JP3224299B2 - Method of manufacturing inkjet head - Google Patents
Method of manufacturing inkjet headInfo
- Publication number
- JP3224299B2 JP3224299B2 JP300493A JP300493A JP3224299B2 JP 3224299 B2 JP3224299 B2 JP 3224299B2 JP 300493 A JP300493 A JP 300493A JP 300493 A JP300493 A JP 300493A JP 3224299 B2 JP3224299 B2 JP 3224299B2
- Authority
- JP
- Japan
- Prior art keywords
- hole
- pressure chamber
- nozzle
- substrate
- nozzle hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Description
【０００１】[0001]
【産業上の利用分野】この発明は、ノズル孔からインク
滴を吐出させて記録を行うためのインクジェットヘッド
の製造方法に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method of manufacturing an ink jet head for performing recording by discharging ink droplets from nozzle holes.
【０００２】インクジェット記録方式は構造が簡単で、
カラー化がし易く、騒音も無いなどの長所を有してお
り、今後の記録方式の主流として期待されている。本発
明はインクジェット記録装置の、特に記録ヘッドの製造
方法に関するものである。[0002] The ink jet recording system has a simple structure,
It has advantages such as easy colorization and no noise, and is expected as the mainstream of the recording system in the future. The present invention relates to an inkjet recording apparatus, and more particularly to a method for producing a recording head.
【０００３】[0003]
【従来の技術】従来のインクジェットヘッドは、インク
流路部とノズル部とを金属、シリコン単結晶ウェハ等の
無機材料で構成して、そこに圧力室やノズル孔等をエッ
チング加工によって形成するか、インク流路部とノズル
部を光硬化樹脂で構成して、圧力室やノズル孔等となる
位置に遮光マスクを置いて紫外線を照射し、圧力室やノ
ズル孔が非硬化部分として形成されるようにしていた。2. Description of the Related Art In a conventional ink jet head, an ink flow path portion and a nozzle portion are made of an inorganic material such as a metal or a silicon single crystal wafer, and pressure chambers and nozzle holes are formed therein by etching. The ink flow path portion and the nozzle portion are made of a photo-curing resin, and a light-shielding mask is placed at a position to be a pressure chamber or a nozzle hole, and ultraviolet light is irradiated, so that the pressure chamber or the nozzle hole is formed as an uncured portion Was like that.
【０００４】[0004]
【発明が解決しようとする課題】しかし、エッチング加
工の場合には、加工面が次第に先細りの形状になるの
で、厳密な寸法精度が求められるノズル孔を正確な形状
寸法に形成するのが難しい欠点がある。However, in the case of etching, since the processing surface gradually becomes tapered, it is difficult to form a nozzle hole having a strict dimensional accuracy in a precise shape and size. There is.
【０００５】一方、光硬化樹脂を用いるとノズル孔の加
工は精度よくできるが、材料の機械強度が弱いので駆動
源からの圧力によってノズル板自身が振動してしまい、
そのためにインク滴の吐出速度が充分でなくて、良い印
字品位が得られない欠点がある。[0005] On the other hand, the use of a photo-curing resin makes it possible to process the nozzle hole with high accuracy, but the mechanical strength of the material is weak, so that the nozzle plate itself vibrates due to the pressure from the driving source.
For this reason, there is a disadvantage that the ejection speed of the ink droplets is not sufficient and good print quality cannot be obtained.
【０００６】そこで本発明は、ノズル孔を高精度に形成
することができ、しかもノズル板が振動し難くてインク
滴の充分な吐出速度により安定した印字品位を得ること
ができるインクジェットヘッドの製造方法を提供するこ
とを目的とする。Accordingly, the present invention provides a method of manufacturing an ink jet head in which a nozzle hole can be formed with high accuracy, a nozzle plate is hardly vibrated, and a stable print quality can be obtained with a sufficient discharge speed of ink droplets. The purpose is to provide.
