JP3122195B2 - INK JET PRINT HEAD, METHOD FOR MANUFACTURING THE SAME, AND INK JET PRINTING APPARATUS HAVING THE INK JET PRINT HEAD - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet recording head for discharging ink to perform recording on a recording medium, a method for manufacturing the same, and an ink jet recording apparatus provided with the ink jet recording head.

[0002]

2. Description of the Related Art In general, an ink jet recording head (hereinafter, referred to as a "recording head") applied to an ink jet recording system has, as shown in FIG. A liquid chamber 111 for storing ink to be supplied to the discharge port 116, a liquid flow path 115 communicating the discharge port 116 with the liquid chamber 111, and discharging ink provided at one portion of the liquid flow path 115. Generating element 102 for generating energy for use
And a supply port 106 for supplying ink to the liquid chamber 111 from outside.

[0003] As a conventional method of manufacturing the recording head, the following method is known.

First, a positive or negative photosensitive dry film is adhered to the first substrate 101 on which the energy generating element 102 is provided, and a discharge port 116, a liquid flow path 115, and a liquid chamber of the photosensitive dry film. A solid layer (not shown) having a pattern corresponding to a part of the discharge port 116, the liquid flow path 115, and the liquid chamber 111 is exposed or developed by masking or exposing a pattern corresponding to a part of the liquid crystal 111.
Is provided on the first substrate 101. Next, on the solid layer and the first substrate 101, an active energy ray curable material 107 which is cured by an active energy ray is applied to an appropriate thickness. Next, an active energy ray permeable second substrate 104 provided with a concave portion 105 and a supply port 106 for forming another part of the liquid chamber 111 is placed on the active energy ray curable material 107. The recess 105 is formed in the liquid chamber 111.
The laminated body is made in accordance with the position where the is to be formed. Further, a second portion of the active energy ray-curable material 107 is formed so as to cover a portion where the liquid chamber 111 is to be formed.
The active energy ray is masked by masking the
Energy ray curable material 10 through substrate 104
Irradiate 7 and cure. Next, the laminate in which the active energy ray-curable material 107 is cured is cut at a position where a discharge port 116 is formed to expose an end face of the solid layer. A method for immersing the solid layer and the uncured active energy ray-curable material from the laminate to remove the solid layer and the uncured active energy ray-curable material, thereby providing a space for forming a liquid flow path 115 and a liquid chamber 111 therein. (See JP-A-62-253457).

[0005]

In the conventional recording head described above, the cross-sectional area of the liquid flow path is larger than the cross-sectional area of the discharge port in order to stably supply ink to the discharge port. I have.

Therefore, when dust such as impurity particles is present in the ink, the dust sometimes reaches the vicinity of the discharge port when the ink is supplied to the liquid flow path during recording. If the dust reaches the vicinity of the ejection port, there is a problem that normal ejection is not performed, such as a shift in the ejection direction of the ink, a change in the ejection amount of the ink, and unevenness. . Further, in some cases, there is a problem that the dust blocks the discharge port, and the ink is not discharged.

Further, if a strong vibration or the like is applied to the recording head, ink may leak from the discharge port, or on the contrary, the ink may flow back to the liquid chamber side, so that normal discharge of the ink may not be performed. There were also problems.

In order to solve the above-mentioned problems, it is preferable to provide a filter or the like in the liquid flow path. However, by providing the filter or the like, the number of components constituting the recording head increases, Since the number of manufacturing steps is increased, there is a problem that the manufacturing cost of the recording head is increased, and further, the number of parts is increased or the number of manufacturing steps is increased, which may lead to generation of dust.

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems of the prior art, and an ink jet recording head which makes it difficult for dust in ink to reach the vicinity of a discharge port without increasing the number of parts and manufacturing steps. It is an object of the present invention to provide a manufacturing method thereof and an ink jet recording apparatus provided with the ink jet recording head.

[0010]

In order to achieve the above object, an ink jet recording head according to the present invention comprises a discharge port for discharging ink, and an energy generation for generating energy used for discharging ink from the discharge port. A first substrate provided with the energy generating element; and a first substrate provided with the energy generating element, the first substrate including the element and a liquid flow path provided corresponding to the energy generating element and communicating with the discharge port. An active energy ray-curable material layer which is laminated on the energy generating element disposing surface and is processed into a predetermined shape to form the liquid flow path, and contains a large number of fibrous fillers; A second substrate laminated on a surface of the line-curable material layer opposite to a surface in contact with the first substrate; and the energy generating element of the liquid flow path. The first substrate and the second substrate are respectively formed as a bottom wall and an upper wall, and the plurality of fibrous materials are formed from the active energy ray-curable material layer serving as a side wall. And a filter part from which the filler protrudes.

The energy generating element is an electrothermal transducer for generating thermal energy used for discharging ink, and a plurality of discharge ports are provided over the entire width of a recording area of a recording medium. May be a full line type.

Further, a method of manufacturing an ink jet recording head according to the present invention is provided corresponding to an energy generating element for generating energy used for discharging ink from a discharge port, and a liquid flow communicating with the discharge port. In the method of manufacturing an ink jet recording head having a path,
The energy generating element is formed on one surface of a first substrate to form an element surface, and the element surface is removed, which corresponds to a part of the liquid flow path including from the discharge port to the energy generating element installation site. Forming a solid layer made of a possible material; and laminating an active energy ray-curable material containing a fibrous filler and a second substrate on the element surface on which the solid layer is formed. And shielding a portion of the portion corresponding to the liquid flow path, on which the solid layer is not formed, from one of the first substrate and the second substrate. And irradiating the solid layer and the active energy ray-curable material that is uncured and shielded from the active energy rays from the laminate, so that a large number of the fibrous fillers protrude. Fill And forming a liquid flow path having a section, of the first substrate and the second substrate,
At least one has a property of transmitting the active energy ray.

