energy generating element may be formed after forming the groove on the substrate.

Next, a hydrophobic liquid ejection surface forming member 4 is provided in the groove 3, for example, as shown in FIGS. 3 (A) and 3 (B). It is preferable that the surface of the base body of the member after being provided is made smooth without any step, but even if there is some step, it does not hinder ink ejection.

The term "hydrophobic" as used herein means water repellency,
Specifically, it is relatively evaluated in relation to the ink used in the liquid jet recording head. That is, it means that the ink is not accumulated in the orifice portion and the ink can be discharged smoothly at all times. Since ink is mainly an aqueous liquid, the property of repelling ink can be considered synonymous with hydrophobicity.

As such a hydrophobic liquid ejection surface forming material, any material can be used as long as it can fill and fix the groove and does not cause a chemical reaction with the ink. Specific examples of such a material include those listed below.

A thermoplastic resin having hydrophobicity. For example, polypropylene, polyethylene, polysulfone resin, polyether sulfone resin, fluororesin and the like.

A liquid curable material to which a hydrophobic substance or a hydrophobic substance is added. For example, thermosetting material,
Examples thereof include UV curable materials and electron beam curable materials.

Hydrophobic metal.

Here, since the hydrophobic liquid ejection surface forming member forms a liquid flow path and serves as a structural material for a liquid jet recording head, the adhesiveness to a substrate, mechanical strength,
It is preferable to select and use those having excellent dimensional stability and chemical resistance. Therefore, from the above viewpoints, it is preferable to use the metal with the liquid curable material in the above-mentioned material group, and it is particularly preferable to use the liquid curable material.

Examples of liquid curable materials such as those having a hydrophobic property or a hydrophobic substance added thereto, such as thermosetting, ultraviolet ray curing and electron beam curing, are listed below. It is mentioned as a thing.

A. Hydrophobic liquid curable material, for example, "DEFEN SA7700 series" (manufactured by Dainippon Ink and Chemicals, Inc.), "Perfluoroalkyl methacrylate" (manufactured by Osaka Organic Chemical Industry, Inc.), "bisphenol AF type" Epoxy resin "(manufactured by Central Glass Co., Ltd.)," Reactive organic fluorine compound MF-120 "
(Manufactured by Mitsubishi Metals Co., Ltd.), “LF-40” (manufactured by Soken Chemical Industry Co., Ltd.), Lumiflon (manufactured by Asahi Glass Co., Ltd.) and the like are preferably used.

B. A material in which a suitable amount of a hydrophobic substance is added to a liquid curable material, such as an epoxy resin, an acrylic resin,
Diglycol dialkyl carbonate resin, unsaturated polyester resin, polyurethane resin, polyimide resin, melamine resin, phenol resin, urea resin and the like are preferably used.

Examples of the hydrophobic additive include a fluorine compound, a silicon compound, and the like. Specifically, the material shown in a and the “reactive organic fluorine compound MF-15” are mentioned.
0 "(manufactured by Mitsubishi Metals Co., Ltd.)," KP-801 "," KP- "
8FT "(manufactured by Shin-Etsu Chemical Co., Ltd.)," FS-116 "
(Manufactured by Daikin Industries, Ltd.), “Fluoro Coat” (manufactured by Asahi Glass Co., Ltd.) and the like.

As the hydrophobic metal mentioned above, a metal which can be coated by electrolytic plating, vapor deposition, sputtering or the like is used. Examples of these include Au, Ni, Ti and Ta.
Etc. Also, these alloys can be used.

When the liquid curable material is used as a liquid flow path forming member, the material may be, for example, an applicator, curtain coat, roll coat, spray coat,
A known means such as screen printing is used to coat the groove 3 with a desired thickness by a method such as applying this. When applying, it is preferable to degas the material and then avoid mixing of air bubbles.

Here, when the liquid curable material as described above is used when laminating the hydrophobic liquid ejection surface forming member 4 as shown in FIG. 3, the curable material is, for example, a liquid. If a curing plate is placed on top and cured under prescribed conditions while suppressing outflow and flow, it can be cured for 30 minutes to 2 hours if the curing conditions are room temperature or heat curing. In the case of line hardening, it is usually 10
Curing is possible by irradiation for a short time within a minute.

