JP2997132B2 - Method of manufacturing ink jet recording head - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet recording head for producing a recording liquid droplet used in an ink jet recording system, a method for manufacturing the same, and a recording apparatus provided with the ink jet recording head.

[0002]

2. Description of the Related Art In general, an ink jet recording head (hereinafter, referred to as a "recording head") applied to the ink jet recording system has an ink discharge port for discharging ink, and an ink discharge port for supplying ink to the discharge port. An ink chamber for storing ink, an ink path communicating the discharge port with the ink chamber, an energy generating element provided in a part of the ink path, for generating energy for discharging ink, and the ink chamber. Is provided with an ink supply port for supplying ink from outside.

[0003] As a conventional method of manufacturing a recording head, the following is known.

(1) A first substrate provided with an energy generating element is provided, and an ink discharge port, an ink path, and an ink chamber are formed on a second substrate made of glass, metal, or the like by processing means such as cutting or etching. After providing a concave portion for making the ink chamber and an ink supply port for communicating the ink chamber with the outside, the adhesive is formed by aligning the second substrate with the first substrate by positioning the energy generating element and the ink path. How to stick together.

(2) A positive or negative photosensitive dry film is adhered to a first substrate made of glass or the like on which an energy generating element is provided, and an ink discharge port, an ink path, and an ink of the photosensitive dry film are provided. A pattern corresponding to the chamber is exposed or exposed by masking or exposing, and a solid layer of the pattern corresponding to the ejection port, the ink path and the ink chamber is provided on the first substrate. A liquid curable material in which a curing agent is mixed is applied to an appropriate thickness on the solid layer and the first substrate, and left at a predetermined temperature for a long time to cure the curable material. Next, the first substrate, on which the curable material is cured, is cut at a position where an ink discharge port is formed to expose an end face of the solid layer, and then immersed in a solvent that dissolves the solid layer. First hardened material
A method of dissolving and removing the solid layer from the substrate described above to provide a space for forming an ink path and an ink chamber therein (Japanese Patent Application Laid-Open No. 61-1986).
No. 15497).

(3) A positive or negative photosensitive dry film is adhered to the first substrate provided with the energy generating element, and corresponds to an ink discharge port, an ink path and an ink chamber of the photosensitive dry film. The pattern is exposed by masking or exposing, developed, and a solid layer of a pattern corresponding to the ink discharge port, ink path and ink chamber is provided on the first substrate. An active energy ray-curable material which is cured by an active energy ray on the solid layer and the first substrate is applied to an appropriate thickness, and an active part provided with a concave portion and a supply port for forming a part of an ink chamber is provided. An energy-ray-transmissive second substrate is attached to the active energy-ray-curable material so that the concave portion is positioned at a position where an ink chamber is to be formed. Next, the active energy ray-curable material is irradiated on the active energy ray-curable material through the second substrate by masking the second substrate so as to cover a portion where the ink chamber is to be formed in the active energy ray-curable material. And cure. Next, the laminate in which the active energy ray-curable material is cured is cut at a position where an ink discharge port is formed to expose an end face of the solid layer, and then the solid layer and the uncured active energy ray-curable material are cut. And dissolving and removing the solid layer and the uncured active energy ray-curable material from the laminate to form an ink path and an ink chamber therein. 62-253457).

(4) A portion corresponding to an ink discharge port, an ink path and an ink chamber is formed by a solid layer made of a removable material on a first substrate made of glass or the like provided with an ink discharge energy generating element. . By transfer molding on the solid layer and the first substrate, at least the other part of the surface of the solid layer except the surface corresponding to a part of the ink chamber is covered with a mold resin. Next, the first substrate is cut at a position where an ink discharge port is to be formed to expose an end face of the solid layer, and then immersed in a solvent that dissolves the solid layer, and the first substrate coated with a mold resin is dissolved. There has been proposed a method of dissolving and removing the solid layer from a substrate to provide a space for forming an ink path and an ink chamber therein.

[0008]

The above-mentioned conventional methods for manufacturing each recording head have the following problems.

In the method (1) for manufacturing a recording head, the second method
By increasing the size of the concave portion for forming the ink chamber provided on the substrate, there is an advantage that a print head having a large ink chamber suitable for high-speed printing can be manufactured. When the substrate is bonded with an adhesive, it is necessary to precisely align the fine energy generating element of the first substrate with the fine ink path of the second substrate, and when bonding with the adhesive, It is necessary to take measures to prevent the adhesive from flowing into the fine ink path, which makes the inkjet recording head manufacturing equipment complicated and expensive, and lacks mass productivity.
There is a problem that the cost of the product is increased.