An ink jet recording apparatus according to the present invention has a discharge port for discharging ink, an energy generating element for generating energy used for discharging ink from the discharge port, and an energy generating element corresponding to the energy generating element. An ink jet recording head having a liquid flow path communicating with the ejection port, and means for mounting the ink jet recording head. The ink jet recording head ejects the ink based on a recording signal. In an ink jet recording apparatus which performs recording by discharging from an outlet, the ink jet recording head is laminated on a first substrate provided with the energy generating element and a surface of the first substrate on which the energy generating element is provided. In order to form the liquid flow path, the active material is processed into a predetermined shape and contains a large number of fibrous fillers. An energy ray-curable material layer, a second substrate laminated on a surface of the active energy ray-curable material layer opposite to a surface contacting the first substrate, and the energy generating element of the liquid flow path. The first substrate and the second substrate are respectively provided as a bottom wall and an upper wall, and a part of the active energy ray-curable material layer serving as a side wall, The filter is characterized by having a filter portion in which a large number of fibrous fillers protrude.

The energy generating element is an electrothermal converter for generating thermal energy for discharging ink, or a full-line type in which discharge ports are formed over the entire width of a recording area of a recording medium. May be used.

[0015]

In the ink jet recording head of the present invention configured as described above, a part of the liquid flow path is provided on a part of the liquid flow path on the side opposite to the discharge port side where the energy generating element is provided. Since a filter portion is provided in which a large number of fibrous fillers protrude from the active energy ray-curable material layer serving as a side wall of the ink jet recording head, ink supplied from outside the ink jet recording head is ejected through the filter portion during recording. Discharged from the outlet. At this time, if dust composed of impurity particles or the like is present in the ink, the dust is caught by the fibrous filler projecting from the filter portion. As a result, the dust is prevented from entering the vicinity of the discharge port, and the occurrence of defective discharge due to the clogging of the dust near the discharge port is suppressed.

In the method for manufacturing an ink jet recording head according to the present invention, a removable material corresponding to a part of a liquid flow path from the discharge port to a portion where the energy generating element is provided is provided on the element surface of the first substrate. Forming a solid layer consisting of
An active energy ray-curable material layer containing a fibrous filler and a second substrate are laminated on the element surface on which the solid layer is formed to form a laminate. After that, among the portions corresponding to the liquid flow paths, the portions where the solid layer was not formed were shielded and irradiated with active energy rays, so that the active energy ray-curable material layer was shielded from the active energy rays. The parts remain uncured, while the other parts cure.

Then, by removing the solid layer and the uncured active energy ray-curable material layer from the first substrate, a portion of the liquid flow path is formed at the portion where the solid layer was formed. Is formed. At the same time, at the site where the uncured active energy ray-curable material layer was present, the fibrous filler that was present over the active energy ray irradiation site and the non-irradiation site was cured active energy beam. In the state where the filter portion is supported and projected by the line-curable material layer, the filter portion which remains without being removed and forms another part of the liquid flow path is formed.

[0018]

Next, embodiments of the present invention will be described with reference to the drawings.

First, an ink jet recording head (hereinafter, referred to as an ink jet recording head)
It is called "recording head". An embodiment will be described.

As shown in FIG. 1, glass, ceramic,
An electrothermal transducer 2 as an energy generating element is formed on a first substrate 1 made of plastic, metal, or the like by a semiconductor manufacturing process such as etching, vapor deposition, or sputtering, and is arranged at predetermined intervals. The one surface is the element surface 1a. Each of the electrothermal transducers 2 is connected to a control signal input electrode (not shown) for operating each of the electrothermal transducers 2, and each of the electrothermal transducers is operated by a signal input from each of the electrodes. 2 generates ejection energy by heating the ink in the vicinity thereof.

On the element surface 1a, an active energy ray-curable material layer 1 cured by irradiation with active energy rays is provided.
A curing member 10 composed of three members is laminated.

A plurality of grooves are formed on the surface of the curing member 10 facing the element surface 1a so as to correspond to the positions of the electrothermal transducers 2, respectively, and a space surrounded by the grooves and the element surface 1a. Constitute the individual liquid flow paths 15, and the openings that open to the outside of the respective spaces constitute the discharge ports 16. The element surface 1 is provided at a position spaced from each of the grooves (individual liquid flow paths 15) of the curing member 10.
An opening having a as a bottom wall is formed. A second substrate 4 having a concave portion 5 formed corresponding to a portion where the opening is formed is laminated on the curing member 10, and the opening and the concave portion 5 constitute a liquid chamber 11. Further, the hardening member 10 is formed with a plurality of filter sections 13 that communicate the liquid chamber 11 and the individual liquid flow paths 15. Each filter unit 1
Reference numeral 3 designates the first substrate 1 and the second substrate 4 as a bottom wall and an upper wall, respectively, and a number of fibrous fillers 18 protrude from the curing member 10 serving as a side wall. Each of the individual liquid channels 15 and each of the filter sections 13 constitute a liquid channel.

On the other hand, the second substrate 4 has a supply port 6 for communicating the liquid chamber 11 with the outside of the recording head.
A supply pipe (not shown) connected to an ink tank (not shown) or the like is connected to the supply port 6, so that ink is supplied from the ink tank to the liquid chamber 11 via the supply pipe. ing. The liquid chamber 11 is provided for the purpose of stably supplying the ink to the discharge port 16, but is not always necessary in the present invention, and supplies the ink from outside the recording head directly to the liquid flow path. You may.

Here, the operation when ink is ejected from each of the ejection ports 16 will be described. The ink supplied to the liquid chamber 11 and temporarily stored therein passes through the filter section 13 by capillary action to separate liquid. After entering the flow path 15, a meniscus is formed at the discharge port 16 and the individual liquid flow path 15 is kept filled. At this time, when the electrothermal transducer 2 is energized through an electrode (not shown) and generates heat, the ink on the electrothermal transducer 2 is rapidly heated, and bubbles are generated in the individual liquid flow paths 15. The ink is ejected from the ejection port 16 by the expansion of the bubble.

