JP2711016B2 - INK JET PRINT HEAD, INK JET PRINTING APPARATUS HAVING THE INK JET PRINT HEAD, AND METHOD OF MANUFACTURING THE INK JET PRINT HEAD - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Application Field] The present invention relates to an ink jet recording head that discharges ink to perform recording on a recording medium, an ink jet recording apparatus including the ink jet recording head, and the ink jet recording. The present invention relates to a head manufacturing method.

2. Description of the Related Art In general, an ink jet recording head (hereinafter, referred to as a “recording head”) applied to an ink jet recording system is provided with an ejection port for ejecting ink, and an ink for supplying the ejection port. A liquid chamber for storing, a liquid flow path communicating the discharge port with the liquid chamber, an energy generating element for generating energy for discharging ink provided at one portion of the liquid flow path, and the liquid chamber And a supply port for supplying ink from outside.

The following is known as a conventional method for manufacturing the recording head.

(1) A method for forming a discharge port, a liquid flow path, and a liquid chamber on a second substrate made of glass, metal, or the like by a processing means such as cutting or etching, including a first substrate provided with an energy generating element. After providing a concave portion and a supply port for communicating the liquid chamber with the outside, the second substrate is bonded to the first substrate with an adhesive by aligning the position of the energy generating element and the liquid flow path. Method.

(2) A positive or negative photosensitive dry film is attached to a first substrate made of glass or the like provided with an energy generating element, and corresponds to a discharge port, a liquid flow path, and a liquid chamber of the photosensitive dry film. The solid pattern having a pattern corresponding to the discharge port, the liquid flow path, and the liquid chamber is provided on the first substrate by masking or exposing the pattern to be exposed or exposing, and developing. A liquid curable material in which a curing agent is mixed is applied to an appropriate thickness on the solid layer and the first substrate, and the curable material is cured at a predetermined temperature for a long time. Next, the first substrate in which the curable material is cured is cut at a position where a discharge port is formed to expose an end face of the solid layer, and then immersed in a solvent that dissolves the solid layer. A method of dissolving and removing the solid layer from the first substrate cured to provide a space for forming a liquid flow path and a liquid chamber therein (see JP-A-61-15497).

(3) A positive or negative photosensitive dry film is attached to the first substrate provided with the energy generating element, and corresponds to a part of the discharge port, the liquid flow path, and the liquid chamber of the photosensitive dry film. A pattern is masked or exposed, exposed, developed, and a solid layer of a pattern corresponding to a part of the discharge port, the liquid channel, and the liquid chamber is provided on the first substrate. An active energy ray-curable material which is cured by an active energy ray is applied to the solid layer and the first substrate to an appropriate thickness, and a concave portion and a supply port for forming another part of the liquid chamber are provided. The active energy ray-transmissive second substrate is attached to the active energy ray-curable material so that the concave portion is aligned with a position where a liquid chamber is to be formed, thereby forming a laminate. Next, the active energy ray curable material is irradiated on the active energy ray curable material through the second substrate by masking the second substrate so as to hide a portion of the active energy ray curable material where the liquid chamber is to be formed. And cure. Then, after exposing the end face of the solid layer by cutting the laminate where the active energy ray-curable material is cured at a position forming a discharge port, the solid layer and the uncured active energy ray-curable material In a solvent in which the solid layer and the uncured active energy ray-curable material are dissolved and removed from the laminate to provide a space for forming a liquid flow path and a liquid chamber therein (Japanese Patent Application Laid-Open No. No. 62-253457).

[Problems to be Solved by the Invention] In the above-mentioned conventional method for manufacturing each print head, in the method for manufacturing a print head of (1), the concave portion for forming the liquid chamber provided on the second substrate is enlarged. Is advantageous in that a recording head having a large liquid chamber suitable for high-speed recording can be manufactured, but when the first substrate and the second substrate are bonded with an adhesive,
It is necessary to precisely align the fine energy generating element of the second substrate with the fine liquid flow path of the second substrate, which makes the apparatus complicated and expensive, lacks mass productivity, and reduces product productivity. There is a problem that the cost is increased.

The method (2) for manufacturing a print head has the advantage that precise alignment is not required when the first substrate and the second substrate are bonded to each other as in the method for manufacturing a print head (1). However, the volume of the liquid chamber cannot be so large because it is limited to the same height as the thickness of the patterned solid layer provided on the first substrate.
Since the process is complicated and time-consuming, and the number of processes is large, there is also a problem that mass productivity is lacking and the cost of the product is increased.

According to the method (3) of manufacturing a printhead, a printhead having a large liquid chamber can be manufactured by enlarging a concave portion for forming another part of the liquid chamber provided on the second substrate. There is an advantage that there is no need for precise alignment when bonding the first substrate and the second substrate as in the method of manufacturing a recording head of (1). As in the method of manufacturing a recording head, the steps are complicated and time-consuming, and the number of steps is further increased. Thus, there is a problem that the productivity is also low and the cost of the product is increased.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems of the related art, and does not require a step of precisely aligning and bonding two substrates and forming a large liquid chamber with simple and small steps. It is an object of the present invention to provide an inexpensive inkjet recording head suitable for mass production, an inkjet recording apparatus having the inkjet recording head, and a method of manufacturing the inkjet recording head.

[Means for Solving the Problems] To achieve the above object, an ink jet recording head according to the present invention comprises: an ejection port from which ink is ejected; and a liquid chamber for temporarily storing ink to be supplied to the ejection port. A liquid flow path communicating the discharge port with the liquid chamber, an energy generating element for generating energy for discharging ink from the discharge port, and a supply port for supplying ink to the liquid chamber from outside. An ink jet recording head comprising: a substrate having an element surface on which the energy generating element is formed as a film; and a structural member fused and simultaneously formed on the element surface of the substrate by transfer molding; On the surface of the structural member facing the substrate, grooves for forming the discharge ports and the liquid flow paths are formed corresponding to the positions of the energy generating elements. It is characterized in that a cavity is formed with the element surface of the substrate as a bottom wall for constituting the liquid chamber communicating with the groove.

In some cases, the peripheral edge of the opening end of the cavity projects toward the side opposite to the substrate.

Further, the energy generating element is provided with an electrothermal converter for generating thermal energy for discharging ink, or a full line type in which discharge ports are formed over the entire width of a recording area of a recording medium. It can be.

Next, an ink jet recording apparatus of the present invention includes any one of the ink jet recording heads of the present invention, and performs recording by discharging ink from a discharge port of the ink jet recording head based on a recording signal. .

