JPH05124206A - Ink jet recording head, production thereof, and ink jet recorder provided with the ink jet recording head - Google Patents

Abstract

PURPOSE:To prevent foreign particles in ink from reaching the delivery ports or thereabouts to reduce failures in delivering the ink without increasing the number of component parts and production processes. CONSTITUTION:Two electrothermal energy conversion bodies 2 are juxtaposed on one surface of a first substrate 1. A structural member 10 and a second substrate 4 are laminated in order. The structural member 10 is provided with delivery ports 16 for delivering ink, a liquid chamber 11 temporarily storing the ink, a common liquid flow path 14 connecting to the liquid chamber 11, and discrete liquid flow paths 15 connecting the common liquid flow path 14 to the respective delivery ports 16 on the surface thereof opposed to the surface of the first substrate 1. In the common liquid flow path 14, a plurality of pillar parts 12 are integrally formed apart from each other. The cross sectional area of an open part 13 formed by the adjacent pillar parts 12 is smaller than that of the delivery port 16. Foreign particles existing in the ink are screened by the open parts 13 and hardly reach the delivery ports 16 or thereabouts. Thus, failures in delivering ink caused by the clogging of the devivery ports 16 or the like are reduced.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet recording head for ejecting ink to record on a recording medium, a method for manufacturing the same, and an ink jet recording apparatus having the ink jet recording head.

[0002]

2. Description of the Related Art Generally, an ink jet recording head (hereinafter referred to as a "recording head") applied to an ink jet recording system has an ejection port 116 for ejecting ink as shown in FIG. A liquid chamber 111 for storing ink to be supplied to the outlet 116, and the ejection port 1
16 and the liquid flow path 115 that communicates with the liquid chamber 111, and an energy generating element 102 that generates energy for ejecting ink, which is provided in a part of the liquid flow path 115.
And a supply port 106 for supplying ink to the liquid chamber 111 from the outside.

As a conventional method of manufacturing the recording head, the following method is known.

First, a positive type or negative type photosensitive dry film is attached to the first substrate 101 provided with the energy generating element 102, and the ejection port 116, the liquid flow path 115 and the liquid chamber of the photosensitive dry film are attached. A solid layer (not shown) having a pattern corresponding to a part of the discharge port 116, the liquid flow path 115 and the liquid chamber 111 is exposed by exposing or masking a pattern corresponding to a part of the liquid chamber 111.
Are provided on the first substrate 101. Next, an active energy ray curable material 107 that is cured by an active energy ray is applied on the solid layer and the first substrate 101 to an appropriate thickness. Next, the active energy ray transparent second substrate 104 provided with the concave portion 105 and the supply port 106 for forming another part of the liquid chamber 111 is placed on the active energy ray curable material 107. The concave portion 105 is formed in
The attached laminated body is made according to the planned position where the is formed. Further, a second portion of the active energy ray-curable material 107 is formed so as to cover a portion where the liquid chamber 111 is to be formed.
The substrate 104 of the mask is used to mask the active energy ray
Through the substrate 104 of the active energy ray curable material 10
Irradiate 7 and cure. Then, the laminated body in which the active energy ray-curable material 107 is cured is cut at a position where the ejection port 116 is formed to expose the end face of the solid layer, and then the solid layer and the uncured active energy ray curable material are cured. A method of immersing in a solvent that dissolves the material and dissolving and removing the solid layer and the uncured active energy ray-curable material from the laminate to provide a space for forming the liquid flow path 115 and the liquid chamber 111 therein. (See JP-A-62-253457).

[0005]

In the conventional recording head described above, the cross-sectional area of the liquid flow path is larger than the cross-sectional area of the ejection port in order to stably supply the ink to the ejection port.

Therefore, if dust such as impurity particles is present in the ink, the dust may reach the vicinity of the ejection port when the ink is supplied to the liquid flow path during recording. When the dust reaches the vicinity of the ejection port, there is a problem in that when ejecting ink, the ejection direction of the ink deviates, the ejection amount of the ink changes, and unevenness occurs, and normal ejection cannot be performed. .. In addition, in some cases, the dust blocks the ejection port, and the ink cannot be ejected.

Further, when strong vibration or the like is applied to the recording head, ink may leak from the ejection port, or conversely, the ink may flow back to the liquid chamber side and normal ejection of ink may not be performed. There were also problems.

In order to solve the above-mentioned problems, it is advisable to provide a filter or the like in the liquid flow path. However, by providing the filter or the like, the number of parts constituting the recording head increases and the recording head Since the number of manufacturing processes is increased, there is a problem that the manufacturing cost of the recording head is increased, the number of parts is increased, and the number of manufacturing processes is increased, which may rather lead to generation of dust.

The present invention has been made in view of the above problems of the prior art, and an ink jet recording head that makes it difficult for dust in the ink to reach the vicinity of the ejection port without increasing the number of parts or the manufacturing process, An object of the present invention is to provide an ink jet recording apparatus including the manufacturing method and the ink jet recording head.

[0010]

In order to achieve the above object, a method of manufacturing an ink jet recording head according to the present invention corresponds to an energy generating element that generates energy used for ejecting ink from an ejection port. In a method for manufacturing an inkjet recording head provided with a liquid flow path that communicates with the ejection, in advance, a film is formed on one surface of a substrate to form an energy generating element as an element surface, and the liquid flow is applied to the element surface. Corresponding to a channel and an opening having a cross-sectional area smaller than the cross-sectional area of the discharge port, which is formed in the cross section of at least a portion of the liquid flow path on the side opposite to the discharge port of the portion where the energy generating element is provided. Forming a solid layer made of a removable material, covering the substrate and the solid layer with a structural member, and removing the solid layer from the substrate. And wherein the Rukoto.