At this time, if dust such as impurity particles is present in the ink, the dust is caught by the fibrous filler 18 projecting from the filter portion 13 when passing through the filter portion 13. As a result, entry of the dust into the vicinity of the discharge port 16 is prevented, and occurrence of discharge failure due to clogging of the dust near the discharge port 16 is suppressed.

In this embodiment, an example is shown in which the electrode is provided with the electrothermal transducer 2 as an energy generating element for generating energy used for discharging ink.
However, the invention is not limited to this, and a piezoelectric element or the like that generates mechanical energy for instantaneously applying ejection pressure to ink may be used.

The number of the discharge ports 16 can be 128 or 256 at a high density of 16 / mm. Further, the number of the discharge ports 16 can be as large as the full width of the recording area of the recording medium to form a full line type. It can also be.

Next, an embodiment of a method for manufacturing a recording head will be described.

First, as shown in FIG. 2, two electrothermal converters each having an electrode (not shown) connected to an element surface 1a of a first substrate 1 made of glass, ceramic, plastic, metal, or the like. 2 are formed by a semiconductor manufacturing process such as etching, vapor deposition, or sputtering, and are provided at predetermined intervals.

In this embodiment, a description will be given of a case where two energy generating elements are provided. However, the number of the energy generating elements and the number of the liquid flow paths and the discharge ports corresponding thereto are not limited to two. It goes without saying that the number can be appropriately changed and provided.

Although not shown, various functional layers such as protective films may be provided on the element surface 1a including the electrodes and the electrothermal transducers 2 for the purpose of improving durability. General. In this embodiment, the effect is exhibited regardless of the presence or absence of these functional layers and the material.

The first substrate 1 functions as a part of a material for forming the liquid flow path and the liquid chamber, and also functions as a support for a solid layer and a hardening member described later. In the case where the liquid chamber is provided as in the present embodiment, when the below-described active energy ray irradiation step is performed from the first substrate 1 side, the first substrate 1 needs to be active energy ray permeable. However, in other cases, it can be used without any particular limitation on its shape, material, and the like.

Next, as shown in FIG. 3A, the solid layer 3 is laminated on the element surface 1a on the individual liquid flow path forming portion including each electrothermal converter 2 and the liquid chamber forming portion. Before and after the description, FIG. 3B shows an example of the second substrate 4. In the present embodiment, the second substrate 4 is configured to have a concave portion 5 and two supply ports 6 at a portion where a liquid chamber is to be formed. Hereinafter, each (A) in FIGS.
FIG. 4 is a schematic cross-sectional view taken along line AA ′ in FIG.
(B) of FIG. 7 to FIG. 7 are schematic cross-sectional views taken along the line BB ′ of FIG. 3, and (C) of FIG.
Shows a schematic cross-sectional view taken along the line CC ′ in FIG.

The solid layer 3 is removed after each of the steps described below, and an individual liquid flow path and a liquid chamber are formed in the removed portion. Needless to say, the shapes of the individual liquid flow paths and the liquid chambers can be made desired, and the solid layer 3 can also have a shape corresponding to the shapes of the individual liquid flow paths and the liquid chambers. In this embodiment, the individual liquid flow path is branched into two so that ink droplets can be ejected from each of the two ejection ports provided corresponding to the two electrothermal transducers 2. The liquid chamber communicates with each of the flow paths so that ink can be supplied to each of the flow paths.

The materials and means used for forming such a solid layer include, for example, the following materials.

Using a photosensitive dry film, the solid layer 3 is formed according to a so-called dry film image forming process.

A desired thickness of a solvent-soluble polymer layer and a photoresist layer are sequentially laminated on the first substrate 1,
After patterning the photoresist layer, the solvent-soluble polymer layer is selectively removed.

Print the resin.

As the photosensitive dry film described above, either a positive type or a negative type can be used. For example, in the case of a positive type dry film, it is solubilized in a developing solution by irradiation with active energy rays. As a positive type dry film or a negative type dry film, a negative type dry film which is a photopolymerization type but can be dissolved or peeled off with methylene chloride or a strong alkali is suitable.

As the positive type dry film, specifically, for example, “OZATEC R225” (trade name, Hoechst Japan KK) or the like, or as the negative type dry film,
"OZATEC T series" [trade name, Hoechst Japan Co., Ltd.], "PHOTEC PHT series" [trade name, Hitachi Chemical Co., Ltd.], "RISTON" [trade name, du Pont de.
Nemore's Co.] is used.

Of course, not only these commercially available materials,
Positive acting resin composition, for example, a resin composition mainly composed of a naphthoquinone diad derivative and a novolak type phenol resin, and a negative acting resin composition, for example, an acrylic oligomer having an acrylic ester as a reactive group and a thermoplastic polymer A composition mainly composed of a compound and a sensitizer or a composition composed of a polythiol, a polyene compound and a sensitizer can be used in the same manner.

The solvent-soluble polymers listed above include:
Any polymer compound can be used as long as it has a solvent that dissolves it and can form a film by coating. As the photoresist layer that can be used here, typically, a positive type liquid photoresist composed of a novolak type phenol resin and naphthoquinone diazide, a negative type liquid photoresist composed of polyvinyl cinnamate, a negative type liquid photoresist composed of a cyclized rubber and bisazide Examples thereof include a photoresist, a negative photosensitive dry film, a thermosetting ink and an ultraviolet curing ink.

Examples of the material for forming the solid layer 3 by the printing method described above include flat inks, screen inks, and transfer-type resins used in respective drying methods such as an evaporation drying type, a thermosetting type, and an ultraviolet curing type. Are used.

Among the above-listed materials, a means using a photosensitive dry film is preferable in view of processing accuracy, easiness of removal, workability, and the like. Among them, a positive type dry film is preferable. Is particularly preferred. That is, for example, the positive photosensitive material has a higher resolution than the negative photosensitive material, the relief pattern has a vertical and smooth side wall surface, or a tapered or reverse tapered cross-sectional shape can be easily formed. It is the most suitable for forming the liquid flow path. Further, it has a feature that the relief pattern can be dissolved and removed with a developing solution or an organic solvent, and is preferred as a solid layer forming material in the present invention. In particular, for example, in the positive photosensitive material using naphthoquinonediazide and novolak-type phenol resin mentioned above, since it can be completely dissolved with a weak alkaline aqueous solution or alcohol, it does not cause any damage to the energy generating element, and the subsequent process Removal is also very quick. Among such positive photosensitive materials, a dry film-like material is the most preferable material in that a film having a thickness of 10 to 100 μm can be obtained.