Next, the method for manufacturing an ink jet recording head of the present invention comprises: an ejection port from which ink is ejected; a liquid chamber for temporarily storing ink to be supplied to the ejection port; and the ejection port and the liquid chamber. In a method for manufacturing an ink jet recording head, comprising: a communicating liquid flow path; and an energy generating element for generating energy for discharging ink from the discharge port, the energy generating element is formed on one surface of a substrate in advance. A solid made of a removable material corresponding to the discharge port, a part of the liquid chamber, and the liquid flow path corresponding to the position of the energy generating element on the element surface of the substrate. A step of forming a layer, on the element surface of the substrate on which the solid layer is formed, by transfer molding, of a surface corresponding to a discharge port and a portion corresponding to a part of a liquid chamber in the surface of the solid layer. A step of fusing the structural member at the same time as the molding so that one part of the surface is exposed and the other surface is covered; and, after releasing, the solid layer from the substrate on which the structural member is fused at the same time as the molding. And a discharge port from which ink is discharged, a liquid chamber for temporarily storing ink to be supplied to the discharge port, and the discharge port and the liquid chamber. A method for manufacturing an ink jet recording head, comprising: a liquid flow path that communicates with the ink jet head; and an energy generating element that generates energy for discharging ink from the discharge port. It is formed of a removable material corresponding to the discharge port, a part of the liquid chamber, and the liquid flow path corresponding to the position of the energy generating element on the element surface of the substrate. Solid layer And forming, on the element surface of the substrate on which the solid layer is formed, by transfer molding, one portion of the surface of the solid layer corresponding to a part of the liquid chamber is exposed and the other surface is exposed. A step of forming and fusing the structural member at the same time as being coated, and forming a discharge port of a liquid flow path equivalent portion while releasing the structural member and the substrate while releasing the mold. And then forming a discharge port on a cut surface formed by the cutting, which is an end of the liquid flow path, by removing the solid layer from a liquid flow path equivalent part. A discharge port from which ink is discharged, a liquid chamber for temporarily storing ink to be supplied to the discharge port, a liquid flow path communicating the discharge port with the liquid chamber, An energy generating energy for discharging ink from the discharge port A method for manufacturing an ink jet recording head including a energy generating element, wherein two ink jet recording heads are arranged to face each other such that the liquid flow paths of the two ink jet recording heads are continuous with respect to the discharge port. Using a substrate having a size corresponding to the above, on one surface of the substrate, energy-generating elements for the two ink jet recording heads are formed and formed in an element surface corresponding to the opposed arrangement, and an element surface is formed on the element surface of the substrate. A solid layer made of a removable material corresponding to the two liquid passages corresponding to the positions of the energy generating elements and a part of each liquid chamber of the ink jet recording head. A step of forming the solid layer corresponding to the facing arrangement; and transferring the solid surface of the solid layer to the element surface of the substrate by transfer molding. Structural members are formed and melted simultaneously with the facing arrangement so that one part of the surface of each part corresponding to a part of the liquid chamber of each of the ink jet recording heads is exposed and the other surface is covered. Attaching, after releasing, the structural member and the substrate are cut along the opposed center line of the opposed arrangement in the fused state, and then, the solid layer is removed. A discharge port from which ink is discharged, a liquid chamber for temporarily storing ink to be supplied to the discharge port, and a liquid flow communicating the discharge port with the liquid chamber. A method for manufacturing an ink jet recording head comprising a path and an energy generating element for generating energy for discharging ink from the discharge port, wherein two of the ink jet recording heads are both centered on the discharge port. As a set, the liquid flow paths of the ink jet recording head are arranged in opposition to form a set, and a substrate having a size corresponding to a plurality of the sets is used. A plurality of sets of energy generating elements for the head are formed in a film corresponding to the respective opposed arrangements to form an element surface, and the two elements corresponding to the positions of the energy generating elements are continuously formed on the element surface of the substrate. Forming a solid layer made of a removable material corresponding to the liquid flow path to be formed and a part of each liquid chamber of each of the ink jet recording heads in correspondence with each of the opposed arrangements; and On the formed element surface, one part of the surface of each part corresponding to a part of each liquid chamber of each of the ink jet recording heads is exposed by transfer molding. A step of forming and fusing the structural member corresponding to each of the opposed arrangements so as to cover the other surfaces, and simultaneously fusing the structural member, and after releasing, the structural member and the substrate are kept in the fused state. Cutting along the boundary between the adjacent sets and the center line of the opposed arrangement, and then removing the solid layer.

A discharge port from which the ink is discharged; a liquid chamber for temporarily storing ink to be supplied to the discharge port; a liquid flow path communicating the discharge port with the liquid chamber; A method for manufacturing an ink jet recording head comprising: an energy generating element for generating energy for discharging ink; a method comprising: forming a film of the energy generating element on one surface of a substrate in advance to form an element surface; Forming a solid layer made of a removable material corresponding to the discharge port and the liquid flow path corresponding to the position of the energy generating element; and transferring the solid layer to the element surface of the substrate on which the solid layer is formed. By molding, the structural member is molded so that the surface corresponding to the discharge port and the surface corresponding to the connection portion of the liquid flow path to the liquid chamber are exposed and the other surfaces are covered. And a step of removing the solid layer from the substrate on which the structural member is fused simultaneously with the molding after the mold release, and a discharge port from which ink is discharged. A liquid chamber for temporarily storing ink to be supplied to the discharge port, a liquid flow path communicating the discharge port with the liquid chamber, and energy for generating energy for discharging ink from the discharge port. In a method of manufacturing an ink jet recording head including a generating element, the energy generating element is formed in advance on one surface of a substrate to form an element surface, and the discharge port and the energy generating element are formed on the element surface of the substrate. A step of forming a solid layer made of a removable material corresponding to the liquid flow path corresponding to a position; and, on the element surface of the substrate on which the solid layer is formed, transfer molding the solid layer. Forming and fusing the structural member at the same time as molding so that the surface corresponding to the connection portion of the liquid flow path to the liquid chamber of the surface is exposed and the other surface is covered; The substrate and the fused state are cut at a position where the discharge port is formed in the liquid flow path equivalent portion, and then the solid layer is removed from the liquid flow path equivalent portion by removing the solid layer from the liquid flow path equivalent portion. Forming a discharge port on a cut surface formed by the cutting, which is an end portion, a discharge port from which ink is discharged, and temporarily supplying ink to be supplied to the discharge port. For manufacturing an ink jet recording head, comprising: a liquid chamber for temporarily storing, a liquid flow path communicating the discharge port with the liquid chamber, and an energy generating element for generating energy for discharging ink from the discharge port. In the above two ink jets The recording head uses a substrate having a size corresponding to that of the ink-jet recording heads arranged so that the liquid flow paths of both the ink-jet recording heads are continuous with the ejection port as a center. Two heads of energy generating elements are formed in a film corresponding to the facing arrangement to form an element surface, and the two elements corresponding to the positions of the energy generating elements are continuous with each other on the element surface of the substrate. Forming a solid layer made of a removable material corresponding to the liquid flow path in correspondence with the facing arrangement; and, on the element surface of the substrate on which the solid layer is formed, by transfer molding, the surface of the solid layer is formed. A step of simultaneously fusing and simultaneously forming a structural member corresponding to the facing arrangement so that each surface corresponding to a connection portion of each liquid flow path to the liquid chamber is exposed and the other surface is covered, After the mold, cutting the structural member and the substrate along the opposed center line of the opposed arrangement in the fused state, and thereafter, removing the solid layer. A discharge port from which ink is discharged, a liquid chamber for temporarily storing ink to be supplied to the discharge port, a liquid flow path communicating the discharge port with the liquid chamber, and the discharge port A method for manufacturing an ink jet recording head, comprising: an energy generating element for generating energy for discharging ink from the ink jet recording head. A plurality of the ink jet recording heads are provided on one surface of the substrate by using a substrate having a size corresponding to a plurality of the pairs arranged in such a way that the roads are continuous. The two liquid flow paths corresponding to the positions of the energy generating elements are formed on the element surface of the substrate by forming a film corresponding to each of the opposed energy generating elements. Forming a solid layer made of a removable material corresponding to each of the opposed arrangements; and, on the element surface of the substrate on which the solid layer is formed, by transfer molding, of the surface of the solid layer, Forming a structural member corresponding to each of the opposed arrangements and simultaneously fusing the structural member so that each surface corresponding to a connection portion of each liquid flow path to the liquid chamber is exposed and the other surface is covered; After the mold, the structural member and the substrate are cut along the boundary line between the adjacent sets and the opposing center line of the opposing arrangement while maintaining the fused state. And a removing step. There is also

Further, instead of the step of cutting the structural member and the substrate along the boundary between the adjacent sets and the opposing center line of the opposing arrangement while maintaining the fused state, and then removing the solid layer, In the structure member and the substrate, in a fused state, cut along the opposed center line of the opposed arrangement to remove the solid layer, after that, the structure member and the substrate The method further comprises a step of cutting along the boundary between the adjacent sets in the fused state.