After the above steps are finished, surface treatment may be performed by an ultraviolet irradiation method, a plasma treatment method or the like in order to improve the wettability of the substrate 1 and the hydrophobic liquid ejection surface forming member 4. good.

The discharge energy generating element may be formed on the substrate after the groove is filled with the member.

Next, for example, in FIG.
The solid layer 5 as shown in (A) and (B) is laminated. Note that FIG. 4A is a schematic plan view of the substrate after the solid layers are stacked, and FIG. 4B is AA or B of FIG. 4A.
FIG. 6 is a schematic cross-sectional view of a substrate cut along line B.

The solid layer 5 is removed from the substrate 1 after the liquid flow path constituting members described below are laminated, and the liquid flow path is formed in the removed portion. Of course, the shape of the liquid flow path can be set to a desired shape, and the solid layer 5 provided for forming the flow path can also be adapted to the shape of the flow path. Incidentally, in this example, since the recording liquid droplets are ejected from each of the two orifices provided corresponding to the two ejection energy generating elements, the liquid flow passage has two
It is composed of a liquid fine channel dispersed in one and a common liquid chamber for supplying the recording liquid to the channel.

Specific examples of the materials and means used to form the solid layer 5 are those listed below.

I) A photosensitive dry film is used to form a solid layer according to a so-called dry film image forming process.

Ii) A solvent-soluble polymer having a desired length and a photoresist layer are laminated on the substrate 1, and after the patterning of the photoresist layer, the solvent-soluble polymer layer is selectively removed.

Iii) Printing a curable or curable resin.

As the photosensitive dry film mentioned in i), either a positive type or a negative type can be used. For example, in the case of a positive type dry film, it is solubilized in a developing solution by irradiation with actinic rays. If it is a positive dry film or a negative dry film, a negative dry film which is a photopolymerization type but can be dissolved or peeled off with methylene chloride or strong alkali is suitable.

The positive dry film is specifically, for example, "OZATEC R225" [trade name, Hoechst Japan KK], or the negative dry film is "OZATEC T series" [trade name, Hoechst. Japan Co., Ltd.], "PHOTEC PHT Series" [Product Name, Hitachi Chemical Co., Ltd.], "RISTO
N ”[trade name, Du Pont de Nemours, Co] and the like are used.

As the solvent-soluble polymer mentioned in ii), any polymer compound can be used as long as it has a solvent capable of dissolving it and can form a film by coating. The photoresist layer that can be used here is typically a positive liquid photoresist composed of a novolac phenolic resin and naphthoquinone diazide, a negative liquid photoresist composed of polyvinyl cinnamate, a negative liquid composed of cyclized rubber and bisazide. Examples thereof include photoresists, negative photosensitive dry films, thermosetting inks and ultraviolet curable inks.

Examples of the material for forming the solid layer by the printing method described in iii) include flat plate ink and screen ink used in respective drying methods such as evaporation drying type, thermosetting type and ultraviolet curing type. Used.

Among the materials listed above, the means using the photosensitive dry film of i) is preferable in view of processing accuracy, easiness of removal, workability, etc. Among them, the positive type dry film is preferable. It is particularly preferable to use. That is, the positive photosensitive material is superior in the resolution to the negative photosensitive material, for example. The relief pattern has vertical and smooth side wall surfaces, and the relief hatter can be dissolved and removed with a developing solution or an organic solvent, which is preferable as the solid layer forming material in the present invention. Among them, the dry film type has a thickness of 10 to 100 μm.
It is the most preferable material in that a thick film can be obtained.