The ink jet recording head of the present invention is manufactured by the manufacturing method described above.

Further, the energy generating element is provided with an electrothermal converter for generating thermal energy used for ejecting ink, and the ejection port is formed over the entire width of the recording area of the recording medium. It may be a full line type.

The ink jet recording apparatus of the present invention is characterized by having the above-mentioned ink jet recording head and means for mounting the ink jet recording head, and for ejecting ink as an energy generating element. It may be provided with an electrothermal converter that generates the heat energy to be used, or may be a full line type in which a plurality of ejection openings are provided over the entire width of the recording area of the recording medium.

[0014]

In the method for manufacturing an ink jet recording head of the present invention configured as described above, the ejection port, the liquid flow path corresponding to the position of the energy generating element, and the liquid flow path are formed on the element surface of the substrate. Solid layer made of a removable material, which corresponds to an opening having a cross-sectional area smaller than the cross-sectional area of the discharge port, which is formed in at least part of the cross-section on the side opposite to the discharge port from the site where the energy generating element is provided. To form. Then, after covering the substrate and the solid layer with a structural member, by removing the solid layer from the substrate,
A liquid flow path is formed in a portion surrounded by the element surface and the structural member, and an opening that functions as a filter is integrally formed without increasing the manufacturing process or the number of parts.

Further, in the ink jet recording head of the present invention, the cross section of at least a part of the liquid flow path on the side opposite to the ejection port side of the portion where the energy generating element is provided has a cross sectional area smaller than the cross sectional area of the ejection port. Since the opening is formed, the ink supplied from the outside of the inkjet recording head is ejected from the ejection port through the opening during recording. At this time, if dust that is larger than the cross-sectional area of the ejection port exists in the ink, the opening acts as a filter, and the dust is blocked by the opening, so that the dust is clogged near the ejection port. The ejection failure can be suppressed. Since the ink always passes through the opening, the fluidity of the ink in the liquid flow path is suppressed, and when strong vibration or the like is applied to the ink jet recording head, the ink leaks from the ejection port or the ink It is possible to suppress the backflow of the ink to the ink storage unit side.

Embodiments of the present invention will now be described with reference to the drawings.

First, an ink jet recording head (hereinafter,
An example of a "recording head") will be described.

As shown in FIG. 1, glass, ceramic,
An electrothermal converter 2 as an energy generating element is formed on one surface of the first substrate 1 made of plastic or metal.
However, they are formed into a film by a semiconductor manufacturing process such as etching, vapor deposition, and sputtering, and are arranged at a predetermined interval, and the one surface is the element surface 1a. A control signal input electrode (not shown) for operating each electrothermal converter 2 is connected to each electrothermal converter 2, and each electrothermal converter is input by a signal input from each electrode. 2 heats the ink in the vicinity thereof to generate ejection energy.

On the element surface 1a, a structural member 10 made of one member which is cured by irradiation with active energy rays is laminated. A plurality of individual groove portions corresponding to the positions of the electrothermal converters 2 are formed on the surface of the structural member 10 facing the element surface 1a, and the spaces surrounded by the individual groove portions and the element surface 1a are respectively formed. The individual liquid flow path 15 is configured. One end of each of the individual groove portions is opened to one end surface of the structural member 10 to form a discharge port 16, respectively. A common groove communicating with each of the individual grooves is formed on a surface of the other end of each of the individual grooves facing the element surface 1a, and a space surrounded by the common groove and the element surface 1a is a common liquid channel 14. Make up. The common liquid flow path 14 and each individual liquid flow path 15 form a liquid flow path. In addition, in the middle portion of the common liquid flow path 14, a plurality of column portions 12 are arranged in parallel with the arrangement direction of the ejection ports 16.
Are formed at a predetermined interval, and the adjacent pillar portions 1
Between 2 is an opening 13 having a cross-sectional area smaller than the cross-sectional area of the discharge port 16.

At one end of the common liquid flow path 14 of the structural member 10, an opening having the element surface 1a as a bottom wall is formed, and the opening is formed in the second substrate 4 laminated on the structural member 10. The liquid chamber 11 is configured together with the formed recess 5. Liquid chamber 1
Although No. 1 is provided for the purpose of stably supplying the ink to the ejection port 16, the liquid chamber 11 is not always necessary in the present invention.

On the other hand, the second substrate 4 is provided with an opening communicating with the liquid chamber 11 and the outside of the recording head to form a supply port 6. A supply pipe (not shown) connected to an ink tank (not shown) or the like is connected to the supply port 6, and ink is supplied from the ink tank to the liquid chamber 11 via the supply pipe. ing.

The operation when ink is ejected from each of the ejection ports 16 will now be described. The ink that is supplied to the liquid chamber 11 and temporarily stored therein passes through the opening 13 by the capillary phenomenon and becomes an individual liquid. Penetration into the flow path 15 and discharge 16
To form a meniscus to keep the individual liquid flow path 15 filled. At this time, when the electrothermal converter 2 is energized via an electrode (not shown) to generate heat, the ink on the electrothermal converter 2 is rapidly heated, and bubbles are generated in the individual liquid flow path 15. Ink is ejected from the ejection port 16 due to the expansion of the bubbles.