In the method (2) for manufacturing a recording head,
Although there is an advantage that the problem that occurs in bonding the first substrate and the second substrate as seen in the method of manufacturing a recording head (1) can be solved, the volume of the ink chamber is high. Is limited by the thickness of the patterned solid layer provided on the first substrate, so that it is difficult to increase the volume. In addition, since the process is complicated and time-consuming, and the number of processes is large, there is also a problem that a large amount of productivity is lacking and the cost of a product is increased.

In the method (3) for manufacturing a recording head, the second method
By enlarging a concave portion for forming another part of the ink chamber provided on the substrate, it is possible to manufacture a recording head having a large liquid chamber, and the method (1) for manufacturing a recording head. The first substrate and the second as seen
There is an advantage that the problem that occurs in bonding with the substrate can be solved. However, similar to the method of manufacturing the recording head of (2),
Since the process is complicated and time-consuming, and the number of processes is further increased, there is a problem that the productivity is also low and mass production is increased.

In the method (4) for manufacturing a recording head,
It is possible to solve the above-mentioned problems of the manufacturing methods shown in (1), (2) and (3), and to provide an inexpensive inkjet recording head excellent in mass productivity. However, if a so-called packaging structure is adopted in which the entire substrate is wrapped with the mold resin for the purpose of relaxing the stress at the interface between the substrate and the mold resin and / or improving the adhesion between the substrate and the mold resin, heat generated from the substrate may be reduced. , The heat radiation is poor. Said doing is
The tendency becomes more remarkable as the number of the ink ejection energy generating elements increases.

The present invention has been made in view of the above-mentioned problems of the prior art, and does not require a step of precisely aligning and bonding two substrates, and provides a simple and small number of steps. It is an object of the present invention to provide an inexpensive inkjet recording head which has high reliability and is suitable for mass production, an inkjet recording apparatus provided with the recording head, and a method for manufacturing the recording head.

It is another object of the present invention to provide a method of manufacturing an ink jet recording head capable of providing an ink jet recording head and a recording apparatus having a structure in which ink paths are finely processed with high precision and high yield. .

Further, by using a metal member which also serves as a support for the substrate and a member for attaching to the recording apparatus, it is possible to provide an ink jet recording head and a recording apparatus which can improve heat radiation and obtain stable ejection. It also aims to provide a possible manufacturing method

[0016]

According to the present invention, there is provided an ink discharge port for discharging ink.
And ink for storing ink to be supplied to the discharge port
Chamber, and an ink path communicating the discharge port with the ink chamber
And an energy generation element provided in a part of the ink path for generating energy used for discharging ink, and for supplying ink to the ink chamber from outside.
Of an ink jet recording head having an ink supply port of
In the manufacturing method, a substrate provided with the energy generating element
A step of preparing a plate, said to match the energy generating element, a step of forming a solid layer having a respective corresponding portions of the ink paths and ink chambers on said substrate, the substrate having the solid layer
The mold is sandwiched between the mold and the solid layer forming surface of the substrate and the back thereof.
Forming a space on both sides of the substrate with a surface and a mold;
The space is filled with a resin, and the resin is used to fill the solid layer forming surface of the substrate.
Above cover the solid layer except for the ink supply port,
A step of forming an outer frame having a substrate exposed portion on a part of the substrate rear surface by a transfer molding method ,
After removing the mold, the solid layer is dissolved and removed, and
A method for producing an ink jet recording head is characterized in that a step of forming fine ink chamber.

Further, a method of manufacturing a recording head according to the present invention comprises:
Contacts the substrate and the metal member in <br/> the substrate exposed portion of the ink jet recording head manufactured by the above manufacturing method
As described above, the method includes the step of joining the metal member to the substrate.

[0018] recording head in the manufacturing method of the present invention, it is of a full-line type in which the discharge port is provided with a plurality over the entire width of the recording area of the recording medium
Come, the ink discharge energy generating elements of the recording head,
Generates heat by applying an electric energy may be an electrothermal transducer for causing ejection to give rise to state changes in the ink.

Further, the recording head of the present invention, as can discharge port facing the recording surface of the recording medium, the recording device along with members for placing at least <br/> the recording head
Can be provided .

Hereinafter, the present invention will be described in detail with reference to the drawings.