On the substrate 1 on which the solid layer 5 is formed, a hydrophilic liquid flow path constituting member 6 is laminated so as to cover the solid layer 5, as shown in FIG. 5, for example. Note that FIG. 5 is a schematic cross-sectional view of the substrate cut along the line C-C in FIG. 4A after stacking the liquid flow path constituent members. As such a hydrophilic liquid flow path constituting member, any material that can coat the solid layer 5 can be preferably used, but such a material forms a liquid flow path and a liquid chamber. Since it is a structural material for a liquid jet recording head, its adhesiveness to the substrate,
It is preferable to select and use one having excellent mechanical strength, dimensional stability and corrosion resistance. Specific examples of such materials are liquid, and active energy ray curable materials such as ultraviolet ray curable and electron beam curable are suitable, among which epoxy resin, acrylic resin, diglycol dialkyl carbonate resin, unsaturated polyester resin. Polyurethane resin, polyimide resin, melamine resin, phenol resin, urea resin and the like are used. In particular, an epoxy resin capable of initiating cationic polymerization by light, an acrylic oligomer having an acrylic ester group capable of radical polymerization by light, a photoaddition polymerization type resin using polythiol and polyene, an unsaturated cycloacetal resin, etc., It has a high polymerization rate and excellent physical properties, and is suitable as a structural material.

As a method for laminating the hydrophilic liquid flow path forming member, for example, a discharging device using a nozzle conforming to the shape of the substrate,
Specific examples include a method of laminating with a means such as an applicator, a curtain coater, a roll coater, a spray coater, and a spin coater. When a liquid curable material is laminated, it is preferable to degas the material and then avoid mixing of air bubbles.

In this way, after obtaining a laminated body in which the substrate, the solid layer, and the hydrophilic liquid flow path forming member are laminated in order, as shown in FIG. 6, a liquid discharge surface (also referred to as an orifice surface) is planned to be formed. , The liquid supply port planned site is irradiated with active energy rays from above the mask 7 so as to shield it from the active energy rays 8 (the black portion of the mask 7 shown in the figure is the active energy rays). It is a part that does not penetrate, and the part other than the black painted part is the part that is penetrated by the active energy rays). By irradiation with this active energy ray 8, a cured resin layer is formed on the hydrophilic liquid flow path constituting member at the irradiated portion.

As the active energy ray, ultraviolet rays, electron rays, visible rays and the like can be used. However, since exposure is carried out through a substrate, ultraviolet rays and visible rays are preferable, and ultraviolet rays are most suitable from the viewpoint of polymerization rate. There is. As the ultraviolet ray source, a light source having a high energy density such as a high pressure mercury lamp, an ultrahigh pressure mercury lamp, a halogen lamp, a xenon lamp, a metal halide lamp or a carbon arc is preferably used.
The light from the light source is highly parallel, and the less heat is generated, the more accurate processing can be performed.However, it may be an ultraviolet light source that is generally used for printing plate making, printed wiring board processing, or curing of photocurable paint. Generally available.

As the mask for the active energy rays, particularly when ultraviolet rays or visible rays are used, a metal mask, a silver salt emulsion mask, a diazo mask, etc. may be mentioned. In addition, a black ink is simply printed or sealed on the liquid chamber forming portion. You may use a method such as pasting.

Next, the uncured liquid flow path forming member is removed from the above-mentioned laminated body after the irradiation of active energy rays, as shown in FIG. 7, and the liquid discharge surface formation planned site 9 and the liquid supply port planned site 10 are removed. To form.

The means for removing the uncured liquid flow path constituting member is not particularly limited. Specifically, for example, the uncured active energy ray curable material is immersed in a liquid that dissolves, swells or peels. A preferable method is a method such as removal by removal. At this time, if necessary, ultrasonic treatment, spraying, heating, stirring, shaking, pressure circulation, or other removal promoting means can be used.

Examples of the liquid used for the removing means include halogen-containing hydrocarbon, ketone, ester,
Examples thereof include aromatic hydrocarbons, ethers, alcohols, N-methylpyrrolidone, dimethylformamide, phenol, water, water containing an acid or alkali, and the like. A surfactant may be added to these liquids if necessary. In this case, it is important to select a liquid that does not dissolve or swell as the solid layer 5.

The substrate 1 on which the liquid discharge surface formation-scheduled portion 9 is formed is covered with a hydrophobic liquid discharge surface forming member 11 as shown in FIG. 8, for example.