On the first substrate 1 on which the solid layer 3 is formed,
As shown in FIGS. 4A, 4B and 4C,
An active energy ray-curable material 7 is laminated so as to cover the solid layer 3. As the active energy ray-curable material 7,
Any polymer material containing a fibrous filler that can cover the solid layer 3 can be suitably used. The material forms a liquid flow path and a liquid chamber including a filter portion. Therefore, it is preferable to select and use a material having excellent adhesiveness to a substrate, mechanical strength, dimensional stability, and corrosion resistance. If such a material is specifically shown, a liquid, an active energy ray-curable material such as ultraviolet ray curing and electron beam curing is suitable, among which epoxy resin, acrylic resin, diglycol dialkyl carbonate resin, unsaturated polyester resin , A polyurethane resin, a polyimide resin, a melamine resin, a phenol resin, a urea resin and the like.
In particular, epoxy resins capable of initiating cationic polymerization by light, acrylic oligomers having an acrylic ester group capable of radical polymerization by light, photoaddition polymerization type resins using polythiols and polyenes, unsaturated cycloacetal resins, etc. The polymerization rate is high, and the physical properties of the polymer are excellent, and it is suitable as a structural material.

Examples of the fibrous filler containing the active energy ray-curable material 7 include glass fibers, metal fibers, mineral fibers, various whiskers, and carbon fibers. It is desirable that Specific examples of the fibrous filler include "YARN" (trade name, Asahi Fiber Glass Co., Ltd.) and Almax [trade name, Mitsui Mining Co., Ltd.].

As a method of laminating the active energy ray-curable material 7, for example, a discharge device using a nozzle conforming to a substrate shape, an applicator, a curtain coater, a roll coater,
Specific examples include a method of laminating by means such as a spray coater and a spin coater. In addition, when laminating a liquid curable material, it is preferable to perform deaeration of the material and then avoid mixing of air bubbles.

Next, (A), (B) and (C) of FIG.
As shown in (1), the second substrate 4 is laminated on the active energy ray-curable material 7 of the first substrate 1. At this time, the second substrate 4 may be provided with a concave portion 5 for obtaining a desired liquid chamber volume at a liquid chamber forming portion as necessary. Of course, like the first substrate 1, the second substrate 4 is made of glass, plastic,
A desired material such as a photosensitive resin, a metal, and a ceramic can be used. However, when the step of irradiating active energy rays described below is performed from the second substrate 4 side, the active energy rays may be transparent. is necessary. Further, the second substrate 4 may be provided with a supply port 6 for supplying ink in advance.

Although not particularly shown above, the lamination of the active energy ray-curable material 7 may be performed after the second substrate 4 is laminated on the solid layer 3. In this case, as a lamination method, a method is preferably used in which, after the second substrate 4 is pressed against the first substrate 1, the inside is depressurized, and then the active energy ray-curable material 7 is injected. When laminating the second substrate 4, for example, a spacer may be provided between each of the substrates 1 and 4, or an end of the second substrate 4 may be provided so that the active energy ray-curable material 7 has a required thickness. A device such as providing a convex portion may be used.

After obtaining a laminated body in which the first substrate 1, the solid layer 3, the active energy ray-curable material 7 and the second substrate 4 are sequentially laminated in this manner, FIGS. As shown in (C), the active energy ray permeable substrate side (in the present embodiment, the second part in this embodiment) is shielded from the active energy ray 9 with respect to the liquid chamber forming part and the filter part forming part. A mask 8 is laminated on the substrate 4), and an active energy ray 9 is irradiated from above the mask 8 (a black portion of the mask 8 shown in the figure is a portion which does not transmit the active energy beam, and a black portion Are the parts that transmit active energy rays). By the irradiation of the active energy ray 9, the active energy ray-curable material 7 (see FIG. 5) at the irradiated portion is cured to form a cured member 10, and the first substrate 1 and the second substrate 4 are cured by the curing. Is also performed. The active energy ray-curable material not irradiated with the active energy ray 9 remains uncured.

As the active energy ray 9, ultraviolet ray, electron beam, visible ray and the like can be used, but ultraviolet ray and visible ray are preferable because the exposure is carried out through a substrate, and ultraviolet ray is most suitable from the viewpoint of polymerization rate. ing. Ultraviolet light sources include high-pressure mercury lamps, ultra-high-pressure mercury lamps, halogen lamps,
A light source having a high energy density such as a xenon lamp, a metal halide lamp, or a carbon arc is preferably used. Light rays from the light source have high parallelism and can perform processing with higher accuracy as less heat is generated.However, if it is an ultraviolet light source generally used for printing plate making or printing wiring processing or curing of a photo-curable paint, Generally available.

As the mask 8 for the active energy ray 9, in particular, when ultraviolet rays or visible rays are used, a metal mask, a silver salt emulsion mask, a diazo mask, and the like can be mentioned. A method such as printing of black ink or attaching a sticker to the site may be used.

Next, for example, when the discharge port surface is not exposed, the laminated body which has been cured by irradiation with the active energy rays 9 is cut at a required position by a dicing saw using a diamond blade as necessary. Then, the discharge port surface is exposed. However, such a cutting operation,
It is not always necessary for carrying out the present invention, for example, a liquid curable material is used, a mold is used when laminating the material, the discharge port is not closed and covered, and the discharge port surface In the case where is made smooth, cutting is unnecessary.

Next, the solid layer 3 and the uncured active energy ray-curable material 7 were converted from the above-mentioned laminate after the irradiation of the active energy ray with the active energy ray-irradiated materials shown in FIGS. 7A, 7B and 7C.
The liquid chamber 11 and the individual liquid flow path 15 are removed as shown in FIG.
And a filter section 13 are formed.