FIGS. 1 to 5 are schematic diagrams showing an example of a method for manufacturing a recording head according to the present invention.
Each shows an example of a configuration of an ink jet recording head related to the method of the present invention and an example of a manufacturing procedure thereof.
In this example, an ink jet recording head having three ejection ports is shown, but it goes without saying that the same applies to a high density multi-array ink jet recording head having more ejection ports.

First, in the ink jet recording head according to the present invention, for example, a substrate 1 made of glass, ceramics, plastic, metal or the like as shown in FIG. 1 is used.

[0023] Such a substrate 1 functions as a part of the ink path forming member, and as long as it can function as a support described later resist layer, without its shape, is restricted to the material Can be used. A desired number of ink ejection energy generating elements 2 such as electrothermal transducers or piezoelectric elements are arranged on the substrate 1 (three in FIG. 1 are illustrated). The ejection energy for ejecting the ink droplets by the ink ejection energy generating element 2 is applied to the ink liquid, and recording is performed. For example,
When an electrothermal conversion element is used as the ink discharge energy generating element 2, the element generates discharge energy by heating nearby ink. or,
For example, when a piezoelectric element is used, ejection energy is generated by mechanical vibration of the element.

The elements 2 are connected to control signal input electrodes 3 for operating the elements. In general, various functional layers such as a protective film layer may be provided for the purpose of improving the durability of the ejection energy generating element 2 and a part of the electrode 3. Of course, the present invention also provides such a functional layer. There is no problem in providing various functional layers.

The formation of the energy generating element 2 and the control signal input electrode 3 on the substrate 1 is performed by a semiconductor process such as a vapor deposition method, a sputtering method, and an etching method.

Next, a solid layer 4 made of, for example, a resist, which can be removed by a solvent or the like, is formed on the substrate 1 including the ink ejection energy generating elements 2. This solid layer 4
Is not particularly limited to a resist as long as it can be removed by some means.

Next, as shown in FIG. 2, an outer frame 5 made of a molding resin is formed by using a mold capable of forming an outer frame of an ink jet recording head, an ink supply port 9 and a cavity 10 which is a feature of the present invention. It is formed by transfer molding.

Here, the transfer molding method will be described.

As a method using the transfer molding of the present embodiment, the substrate 1 on which the solid layers 2 and 3 are formed is placed on the upper mold or the lower mold having an appropriate runner, a gate, and a cavity having an air vent structure. After inserting into the mold, tighten the mold. When a thermosetting epoxy resin is used as the material of the outer frame 5, for example, a preheating temperature of the resin of 60 to 9 is used.
The molding can be carried out according to general molding conditions and methods such as 0 ° C., an injection pressure of 20 to 140 kgf / cm ² , a mold temperature of 100 to 180 ° C., a holding pressure curing time of 1 to 10 minutes, and post cure after molding. The conditions described above include moldability (shape, shape,
It is only necessary to check bubbles, burrs, flashes, etc. in the resin, and set appropriate points for each. In general, the higher the molding temperature, the shorter the curing time. The higher the injection pressure, the more stable the shape and the generation of bubbles, but excessive pressure causes problems such as damage to products, resin burrs and flashing. Here, the post-curing is not necessarily performed continuously with the molding, but may be performed at any time until the product is completed. Therefore, it can be performed at a convenient stage of the process. Of course, depending on the use condition of the product, the above steps can be omitted.

In order to improve the releasability when the product is released from the mold after molding, a release agent is sometimes used in a molding die or the like.

As a molding means of the molding resin, the transfer molding method is most suitable for the present invention in consideration of mass productivity, accuracy and tact.

The molding resin which is the material for forming the outer frame 5 is an allyl resin, a diallyl phthalate resin, a silicon resin, polyester, phenol, melamine, and depending on the molding means, it is liquid, and is hardened at room temperature, heat hardened, Materials such as ultraviolet curing can be used, and examples thereof include an acrylic resin, an unsaturated polyester resin, a polyurethane resin, a polyimide resin, and a urea resin.

Next, the solid layer 4 which can be removed after the molding is removed to obtain the ink jet recording head of the present invention shown in FIG.

As a means for removing the solid layer, for example, when the solid layer is a positive resist, there is a method of dissolving and removing the solid layer with a solution of an organic solvent such as an aqueous solution of caustic soda or ascent. The solution is not limited to the above as long as it does not soak the outer frame forming material. It is needless to say that the solid layer can be more effectively removed by using a means for promoting the stirring of the solvent, ultrasonic waves or the like.