As such a hydrophobic liquid ejection surface forming member, any member that can be embedded and fixed, which is formed as a liquid ejection surface formation planned site, can be suitably used. Such a material can be selected from a material group that can be used for the liquid ejection surface forming member 4 formed on the substrate. However, it is not necessary to use the same material completely, and different materials may be used as long as they have the same property in hydrophobicity, adhesiveness, and durability. That is, the hydrophobic liquid ejection surface forming member for covering the solid layer and the above-mentioned member used for filling the groove on the substrate are the same or different within the above range, within the range, or within the range. However, it is not limited. The material of the same quality referred to in the present invention means such contents.

When the above-mentioned liquid curable material is used as the liquid ejection surface forming member, the material may be a known means such as an applicator, curtain coat, roll coat, spray coat, screen printing, etc. It is laminated on the substrate with a desired thickness by a method such as applying this. When applying, it is preferable to degas the material and then avoid mixing of air bubbles.

Here, when the liquid curable material as described above is used when laminating the liquid ejection surface forming member 11 as shown in FIG. 8, for example, the curable material may flow out of the liquid, In the state where the flow is suppressed, if necessary, a pressing plate may be overlaid and cured under predetermined conditions (see FIG. 8). If the curing conditions are room temperature or heat curing, it may be left for 30 minutes to 2 hours, and in the case of ultraviolet curing or the like, it is possible to cure by irradiation for a short time usually within 10 minutes.

By cutting the substrate 1 on which the hydrophobic liquid ejection surface forming member 11 is formed, for example, along the orifice forming positions AA and BB shown in FIG.
As shown in FIG. 9, the liquid ejection surface (orifice surface) 12 is formed. As a method of forming the orifice surface, a ticing method, a processing method using laser light, an ultrasonic processing method, or the like can be used. In some cases, it is effective to perform grinding or polishing after cutting in order to optimize the distance between the ejection energy generating element 2 and the orifice surface 12 and to smooth the orifice surface.

Then, as shown in FIG. 10, the solid layer 5 is removed from the substrate having the orifice surface to form the liquid flow path 13 and the orifice 14.

The means for removing the solid layer 5 is not particularly limited, but specifically, for example, a method of immersing and removing the substrate in a liquid that dissolves, swells or peels the solid layer 5 is preferable. It is mentioned as a thing. At this time, if necessary, ultrasonic treatment, spraying, heating, stirring,
It is also possible to use other removal promoting means.

Examples of the liquid used for the removing means include halogen-containing hydrocarbon, ketone, ester,
Examples thereof include aromatic hydrocarbons, ethers, alcohols, N-methylpyrrolidone, dimethylformamide, phenol, water, water containing a strong alkali, and the like. These liquids include
A surfactant may be added if necessary. Further, when a positive type dry film is used as the solid layer, it is preferable to irradiate the solid layer with ultraviolet light again for easy removal, and when other materials are used, 40 to 60 ° C.
It is preferred to warm the liquid to

As described above, the orifice surface 12 having the desired hydrophobicity and the liquid flow path 13 having the hydrophilicity are provided at desired positions on the substrate 1 on which the ejection energy generating element 2 is provided.
And the liquid jet recording head as shown in FIG. 11 in which the orifice surface 14 is formed is configured.

The present invention is particularly effective in the ink jet recording type recording head and recording apparatus for recording by forming flying droplets by utilizing thermal energy among the ink jet recording methods. is there.

With regard to its typical structure and principle, see, for example, US Pat. Nos. 4,723,129 and 4740.
No. 796, the present invention is preferably carried out using these basic principles. This recording method is applicable to both the so-called on-demand type and the continuous type.