[Operation] In the inkjet recording head of the present invention configured as described above, a space surrounded by the groove formed on the surface of the structural member facing the substrate and the element surface of the substrate constitutes a liquid flow path, An opening that opens to the outside of the space constitutes a discharge port. A cavity which communicates with the groove formed in the structural member and has an element surface as a bottom wall constitutes a liquid chamber, and an opening of the cavity serves as a supply port.

Next, in the method for manufacturing an ink jet recording head according to the present invention, the solid layer is formed such that a portion corresponding to the liquid flow path is aligned with the energy generating element of the substrate.
The structural members for forming the discharge port, the liquid flow path, and the liquid chamber are fused to the one surface of the substrate on which the solid layer is formed by transfer molding at the same time as molding.

The solid layer is removed from the surface that is not covered by the structural member, or is removed from the surface and the cut and exposed surface, and a discharge port and a liquid flow path are formed on the surface of the structural member facing the substrate. A space to be formed is formed, and a cavity, that is, a liquid chamber is formed in the structural member with the element surface of the substrate communicating with the space as a bottom wall.

Example An example of the present invention will be described with reference to the drawings.

First, a first embodiment of an ink jet recording head (hereinafter, referred to as “recording head”) will be described.

In FIG. 1, a plurality of electrodes 2 having electrothermal transducers 2a are formed on one surface of a substrate 1 made of glass, silicon wafer, or the like by a semiconductor manufacturing process such as etching, vapor deposition, or sputtering. Are arranged side by side, and one surface is an element surface 1a. Also,
A structural member 3 made of one member made of a thermosetting resin such as an epoxy resin or a silicon resin is fused to the element surface 1a simultaneously with molding by a transfer molding.

On the surface of the structural member 3 facing the element surface 1a, a plurality of grooves are formed corresponding to the positions of the electrothermal transducers 2a, respectively, and a space surrounded by the groove and the element surface 1a is formed. Each of the liquid passages 3b constitutes a liquid passage 3b, and the openings opened to the outside of the respective spaces constitute the discharge ports 3a. The structural member 3 is formed with a cavity having an element surface 1a as a bottom wall which communicates with each of the grooves (liquid flow path 3b) to form a liquid chamber 3c. An opening communicating between the liquid chamber 3c) and the outside (such as a connector 4 described later)
The supply port 3d is formed open in the same direction as the element surface 1a faces.

A supply pipe 5 connected to an ink tank (not shown) or the like is connected to the supply port 3d via a connector 4, and ink is supplied from the ink tank to the liquid chamber 3c through the supply pipe 3d. It has become.

Here, the operation when the ink is ejected from each of the ejection ports 3a will be described. The ink supplied to the liquid chamber 3c and temporarily stored enters the liquid channel 3b by capillary action, and the ejection port 3a To form a meniscus to keep the liquid channel 3b filled. At this time, when the electrothermal transducer 2a is energized through the electrode 2 and generates heat, the ink on the electrothermal transducer 2a is rapidly heated and bubbles are generated in the liquid flow path 3b,
The ink is ejected from the ejection port 3a by the expansion of the bubble.

In the present embodiment, an example is shown in which the electrode 2 is provided with the electrothermal transducer 2a as an energy generating element for generating energy for discharging ink. However, the present invention is not limited to this. Or a piezoelectric element that generates mechanical energy.

Further, the discharge ports 3a have a high density of 128
Or a total number of 256 can be formed, and a full line type can be formed by forming as many as the entire width of the recording area of the recording medium.

Next, a second embodiment of the recording head will be described.
As shown in FIG. 2, the recording head according to the present embodiment includes a supply port 23d, which is an opening communicating the cavity (the liquid chamber 23c) with the outside, at the periphery of the opening end on the outside (connector 24 side) of the supply port 23d. A protruding portion 23e protruding toward the non-substrate side is formed integrally with the structural member 23. The other points are the same as those of the first embodiment of the recording head, and the description is omitted.

The protrusion 23e can perform a function of positioning when the connector 24 is connected to the supply port 23d, and when bonded with an adhesive or the like, the bonding surface becomes large,
Adhesion can be made stronger.

Next, a first embodiment of a method for manufacturing a recording head will be described.

 First, a process of providing a solid layer on a substrate will be described.

In FIG. 3 (a), three electrodes having electrothermal transducers 32a are formed on an element surface 31a of a substrate 31 made of glass, silicon wafer, or the like by a semiconductor manufacturing process such as etching, vapor deposition, or sputtering. They are arranged at a predetermined interval. In this embodiment, a description will be given of a case where three energy generating elements are provided.
It goes without saying that the number of energy generating elements and the number of liquid flow paths and discharge ports corresponding thereto are not limited to the above-mentioned three, but can be appropriately changed and provided to other numbers.

Although not shown, the element surface 3 including each electrode 32 and each electrothermal converter 32a is used for the purpose of improving durability and the like.
It is general to provide various functional layers such as a protective film on 1a. In the present embodiment, the effect is exhibited regardless of the presence or absence of these functional layers and the material.

FIG. 3 (b) shows a discharge port for discharging ink, a part of a liquid chamber for storing ink to be supplied to the discharge port, and the discharge port on the element surface 31a of the substrate 31. A pattern-like solid layer corresponding to a liquid flow path communicating with the liquid chamber
This shows a state in which 36 is formed, and three liquid flow path equivalent portions 36b corresponding to the liquid flow paths in the solid layer 36 are the electrodes 3
2 respectively.

As a means for forming the solid layer 36 on the element surface 31a of the substrate 31, for example, a positive or negative photosensitive dry film having an appropriate thickness is attached to the element surface 31a, and an ejection port of the photosensitive dry film is formed. A pattern corresponding to the liquid flow path and the liquid chamber is masked or exposed and exposed to light and developed to form a solid layer 36 having a pattern corresponding to the discharge port, the liquid flow path and the liquid chamber on the element surface 31a. Such photolithography means can be used. In this case, the material of the photosensitive dry film may be any material that can be dissolved and removed by a solvent in a later step described later. It is preferable to use a positive photosensitive dry film because the cross-sectional shape of the patterned solid layer 36 is formed closer to a rectangle than that of a negative photosensitive dry film.

In addition to the photolithography means, it is also possible to provide the pattern-like solid layer 36 to an appropriate thickness by printing means such as screen printing, intaglio printing using an intaglio prepared by etching a metal substrate (eg, Ni, Cu). it can. Examples of the material of the solid layer that can be used for the printing means include a polyvinyl alcohol resin in an aqueous solution, and a solvent-soluble resin such as a vinyl chloride resin, a vinyl acetate resin, a vinyl chloride vinyl acetate copolymer, and a styrene resin.

Next, the solid layer of the substrate 31 is formed by transfer molding.
The step of fusing the structural member to the element surface 31a on which the 36 is formed at the same time as the molding is described.

First, a mold used for the transfer molding will be described. As shown in FIG. 3 (c), the mold comprises a first mold 37 and a second mold 38.

The first mold 37 has a concave portion having a depth equivalent to the thickness of the substrate 31 for fitting and fixing the substrate 31. When the substrate 31 is fitted into the concave portion, the substrate 31 Is configured such that the element surface 31a is flush with the parting surface.