【０００７】[0007]
【課題を解決するための手段】上記の目的を達成するた
め、本発明のインクジェットヘッドの製造方法は、実施
例を説明するための図１に示されるように、圧力室３か
らインク滴を吐出させるためのノズル孔９の径より太い
孔５を上記圧力室３内に開口するように基板１に穿設し
て、上記孔５に光硬化樹脂７を充填し、ノズル孔９にな
る部分を遮光した状態で上記光硬化樹脂７に光を照射し
て上記光硬化樹脂７を硬化させた後、上記孔５内から上
記光硬化樹脂７の未硬化部分を除去してノズル孔９を形
成することを特徴とし、上記基板１を無機物によって形
成するとよい。In order to achieve the above object, a method of manufacturing an ink jet head according to the present invention discharges ink droplets from a pressure chamber 3 as shown in FIG. A hole 5 larger than the diameter of the nozzle hole 9 is formed in the substrate 1 so as to open into the pressure chamber 3, and the hole 5 is filled with the photocurable resin 7. After irradiating the photocurable resin 7 with light in a light-shielded state to cure the photocurable resin 7, an uncured portion of the photocurable resin 7 is removed from the inside of the hole 5 to form a nozzle hole 9. It is preferable that the substrate 1 is formed of an inorganic material.
【０００８】[0008]
【作用】ノズル孔９になる部分には、ノズル孔９の径よ
り大きな孔５が穿設されて、その孔１内に光硬化樹脂７
が充填される。そして、ノズル孔９になる部分以外は光
照射によって硬化され、未硬化部分を除去することによ
りノズル孔９が形成される。A hole 5 having a diameter larger than the diameter of the nozzle hole 9 is formed in a portion to be the nozzle hole 9 so that the photocurable resin 7 is formed in the hole 1.
Is filled. The portion other than the portion that becomes the nozzle hole 9 is cured by light irradiation, and the uncured portion is removed to form the nozzle hole 9.
【０００９】一方、ノズル孔９になる部分以外のノズル
板は、基板１自体で形成される。On the other hand, the nozzle plate other than the portion that becomes the nozzle hole 9 is formed by the substrate 1 itself.
【００１０】[0010]
【実施例】図面を参照して実施例を説明する。この実施
例のインクジェットヘッドを製造するには、まず、図２
に示されるように、例えばシリコン単結晶ウェハまたは
ステンレス鋼等の無機物からなる基板１の裏面側に、エ
ッチング加工によって、図示が省略されているインク供
給路２に連通して圧力室３を凹んで形成する。An embodiment will be described with reference to the drawings. To manufacture the ink jet head of this embodiment, first, FIG.
As shown in FIG. 3, the pressure chamber 3 is recessed on the back side of a substrate 1 made of an inorganic substance such as a silicon single crystal wafer or stainless steel by communicating with an ink supply path 2 (not shown) by etching. Form.
【００１１】図３はその平面断面図であり、多数の圧力
室３が、インク供給路２に連通して一枚の基板１に並ん
で形成される。そして、この圧力室３内に、図４に示さ
れるように、例えばポリエチレングリコール♯４０００
を８０℃に加熱して液状にした充填材４を充填し、室温
に戻して固化させる。FIG. 3 is a cross-sectional plan view, in which a number of pressure chambers 3 are formed side by side on a single substrate 1 so as to communicate with an ink supply path 2. Then, for example, as shown in FIG.
Is heated to 80 ° C., filled with the filler 4 which has been liquefied, returned to room temperature, and solidified.
【００１２】次に、図５に示されるように、圧力室３内
からインク滴を吐出させるためのノズル孔（後述する
９）の径より太い径の孔５を、圧力室３からはみ出さな
いように圧力室３内に一端を開口させて、基板１の表面
側から圧力室３内に貫通するようにエッチング加工によ
り形成する。Next, as shown in FIG. 5, a hole 5 having a diameter larger than the diameter of a nozzle hole (9 described later) for ejecting ink droplets from inside the pressure chamber 3 does not protrude from the pressure chamber 3. One end is opened in the pressure chamber 3 so as to penetrate into the pressure chamber 3 from the surface side of the substrate 1 by etching.
【００１３】そして、図６に示されるように、その孔５
内に、光が当たると硬化する光硬化樹脂７を充填して、
図７に示されるように、光硬化樹脂７の表面上に、ノズ
ルになる部分を遮光するための遮光マスク８を置く。遮
光マスク８としては、例えばクロム蒸着をしたガラスマ
スクを用いることができる。Then, as shown in FIG.
Is filled with a photo-curing resin 7 that cures when exposed to light,
As shown in FIG. 7, a light-shielding mask 8 is placed on the surface of the photo-curing resin 7 to shield a part to be a nozzle from light. As the light shielding mask 8, for example, a glass mask on which chromium is deposited can be used.