To briefly explain this recording method, the electrothermal converter arranged corresponding to the sheet or liquid path holding the liquid (ink) is changed to the liquid (ink) corresponding to the recording information. Thermal energy is generated by applying at least one drive signal for giving a rapid temperature rise that causes the film boiling phenomenon beyond the nucleate boiling phenomenon, and causes the film boiling on the heat acting surface of the recording head. . In this way, bubbles can be formed in one-to-one correspondence with the drive signal applied from the liquid (ink) to the electrothermal converter, which is particularly effective for the on-demand recording method. By the growth and contraction of the bubbles, liquid (ink) is ejected through the ejection holes,
Form at least one drop. It is more preferable to make the driving signal into a pulse shape because bubbles can be grown and contracted immediately and appropriately, and thus a liquid (ink) with excellent responsiveness can be ejected. As the pulse-shaped drive signal, U.S. Pat. Nos. 4,463,359 and 4,345 are used.
Those as described in the '262 patent are suitable. If the conditions described in US Pat. No. 4,313,124, which is an invention relating to the rate of temperature rise on the heat acting surface, are adopted, more excellent recording can be performed.

The structure of the recording head is a combination of a discharge hole, a liquid flow path and an electrothermal converter as disclosed in the above-mentioned specifications (straight liquid flow path or right-angled liquid flow path).
In addition, as disclosed in U.S. Pat. No. 4,558,333 and U.S. Pat. No. 4,459,600, the present invention includes those having a configuration in which a heat acting portion is arranged in a bending region.

In addition, Japanese Patent Laid-Open No. 123670/1984 discloses a structure in which a common slit is used as a discharge hole of an electrothermal converter for a plurality of electrothermal converters, and a pressure wave of thermal energy is absorbed. The present invention is also effective in a structure based on Japanese Patent Laid-Open No. 138461/1984, which discloses a structure in which the corresponding opening corresponds to the discharge portion.

Further, as a recording head in which the present invention is effectively used, there is a full line type recording head having a length corresponding to the maximum width of the recording medium which can be recorded by the recording apparatus. The full line head may be a full line configuration formed by combining a plurality of print heads as disclosed in the above specification, or may be a single full line print head integrally formed.

In addition, by being attached to the main body of the apparatus, it can be electrically connected to the main body of the apparatus and can supply ink from the main body of the exchangeable chip type recording head or the recording head itself. The present invention is also effective when a cartridge-type recording head that is specially provided is used.

Further, it is preferable to add recovery means for the recording head, preliminary auxiliary means, etc. to the recording apparatus of the present invention because the recording apparatus of the present invention can be made more stable. Specifically, the recording head is preheated by a capping means, a cleaning means, a pressure or suction means, an electrothermal converter or a heating element other than this, or a combination thereof. It is also effective to perform stable recording by adding a means for performing a preliminary ejection mode for performing ejection different from the means and recording.

Further, the recording mode of the recording apparatus is not limited to the mode in which only the mainstream color such as black is recorded, and either the recording head may be integrally formed or a combination of plural recording heads may be used. However, the present invention is extremely effective for an apparatus provided with at least one of a multicolor of different colors or a full color by color mixing.

In the embodiments of the present invention described above, the liquid ink is used for the description. However, in the present invention, either an ink which is solid at room temperature or an ink which is in a softened state at room temperature is used. Can be used. In the above-mentioned inkjet device, the temperature of the ink itself is generally adjusted within the range of 30 ° C. or higher and 70 ° C. or lower to control the temperature of the ink so that the viscosity of the ink is within the stable ejection range. Any liquid may be used as long as the ink is liquid.

In addition, the excessive temperature rise of the head or ink due to thermal energy is positively prevented by using it as the energy for the state change of the ink from the solid state to the liquid state, or the evaporation of the ink is prevented. It is also possible to use an ink that solidifies when left as it is. In any case, liquefaction occurs only when heat energy is applied, such as when the ink is liquefied by applying heat energy according to the recording signal and ejected as an ink liquid, or when it begins to solidify when it reaches the recording medium. The use of an ink having such a property is also applicable to the present invention.

Such an ink is disclosed in JP-A-54-568.
No. 47 or Japanese Patent Laid-Open No. 60-71260, facing the electrothermal converter in the state of being held as a liquid or solid in the recesses or through holes of the porous sheet. It may be in the form.

In the present invention, the most effective one for each of the above-mentioned inks is one that executes the above-mentioned film boiling method.