The second mold 38 is formed with a cavity 38a for molding a structural member constituting a discharge port, a liquid flow path, and a liquid chamber, and a part of an inner wall of the cavity 38a is used for mold clamping. Then, the solid layer 36 comes into contact with three discharge port-equivalent surfaces 36a, which are surfaces corresponding to the discharge ports, respectively. In the second mold 38, a hollow portion serving as a liquid chamber in the structural member and a protruding portion 38b for forming a supply port for supplying ink from outside to the liquid chamber are formed inside the cavity portion 38a. The tip surface of the protruding portion 38b is
The solid layer 36 abuts on the upper surface in the drawing of a part 36c corresponding to a part of the liquid chamber of the liquid chamber. Further, a part of the element surface 31a of the substrate 31 including the electrical connection portion 32b of each electrode 32 is
The second mold 38 is configured to protrude from the cavity 38a toward the parting surface of the second mold 38.

The direction of mold opening of the first mold 37 and the second mold 38 is as follows:
The direction is perpendicular to the element surface 31a of the substrate 31.

When molding the structural member, the second mold of the solid layer 36 is used.
The surface 36a corresponding to each of the discharge ports abutting on the inner wall of the cavity 38a and the portion 36c corresponding to a part of the liquid chamber abutting on the distal end surface of the protruding portion 38b are slightly melted by the heat during molding to form the cavity 38a. The molding material is in close contact with the inner wall and the distal end surface of the protruding portion 38b to prevent the molding material from entering.

Further, a flexible member such as silicone rubber, fluorine-based rubber, or polytetrafluoroethylene may be attached to the tip end surface of the protrusion 38b.

3 (d) and 3 (e), the structural member 39 is
The first mold 37 and the second mold 38 are used for transfer molding and fused to the element surface 31a of the substrate 31, on which the solid layer 36 is formed, simultaneously with molding.

The structural member 39 exposes the electrical connection portions 32b of the respective electrodes 32, and further includes a surface 36a corresponding to a discharge port on the surface of the solid layer 36 and the second mold 38 of a portion 36c corresponding to a liquid chamber. Protrusion
38b exposes the surface in contact with and covers other surfaces.

The transfer molding uses a thermosetting epoxy resin as a material of the structural member 39, and a resin preheating temperature of 60 to 90 ° C.,
It can be carried out according to the general molding conditions of an injection pressure of 20 to 140 kgf / cm ² , a mold temperature of 100 to 180 ° C., a curing time of 1 to 10 minutes, and post-curing after molding. The structural member
As other materials of 39, materials that are liquid and can be used at room temperature, such as room temperature curing, heat curing, and ultraviolet curing, such as epoxy resin, acrylic resin, diglycol dialkyl carbonate resin, unsaturated polyester resin, and polyurethane resin , A polyimide resin, a melamine resin, a phenol resin, and a urea resin.

Next, a step of removing the solid layer 36 from the substrate 31 to which the structural member 39 has been fused at the same time as the molding after the release from the mold will be described.

As the means for removing the solid layer 36, an optimal means is selected according to the material for forming the solid layer 36. Generally, the structural member is dissolved in a solvent for dissolving, swelling, and peeling the solid layer 36. Means 39 is used to immerse and remove the substrate 31 fused at the same time as molding. At this time, if necessary, ultrasonic treatment,
Means for promoting removal of spray, heating, stirring and the like may be added. When a positive photosensitive resin is used for the solid layer 36, an aqueous solution containing acetone or other ketones, esters, alcohols, alkalis, or the like can be used as a solvent for removal.

FIG. 3 (f) shows a structure in which the solid layer 36 has been removed from the substrate 31 to which the structural member 39 has been fused at the same time as molding. A space is formed inside the structural member 39 after the solid layer 36 is removed, and the space is formed by three discharge ports 39a and three liquid channels 3
9b, a liquid chamber 39c and a supply port 39d.

By executing the method of manufacturing a print head according to the present embodiment described above, the print head shown in FIG. 1 can be manufactured.

As an effect of the present embodiment, the alignment of each liquid flow path 39b with respect to each electrode 32 having each electrothermal converter 32a provided on the element surface 31a of the substrate 31 is performed when the solid layer 36 is formed on the element surface 31a. And a complicated and expensive apparatus for precisely aligning and bonding the fine energy generating element of the first substrate and the fine liquid flow path of the second substrate, which are found in the conventional method. Becomes unnecessary.

The step of providing the structural member 39 for forming each of the discharge ports 39a, each of the liquid flow paths 39b, and the liquid chamber 39c is performed by forming the structural member 39 on the element surface 31a on which the solid layer 36 is formed by transfer molding.
Is fused at the same time as molding, so apply a curable material mixed with a curing agent found in the conventional method and leave it for a long time, or apply an active energy ray curable material and irradiate it with active energy rays This is simpler and requires less time than the complicated and time-consuming process of providing a structural member. Further, at the time of molding the structural member 39,
The supply port can be formed at the same time. Further, the liquid chamber 39
The volume of c can be freely increased without being limited by the thickness of the solid layer 36.

Next, a description will be given of a second embodiment of the method of manufacturing the recording head.

In the first embodiment of the above-described method of manufacturing a recording head, a discharge port-equivalent surface 36a is formed in the solid layer 36, and a structural member 39 is formed by exposing the discharge port-equivalent surface 36a. Although the example in which the opening becomes the discharge port 39a as it is after the removal is shown, the method of the present embodiment extends the position corresponding to the liquid flow path of the solid layer on the element surface of the substrate beyond the position where the discharge port is formed. A resin board diamond blade is formed at the position where the discharge port is formed while the structural member and the substrate are kept in the fused state after the mold is released. (Thickness: 0.3 mm, # 2400) or the like, the cut surface is polished, and the solid layer is removed. The other points are the same as those of the first embodiment of the method of manufacturing the recording head, and the description is omitted.

In the present embodiment, the cut surface is a discharge port surface in which a plurality of discharge ports are arranged in parallel, but when the cut surface is polished, since the solid layer has not been removed yet, the polishing swarf may be a liquid. There is an advantage that it does not enter the flow path.
In other respects, the same effects as in the first embodiment of the method for manufacturing a recording head can be obtained.

Next, a third embodiment of the method for manufacturing a recording head will be described.

In the manufacturing method of the present embodiment, two print heads are simultaneously manufactured halfway in a state where they are opposed to each other so that both liquid flow paths are continuous with each other as a center, and then the two opposed print heads are opposed to each other. This is to obtain two recording heads by cutting at the position where the ejection port, which is the center line, is formed.

In FIG. 4 (a), on the element surface 41a of the substrate 41 having a size corresponding to the arrangement of the two recording heads opposed to each other, an electrode having two electrothermal transducers 42a for two recording heads (the In the embodiment, six are shown for convenience of explanation) 42 are formed in three films symmetrically with respect to a position (hereinafter, referred to as “discharge port forming device”) 50 where discharge ports are formed.

As shown in FIG. 4 (b), a pattern-like solid layer 46 for two recording heads is formed on the element surface 41a. Six liquid flow path equivalent parts 46 are provided one by one symmetrically with respect to the formation position 50.
The three b are symmetrically arranged with respect to the discharge port forming position 50. Further, two liquid flow path equivalent portions 46b forming a pair among the respective liquid flow passage equivalent portions 46b are continuous with the discharge port formation 50.