At this time, the active energy ray-curable material 7
Of the fibrous filler 18 existing between the portion irradiated with the active energy ray and the portion not irradiated with the active energy ray.
Is partially supported by a cured member 10 which is a cured active energy ray-curable material 7. As a result, even if the uncured active energy ray-curable material 7 is removed to form the filter portion 13, the fibrous filler 18 is removed.
The fibrous filler 18 is supported by the hardened member 10 and protrudes from the hardened member 10 serving as the side wall of the filter unit 13 without being removed.

The means for removing the solid layer 3 and the uncured active energy ray-curable material 7 (see FIG. 6) is not particularly limited. A preferred method is to immerse and remove the line-curable material 7 in a liquid that dissolves, swells or peels off. At this time, if necessary, ultrasonic treatment, spraying, heating, stirring, shaking, pressurized circulation, and other removal promoting means can be used.

The liquid used for the above-mentioned removing means includes, for example, halogen-containing hydrocarbons, ketones, esters,
Examples thereof include aromatic hydrocarbons, ethers, alcohols, N-methylpyrrolidone, dimethylformamide, phenol, water, water containing acids or alkalis, and the like. A surfactant may be added to these liquids as needed. When a positive-type dry film is used as the solid layer 3, it is preferable that the solid layer 3 be again irradiated with ultraviolet rays in order to facilitate the removal. When other materials are used, the solid layer 3 is heated to 40 to 60 ° C. Preferably, the liquid is heated.

FIG. 7A, FIG. 7B and FIG.
The state after the removal of the solid layer 3 and the uncured active energy ray-curable material 7 as described above is shown. In the case of this embodiment, the solid layer 3 and the uncured active energy ray-curable material 7 are cured. The conductive material 7 is immersed in a liquid for dissolving the same, and is dissolved and removed through the discharge port 16 (see FIG. 1) of the recording head and the liquid supply port 6.

After the above steps are completed, the surface of the discharge port may be cut, polished, and smoothed as necessary in order to optimize the distance between the electrothermal transducer 2 and the discharge port.

Next, a first embodiment of the ink jet recording apparatus will be described.

Referring to FIG. 8, a recording head 21 which discharges ink based on a predetermined recording signal and records a desired image.
Has the same configuration as that shown in the above-described embodiment of the recording head, and is manufactured by the method of the above-described embodiment of the manufacturing method of the recording head.

The carriage 22 on which the recording head 21 is mounted and which serves as a means for mounting the recording head
A timing belt 28 is slidably fitted to the guide shafts 23 and 24 in the direction of arrow B, and is wound around a pulley 27 fixed to an output shaft of a carriage motor 25 and a pulley 26 rotatably supported on the shaft. At one site. The recording head 21 is configured such that the pulley 27 rotates forward and backward by the driving force of the carriage motor 25, so that the timing belt 28 rotates forward and backward, and reciprocates in the arrow B direction.

The recording paper 29 as a recording medium is guided by a paper pan 30 and conveyed by a paper feed roller (not shown) pressed by a pinch roller. This conveyance is performed using the paper feed motor 36 as a drive source. The transported recording paper 29 is tensioned by a discharge roller 33 and a spur 34 and is pressed against the heater 31 by a paper pressing plate 32 formed of an elastic member. It is conveyed while being performed. The recording paper 29 to which the ink ejected by the recording head 21 adheres is heated by the heater 31, and the moisture of the adhered ink evaporates and is fixed to the recording paper 29.

The recovery unit 35 is for maintaining the ejection characteristics in a normal state by removing foreign matters and ink having increased viscosity attached to the ejection openings (not shown) of the recording head 21. .

The recovery unit 35 includes a cap 38a.
Is provided to cap the ejection openings of the recording head 21 to prevent clogging. An ink absorber 38 is provided inside the cap 38a.

Further, the recording area side of the recovery unit 35 is in contact with the surface of the recording head 21 on which the ejection openings are formed to clean foreign matter and ink droplets adhered to the surface on which the ejection openings are formed. Cleaning blade 37
Is provided.

Next, a description will be given of a second embodiment of the ink jet recording apparatus.

FIG. 9 is a schematic perspective view showing only a main part of the second embodiment of the ink jet recording apparatus. The recording head 41 which discharges ink based on a predetermined recording signal and records a desired image includes: The recording head has the same configuration as that shown in the above-described embodiment of the recording head, and is a full line type in which a plurality of ejection ports are provided over the recording region of the recording medium. It is manufactured by the method.

The recording head 41 is mounted on a main body of an ink jet recording apparatus (not shown), and a discharge port surface 41a in which a plurality of discharge ports are arranged is separated from a transport surface 42a of a transport belt 42 by a predetermined gap. In position.

The transport belt 42 is wound around two rollers 43a and 43b which are rotatably supported by the main body of the ink jet recording apparatus.
When the rollers are forcibly rotated, the rollers rotate in the direction of arrow C.

In the ink jet recording apparatus of this embodiment, the recording medium sent out from a paper supply unit (not shown) (right side in the figure) toward the transport belt 42 is attracted to the transport surface 42a of the transport belt 42, and the recording head 41 is moved. Discharge port surface 41a
In this case, the recording head 41 passes through a gap between the recording head 41 and the recording head 41. At this time, ink is ejected from each ejection port of the recording head 41 to perform recording.

Next, an experimental example of the recording head of the present invention will be described.

In this experiment, two types of print heads manufactured according to the print head manufacturing procedure shown in FIGS. 2 to 7 were used. One type is an embodiment of the present invention, in which the cross-sectional area of the filter portion is 1500 μm ² (width 30 μm × height 50 μm),
In addition, a large number of fibrous fillers protrude from the side wall of the filter portion (hereinafter, referred to as “examples”). Another type is a sample for investigating the effect of the fibrous filler, and the cross-sectional area of the filter part is the same as that of the experimental example, but the fibrous filler does not protrude from the filter part (hereinafter, referred to as “ Comparative Example). Here, the height of the filter portion of the recording head of the embodiment is equal to the thickness of the active energy ray-curable material, and is actually 50 μm or more.
Since its value is only slightly larger than 50 μm,
The thickness may be 50 μm for convenience. Further, in any of the recording heads, the sectional area of the ejection port is 2.
It is 500 μm ² (width 50 μm × height 50 μm).