【００１４】そのようにしておいてから、図１に示され
るように、例えば６０ｍＶ／cm2 の紫外線を、基板１の
表面側から垂直に５秒間照射する。このようにすること
によって、図７に示されるように、光硬化樹脂７は遮光
マスク８の裏側以外の部分が硬化する。After that, as shown in FIG. 1, ultraviolet rays of, for example, 60 mV / cm 2 are irradiated vertically from the surface side of the substrate 1 for 5 seconds. In this way, as shown in FIG. 7, the photo-curing resin 7 is cured at a portion other than the back side of the light-shielding mask 8.
【００１５】そこで、遮光マスク８を光硬化樹脂７の表
面から剥離し、アセトン等の溶剤を用いて例えば４０秒
間超音波洗浄することにより、図８に示されるように、
光硬化樹脂７の未硬化部分が溶出して、ノズル孔９が形
成される。そして、ノズル板１０部分は、基板１によっ
て形成される。Then, the light-shielding mask 8 is peeled off from the surface of the photo-curing resin 7 and subjected to ultrasonic cleaning with a solvent such as acetone for 40 seconds, for example, as shown in FIG.
The uncured portion of the photocurable resin 7 elutes, and the nozzle hole 9 is formed. The nozzle plate 10 is formed by the substrate 1.
【００１６】次に、基板１全体を、例えば８０℃に加熱
した水中に漬けることにより、図９に示されるように、
充填材４が溶出して、インク供給路２及び圧力室３内か
ら除去される。Next, the entire substrate 1 is immersed in water heated to, for example, 80 ° C., as shown in FIG.
The filler 4 elutes and is removed from the ink supply path 2 and the pressure chamber 3.
【００１７】そして最後に、図１０に示されるように、
基板１の裏面側に振動板１１を接着し、さらにその振動
板１１の外面側に、各圧力室３と位置を合わせて圧電素
子１２を接着する。Finally, as shown in FIG.
The vibration plate 11 is bonded to the back surface of the substrate 1, and the piezoelectric element 12 is bonded to the outer surface of the vibration plate 11 in alignment with each pressure chamber 3.
【００１８】このようにしてインクジェットヘッドがで
きる。図１１は、ノズル孔側から見たインクジェットヘ
ッドである。このようにして形成されたインクジェット
ヘッドの圧力室３に、インク供給路２を介してインク液
を満たし、圧電素子１２を電圧印加によって変形させる
と、それによって振動板１１が振動し、圧力室３内のイ
ンク液に吐出圧が加えられて、ノズル孔９からインク滴
が吐出される。Thus, an ink jet head is obtained. FIG. 11 shows the ink jet head viewed from the nozzle hole side. The pressure chamber 3 of the ink-jet head thus formed is filled with ink liquid via the ink supply path 2 and the piezoelectric element 12 is deformed by applying a voltage, whereby the diaphragm 11 vibrates, and the pressure chamber 3 is vibrated. The ejection pressure is applied to the ink liquid in the inside, and an ink droplet is ejected from the nozzle hole 9.
【００１９】なお、本発明は上記実施例に限定されるも
のではなく、例えば基板１にはニッケルや感光性ガラス
等を用いてもよく、充填材４としては、パラフィンワッ
クス、ポリカーボネートなどの熱可塑性材料、又は、ポ
リビニールアルコール、ポリスチレン等の溶媒に溶解可
能な材料を用いてもよい。The present invention is not limited to the above embodiment. For example, the substrate 1 may be made of nickel or photosensitive glass, and the filler 4 may be made of thermoplastic resin such as paraffin wax or polycarbonate. A material or a material that can be dissolved in a solvent such as polyvinyl alcohol or polystyrene may be used.
【００２０】また加工の順序として、基板１の表側にま
ずノズル孔９より大きな孔５を形成し、さらにノズル孔
９を形成した後に、基板１の裏側に圧力室３とインク供
給路２を形成する等、加工の順序を変えてもよく、充填
材４は、基板１の裏面に振動板１１を接着した後で流し
出すようにしてもよい。The processing order is as follows. First, a hole 5 larger than the nozzle hole 9 is formed on the front side of the substrate 1, and after the nozzle hole 9 is formed, the pressure chamber 3 and the ink supply path 2 are formed on the back side of the substrate 1. For example, the order of processing may be changed, and the filler 4 may be poured out after the diaphragm 11 is adhered to the back surface of the substrate 1.