The substrate 41 on which the solid layer 46 is formed is mounted in a mold composed of a first mold 47 and a second mold 48 shown in FIG. 4C, and the structure for two recording heads is formed by transfer molding. The member is fused to the element surface 41a simultaneously with molding. The first
The mold 47 and the second mold 48 are used to mold the structural members for two recording heads symmetrically with respect to the ejection port formation position 50.
Again, the shapes are symmetrical with respect to the ejection port formation position 50.

The structural member 49 shown in FIG. 4 (d) is formed by transfer molding using the first mold 47 and the second mold 48 to the substrate 41.
Is formed and fused to the element surface 41a on which the solid layer 46 is formed.

The substrate 41 on which the structural members 49 for the two recording heads are fused at the same time as the molding is separated from the substrate 41 and then cut at the discharge port forming position 50. After the polishing of each of the cut surfaces 49, the solid layers 46 remaining inside are removed.

The points other than those described above are the same as those of the first embodiment of the method of manufacturing the recording head, and thus the description thereof is omitted.

In this embodiment, there is an advantage that two print heads can be obtained at the same time with almost the same number of steps as in the first or second embodiment of the method of manufacturing a print head.

Next, a description will be given of a fourth embodiment of the method of manufacturing the recording head.

This embodiment is an application of the method for simultaneously manufacturing two print heads described in the third embodiment of the above-described method of manufacturing a print head. At the same time.

5 (a) and 5 (b), a strip-shaped substrate 61 is shown.
The element surface 61a is provided with one structural member 69 for two recording heads.
As a set, a plurality of sets (10 sets in the figure) of the structural members 69 are shared by the transfer molding in parallel with each other while sharing the opposing surfaces of the opposing arrangements, and are fused at the same time. It is symmetrical with respect to the discharge port forming position 70 which is the facing surface of the facing arrangement. On the element surface 61a of the substrate 61, of course, an electrode (not shown) having an electrothermal converter and a solid layer 66 are provided corresponding to the plural sets of structural members 69.

The arrangement of runners for molding the plurality of sets of structural members 69 will be described. The gate 73a of the main runner 73 that is continuous from a sprue (not shown) is connected to one set of structural members
9 is disposed at one end of the one end farthest from the discharge port forming position 70, and the gate portion of the pair of structural members 69 is provided.
At one end of the other end farthest from the discharge port forming position 70 on the side opposite to 73a, a sub-runner 72 that is continuous with a pair of adjacent structural members 69 is provided. Between each of the plural sets of structural members 69 from the left end to the right end in the drawing, sub-runners 72 are alternately arranged one by one with the discharge port forming position 70 interposed therebetween in a similar configuration, and the structure of the set at the right end in the drawing is shown. The member 69 has an air bleeding part at a position that is alternated with the position of the last subrunner 72.
74 are arranged. By arranging the runners as described above, the molding material spreads evenly, and even if each structural member 69 is distorted due to residual internal stress after molding, the position of each sub-runner 72 and gate portion 73a is separated from the discharge port. Therefore, distortion near the discharge port can be minimized.

The substrate 61 on which the plurality of sets of the structural members 69 are fused at the same time as the molding is released, and then cut by the discharge port forming apparatus 70, and the cut surfaces of the substrate 61 separated into two (the cut surfaces of the respective structural members 69). After the respective cut surfaces (including the cut surfaces) are polished, the solid layer 66 remaining inside is removed. Further, the two separated substrates 61
May be further cut along the boundary between the two adjacent structural members to separate it into one corresponding to one recording head, and then polished to remove the solid layer 66. .

The points other than those described above are the same as those of the third embodiment of the method of manufacturing the recording head, and thus the description thereof is omitted.

In this embodiment, a large number of recording heads can be manufactured at one time. Further, when the substrate 61 on which a plurality of sets of the structural members 69 are fused at the same time as the molding is released, the substrate 61 is cut along the discharge port forming position 70, and the solid layer 66 is removed in a state of being separated into two. Since the recording heads are not scattered, the handling when removing the solid layer is convenient.

Next, a description will be given of a fifth embodiment of the method of manufacturing the recording head.

In the fourth embodiment of the recording head manufacturing method described above, an example is shown in which a plurality of sets of structural members 69 are simultaneously formed and fused on the element surface 61a of the strip-shaped substrate 61. As shown, a disk-shaped substrate 81 such as a silicon wafer is provided.
Plural sets on the element surface 81a (44 sets are illustrated in the figure)
Is fused simultaneously with molding. The 44 sets of structural members 89 are arranged in four rows, one for each row.
Main runners 83 are provided individually. The sub-runner 82 and the air vent 84 are provided in the same configuration as in the fourth embodiment of the method of manufacturing a recording head described above.

The points other than those described above are the same as those of the above-described fourth embodiment of the method of manufacturing a recording head, and thus description thereof will be omitted.

The effect of this embodiment can be the same as that of the fourth embodiment of the method of manufacturing a recording head.

Next, a description will be given of a sixth embodiment of the method of manufacturing the recording head.

In each of the first to fifth embodiments of the method for manufacturing a recording head described above, an example is shown in which a part corresponding to a liquid chamber is formed in a solid layer provided on an element surface of a substrate. This method is performed without forming a part corresponding to a part of a liquid chamber in a solid layer provided on an element surface of a substrate.

In FIG. 7, the solid layer 96 formed on the element surface 91a of the substrate 91 does not have a portion corresponding to a part of the liquid chamber. In this case, the protruding portion 98b of the second mold 98 has a tip surface abutting on the element surface 91a on which the electrodes 92 are formed and formed at the time of mold clamping, and a part of a side wall of the tip portion has a shape corresponding to each part. The liquid passage equivalent portion 96b is configured to come into contact with a surface corresponding to a connection portion to the liquid chamber.

Except for the points described above, the present embodiment can be the same as the configuration of each embodiment of the method of manufacturing a recording head described above.

Next, a mold for forming a projection at the opening end of the supply port shown in the second embodiment of the recording head will be described.

As shown in FIG. 8, the mold for forming the protrusion has a sub-cavity 58c formed around the entire periphery of the base of the protrusion 58b of the second mold 58.

By forming the subcavity 58c in the second mold used in each of the above-described embodiments of the method of manufacturing a recording head, a projection can be formed at the opening end of the supply port of the recording head to be manufactured.

Next, a first embodiment of the ink jet recording apparatus will be described.

In FIG. 9, a recording head 101 that discharges ink based on a predetermined recording signal and records a desired image has a configuration similar to that of the recording head described in the first or second embodiment. In addition, the recording head is manufactured by any one of the first to sixth embodiments of the manufacturing method of the recording head described above.

A carriage 102 on which the recording head 101 is mounted is slidably fitted to two guide shafts 103 and 104 in the direction of arrow B, and a pulley 1 fixed to an output shaft of a carriage motor 105.
It is coupled to a part of a timing belt 108 which is wrapped around 07 and a pulley 106 which is rotatably supported. The recording head 101 is configured such that the pulley 107 rotates forward and backward by the driving force of the carriage motor 105, so that the timing belt 108 rotates forward and backward, and reciprocates in the direction of arrow B.

The recording paper 109 as a recording medium is guided by a paper pan 110, and is conveyed by a paper feed roller (not shown) pressed by a pinch roller. This conveyance is performed using the paper feed motor 116 as a drive source. The transported recording paper 109 is tensioned by the paper ejection roller 113 and the spur 114, and is pressed against the heater 111 by the paper pressing plate 112 formed of an elastic member.
It is transported while being in close contact with the heater 111. The recording paper 109 to which the ink ejected by the recording head 101 adheres,
The ink that has been heated and adhered by the heater 111 evaporates its moisture and is fixed on the recording paper 109.