At this time, if dust that is larger than the cross-sectional area of the ejection port 16 exists in the ink, the opening 13 acts as a filter and the dust is blocked by the opening 13, so the dust is clogged near the ejection port. Therefore, ejection failure will not occur.

In this embodiment, the liquid flow path is composed of the common liquid flow path 14 and the individual liquid flow path 15, and the opening 13 having a cross-sectional area smaller than the cross-sectional area of the discharge port 16 is provided in the common liquid flow path 14. However, the common liquid flow path 14 does not necessarily have to be provided,
The opening 13 may also be provided in at least a part of the liquid flow path.

Further, an example in which the electrothermal converter 2 is provided on the electrode as an energy generating element for generating energy used for ejecting ink is shown, but the invention is not limited to this, and the ink is instantaneously applied. A piezoelectric element or the like that generates mechanical energy that applies a discharge pressure may be used.

Further, 128 or 256 discharge ports 16 can be formed at a high density of 16 / mm, and a full line type can be formed by forming only the number corresponding to the entire width of the recording area of the recording medium. It can also be

Next, an embodiment of the method of manufacturing the recording head will be described.

First, as shown in FIG. 2, two electrothermal converters each having an electrode (not shown) connected to the element surface 1a of the first substrate 1 made of glass, ceramic, plastic, metal or the like. 2 are formed into a film by a semiconductor manufacturing process such as etching, vapor deposition, and sputtering, and are provided at predetermined intervals. In the present embodiment, the description will be made on the case where two energy generating elements are provided, but the number of energy generating elements and the corresponding liquid flow paths and discharge ports are not limited to the above two, and other numbers may be used. It goes without saying that it can be appropriately modified and provided.

Although not shown, various functional layers such as a protective film are provided on the element surface 1a including each electrode and each electrothermal converter 2 for the purpose of improving durability. It is common. The present embodiment exerts its effect regardless of the presence or absence of these functional layers and the material.

The first substrate 1 functions as a part of a liquid flow path and a material for forming a liquid chamber, and also as a support for a solid layer and a structural member described later. When the liquid chamber is provided as in this embodiment, the first substrate 1 needs to be active energy ray permeable when the step of irradiation of active energy rays described below is performed from the first substrate 1 side. However, in other cases, the shape, the material, and the like can be used without any particular limitation.

Next, as shown in FIG. 3A, an individual liquid flow path forming portion including each electrothermal converter 2, a liquid chamber forming portion, and each individual liquid flow path formation on the element surface 1a. The solid layer 3 is laminated on the common liquid flow path forming portion that connects the portion and the liquid chamber forming portion and has an opening (hereinafter, referred to as “filter”) having a cross-sectional area smaller than the cross-sectional area of the discharge port. Although not described, the example of the second substrate 4 is shown in FIG. In the present embodiment, the second substrate 4 is configured to have the recess 5 and the two supply ports 6 in the liquid chamber formation planned site. After that, each of FIGS. 4 to 7 (A)
Shows a schematic cross-sectional view taken along the line AA ′ of FIG.
Each of FIGS. 4 to 7 is a schematic cross-sectional view taken along the line BB ′ of FIG. 3, and each of FIGS. 4 to 7 is a line C-C ′ of FIG. A schematic cross-sectional view taken along the line of FIG.

The solid layer 3 is removed after each step described later, and a liquid flow path, a liquid chamber and a filter are formed in the removed portion. Of course, the shapes of the liquid flow path, the liquid chamber, and the filter can be set as desired, and the solid layer 3 can also be formed in accordance with the shapes of the liquid flow path, the liquid chamber, and the filter. Incidentally, in the present embodiment, the liquid flow path is branched into two so that the ink droplets can be ejected from each of the two ejection ports provided corresponding to the two electrothermal converters 2. The liquid chamber communicates with each of the flow paths so that ink can be supplied to each of the flow paths.

Specific examples of materials and means used to form such a solid layer 3 include those listed below.

The solid layer 3 is formed using a photosensitive dry film according to a so-called dry film image forming process.

A solvent-soluble polymer layer having a desired thickness and a photoresist layer are sequentially laminated on the first substrate 1. After patterning the photoresist layer, the solvent-soluble polymer layer is selectively removed.

Print the resin.

As the photosensitive dry film mentioned above, either a positive type or a negative type can be used. For example, a positive type dry film is solubilized in a developing solution by irradiation with active energy rays. In the case of a positive type dry film or a negative type dry film, a negative type dry film which is a photopolymerization type but can be dissolved or peeled off with methylene chloride or strong alkali is suitable.

Specific examples of the positive dry film include "OZATEC R225" (trade name, Hoechst Japan Co., Ltd.), and the negative dry film includes
"OZATEC T series" [Product name, Hoechst Japan Ltd.], "PHOTEC PHT series" [Product name, Hitachi Chemical Co., Ltd.], "RISTON" [Product name, Du Pont de
Nemo Earth Co., etc. are used.

Of course, not only these commercially available materials,
A resin composition acting positively, for example, a resin composition mainly composed of a naphthoquinone diad derivative and a novolac type phenolic resin, and a resin composition acting negatively,
For example, a composition mainly composed of an acrylic oligomer having an acrylic ester as a reactive group and a thermoplastic polymer compound and a sensitizer, or a composition composed of a polythiol, a polyene compound and a sensitizer can be similarly used.