Here, since the discharge characteristics of the ink vary depending on the length of the ink path, if necessary, the discharge port may be cut at a predetermined position to determine the optimum position. . The cutting is performed by a known dicing method or the like for cutting the wafer.

It is also possible to remove the solid layer after cutting the discharge port. This method can solve the problem of clogging in the ink path due to cutting powder, dust, etc., since there is a solid layer in the ink path, which plays an important role of the ink jet, when cutting the discharge port. Since the ink path is shortened, there is an advantage that the removability of the solid layer is also improved.

FIG. 4 shows the cavity 1 obtained by the above-mentioned molding.
2 shows a step of bonding the substrate 1 and the metal member 11 through the reference numeral 0. As described above, heat generated in the substrate 1 can be released to the metal member 11.

As the metal member, Al stainless steel, S
iC and the like can be mentioned.

In bonding the metal member and the substrate, it is more effective to use a bonding material having relatively excellent heat dissipation such as a silver paste or a silicon compound in the cavity. In addition to the hollow holes, the bonding strength may be increased by using another general adhesive.

The metal member 11 has a role as a connecting part to the recording apparatus. Further, it is also possible to mount an electrical component for driving the head on the metal member.

The present invention provides an excellent effect in a recording head and a recording apparatus of an ink jet recording system in which flying droplets are formed by utilizing thermal energy and recording is performed, particularly in the ink jet recording system. is there.

The typical configuration and principle are described in, for example, US Pat. Nos. 4,723,129 and 4,740.
No. 796, and the present invention is preferably performed using these basic principles. This recording method can be applied to both so-called on-demand type and continuous type.

The recording method will be briefly described. An electrothermal transducer disposed corresponding to a sheet or a liquid path holding a liquid (ink) is provided with a liquid (ink) corresponding to recording information. By applying at least one drive signal for exceeding the nucleate boiling phenomenon and giving a rapid temperature rise to cause the film boiling phenomenon, heat energy is generated, and the film boiling occurs on the heat acting surface of the recording head. . As described above, since bubbles corresponding to the drive signal applied to the electrothermal converter from the liquid (ink) can be formed one-to-one, it is particularly effective for an on-demand type recording method. By discharging the liquid (ink) through the discharge port by the growth and contraction of the bubble,
Form at least one drop. When the drive signal is formed into a pulse shape, the growth and shrinkage of the bubble are performed immediately and appropriately, so that the ejection of a liquid (ink) having particularly excellent responsiveness can be achieved, which is more preferable. Examples of the drive signal in the form of a pulse include U.S. Pat. Nos. 4,463,359 and 4,345.
No. 262 are suitable. If the conditions described in U.S. Pat. No. 4,313,124 relating to the temperature rise rate of the heat acting surface described above are adopted, more excellent recording can be performed.

As the configuration of the recording head, a configuration combining a discharge port, a liquid flow path, and an electrothermal converter as disclosed in the above-mentioned respective specifications (linear liquid flow path or right-angled liquid flow path)
In addition, the present invention also includes those having a configuration in which a heat acting portion is arranged in a bent region as disclosed in US Pat. No. 4,558,333 and US Pat. No. 4,459,600.

In addition, Japanese Unexamined Patent Publication No. 123670/1984 discloses a configuration in which a common slit is used as a discharge port of an electrothermal transducer for a plurality of electrothermal transducers, or absorbs pressure waves of thermal energy. The present invention is also effective in a configuration based on JP-A-59-138461, which discloses a configuration in which the opening to be made corresponds to the discharge section.

Further, as a recording head in which the present invention is effectively used, there is a full line type recording head having a length corresponding to the maximum width of a recording medium on which a recording apparatus can record. The full line head may be a full line configuration by combining a plurality of recording heads as disclosed in the above specification, or may be a single full line recording head formed integrally.

In addition, the print head is exchangeable with a print head of the chip type, which can be electrically connected to the main body of the apparatus and can supply ink from the main body of the apparatus, or is integrated with the print head itself. The present invention is also effective when a cartridge-type recording head provided in a fixed manner is used.

It is preferable to add recovery means for the print head, preliminary auxiliary means, and the like to the recording apparatus of the present invention, since the recording apparatus of the present invention can be further stabilized. More specifically, preheating of the recording head by capping means, cleaning means, pressurizing or suction means, an electrothermal transducer or another heating element, or a combination thereof. Means and means for performing a preliminary ejection mode for performing ejection other than printing are also effective for performing stable printing.