FIG. 12 is an external perspective view showing an example of an ink jet recording apparatus (IJRA) in which the recording head obtained by the present invention is mounted as an ink jet head cartridge (IJC).

In the figure, reference numeral 20 is an ink jet head cartridge (IJC) provided with a group of nozzles for ejecting ink so as to face the recording surface of the recording paper fed onto the platen 24. Reference numeral 16 is a carriage HC that holds the IJC 20, and is connected to a part of a drive belt 18 that transmits the driving force of the drive motor 17, and is slidable with two guide shafts 19A and 19B arranged in parallel with each other. By doing so, reciprocating movement over the entire width of the recording paper of the IJC 20 is possible.

Reference numeral 26 is a head recovery device, which is an IJC 20.
Is arranged at one end of the movement path of, for example, at a position facing the home position. The drive force of the motor 22 via the transmission mechanism 23 causes the head recovery device 26 to operate, and
Cap the JC20. In association with capping the IJC 20 by the cap portion 26A of the head recovery device 26, ink is sucked by an appropriate suction means provided in the head recovery device 26 or by an appropriate pressure means provided in an ink supply path to the IJC 20. The ink is pressure-fed and the ink is forcibly discharged from the ejection port to perform ejection recovery processing such as removing the thickened ink in the nozzle. Further, the IJC is protected by capping at the end of recording or the like.

A blade 30 is provided on the side surface of the head recovery device 26 and is made of silicon rubber as a wiping member. The blade 31 is a blade holding member 31.
The head recovery device 26 is held by A in a cantilever form.
Similarly to the above, the motor 22 and the transmission mechanism 23 operate to enable engagement with the ejection surface of the IJC 20. Thereby, the blade 31 is projected into the movement path of the IJC 20 at an appropriate timing in the recording operation of the IJC 20 or after the ejection recovery processing using the head recovery device 26, and the ejection surface of the IJC 20 is accompanied by the movement operation of the IJC 20. It removes dew condensation, wetness, dust, etc.

[0081]

The present invention will be described in more detail with reference to the following examples.

Example 1 A liquid jet recording head having the structure shown in FIG. 11 was manufactured under the following conditions in accordance with the manufacturing procedure shown in FIGS. (1) A HfB ₂ thin film was patterned as an ejection energy generating element 2 on the upper surface of a substrate made of silicon to prepare a generating element substrate using Al as a wiring material. (2) Depth of 25 μm and width of 1 on the substrate 1
A groove 3 of 00 μm was formed. (3) In the same procedure as above, after a total of three substrates having grooves similar to those described above were prepared, a liquid curable material shown in Table 1 was applied to each of the substrates having the grooves. The hydrophobic liquid ejection surface forming member 4 was provided. The operating procedure was performed like intimidation. The curable materials of Table 1 were mixed as needed and degassed using a vacuum pump. Then, the defoamable curable material was covered by screen printing.

[0083]

[Table 1] Ultraviolet rays were radiated from above to 6 J / cm ² to cure the hydrophobic liquid ejection surface forming member. (4) Positive type dry film "OZAT
EC R225 "(Hoechst) thickness 25μ
The photosensitive layer of m was formed by lamination. A mask having a pattern corresponding to that shown in FIG. 4 (A) was placed on this photosensitive layer, and ultraviolet rays of 300 J / cm ² were irradiated to the portion excluding the portion where the liquid flow path was to be formed. Next, spray development was performed using a 1% aqueous solution of sodium hydroxide to form a relief solid layer 5 having a thickness of 25 μm on the portion where the liquid flow path was to be formed on the substrate. (5) A second layer is formed on each of the substrates on which the solid layer is formed.
The hydrophilic liquid flow path constituting member 6 shown in the table, which is a liquid curable material, was applied to a thickness of 50 μm using an applicator.