As the solvent-soluble polymer mentioned in the above,
Any polymer compound which has a solvent capable of dissolving it and can form a film by coating may be used. The photoresist layer that can be used here is typically a positive liquid photoresist composed of a novolac phenolic resin and naphthoquinone diazide, a negative liquid photoresist composed of polyvinyl cinnamate, a negative liquid composed of cyclized rubber and bisazide. Examples thereof include photoresists, negative photosensitive dry films, thermosetting inks and ultraviolet curable inks.

As the material for forming the solid layer 3 by the printing method mentioned above, for example, flat plate ink, screen ink and transfer type which are used in respective drying methods such as evaporation drying type, thermosetting type and ultraviolet curing type are used. Resin, etc. are used.

Among the materials listed above, the means using a photosensitive dry film is preferable in view of processing accuracy, easiness of removal, workability, etc. Among them, a positive type dry film is used. Is particularly preferable. That is, the positive type photosensitive material has, for example, a resolution superior to that of the negative type photosensitive material, the relief pattern has a vertical and smooth side wall surface, or a tapered or inverse tapered sectional shape can be easily formed. It has the feature that it is optimal for shaping the liquid flow path. Further, it has a feature that the relief pattern can be dissolved and removed with a developing solution or an organic solvent, which is preferable as the solid layer forming material in the present invention. In particular, for example, in the positive type photosensitive material using the naphthoquinonediazide and novolak type phenolic resin mentioned above, since it can be completely dissolved in a weak alkaline aqueous solution or alcohol, it does not cause any damage to the energy generating element, Removal is extremely quick. Among such positive type photosensitive materials, the dry film type is the most preferable material in that a thick film having a thickness of 10 to 100 μm can be obtained.

On the first substrate 1 on which the solid layer 3 is formed,
As shown in (A), (B) and (C) of FIG.
An active energy ray curable material 7 that is cured by an active energy ray and becomes a structural member is laminated so as to cover the solid layer 3.

As the structural member, any member capable of covering the solid layer 3 can be preferably used, but the member forms a liquid flow path, a liquid chamber and a filter and has a structure as a recording head. Since it is a material, it is preferable to select and use a material having excellent adhesiveness to a substrate, mechanical strength, dimensional stability, and corrosion resistance. Specific examples of such materials are liquid, and active energy ray curable materials such as ultraviolet ray curable and electron beam curable are suitable, among which epoxy resin, acrylic resin, diglycol dialkyl carbonate resin, unsaturated polyester resin. Polyurethane resin, polyimide resin, melamine resin, phenol resin, urea resin and the like are used. In particular, epoxy resins capable of initiating cationic polymerization by light, acrylic oligomers having an acrylic ester group capable of radical polymerization by light, photoaddition polymerization type resins using polythiol and polyene, unsaturated cycloacetal resins, etc. Since the polymerization rate is high and the polymer has excellent physical properties, it is suitable as a structural member.

As a method for laminating the active energy ray-curable material 7, for example, a discharge device using a nozzle suitable for the shape of the substrate, an applicator, a curtain coater, a roll coater,
Specific examples include a method of laminating with a means such as a spray coater or a spin coater. When a liquid curable material is laminated, it is preferable to degas the material and then avoid mixing of air bubbles.

Next, in FIGS. 5A, 5B and 5C,
As shown in FIG. 2, the second substrate 4 is laminated on the active energy ray curable material 7 of the first substrate 1. The second substrate 4
Are not necessary for the present invention. At this time, the second substrate 4 may be provided with a recess 5 for obtaining a desired liquid chamber volume at the liquid chamber forming portion, if necessary. Of course, like the first substrate 1, the second substrate 4 can be made of a desired material such as glass, plastic, photosensitive resin, metal, or ceramics. When performing from the second substrate 4 side, it is necessary that the active energy ray is transparent. Also,
The second substrate 4 may be provided with a supply port 6 for supplying ink in advance.

Although not shown above, the active energy ray-curable material 7 may be laminated after the second substrate 4 is laminated on the solid layer 3. As a stacking method in this case, a method of pressure-bonding the second substrate 4 to the first substrate 1, depressurizing the inside, and then injecting the active energy ray-curable material 7 is preferably used. When stacking the second substrate 4, for example, a spacer is provided between the substrates 1 and 4 or an end portion of the second substrate 4 is provided so that the active energy ray-curable material 7 has a required thickness. It is also possible to devise such as providing a convex portion on the.

Thus, after obtaining a laminated body in which the first substrate 1, the solid layer 3, the active energy ray-curable material 7 and the second substrate 4 are laminated in this order, (A), (B) of FIG. As shown in (C), a mask is formed on the active energy ray transparent substrate side (the second substrate 4 in this embodiment) so as to shield the liquid chamber formation planned site from the active energy rays 9. 8 is laminated, and the active energy ray 9 is irradiated from above the mask 8 (the black portion of the mask 8 shown in the figure is a portion which does not transmit the active energy ray, and the portion other than the black portion is the active energy ray. The part that is transparent). The irradiation of the active energy ray 9 cures the active energy ray-curable material 7 (see FIG. 5) in the irradiated portion to form the structural member 10, and the curing also causes the first substrate 1 and the second substrate 1 to be cured. The substrates 4 are also joined. The active energy ray curable material that is not irradiated with the active energy ray 9 remains uncured.