Hereinafter, a description will be given of a procedure for manufacturing a sample of the recording head used in this experiment.

First, an electrothermal transducer (material HfB ₂ ) as an energy generating element is formed on a glass substrate (1.1 mm in thickness) as a first substrate, and then a positive electrode is formed on the first substrate. A 50 μm-thick photosensitive layer made of a mold dry film “OZATEC R225” (Hoechst Japan K.K.) was formed by lamination. A mask having a predetermined pattern is superimposed on the photosensitive layer, and a liquid channel including a filter portion is provided for a sample as an example except for an individual liquid channel and a portion where a liquid chamber is to be formed. A portion excluding the portion where the liquid chamber is to be formed was irradiated with ultraviolet light of 70 mJ / cm ² .

Next, a spray phenomenon was carried out with a 5% aqueous solution of sodium metasilicate, and the sample to be used as an example was placed on a portion of the glass substrate containing the above-mentioned electrothermal transducer on which individual liquid channels and liquid chambers were to be formed. On a sample serving as a comparative example, a relief solid layer having a thickness of about 50 μm was formed in a portion where a liquid flow path including a filter portion and a liquid chamber were to be formed.

In the same operation procedure as above, 200 substrates each having the same solid layer laminated thereon were formed in each of the Examples and Comparative Examples, and a total of 400 substrates were formed on each of the substrates on which the solid layer was formed. An epoxy resin "Cyracure UVR-6110" (manufactured by Nippon Union Carbide Co., Ltd.) was laminated as an active energy ray-curable material. The lamination procedure was performed as follows.

The active energy ray curable material has a thickness of 40 μm.
Of fibrous filler "Almax" (trade name, Mitsui Mining Co., Ltd.) cut to a length of 1/3 of the weight of the active energy ray-curable material, and then mixed with a catalyst (triphenyl (Fonium hexafluoroantimonate) and degassed using a vacuum pump. afterwards,
The defoamed active energy ray-curable material was applied to each of the first substrates on which the solid layers were laminated using an applicator to a thickness such that the solid layers were covered.

Next, each of the first substrates having the active energy ray-curable material laminated thereon has a thickness of 1.1 mm.
Then, a glass substrate serving as a second substrate having a concave portion having a depth of 0.3 mm at a portion where the liquid chamber is to be formed and a through hole (supply port) for supplying a recording liquid at the center of the concave portion is formed. The parts were aligned and laminated.

Next, a film mask was brought into close contact with the upper surface of the second substrate of the laminate, and for the sample to be used as an example, the liquid chamber and the filter portion were to be formed, and
The sample serving as a comparative example was irradiated with an ultrahigh-pressure mercury lamp "Uniarc" (made by Ushio Inc.) from above with the active energy ray shielded from the portion where the liquid chamber was to be formed. At this time, the integrated intensity of light near 365 nm is 10
It was 00 mW / cm ² . Next, the film mask was removed, and the electrothermal transducer was cut so as to be at a position of 0.1 mm from the discharge port to form a discharge port surface. Each of the 400 laminates with the discharge port surface exposed is immersed in ethanol, filled in a liquid chamber with ethanol, and kept in contact with the ethanol for about 3 minutes in an ultrasonic cleaning tank with the discharge port surface in contact with ethanol. A dissolution removal operation was performed. 5% after dissolution and removal
Was washed with a NaOH aqueous solution and pure water. After washing, these laminates were dried, and then 10 J / cm ² using a high-pressure mercury lamp.
After exposure, the active energy ray-curable material was completely cured.

In each case, no solid layer residue was present in the liquid flow paths of the 400 recording heads thus formed. Further, these recording heads were mounted on an ink jet recording apparatus, and pure water / glycerin / direct black 154 (water-soluble black dye) = 65/30.
An ejection test was performed using an inkjet ink composed of / 5 (parts by weight). Table 1 shows the results. In Table 1,
In order to confirm the effect of this test, the results of an ejection test performed on a conventional print head having no filter opening are also shown.

[0082]

[Table 1] In Table 1, "nozzle clogging" refers to a case where dust is clogged in an individual liquid flow path when observed with a microscope. It is expressed by the number / the number of recording heads. In addition, “non-discharge” means that dust clogging the individual liquid flow path narrows the individual liquid flow path, and the number of times ink was not ejected. This indicates the number of times that the ink has not been ejected straight due to a decrease in the force.

As shown in Table 1, when an opening having a cross-sectional area smaller than the cross-sectional area of the discharge port is provided in a part of the liquid flow path, the rate of occurrence of nozzle clogging is greatly reduced, and accordingly, non-discharge and deflection are also reduced. You can see that When the fibrous filler protrudes from the opening, the nozzle clogging rate, discharge failure, and deflection are further reduced, and the fibrous filler is effectively acting as a filter for dust in the ink. You can see that.

The present invention provides an excellent effect particularly in a recording head and an ink jet recording apparatus of the type ejecting ink using thermal energy, which are proposed by Canon Inc. among the ink jet recording methods. is there.