Further, the recording mode of the recording apparatus is not limited to the mode for recording only the mainstream color such as black, and may be either a mode in which the recording head is integrally formed or a mode in which a plurality of recording heads are combined. However, the present invention is also very effective for an apparatus provided with at least one of multiple colors of different colors or full color by mixing colors.

In the embodiments of the present invention described above, the description is made using the liquid ink. However, in the present invention, an ink which is solid at room temperature or an ink which becomes soft at room temperature is used. Can be used. In general, in the above-described ink jet device, the temperature of the ink itself is adjusted within a range of 30 ° C. or more and 70 ° C. or less to control the temperature so that the viscosity of the ink is in a stable ejection range. It is sufficient if the ink is in a liquid state.

In addition, an excessive temperature rise of the head and the ink due to thermal energy is positively prevented by using the energy of the state change from the solid state to the liquid state of the ink, or the purpose is to prevent the evaporation of the ink. Alternatively, an ink that solidifies in a standing state may be used. In any case, the ink is liquefied for the first time by the application of heat energy, such as one in which the ink is liquefied and ejected as an ink liquid by application of the heat energy according to the recording signal, or one which already starts to solidify when reaching the recording medium. The use of an ink having the following properties is also applicable to the present invention.

Such an ink is disclosed in JP-A-54-568.
No. 47 or Japanese Patent Application Laid-Open No. 60-71260, while being held as a liquid or solid substance in a concave portion or a through hole of a porous sheet, facing the electrothermal converter. It is good also as a form.

In the present invention, the most effective one for each of the above-mentioned inks is to execute the above-mentioned film boiling method.

FIG. 5 is an external perspective view showing an example of an ink jet recording apparatus (IJRA) in which the recording head obtained according to the present invention is mounted as an ink jet head cartridge (IJC).

In the drawing, reference numeral 20 denotes an ink jet head cartridge (IJC) having nozzle groups for discharging ink while facing the recording surface of the recording paper sent on the platen 24. Reference numeral 16 denotes a carriage HC that holds the IJC 20, which is connected to a part of a drive belt 18 that transmits the driving force of a drive motor 17, and is slidable with two guide shafts 19A and 19B disposed in parallel with each other. By doing so, the reciprocating movement over the entire width of the recording paper of the IJC 20 becomes possible.

Reference numeral 26 denotes a head recovery device, which is an IJC20.
, For example, at a position facing the home position. The head recovery device 26 is operated by the driving force of the motor 22 via the transmission mechanism 23, and I
JC20 capping is performed. In connection with the capping of the IJC 20 by the cap portion 26A of the head recovery device 26, ink is suctioned by a suitable suction device provided in the head recovery device 26 or by an appropriate pressurizing device provided in an ink supply path to the IJC 20. Discharge recovery processing such as removing the thickened ink in the nozzles by performing ink pressure feeding and forcibly discharging the ink from the discharge port is performed. Also, by performing capping at the end of recording or the like, IJC is protected.

Reference numeral 30 denotes a blade disposed on a side surface of the head recovery device 26 and formed of silicon rubber as a wiping member. The blade 31 is a blade holding member 31
A is held in a cantilever form, and the head recovery device 26
Similarly to the above, it is operated by the motor 22 and the transmission mechanism 23, and can be engaged with the discharge surface of the IJC 20. Thus, at an appropriate timing in the recording operation of the IJC 20, or after the ejection recovery processing using the head recovery device 26, the blade 31 is protruded into the movement path of the IJC 20, and the ejection surface of the IJC 20 is moved with the movement operation of the IJC 20. To remove condensation, wetness, dust and the like.

[0058]

EXAMPLES The present invention will be described more specifically with reference to the following examples.

An electrothermal transducer (a heater made of material HfB ₂ ) and an electrode (material Al) corresponding to the electrothermal transducer are formed on a substrate made of a silicon wafer by sputtering, and patterned by photolithography. To obtain an element surface.

Next, a protective film made of a SiO ₂ film was provided on the element surface.

Next, after a positive resist is spin-coated on the protective film to a thickness equivalent to the height of the ink ejection port, a pattern mask serving as an ink path and an ink chamber facing each electrothermal converter is used. Through the exposure and development steps, a solid layer 4 was formed.

Next, using a thermosetting epoxy resin as an outer frame forming material, a preheating temperature of 80 ° C. and an injection pressure of 60 Kgf were applied by a general microwave preheater.
/ Cm ² , a molding temperature of 150 ° C. and a pressure-holding curing time of 4 minutes, thereby forming an outer frame having hollow holes by transfer molding.