As the active energy ray 9, ultraviolet rays, electron rays, visible rays and the like can be used. However, ultraviolet rays and visible rays are preferable because they are exposed through the substrate, and ultraviolet rays are most suitable from the viewpoint of polymerization rate. ing. Ultraviolet ray sources include high-pressure mercury lamps, ultra-high-pressure mercury lamps, halogen lamps,
A light source having a high energy density such as a xenon lamp, a metal halide lamp, or a carbon arc is preferably used. The light from the light source has a high degree of parallelism and the less heat is generated, the more accurate processing can be performed.However, it is an ultraviolet light source generally used for printing plate making or printed wiring board processing or curing of photo-curable paint. Most of them can be used.

The mask 8 for the active energy rays 9 may be a metal mask, a silver salt emulsion mask, a diazo mask, etc., particularly when ultraviolet rays or visible rays are used. In addition, black ink is simply printed on the liquid chamber forming portion. Alternatively, a method such as sticking a sticker may be used.

Then, for example, when the ejection port surface is not exposed, the laminate, which has been cured by irradiation with the active energy rays 9, is cut at a required position by a dicing saw using a diamond blade or the like, if necessary. Then, the ejection port surface is exposed. However, this kind of cutting operation
It is not always necessary to carry out the present invention, for example, a liquid curable material is used, a mold is used when laminating the material, the ejection port is not closed and covered, and the ejection port surface is not covered. The cutting is not necessary when it is molded smoothly.

Then, the solid layer 3 and the uncured active energy ray-curable material 7 are removed from the above-mentioned laminated body after the irradiation with the active energy rays, and shown in FIGS.
The liquid chamber 11 and the opening (filter) are removed as shown in FIG.
A common liquid flow channel 14 (see FIG. 1) having 13 and an individual liquid flow channel 15 are formed.

The means for removing the solid layer 3 and the uncured active energy ray-curable material 7 (see FIG. 6) is not particularly limited, but specifically, for example, the solid layer 3 and the uncured active energy. A preferable method is a method of immersing the wire-curable material 7 in a liquid that dissolves, swells or peels and removes it. At this time, if necessary, ultrasonic treatment, spraying, heating, stirring, shaking, pressure circulation, or other removal promoting means can be used.

Examples of the liquid used for the removing means include halogen-containing hydrocarbon, ketone, ester,
Examples thereof include aromatic hydrocarbons, ethers, alcohols, N-methylpyrrolidone, dimethylformamide, phenol, water, water containing an acid or alkali, and the like. If necessary, a surfactant may be added to these liquids. In addition, when a positive type dry film is used as the solid layer 3, it is preferable to irradiate the solid layer 3 with ultraviolet rays again in order to facilitate the removal, and when other materials are used, the temperature is 40 to 60 ° C. It is preferred to warm the liquid.

In FIGS. 7A, 7B and 7C,
The state after removing the solid layer 3 and the uncured active energy ray-curable material 7 as described above is shown, but in the case of the present embodiment, the solid layer 3 and the uncured active energy ray-curable material 7 are cured. The functional material 7 is immersed in a liquid that dissolves it, and is dissolved and removed through the ejection port 16 (see FIG. 1) of the recording head and the liquid supply port 6.

After completion of the above steps, in order to optimize the distance between the electrothermal converter 2 and the discharge port, the discharge port surface may be cut, polished, or smoothed, if necessary.

Next, the first embodiment of the ink jet recording apparatus will be described.

In FIG. 8, a recording head 21 for recording a desired image by ejecting ink based on a predetermined recording signal.
Has the same structure as that shown in the above-described embodiment of the recording head, and is manufactured by the method of the embodiment of the above-described recording head manufacturing method.

The carriage 22 as a means for mounting the recording head on which the recording head 21 is mounted has two carriages.
A timing belt 28 slidably fitted to the guide shafts 23 and 24 in the direction of the arrow B and wound around a pulley 27 fixed to the output shaft of the carriage motor 25 and a pulley 26 rotatably supported. Is bound to one site. The recording head 21 has a structure in which the pulley 27 rotates forward and backward by the driving force of the carriage motor 25, so that the timing belt 28 rotates normally and reversely, and reciprocates in the direction of arrow B.

The recording paper 29, which is a recording medium, is guided by a paper pan 30 and conveyed by a paper feed roller (not shown) which is pressed against by a pinch roller. This conveyance is performed using the paper feed motor 36 as a drive source. The conveyed recording paper 29 is tensioned by the paper discharge roller 33 and the spur 34, and is pressed against the heater 31 by the paper pressing plate 32 formed of an elastic member. It is transported while being transported. The recording paper 29 to which the ink ejected from the recording head 21 adheres is warmed by the heater 31, and the adhered ink has its moisture evaporated and is fixed on the recording paper 29.

The recovery unit 35 is for maintaining the ejection characteristics in a normal state by removing foreign matters adhering to the ejection ports (not shown) of the recording head 21 and ink of high viscosity. ..

The recovery unit 35 has a cap 38a.
Is provided to prevent the occurrence of clogging by capping the ejection port of the recording head 21. An ink absorber 38 is disposed inside the cap 38a.