The typical configuration and principle are described in, for example, US Pat. Nos. 4,723,129 and 4,740.
It is preferable to use the basic principle disclosed in the specification of Japanese Patent No. 796. This method is a so-called on-demand type,
Although it can be applied to any type of continuous type, in particular, in the case of the on-demand type, it can be applied to a sheet holding liquid (ink) or an electrothermal converter arranged corresponding to the liquid path. Applying at least one drive signal to a rapid temperature rise exceeding nucleate boiling corresponding to the recorded information, thereby generating heat energy in the electrothermal transducer,
This is effective because the film can be boiled on the heat-acting surface of the recording head and bubbles in the liquid (ink) can be effectively formed in one-to-one correspondence with the drive signal. By discharging the liquid (ink) through the discharge opening by the growth and contraction of the bubble, at least one droplet is formed. When the drive signal is formed into a pulse shape, the growth and shrinkage of the bubble are performed immediately and appropriately, so that the ejection of a liquid (ink) having particularly excellent responsiveness can be achieved, which is more preferable. As the pulse-shaped drive signal, those described in US Pat. Nos. 4,463,359 and 4,345,262 are suitable. It should be noted that US Patent No. 43 of the invention relating to the rate of temperature rise of the heat acting surface.
If the conditions described in the specification of JP-A No. 13124 are adopted, more excellent recording can be performed.

The configuration of the recording head may be a combination of a discharge port, a liquid path and an electrothermal converter (a linear liquid path or a right-angle liquid path) as disclosed in the above-mentioned respective specifications. U.S. Pat. No. 4,558,333 and U.S. Pat.
A configuration using the specification of Japanese Patent No. 59600 is also effective for the present invention. In addition, Japanese Unexamined Patent Publication (Kokai) No. 123670/1984 discloses a configuration in which a common slit is used as a discharge portion of an electrothermal converter for a plurality of electrothermal converters, and an aperture for absorbing pressure waves of thermal energy. The present invention is also effective as a configuration based on Japanese Patent Application Laid-Open No. 59-138461, which discloses a configuration corresponding to a discharge unit.

Further, as a full-line type recording head having a length corresponding to the maximum recording medium width that can be recorded by the ink jet recording apparatus, a combination of a plurality of recording heads as disclosed in the above specification is used. However, the present invention can more effectively exhibit the above-mentioned effects, although it may be either a configuration satisfying the length or a configuration as a single recording head formed integrally.

In addition, by being mounted on the apparatus main body, it is possible to make an electrical connection with the apparatus main body and supply ink from the apparatus main body, and to be a replaceable chip type recording head, or to be integrated with the recording head itself. The present invention is also effective when a cartridge-type recording head provided in a fixed manner is used.

Further, recovery means for the recording head provided as a constitution of the ink jet recording apparatus of the present invention,
It is preferable to add a preliminary auxiliary means or the like because the effects of the present invention can be further stabilized. If these are specifically mentioned, the capping means for the recording head,
Preliminary heating means using cleaning means, pressurizing or suction means, electrothermal transducer or another heating element or a combination of these, and performing preliminary ejection mode for performing ejection different from recording also provide stable recording. Effective to do.

Further, the recording mode of the ink jet recording apparatus is not limited to the recording mode of only the mainstream color such as black, but may be a single recording head or a combination of plural recording heads. The present invention is extremely effective for an apparatus provided with at least one of color or full color by color mixture.

In each embodiment of the present invention described above,
Although the ink is described as a liquid, it is an ink that solidifies at room temperature or below, and is softened or liquid at room temperature, or in the above-described inkjet, the temperature of the ink itself is controlled within a range of 30 ° C. or more and 70 ° C. or less. Generally, the temperature is controlled so that the viscosity of the ink is in a stable ejection range, so that the ink may be in a liquid state when the use recording signal is applied. In addition, it is possible to prevent the temperature of the ink from rising from the solid state to the liquid state by positively using thermal energy, or use ink that solidifies in a standing state to prevent evaporation of the ink. In any case, thermal energy such as one that liquefies the ink by applying it according to the recording signal of the thermal energy and discharges it as an ink liquid or one that already starts solidifying when it reaches the recording medium, etc. The use of an ink that liquefies for the first time is also applicable to the present invention. In the present invention, the most effective one for each of the above-mentioned inks is to execute the above-mentioned film boiling method.

[0092]

Since the present invention is configured as described above, it has the following effects.

First, in the ink jet recording head of the present invention, a large number of fibrous fillers protrude from a part of the side wall of the liquid flow path that does not include the area from the discharge port to the energy generating element installation site to form a filter portion. Therefore, when dust including impurity particles or the like is present in the ink, the dust is caught by the fibrous filler when the ink passes through the filter portion during recording. As a result, it is possible to prevent the dust from entering the vicinity of the discharge port, and it is possible to suppress the occurrence of a discharge failure due to the dust clogging near the discharge port.

In addition, the fluidity of the ink is suppressed by the filter portion, and the leakage of the ink from the discharge port, which is generated when a strong vibration or the like is applied to the ink jet recording head,
Discharge failure due to backflow of ink toward the ink storage unit can be suppressed. Further, since the active energy ray-curable material layer serving as the main structural member of the ink jet recording head contains a fibrous filler, it is structurally reinforced.

The method of manufacturing an ink jet recording head of the present invention uses an active energy ray-curable material containing a fibrous filler, and shields a portion corresponding to a filter portion when forming a liquid flow path. By irradiating active energy rays to remove the solid layer and the uncured active energy ray-curable material, a large number of fibrous A filter portion from which the filler protrudes is formed. For this reason,
Compared to the conventional inkjet recording head manufacturing method,
A filter can be provided in a part of the liquid flow path without increasing the number of parts and the number of manufacturing steps, and the function as an inkjet recording head can be improved.

[Brief description of the drawings]

FIG. 1 is a partially cutaway perspective view of one embodiment of an ink jet recording head of the present invention.

FIG. 2 is a view for explaining one embodiment of a method for manufacturing an ink jet recording head according to the present invention, and shows a first embodiment before a solid layer is formed.
FIG. 3 is a perspective view of the substrate of FIG.

3A and 3B are diagrams illustrating an embodiment of a method for manufacturing an ink jet recording head according to the present invention, wherein FIG. 3A is a plan view of a first substrate after a solid layer is formed, and FIG. 3B is a second substrate. FIG.

FIG. 4 is a diagram illustrating one embodiment of a method for manufacturing an ink jet recording head according to the present invention, and shows a cross-sectional view of a first substrate after laminating a solid layer and an active energy ray-curable material;
(A) is an AA 'section shown in FIG. 3, (B) is a BB' section shown in FIG. 3, and (C) is a CC 'section shown in FIG.