[0084]

[Table 2] (6) A mask having a pattern corresponding to that shown in FIG. 6 is overlaid on the substrate coated with the hydrophilic liquid flow path forming member, and 6J is formed on the portion excluding the orifice surface formation planned site and the liquid supply port planned site.
Irradiation with ultraviolet rays of / cm ² was performed. (7) Each of these three substrates is dipped in xylene, and the uncured hydrophilic liquid flow path forming member is dissolved and removed in an ultrasonic cleaning tank for 3 minutes to form an orifice surface formation planned site. The liquid supply port was formed. (8) Each of these three substrates was provided with the hydrophobic liquid ejection surface forming member 11 which is a liquid curable material shown in Table 1. The operating procedure was as follows. The curable materials in Table 1 were mixed as needed and degassed using a vacuum pump. Thereafter, the defoamed curable material was covered with a dispenser, and the curable material was completely cured by irradiating it with ultraviolet rays at 6 J / cm ² from above. (9) Each of these three substrates was cut at the position where the orifice was formed to expose the orifice surface. (10) The 6 substrates obtained by cutting are immersed in ethanol, and the solid layer 6 is dissolved and removed in an ultrasonic cleaning tank for 3 minutes to form a liquid flow path 13 and an orifice 14.

No residue of the solid layer was present in the liquid flow paths of the six liquid jet recording heads thus manufactured. Furthermore, when an ink jet ink composed of pure water / gaseline / direct black 154 (water-soluble black dye) = 65/30/5 (parts by weight) was injected into these liquid jet recording heads, wetting of the ink in the liquid flow path was prevented. It was good, and the orifice surface had water contact with this ink. In addition, even in the rubbing test of the orifice surface with silicone rubber, it had water contact in the initial state. Furthermore, when the above recording head was attached to a recording apparatus and recording was performed using the above ink jet ink, stable printing was possible.

[0086]

The effects brought about by the present invention described above include those listed below. (1) Since the orifice is surrounded by the same material, the ejection direction is constant and uniform, and high-quality printing can be obtained. (2) In addition to the material having the same quality around the orifice and the material itself having water repellency, the ink droplets are easily cut off and high-quality printing can be obtained. (3) Since the structural material forming the periphery of the orifice itself has water repellency, the water repellency can always be maintained. (4) Since the material to be processed at the time of forming the ejection port is the same material, the material can be processed with high yield, and the liquid jet recording head can be provided at low cost. (5) Since the main process for manufacturing the head is due to the so-called printing technique, that is, the fine processing technique using a photoresist or a photosensitive dry film, the fine portion of the head is
Not only can a desired pattern be formed very easily, but a large number of heads having the same structure can be simultaneously processed. (6) The main constituent parts can be easily and surely aligned, and a head with high dimensional accuracy can be obtained with high yield. (7) A high-density multi-array liquid jet recording head can be obtained by a simple method. (8) It is extremely easy to adjust the thickness of the groove wall forming the liquid passage, and the liquid passage having a desired dimension (for example, groove depth) can be formed according to the thickness of the solid layer.

[Brief description of drawings]

FIG. 1 is a schematic diagram illustrating a method of manufacturing a liquid jet recording head of the present invention, and is a perspective view showing a substrate provided with an ejection energy generating element.

2A and 2B are schematic views illustrating a method of manufacturing a liquid jet recording head according to the present invention, showing a step of forming a groove for forming a liquid discharge on a substrate, FIG. 2A is a plan view, and FIG. It is a figure.

3A and 3B are schematic diagrams illustrating a method of manufacturing a liquid jet recording head according to the present invention, showing a step of providing a hydrophobic liquid ejection surface forming member in a groove, FIG. 3A being a plan view and FIG. FIG.

FIG. 4 is a schematic view illustrating a method of manufacturing a liquid jet recording head of the present invention, showing a step of providing a solid layer according to a pattern of liquid flow paths on a substrate provided with a hydrophobic liquid ejection surface forming member, (A) is a plan view and (B) is a front sectional view.

FIG. 5 is a schematic view illustrating a method of manufacturing a liquid jet recording head according to the present invention, which is a side cross-sectional view showing a step of coating a hydrophilic liquid flow path forming member on a substrate provided with a solid layer.