On the recording area side of the recovery unit 35, in order to contact the surface of the recording head 21 on which the ejection port is formed to clean foreign matters and ink droplets attached to the surface on which the ejection port is formed. Cleaning blade 37
Is provided.

Next, a second embodiment of the ink jet recording apparatus will be described.

FIG. 9 is a schematic perspective view showing only the main part of the second embodiment of the ink jet recording apparatus. The recording head 41 for ejecting ink based on a predetermined recording signal to record a desired image, The recording head has a configuration similar to that shown in the embodiment of the recording head described above, and is a full line type in which a plurality of ejection openings are provided over the entire width of the recording region of the recording medium, and the method for manufacturing the recording head described above. Manufactured by the method of the embodiment.

The recording head 41 is mounted on an ink jet recording apparatus main body (not shown), and an ejection opening surface 41a having a plurality of ejection openings arranged in a row is separated from the conveyance surface 42a of the conveyance belt 42 by a predetermined gap. In position.

The conveyor belt 42 is wound around two rollers 43a and 43b which are rotatably supported by the main body of the ink jet recording apparatus.
By forcibly rotating the individual rollers, they rotate in the direction of arrow C.

In the ink jet recording apparatus of the present embodiment, the recording medium sent out from the sheet feeding unit (not shown) (on the right side in the figure) toward the conveyor belt 42 is adsorbed on the conveyor surface 42a of the conveyor belt 42 and the recording head 41. Discharge port surface 41a
The recording head 41 is configured to pass through a gap between the transport surface 42a and the transport surface 42a, and at this time, recording is performed by ejecting ink from each ejection port of the recording head 41.

Next, an experimental example of the recording head of the present invention will be described.

Prior to this experiment, 100 recording heads of each of five types shown in Table 1 having different cross-sectional areas of the filter openings were prepared according to the manufacturing procedure of the recording heads shown in FIGS. ..

[0070]

[Table 1] The cross-sectional area of the discharge port of each sample shown in Table 1 is 2500 μm ²
(50 μm × 50 μm).

The procedure for producing a sample of the recording head used in this experiment will be described below.

First, an electrothermal converter (material HfB ₂ ) as an energy generating element is formed on a glass substrate (thickness 1.1 mm) as a first substrate, and then a positive electrode is formed on the first substrate. A photosensitive layer having a thickness of 50 μm and made of a dry film “OZATEC R225” [Hoechst Japan Ltd.] was formed by lamination. A mask having a pattern corresponding to the shape of the liquid flow path of each sample is overlaid on the photosensitive layer,
70mJ / c in the area excluding the liquid chamber and the planned filter formation area
UV irradiation of m ² was performed.

Next, spray development is carried out with a 5% aqueous solution of sodium metasilicate, and a thickness of about 50 is formed in the liquid flow path and the liquid chamber forming portion on the glass substrate containing the electrothermal converter.
A solid layer of micron relief was formed.

By the same operation procedure as above, 100 substrates for each sample, in which solid layers similar to those described above were laminated, were used for a total of 500 substrates.
After individual production, an epoxy resin "Cyracure UVR-6110" (manufactured by Nippon Union Carbide Co., Ltd.) was laminated as a liquid active energy ray curable material on each of the substrates on which the solid layer was formed. The stacking procedure was performed as follows.

The active energy ray-curable material was mixed with a catalyst (triphenylphonium hexafluoroantimonate) and degassed using a vacuum pump. Then, the defoamed active energy ray-curable material was applied to each of the first substrates on which the solid layer was laminated using an applicator to a thickness of 70 μm from the upper surface of the substrate.

Next, each of the first substrates laminated with this active energy ray-curable material has a thickness of 1.1 mm.
In order to form a liquid chamber, a glass substrate as a second substrate having a recess having a depth of 0.3 mm in the liquid chamber formation planned site and a through hole (supply port) for supplying the recording liquid in the center of the recess is planned. The positions of the parts were aligned and laminated.

Next, a film mask was brought into close contact with the upper surface of the second substrate of this laminated body to shield active energy rays from the site where the liquid chamber was to be formed, and the ultra-high pressure mercury lamp "Uniarc" [USHIO INC. Irradiation). At this time, the integrated intensity of light near 365 nm is 100
It was 0 mW / cm ² . Then, the film mask was removed, and the electrothermal converter was cut so as to be at a position of 0.1 mm from the discharge port to form a discharge port surface.

Each of the 500 laminated bodies with the discharge port surface exposed was dipped in ethanol to fill the liquid chamber with ethanol, and the discharge port surface was in contact with ethanol in an ultrasonic cleaning tank. The dissolution and removal operation was performed for about 3 minutes. After completion of dissolution and removal, washing was performed with a 5% NaOH aqueous solution and pure water. After washing, these laminates were dried and post-exposed at 10 J / cm ² using a high pressure mercury lamp to completely cure the active energy ray-curable material.

In all cases, in the liquid flow paths of the 500 recording heads thus produced, no solid layer residue was present. Further, these recording heads were mounted on an inkjet recording device, and pure water / glycerin / direct black 154 (water-soluble black dye) = 65/30
A discharge test was performed using an inkjet ink composed of / 5 (parts by weight). The results of the discharge test are shown in Table 2.