After completion of the transfer molding, the process
It was immersed in a wt% caustic soda solution to dissolve and remove the solid layer composed of the positive resist, thereby obtaining an ink chamber, an ink path and an ink supply port.

Next, a metal member composed of a substrate and Al is connected to a silicon compound (for example, Toray Silicone Co., Ltd.) through a cavity formed by transfer molding.
SH-340) to obtain an ink jet recording head of the present invention.

[0065]

According to the method for manufacturing an ink jet recording head of the present invention, (1) the main process for manufacturing the head is performed by a photolithography technique using a photoresist or a dry film. Not only can it be formed very easily with this pattern, but also it is possible to simultaneously process a large number of heads of the same configuration in the wafer, and (2) the cavity can be used as a positioning mechanism when joining the substrate and the metal member. There are advantages.

In the ink jet recording head of the present invention, (3) since the substrate is in direct contact with the metal member, the heat energy generated by the energy generating element is released to the outside when the ink is ejected, and the substrate and the curable resin are separated from each other. (4) Furthermore, even when a large number of energy generating elements are provided, the heat dissipation is excellent, so that there is an advantage that stable ejection can be obtained for a long period of time.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view showing a configuration of a recording head process product in which an energy generating element, a control signal input electrode, and a solid layer are formed on a substrate.

[Fig. 2] After transfer molding,
FIG. 4 is an explanatory diagram illustrating a state in which a recording head process product is taken out.

3A is a cross-sectional view showing a configuration of a recording head process product after a solid layer has been removed, and FIG. 3B is a perspective view seen from a cavity hole side.

FIG. 4 is a cross-sectional view of a configuration example of a recording head according to the present invention in which a substrate and a metal member are joined via a cavity.

FIG. 5 is a schematic perspective view showing a recording apparatus provided with an inkjet recording head according to the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Substrate 2 Energy generation element 3 Control signal input electrode 4 Solid layer 5 Outer frame 6 Upper mold for transfer molding 7 Lower mold for transfer molding 8 Ink ejection port 9 Ink supply port 10 Cavity hole 11 Metal member 16 Carriage Reference Signs List 17 drive motor 18 drive belt 19A, 19B guide shaft 20 inkjet head cartridge 22 cleaning motor 23 transmission mechanism 24 platen 26 cap member 30 blade 30A blade holding member

────────────────────────────────────────────────── ─── Continuation of the front page (72) Inventor Hajime Yamamoto 3-30-2 Shimomaruko, Ota-ku, Tokyo Canon Inc. (56) References JP-A-4-90355 (JP, A) JP-A-2 -281958 (JP, A) JP-A-1-259957 (JP, A) JP-A-61-125852 (JP, A) (58) Fields investigated (Int. Cl. ⁷ , DB name) B41J 2/05 B29C 45/02 B41J 2/01 B41J 2/16

Claims (4)

(57) [Claims] 1. An ink discharge port for discharging ink.
And ink for storing ink to be supplied to the discharge port
Chamber, and an ink path communicating the discharge port with the ink chamber
And an energy generation element provided in a part of the ink path for generating energy used for discharging ink, and for supplying ink to the ink chamber from outside.
Of an ink jet recording head having an ink supply port of
In the manufacturing method, a step of preparing a substrate provided with the energy generating element
When the to match the energy generating element to form a solid layer having a respective corresponding portions of the ink paths and ink chambers on said substrate
A step of holding the substrate having the solid layer in a mold,
A space is formed on both sides of the substrate by the body layer forming surface and its back surface and the mold.
And filling the space with a resin , and forming the solid layer of the substrate with the resin.
On the surface, the solid layer is covered except for the ink supply port.
To form a step of forming an outer frame by transfer molding with a substrate exposed portion partially on the substrate back surface, after removing the mold, the ink path and the ink chamber to dissolve and remove the solid layer a method for producing an ink jet recording head is characterized in that a step. 2. A substrate and a metal member at the substrate exposed portion.
Have the bonding metal members to the substrate so as bets are in contact
The method for manufacturing an ink jet recording head according to claim 1.
Law . Wherein said ink discharge energy generating element,
3. The method for manufacturing an ink jet recording head according to claim 1 or 2, wherein the method is an electrothermal transducer for generating heat by applying electric energy to cause a change in state of the ink to perform ejection. Wherein said ink jet recording head according to claim 1, 2 or 3 jet recording according to, characterized in that the full-line type in which the discharge port is provided with a plurality over the entire width of the recording area of the recording medium head of
Manufacturing method .