FIG. 6 is a schematic view illustrating a method of manufacturing a liquid jet recording head according to the present invention, in which a hydrophilic property is covered except for a liquid discharge surface formation planned site and a liquid supply planned site on the substrate on which a solid layer is provided. It is a side sectional view showing a step of curing the liquid flow path forming member.

FIG. 7 is a schematic view illustrating a method of manufacturing a liquid jet recording head according to the present invention, in which after the step of FIG. 6, the hydrophilic liquid flow path constituent members at the planned liquid ejection surface formation site and the planned liquid supply site are removed. It is a front sectional view showing a point.

8A and 8B are schematic diagrams illustrating a method of manufacturing a liquid jet recording head according to the present invention. After the step of FIG. 7, a portion where a liquid jetting surface forming member is filled with a hydrophobic liquid jetting surface forming member and fixed thereto is shown. It is a front sectional view shown.

9 is a schematic cross-sectional view illustrating a method of manufacturing the liquid jet recording head of the present invention, which is a side cross-sectional view showing a section taken along the line AA or the line BB of FIG. 8 after the step of FIG. Is.

FIG. 10 is a schematic view illustrating the method for manufacturing the liquid jet recording head of the present invention, which is a side cross-sectional view showing a state where the solid layer is removed from the substrate after the step of FIG.

FIG. 11 is a transparent schematic perspective view showing the configuration of the liquid jet recording head of the present invention obtained by the steps of FIGS.

FIG. 12 is a perspective view showing an example of a recording apparatus including a liquid jet recording head according to the present invention.

[Explanation of reference symbols] 1 substrate 2 ejection energy generating element 3 groove 4 hydrophobic liquid ejection surface forming member 5 solid layer 6 hydrophilic liquid flow path forming member 7 mask 8 active energy ray 9 liquid ejection surface formation planned site 10 liquid supply port 11 Hydrophobic Liquid Ejection Surface Forming Member 12 Liquid Ejection Surface 13 Liquid Flow Path 14 Orifice 16 Carriage 17 Drive Motor 18 Drive Belt 19A, 19B Guide Shaft 20 Inkjet Head Cartridge 22 Cleaning Motor 23 Transmission Mechanism 24 Platen 26 Head Recovery Device 26A Cap Part 30 Blade 30A Blade holding member

Claims (7)

[Claims] 1. A liquid jet recording head comprising at least a liquid flow path, a liquid discharge energy element provided in a part of the liquid flow path, and a liquid discharge surface having an orifice for discharging ink on a substrate. A liquid jet recording head, wherein the liquid ejection surface is composed of a combination of hydrophobic materials of the same quality, and the orifice peripheral portion is composed of the hydrophobic material of the same quality. 2. The discharge energy element is an electrothermal converter that generates thermal energy.
The liquid jet recording head according to item 1. 3. The liquid jet recording head according to claim 1, wherein the recording medium is a full line type in which a plurality of orifices are provided over the entire width of the recording area of the recording medium. 4. A liquid jet recording head according to claim 1, wherein an orifice for ejecting ink is provided facing a recording surface of the recording medium, and a member for mounting the head. A liquid jet recording apparatus characterized by: 5. A method for manufacturing a liquid jet recording head according to claim 1, wherein a step of forming a groove for forming a liquid ejection surface on the substrate, and a hydrophobic liquid ejection surface forming member in the groove. A step of providing, a step of providing a solid layer on the substrate provided with the hydrophobic liquid ejection surface forming member in accordance with a pattern of a liquid flow path, and a liquid ejection surface formation planned site on the substrate provided with the solid layer And a step of covering the entire surface of the hydrophilic liquid flow path forming member except for the planned liquid supply port, a step of providing a hydrophobic liquid discharge surface forming member at the liquid discharge surface forming planned site, and the solid layer A method of manufacturing a liquid jet recording head, comprising: a step of removing the substrate from the substrate; and a step of cutting the substrate at a portion of the liquid ejection surface forming member. 6. The method for manufacturing a liquid jet recording head according to claim 5, wherein the solid layer is formed of an organic polymer material. 7. The method of manufacturing a liquid jet recording head according to claim 6, wherein the organic polymer material is a positive photosensitive resin.