[0080]

[Table 2] In Table 2, “nozzle clogging” refers to the case where dust is clogged in the individual liquid flow channel when observed under a microscope, and the nozzle clogging occurrence rate is the individual liquid flow channel in which nozzle clogging has occurred. The number is expressed by the number / the number of recording heads. "Discharge" means the number of times dust clogged in the individual liquid flow path narrows the individual liquid flow path, and ink is not ejected. Indicates the number of times that the ejection force has decreased and the ink has not been ejected straight.

It can be seen from Table 2 that by providing the filter in the liquid flow path, the clogging of the nozzle is greatly reduced, and the discharge failure and the deviation in the printing are reduced. Moreover, the smaller the cross-sectional area of the filter opening, the greater the effect. When the cross-sectional area of the filter opening is smaller than the cross-sectional area of the discharge port, a more remarkable effect can be seen.

The present invention brings excellent effects particularly in a recording head and an inkjet recording device of a system which ejects ink by utilizing thermal energy, which is proposed by Canon Inc. among inkjet recording systems. It is a thing.

Regarding its typical structure and principle, see, for example, US Pat. Nos. 4,723,129 and 4740.
What is done using the basic principles disclosed in 796 is preferred. This method can be applied to both the so-called on-demand type and continuous type, but especially in the case of the on-demand type, a liquid (ink) is used.
By applying at least one drive signal to the electrothermal converter arranged corresponding to the sheet or liquid path holding the , Heat energy is generated in the electrothermal converter, and the film is boiled on the heat acting surface of the recording head,
As a result, bubbles can be formed in the liquid (ink) in a one-to-one correspondence with this drive signal, which is effective. The growth of this bubble,
The contraction causes the liquid (ink) to be ejected through the ejection opening to form at least one droplet. It is more preferable to make this drive signal into a pulse shape, because the bubble growth and contraction are immediately and appropriately performed, so that the ejection of the liquid (ink) with excellent responsiveness can be achieved. This pulse-shaped drive signal is disclosed in U.S. Pat.
Those described in 345262 are suitable. If the conditions described in US Pat. No. 4,313,124 of the invention relating to the rate of temperature rise on the heat acting surface are adopted, more excellent recording can be performed.

As the constitution of the recording head, other than the combination constitution (straight liquid passage or right-angled liquid passage) of the ejection port, the liquid passage, and the electrothermal converter as disclosed in the above-mentioned specifications. U.S. Pat. No. 4,558,333 and U.S. Pat. No. 44, which disclose a configuration in which a heat acting portion is arranged in a bending region.
A configuration using the specification of No. 59600 is also effective in the present invention. In addition, Japanese Laid-Open Patent Publication No. 123670/1984 discloses a configuration in which a common slit is used as a discharge portion of a plurality of electrothermal converters, and an opening for absorbing a pressure wave of thermal energy. The present invention is also effective as a configuration based on Japanese Patent Application Laid-Open No. 138461/1984, which discloses a configuration in which the above is associated with the discharge portion.

Further, as a full line type recording head having a length corresponding to the width of the maximum recording medium which can be recorded by the ink jet recording apparatus, a combination of a plurality of recording heads as disclosed in the above-mentioned specification is used. The present invention can exert the above-mentioned effects more effectively, although either the constitution satisfying the length or the constitution as one recording head integrally formed may be used.

In addition, by being mounted on the apparatus main body, it can be electrically connected to the apparatus main body and can be supplied with ink from the apparatus main body by a replaceable chip type recording head or the recording head itself. The present invention is also effective when a cartridge-type recording head that is specially provided is used.

A recovery means for the recording head, which is provided as a constitution of the ink jet recording apparatus of the present invention,
It is preferable to add a preliminary auxiliary means because the effects of the present invention can be further stabilized. Specifically, these are capping means for the recording head,
Cleaning means, pressurization or suction means, electrothermal converter or other heating element or preheating means by a combination of these, preheating mode for discharging other than recording is also stable. It is effective for making a recording.

Further, the recording mode of the ink jet recording apparatus is not limited to the recording mode only for the mainstream color such as black, but the recording head may be integrally formed or a plurality of combinations may be used. Alternatively, the present invention is extremely effective for an apparatus provided with at least one of full colors by color mixing.

In each of the embodiments of the present invention described above,
Although the ink is described as a liquid, it is an ink that solidifies at room temperature or below, and is softened or liquid at room temperature, or in the above-mentioned inkjet, the temperature of the ink itself is adjusted within the range of 30 ° C. to 70 ° C. In general, the temperature is controlled so that the viscosity of the ink is in a stable ejection range, so that the ink may be in a liquid state when the use recording signal is applied. In addition, it is possible to prevent the temperature rise due to thermal energy from being positively used as energy for changing the state of the ink from a solid state to a liquid state, or to use an ink that solidifies when left standing for the purpose of preventing ink evaporation. However, in any case, by applying heat energy such as ink that is liquefied by being applied according to a recording signal of heat energy and ejected as an ink liquid or that has already started to solidify when it reaches the recording medium. The use of an ink having a property of liquefying for the first time is also applicable to the present invention. In the present invention, the most effective one for each of the above-mentioned inks is to execute the above-mentioned film boiling method.

[0090]

Since the present invention is configured as described above, it has the following effects.