FIG. 5 is a view for explaining one embodiment of a method for manufacturing an ink jet recording head according to the present invention, and shows a cross-sectional view of a laminate after laminating a second substrate, and FIG. 5 (A) is AA shown in FIG. FIG. 3B is a sectional view, FIG. 3B is a sectional view taken along line BB shown in FIG.
FIG. 5 is a sectional view taken along the line CC ′ shown in FIG.

FIG. 6 is a view for explaining one embodiment of a method for manufacturing an ink jet recording head according to the present invention, in which a cross-sectional view of a laminated body after lamination of a mask is shown, and (A) is a cross-sectional view along AA ′ shown in FIG. ,
(B) is a BB ′ cross-sectional view shown in FIG. 3, and (C) is a CC ′ cross-sectional view shown in FIG.

FIG. 7 is a view for explaining one embodiment of the method for manufacturing an ink jet recording head according to the present invention, and shows a cross-sectional view of a laminate after removing a solid layer and an uncured active energy ray-curable material; Is a sectional view taken along the line AA ′ shown in FIG. 3, and FIG.
And FIG. 3C is a cross-sectional view taken along the line CC ′ shown in FIG.

FIG. 8 is a perspective view of a main part of a first embodiment of the ink jet recording apparatus of the present invention.

FIG. 9 is a perspective view of a main part of a second embodiment of the ink jet recording apparatus of the present invention.

FIG. 10 is a partially cutaway perspective view of a conventional inkjet recording head.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 1st board | substrate 2 electrothermal transducer 3 solid layer 4 2nd board | substrate 5 recessed part 6 supply port 7 active energy ray curable material 8 mask 9 active energy ray 10 hardening member 11 liquid chamber 13 filter part 15 individual liquid flow path DESCRIPTION OF SYMBOLS 16 Discharge port 18 Fibrous filler 21, 41 Recording head 22 Carriage 23, 24 Guide shaft 25 Carriage motor 26, 27 Pulley 28 Timing belt 29 Recording paper 30 Paper pan 31 Heater 32 Paper press plate 33 Discharge roller 34 Spur 35 Recovery unit 36 Paper feed motor 37 Cleaning blade 38 Ink absorber 38a Cap 41a Discharge port surface 42 Transport belt 42a Transport surface 43a, 43b Roller

──────────────────────────────────────────────────続 き Continued on the front page (58) Field surveyed (Int.Cl. ⁷ , DB name) B41J 2/05 B41J 2/16 B41J 2/175

Claims (7)

(57) [Claims] A discharge port for discharging ink; an energy generating element for generating energy used for discharging ink from the discharge port; and an energy generating element provided corresponding to the energy generating element. An ink jet recording head having a liquid flow path that communicates with a first substrate on which the energy generating element is provided; and a first substrate on which the energy generating element is provided. An active energy ray-curable material layer processed into a predetermined shape to contain and containing a large number of fibrous fillers, and an active energy ray-curable material layer on a side opposite to a surface of the active energy ray-curable material layer contacting the first substrate A second substrate laminated on a surface, and the first substrate and the second substrate are disposed on a part of the liquid flow path on the side opposite to the discharge port from the portion where the energy generating element is provided. Re and a bottom wall and top wall, and an ink jet recording head characterized in that it comprises a filter unit in which the number of fibrous filler protrudes from the active energy ray curable material layer as a sidewall. 2. The ink jet recording head according to claim 1, wherein the energy generating element is an electrothermal converter that generates thermal energy used for discharging ink. 3. An ink jet recording head according to claim 1, wherein a plurality of ejection ports are provided over the entire width of the recording area of the recording medium. 4. A method for manufacturing an ink jet recording head comprising a liquid flow path provided corresponding to an energy generating element for generating energy used for discharging ink from a discharge port and communicating with the discharge port. An energy generating element is formed in advance on one surface of a first substrate to form an element surface, and the element surface corresponds to a part of the liquid flow path including from the discharge port to the energy generating element installation site. Forming a solid layer made of a removable material; and an active energy ray-curable material containing a fibrous filler on the element surface on which the solid layer is formed; and
Forming a laminate by laminating the substrates, and, of the portions corresponding to the liquid flow paths, shielding the portions on which the solid layer is not formed, so as to cover the first substrate and the second substrate. Irradiating an active energy ray from any one side, and removing the solid layer and the active energy ray-curable material that is uncured while the active energy ray is shielded from the laminate, Forming a liquid flow path having a filter portion from which a large number of the fibrous filters project, wherein at least one of the first substrate and the second substrate transmits the active energy ray. A method for producing an ink jet recording head, having properties. 5. An ejection port for ejecting ink, an energy generating element for generating energy used for ejecting ink from the ejection port, and an energy generating element provided corresponding to the energy generating element. An ink jet recording head having a liquid flow path communicating with the ink jet recording head, and means for mounting the ink jet recording head, wherein the ink jet recording is performed by discharging ink from a discharge port of the ink jet recording head based on a recording signal. In the recording apparatus, the inkjet recording head includes a first substrate on which the energy generating element is provided, and is stacked on a surface of the first substrate on which the energy generating element is provided to form the liquid flow path. An active energy ray-curable material layer processed into a predetermined shape and containing a large number of fibrous fillers; A second substrate laminated on a surface of the radiation curable material layer opposite to a surface in contact with the first substrate; and a portion of the liquid flow path that is on a side opposite to the discharge port from a portion where the energy generating element is provided. A filter part in which the first substrate and the second substrate are respectively a bottom wall and an upper wall, and the plurality of fibrous fillers protrude from the active energy ray-curable material layer serving as a side wall. An ink jet recording apparatus comprising: 6. The ink jet recording apparatus according to claim 5, wherein the energy generating element is an electrothermal converter that generates thermal energy used for discharging ink. 7. The ink jet recording apparatus according to claim 5, wherein a plurality of discharge ports are provided in a full line type over the entire width of the recording area of the recording medium.