The recovery unit 115 is for maintaining the ejection characteristics in a normal state by removing foreign matters and ink having increased viscosity attached to ejection openings (not shown) of the recording head 101.

The recovery unit 115 is provided with a cap 118a for capping the discharge port of the recording head 101 to prevent clogging. An ink absorber 118 is provided inside the cap 118a.

In addition, a cleaning blade is provided on the recording area side of the recovery unit 115 so as to contact the surface of the recording head 101 where the ejection port is formed, and to clean foreign matter and ink droplets attached to the surface where the ejection port is formed. 117 are provided.

Next, a second embodiment of the ink jet recording apparatus will be described.

FIG. 10 is a schematic perspective view showing only a main part of the ink jet recording apparatus. The recording head 121 that discharges ink based on a predetermined recording signal and records a desired image is the first recording head of the recording head described above. Alternatively, it is a full-line type having the same configuration as that shown in the second embodiment, and the first, second or third method of the above-described method for manufacturing a recording head.
It is manufactured by the method of the embodiment or the sixth embodiment corresponding to each of these embodiments.

The recording head 121 is mounted on an ink jet recording apparatus main body (not shown), and a discharge port surface 121a having a plurality of discharge ports arranged in a row is separated from the transport surface 122a of the transport belt 122 by a predetermined gap. .

The transport belt 122 includes two rollers 123a and 123 rotatably supported by the inkjet recording apparatus main body.
3b, and rotates in the direction of arrow C when at least one roller is forcibly rotated.

In the ink jet recording apparatus of the present embodiment, the recording medium sent out from a paper supply unit (not shown) (right side in the figure) toward the conveyance belt 122 is adsorbed on the conveyance surface 122a of the conveyance belt 122, and the ejection port of the recording head 121 is The recording head 121 passes through a gap between the surface 121a and the transport surface 122a, and at this time, ink is ejected from each ejection port of the recording head 121 to perform recording.

The present invention brings about an excellent effect particularly in a recording head and an ink jet recording apparatus of a valve jet method among the ink jet recording methods.

Regarding the representative configuration and principle, it is preferable to use the basic principle disclosed in, for example, US Pat. Nos. 4,723,129 and 4,740,796. This method can be applied to both the so-called on-demand type and the continuous type. In particular, in the case of the on-demand type, it is arranged corresponding to the sheet or the liquid path holding the liquid (ink). By applying at least one drive signal that gives a rapid temperature rise exceeding the nucleate boiling corresponding to the recording information to the electrothermal transducer, heat energy is generated in the electrothermal transducer, and the recording head This is effective because it is possible to form a bubble in the liquid (ink) by one-to-one correspondence with the drive signal as a result of film boiling on the heat-acting surface. The liquid (ink) is ejected through the ejection opening by the growth and contraction of the bubble to form at least one droplet. When the drive signal is formed into a pulse shape, the growth and shrinkage of the bubble are performed immediately and appropriately, so that the ejection of liquid (ink) having particularly excellent responsiveness can be achieved, which is more preferable. This pulse-shaped drive signal is disclosed in U.S. Pat. No. 4,463,359.
No. 4,434,262 are suitable. Further, if the conditions described in US Pat. No. 4,313,124 relating to the invention relating to the temperature rise rate of the heat acting surface are adopted, more excellent recording can be performed.

As the configuration of the recording head, in addition to the combination of the discharge port, the liquid path, and the electrothermal converter (linear liquid flow path or right-angled liquid flow path) as disclosed in the above-mentioned specifications, a thermal action A configuration using U.S. Pat. No. 4,558,333 or U.S. Pat. No. 4,445,960, which discloses a configuration in which a portion is arranged in a bent region, is also effective in the present invention. In addition, JP-A-59-123670 discloses a configuration in which a common slit is used as a discharge portion of an electrothermal converter for a plurality of electrothermal converters, and an aperture for absorbing pressure waves of thermal energy. The present invention is also effective as a configuration based on JP-A-59-138461, which discloses a configuration in which is adapted to a discharge unit.

Further, as a full-line type recording head having a length corresponding to the width of the maximum recording medium that can be recorded by the inkjet recording apparatus, the combination of a plurality of recording heads as disclosed in the above-mentioned specification makes the length longer. The present invention can exhibit the above-mentioned effects more effectively, although it may be either a configuration that satisfies the above requirements or a configuration as a single recording head formed integrally.

In addition, a replaceable chip-type recording head that can be electrically connected to the apparatus main body and supplied with ink from the apparatus main body by being attached to the apparatus main body, or provided integrally with the recording head itself The present invention is also effective when a cartridge type recording head is used.

It is preferable to add recovery means for the printhead, preliminary auxiliary means, and the like, which are provided as components of the ink jet printing apparatus of the present invention, since the effects of the present invention can be further stabilized. More specifically, preheating of the recording head by a capping unit, a cleaning unit, a pressurizing or suctioning unit, an electrothermal converter, another heating element, or a combination thereof. It is also effective to perform a preliminary ejection mode in which ejection is performed separately from the means and printing to perform stable printing.

Further, the recording mode of the ink jet recording apparatus is not limited to the recording mode of only the mainstream color such as black, may be configured integrally with the recording head or by a combination of a plurality of, but different color multicolor or The present invention is extremely effective for an apparatus provided with at least one of full colors by color mixing.

In each of the embodiments of the present invention described above, the ink is described as a liquid, but it is an ink that solidifies at room temperature or below, and is softened or liquid at room temperature, or the ink itself is 30 ° C. or more in the above-described inkjet. In general, the temperature is adjusted within a range of 70 ° C. or less to control the temperature so that the viscosity of the ink is in a stable ejection range. Therefore, any liquid may be used as long as the ink is in a liquid state when a use recording signal is applied. In addition, positively prevent the temperature rise due to thermal energy by using the energy of the state change of the ink from the solid state to the liquid state, or use ink that solidifies in a standing state to prevent evaporation of the ink. In any case, heat energy is applied by heat energy, such as one in which ink is liquefied and ejected as an ink liquid by application of heat energy according to a recording signal, or one which already starts to solidify when reaching a recording medium. The use of an ink that liquefies for the first time is also applicable to the present invention. In such a case, the ink, as described in JP-A-54-56847 or JP-A-60-71260, is held in a liquid state or a solid state in a porous sheet concave portion or through hole, It is good also as a form which improves with respect to an electrothermal converter. In the present invention, the most effective one for each of the above-mentioned inks is to execute the above-mentioned film boiling method.

[Effect of the Invention] Since the present invention is configured as described above,
The following effects are obtained.

In the ink jet recording head and the method for manufacturing the ink jet recording head of the present invention, the ink jet recording head has a simple structure including a substrate and a structural member fused and simultaneously formed on the substrate by transfer molding. Compared to a laminate composed of three or more layers, there is less danger of peeling of the joint surface, and a highly reliable laminate can be obtained.

Since the alignment of the liquid flow path with respect to the energy generating element formed on the substrate is performed when the solid layer is formed on the substrate, the fine energy generating element on the first substrate and the second This eliminates the need for a complicated and expensive device for precisely aligning and bonding the fine liquid flow path and the production cost.

The structural members for forming the discharge port, the liquid flow path, and the liquid chamber are simultaneously fused and formed on the element surface of the substrate by transfer molding, so that the curing agent mixed with the curing agent used in the conventional manufacturing method is used. Compared with the complicated and time-consuming process of providing a manufacturing member by applying a conductive material and leaving it for a long time, or applying a viscous energy ray-curable material and irradiating active energy rays, The step of providing the structural member is simple and short in time, and the supply port can be formed simultaneously with the molding of the structural member. Therefore, the manufacturing cost can be reduced.