In the method of manufacturing an ink jet recording head according to the present invention, when the ejection port and the liquid flow path are formed, an opening portion acting as a filter is integrally formed by the same method. With this, when ejecting ink, dust larger than the cross-sectional area of the ejection port existing in the ink is blocked by the opening, so that the dust does not reach the vicinity of the ejection port, and ejection failure is greatly caused. In addition, the fluidity of the ink is suppressed by the opening, and the ink leaks from the ejection port or the ink is stored when the ink jet recording head is subjected to strong vibration or the like. Since it is possible to suppress ejection failure due to backflow to the unit side, it is possible to improve the function as an inkjet recording head without increasing the number of steps or the number of parts compared to the conventional manufacturing method.

[Brief description of drawings]

FIG. 1 is a partially cutaway perspective view of an embodiment of an inkjet recording head of the present invention.

FIG. 2 is a diagram illustrating an example of a method for manufacturing an inkjet recording head according to the present invention, showing a first example before forming a solid layer.
3 is a perspective view of the substrate of FIG.

3A and 3B are diagrams illustrating an embodiment of a method for manufacturing an inkjet recording head according to the present invention, in which FIG. 3A is a plan view of a first substrate after a solid layer is formed, and FIG. 3B is a second substrate. FIG.

FIG. 4 is a view for explaining an example of the method for manufacturing an inkjet recording head of the present invention, showing a cross-sectional view of a first substrate after a solid layer and an active energy ray-curable material are laminated,
3A is a cross section taken along the line AA ′ shown in FIG. 3, FIG. 3B is a cross section taken along the line BB ′ shown in FIG. 3, and FIG. 3C is a cross section taken along the line CC ′ shown in FIG.

FIG. 5 is a diagram illustrating an embodiment of a method for manufacturing an inkjet recording head according to the present invention, showing a cross-sectional view of a laminated body after laminating a second substrate, (A) showing AA in FIG. 3'is a sectional view, FIG. 3B is a sectional view taken along the line BB 'shown in FIG. 3, and FIG.
FIG. 9 is a sectional view taken along line CC ′ shown in FIG.

FIG. 6 is a diagram illustrating an embodiment of a method for manufacturing an inkjet recording head according to the present invention, showing a cross-sectional view of a laminated body after mask lamination, and (A) is a cross-sectional view taken along the line AA ′ in FIG. 3; ,
3B is a sectional view taken along the line BB ′ shown in FIG. 3, and FIG. 3C is a sectional view taken along the line CC ′ shown in FIG.

FIG. 7 is a diagram illustrating an example of a method for manufacturing an inkjet recording head of the present invention, showing a cross-sectional view of a solid layer and a laminate after removal of an uncured active energy ray-curable material, and (A). 3 is a sectional view taken along the line AA ′ shown in FIG. 3, and FIG.
3B is a sectional view taken along the line BB ′ shown in FIG. 3, and FIG. 3C is a sectional view taken along the line CC ′ shown in FIG.

FIG. 8 is a perspective view of a main part of the first embodiment of the inkjet recording apparatus of the present invention.

FIG. 9 is a perspective view of a main part of a second embodiment of the inkjet recording apparatus of the present invention.

FIG. 10 is a perspective view in which a part of a conventional inkjet recording head is broken away.

[Description of Reference Signs] 1 first substrate 2 electrothermal converter 3 solid layer 4 second substrate 5 recess 6 supply port 7 active energy ray curable material 8 mask 9 active energy ray 10 structural member 11 liquid chamber 12 pillar 13 Opening 14 Common Liquid Flow Path 15 Individual Liquid Flow Path 16 Discharge Port 21, 41 Recording Head 22 Carriage 23, 24 Guide Shaft 25 Carriage Motor 26, 27 Pulley 28 Timing Belt 29 Recording Paper 30 Paper Pan 31 Heater 32 Paper Holding Plate 33 Paper ejection roller 34 Spur 35 Recovery unit 36 Paper feed motor 37 Cleaning blade 38 Ink absorber 38a Cap 41a Discharge port surface 42 Conveyor belt 42a Conveying surface 43a, 43b Roller

Claims (7)

[Claims] 1. A method of manufacturing an ink jet recording head, which is provided corresponding to an energy generating element that generates energy used for ejecting ink from an ejection port and has a liquid flow path communicating with the ejection port. In advance, the energy generating element is formed on one surface of the substrate to form an element surface, and at least the liquid flow path is provided on the element surface, and at least a portion of the liquid flow path opposite to the ejection port side of the portion where the energy generating element is provided. Which corresponds to an opening having a cross-sectional area smaller than the cross-sectional area of the discharge port formed in part of the cross-section,
An inkjet recording head comprising: a step of forming a solid layer made of a removable material; a step of covering the substrate and the solid layer with a structural member; and a step of removing the solid layer from the substrate. Production method. 2. An ink jet recording head manufactured by the manufacturing method according to claim 1. 3. The ink jet recording head according to claim 2, wherein an electrothermal converter that generates thermal energy used for ejecting ink is provided as the energy generating element. 4. The ink jet recording head according to claim 2, which is a full line type in which a plurality of ejection openings are provided over the entire width of the recording area of the recording medium. 5. An inkjet recording apparatus comprising the inkjet recording head according to claim 2 and means for mounting the inkjet recording head. 6. The ink jet recording apparatus according to claim 5, wherein an electrothermal converter that generates thermal energy used for ejecting ink is provided as the energy generating element. 7. The inkjet recording apparatus according to claim 5, further comprising a full-line type inkjet recording head having a plurality of ejection openings provided over the entire width of the recording area of the recording medium.