According to the eighth and twelfth aspects of the invention, in addition to the above effects, two ink jet recording heads can be obtained at the same time. In the ninth and thirteenth aspects of the invention, a large number of energy Since the generation elements are formed, in the transfer molding step, the structural members of a large number of ink jet recording heads can be simultaneously transfer-molded only by aligning the substrate with the mold.

[Brief description of the drawings]

1 is a cutaway perspective view of a main part of a first embodiment of an ink jet recording head of the present invention, FIG. 2 is a cutaway perspective view of a main part of a second embodiment of the ink jet recording head of the present invention, and FIG. FIGS. 3A and 3B are views for explaining a first embodiment of a method for manufacturing an ink jet recording head according to the present invention, wherein FIG. 3A is a schematic perspective view showing a substrate, FIG.
Is a cross-sectional view of a main part of a mold used for molding the structural member, (d) is a schematic plan view showing the structural member after release, and (e) is E-line of (d).
E sectional view, (f) is an EE sectional view after the solid layer is removed, and FIG. 4 is a third view of the method for manufacturing an ink jet recording head of the present invention.
It is a figure for explaining an Example, (a) is a schematic perspective view showing a substrate, (b) is a schematic perspective view showing a solid layer,
(C) is a sectional view of a main part of a mold used for molding a structural member,
FIG. 5D is a schematic cross-sectional view showing the structural member after release, and FIG. 5 is a diagram showing the component after release in the fourth embodiment of the method for manufacturing an ink jet recording head of the present invention. ) Is a plan view thereof, (b) is a cross-sectional view taken at the ejection port forming position of (a), and FIG. 6 is a view of a structural member after release according to a fifth embodiment of the method of manufacturing an ink jet recording head of the present invention. FIG. 7 is a plan view, FIG. 7 is a sectional view of a main part of a mold used in a sixth embodiment of the method of manufacturing an ink jet recording head of the present invention, and FIG. 8 can be used in each embodiment of the method of manufacturing an ink jet recording head of the present invention. 9 is a cross-sectional view of a main part of a mold for forming a projection at the opening end of a supply port, FIG. 9 is a perspective view of a main part of a first embodiment of the ink jet recording apparatus of the present invention, and FIG. 10 is an ink jet recording apparatus of the present invention. It is a principal part perspective view of 2nd Example of FIG. 1,21,31,41,51,61,81,91 …… Substrate, 1a, 21a, 31a, 41a, 51
a, 61a, 81a, 91a …… Element surface, 2,22,32,42,52,92 …… Electrode, 2a, 22a, 32a, 42a, 52a, 92a …… Electrothermal converter, 3,23…
... structural members, 3a, 23a, 39a ... discharge ports, 3b, 23b, 39b ... liquid flow paths, 3c, 23c, 39c ... liquid chambers, 3d, 23d, 39d ... supply ports, 4,
24… Connector, 5,25… Supply tube, 23e …… Protrusion, 32
b, 42b, 52b, 92b …… Electrical connection, 36,46,56,66,96 ……
Solid layer, 36a …… Discharge port equivalent surface, 36b, 46b, 56b, 96b ……
Liquid flow path equivalent part, 36c, 46c, 56c, 66c …… Liquid chamber part equivalent part, 3
7,47,57,97… 1st type, 38,48,58,98… 2nd type, 3
8a, 48a, 58a, 98a …… Cavity, 38b, 48b, 58b, 98b…
... projecting part, 39, 49, 69, 89 ... structural member, 50, 70, 90 ... discharge port forming position, 58c ... subcavity part, 72, 82 ... sub runner, 73, 83 ... main runner, 73a, 83a …… Gate part,
74,84 …… Air bleeding part, 101,121 …… Recording head, 102…
... Carriage, 103,104 ... Guide shaft, 105 ... Carriage motor, 106,107 ... Pulley, 108 ... Timing belt, 109 ... Recording paper, 110 ... Paper pan, 111 ... Heater, 112 ... Paper holding plate, 113 ... paper ejection roller, 114 ...
Spur, 115: Recovery unit, 117: Cleaning blade, 118: Ink absorber, 118a: Cap, 121a ...
... Discharge port surface, 122 ... Convey belt, 122a ... Convey surface, 123
a, 123b …… Laura.

Claims (14)

(57) [Claims] A discharge port through which ink is discharged; a liquid chamber for temporarily storing ink to be supplied to the discharge port; a liquid flow path communicating the discharge port with the liquid chamber; In an ink jet recording head comprising: an energy generating element for generating energy for discharging ink from an outlet; and a supply port for supplying ink to the liquid chamber from outside, the energy generating element is formed as a film. A substrate having an element surface; and a structural member fused and simultaneously formed on the element surface of the substrate by transfer molding. The surface of the structural member facing the substrate includes the discharge port and the liquid flow path. A groove for forming the energy generating element is formed corresponding to the position of the energy generating element, and a cavity having a bottom wall as an element surface of the substrate for forming the liquid chamber communicating with the groove is formed. An ink jet recording head, characterized by being made. 2. The ink jet recording head according to claim 1, wherein the peripheral edge of the opening end of the cavity protrudes toward the side opposite to the substrate. 3. The ink jet recording head according to claim 1, wherein the energy generating element includes an electrothermal converter for generating thermal energy for discharging ink. 4. A full line type wherein the discharge ports are formed over the entire width of a recording area of a recording medium.
4. The ink jet recording head according to any one of items 3 to 3. 5. An ink jet recording apparatus, comprising: the ink jet recording head according to claim 1, wherein the recording is performed by discharging ink from a discharge port of the ink jet recording head based on a recording signal. 6. A discharge port from which ink is discharged, a liquid chamber for temporarily storing ink to be supplied to the discharge port, a liquid flow path communicating between the discharge port and the liquid chamber, In a method for manufacturing an ink jet recording head, comprising: an energy generating element for generating energy for discharging ink from an outlet, the energy generating element is formed in a film on one surface of a substrate in advance to form an element surface; On the element surface, the discharge port,
Forming a solid layer made of a removable material corresponding to a part of the liquid chamber and the liquid flow path corresponding to the position of the energy generating element; and an element surface of the substrate on which the solid layer is formed. In addition, by the transfer molding, the structural member such that the surface corresponding to the discharge port and one part of the surface corresponding to a part of the liquid chamber of the surface of the solid layer are exposed and the other surfaces are covered. And a step of removing the solid layer from the substrate on which the structural member has been fused at the same time as the mold is released after releasing the mold. 7. A discharge port from which ink is discharged, a liquid chamber for temporarily storing ink to be supplied to the discharge port, a liquid flow path communicating the discharge port with the liquid chamber, In a method for manufacturing an ink jet recording head, comprising: an energy generating element for generating energy for discharging ink from an outlet, the energy generating element is formed in a film on one surface of a substrate in advance to form an element surface; On the element surface, the discharge port,
Forming a solid layer made of a removable material corresponding to a part of the liquid chamber and the liquid flow path corresponding to the position of the energy generating element; and an element surface of the substrate on which the solid layer is formed. A step of simultaneously forming and fusing the structural member by transfer molding so that one part of the surface of the solid layer surface corresponding to a part of the liquid chamber is exposed and the other surface is covered. After the mold release, the structural member and the substrate are cut at a position where the discharge port is formed in a portion corresponding to a liquid flow path in the fused state, and then, the solid layer is converted to a liquid flow path. Forming an ejection port on a cut surface formed by the cutting, which is an end of the liquid flow path, by removing the ejection port from an end of the liquid flow path. 8. A discharge port from which ink is discharged, a liquid chamber for temporarily storing ink to be supplied to the discharge port, a liquid flow path communicating between the discharge port and the liquid chamber, A method for manufacturing an ink jet recording head, comprising: an energy generating element for generating energy for discharging ink from an outlet; Using a substrate having a size corresponding to that of the opposing arrangement so that the flow paths are continuous, forming a film on one surface of the substrate in such a manner that the energy generating elements for the two ink jet recording heads correspond to the opposing arrangement. To form an element surface, and the element surface of the substrate corresponds to the position of each of the energy generating elements.
Forming a solid layer made of a removable material corresponding to the liquid passages continuous with each other and a part of each liquid chamber of each of the ink jet recording heads in correspondence with the opposed arrangement; and On the element surface on which the solid layer is formed, one part of the surface of each part corresponding to a part of each liquid chamber of each of the ink jet recording heads is exposed by transfer molding. And a step of fusing the structural member at the same time as molding so as to correspond to the facing arrangement so that the other surface is covered.After releasing, the structural member and the substrate are kept in the fused state. Cutting along the opposing center line of the opposing arrangement;
And thereafter removing the solid layer. 9. A discharge port from which ink is discharged, a liquid chamber for temporarily storing ink to be supplied to the discharge port, a liquid flow path communicating between the discharge port and the liquid chamber, A method for manufacturing an ink jet recording head, comprising: an energy generating element for generating energy for discharging ink from an outlet; A pair of substrates arranged opposite to each other such that the flow paths are continuous is used as a set, and a substrate having a size corresponding to a plurality of the sets is used. On one surface of the substrate, energy generation for the plurality of sets of the inkjet recording heads is performed. An element is formed by film formation corresponding to each of the opposed arrangements to form an element surface, and the two elements corresponding to the positions of the energy generating elements are formed on the element surface of the substrate. Forming a solid layer made of a removable material corresponding to the continuous liquid flow path and a part of each liquid chamber of each of the ink jet recording heads in correspondence with each of the opposed arrangements; and a solid layer of the substrate. On the element surface where is formed, one part of the surface of each part corresponding to a part of each liquid chamber of each of the ink jet recording heads is exposed by transfer molding, and the other surface is covered. As described above, a step of forming and fusing the structural member corresponding to each of the opposing arrangements and simultaneously fusing, and after releasing, the adjoining sets of the structural member and the substrate are kept in the fused state. Cutting along the boundary line between the two and the center line of the opposed arrangement, and then removing the solid layer. 10. A discharge port from which ink is discharged, a liquid chamber for temporarily storing ink to be supplied to the discharge port, a liquid flow path communicating the discharge port with the liquid chamber, In a method for manufacturing an ink jet recording head, comprising: an energy generating element for generating energy for discharging ink from an outlet, the energy generating element is formed in a film on one surface of a substrate in advance to form an element surface; Forming, on the element surface, a solid layer made of a removable material corresponding to the discharge port and the liquid flow path corresponding to the position of the energy generating element; and an element surface of the substrate on which the solid layer is formed. By transfer molding, the structural member such that the surface corresponding to the discharge port of the surface of the solid layer and the surface corresponding to the connection portion of the liquid flow path to the liquid chamber are exposed and the other surfaces are covered. Molding a step of fusing the same time, after the release, the manufacturing method of the ink jet recording head wherein the structural member is characterized in that it consists of a step of removing the solid layer from the substrate, which is fused at the same time as the molding. 11. A discharge port from which ink is discharged, a liquid chamber for temporarily storing ink to be supplied to the discharge port, a liquid flow path communicating between the discharge port and the liquid chamber, In a method for manufacturing an ink jet recording head, comprising: an energy generating element for generating energy for discharging ink from an outlet, the energy generating element is formed in a film on one surface of a substrate in advance to form an element surface; Forming, on the element surface, a solid layer made of a removable material corresponding to the discharge port and the liquid flow path corresponding to the position of the energy generating element; and an element surface of the substrate on which the solid layer is formed. Then, by a transfer molding, a structural member is simultaneously formed and fused so that a surface corresponding to a connection portion of the liquid channel to the liquid chamber among the surface of the solid layer is exposed and the other surfaces are covered. After the mold release, the structural member and the substrate are cut at a position where the discharge port is formed in a portion corresponding to a liquid flow path in the fused state, and then, the solid layer is converted to a liquid flow path. Forming an ejection port on a cut surface formed by the cutting, which is an end of the liquid flow path, by removing the ejection port from an end of the liquid flow path. 12. A discharge port from which ink is discharged, a liquid chamber for temporarily storing ink to be supplied to the discharge port, a liquid flow path communicating between the discharge port and the liquid chamber, A method for manufacturing an ink jet recording head, comprising: an energy generating element for generating energy for discharging ink from an outlet; Using a substrate having a size corresponding to that of the opposing arrangement so that the flow paths are continuous, forming a film on one surface of the substrate in such a manner that the energy generating elements for the two ink jet recording heads correspond to the opposing arrangement. To form an element surface, and the element surface of the substrate corresponds to the position of each of the energy generating elements.
A step of forming a solid layer made of a removable material corresponding to the liquid passages continuous with each other corresponding to the opposed arrangement; and, on the element surface of the substrate on which the solid layer is formed, by transfer molding, At the same time as forming the structural member corresponding to the opposed arrangement, so that each surface corresponding to the connection portion to the liquid chamber of each liquid flow path is exposed and the other surfaces are covered among the surfaces of the solid layer. A step of fusing, after releasing, the structural member and the substrate are cut along the opposing center line of the opposing arrangement in the fused state,
And thereafter removing the solid layer. 13. A discharge port from which ink is discharged, a liquid chamber for temporarily storing ink to be supplied to the discharge port, a liquid flow path communicating between the discharge port and the liquid chamber, A method for manufacturing an ink jet recording head, comprising: an energy generating element for generating energy for discharging ink from an outlet; A pair of substrates arranged opposite to each other such that the flow paths are continuous is used as a set, and a substrate having a size corresponding to a plurality of the sets is used. On one surface of the substrate, energy generation for the plurality of sets of the inkjet recording heads is performed. An element is formed by film formation corresponding to each of the opposed arrangements to form an element surface, and the two elements corresponding to the positions of the energy generating elements are formed on the element surface of the substrate. Forming a solid layer made of a removable material corresponding to the liquid flow path corresponding to each of the opposed arrangements; and transferring the solid by transfer molding on the element surface of the substrate on which the solid layer is formed. Structural members corresponding to the respective opposed arrangements are melted simultaneously with the molding so that the respective surfaces corresponding to the connection portions of the respective liquid flow paths to the liquid chambers of the layer surfaces are exposed and the other surfaces are covered. Attaching step, After releasing, the structural member and the substrate are cut along the boundary line between each adjacent pair and the opposing center line of the opposing arrangement while maintaining the fused state, And thereafter removing the solid layer. 14. A structure member and a substrate are cut along a boundary line between adjacent sets and an opposing center line of an opposing arrangement in a fused state, and thereafter, a solid layer is removed. Instead of a step, the structure member and the substrate are cut along the opposed center line of the opposed arrangement in the fused state to remove the solid layer. 10. The method according to claim 9, further comprising a step of cutting along the boundary between the adjacent sets while keeping the substrate and the fused state.
Or a method for manufacturing an ink jet recording head according to item 13.