【００２１】[0021]
【発明の効果】本発明のインクジェットヘッドの製造方
法によれば、ノズル孔は光硬化樹脂に光を照射して、正
確な形状寸法に高精度に形成することができ、しかもノ
ズル孔の周囲以外の部分は、光硬化樹脂より機械強度が
優れた金属、ガラス又はシリコン単結晶など機械的強度
のある無機材料で形成することができるので、無用な振
動が発生せずインク滴の充分な吐出速度が得られて、安
定した印字品位を得ることができる。According to the method of manufacturing an ink jet head of the present invention, the nozzle hole can be formed into a precise shape and size with high accuracy by irradiating the photocurable resin with light, and the nozzle hole can be formed in a region other than around the nozzle hole. Can be made of an inorganic material with mechanical strength such as metal, glass or silicon single crystal, which has better mechanical strength than photo-curing resin, so that unnecessary vibration does not occur and sufficient ejection speed of ink droplets And stable printing quality can be obtained.
【図１】実施例の製造工程を示す正面断面略示図であ
る。FIG. 1 is a schematic front sectional view showing a manufacturing process of an embodiment.
【図２】実施例の製造工程を示す正面断面略示図であ
る。FIG. 2 is a schematic front sectional view showing a manufacturing process of the embodiment.
【図３】実施例の製造工程を示す平面断面図である。FIG. 3 is a plan sectional view showing a manufacturing process of the embodiment.
【図４】実施例の製造工程を示す正面断面略示図であ
る。FIG. 4 is a schematic front sectional view showing a manufacturing process of the embodiment.
【図５】実施例の製造工程を示す正面断面略示図であ
る。FIG. 5 is a schematic front sectional view showing a manufacturing process of the embodiment.
【図６】実施例の製造工程を示す正面断面略示図であ
る。FIG. 6 is a schematic front sectional view showing a manufacturing process of the embodiment.
【図７】実施例の製造工程を示す正面断面略示図であ
る。FIG. 7 is a schematic front sectional view showing a manufacturing process of the embodiment.
【図８】実施例の製造工程を示す正面断面略示図であ
る。FIG. 8 is a schematic front sectional view showing a manufacturing process of the embodiment.
【図９】実施例の製造工程を示す正面断面略示図であ
る。FIG. 9 is a schematic front sectional view showing a manufacturing process of the embodiment.
【図１０】実施例の製造工程を示す正面断面略示図であ
る。FIG. 10 is a schematic front sectional view showing a manufacturing process of the embodiment.
【図１１】実施例の製造工程を示す平面図である。FIG. 11 is a plan view showing a manufacturing process of the example.
１ 基板 ３ 圧力室 ５ 孔 ７ 光硬化樹脂 ８ 遮光マスク ９ ノズル孔 DESCRIPTION OF SYMBOLS 1 Substrate 3 Pressure chamber 5 Hole 7 Photocurable resin 8 Light shielding mask 9 Nozzle hole
───────────────────────────────────────────────────── フロントページの続き (56)参考文献 特開 平２−204048（ＪＰ，Ａ) 特開 平４−216061（ＪＰ，Ａ) 特開 平４−216059（ＪＰ，Ａ) (58)調査した分野(Int.Cl.7，ＤＢ名) B41J 2/135 - 2/16 B41J 2/01 B41J 2/265 B41J 2/385 B41J 2/415 ────────────────────────────────────────────────── ─── Continuation of the front page (56) References JP-A-2-204048 (JP, A) JP-A-4-2166061 (JP, A) JP-A-4-216059 (JP, A) (58) Field (Int.Cl. 7 , DB name) B41J 2/135-2/16 B41J 2/01 B41J 2/265 B41J 2/385 B41J 2/415
Claims (2)
ズル孔の径より太い孔を、上記圧力室内に開口するよう
に光硬化樹脂より機械強度の優れた基板に穿設して、 上記孔に上記光硬化樹脂を充填し、 上記ノズル孔になる部分を遮光した状態で上記光硬化樹
脂に光を照射して上記光硬化樹脂を硬化させた後、 上記孔内から上記光硬化樹脂の未硬化部分を除去してノ
ズル孔を形成することを特徴とするインクジェットヘッ
ドの製造方法。1. A thick hole than the diameter of the nozzle holes for ejecting ink droplets from the pressure chamber, and formed in the substrate excellent mechanical strength than the light curing resin so as to open to the pressure chamber, the hole It was charged with the photocurable resin, after curing the photocurable resin is irradiated with light to the photocurable resin while shielding the areas of the nozzle openings, only the photocurable resin from the hole A method for manufacturing an ink jet head, comprising forming a nozzle hole by removing a cured portion.
請求項１記載のインクジェットヘッドの製造方法。2. The method according to claim 1, wherein said substrate is formed of an inorganic material.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP300493A JP3224299B2 (en) | 1993-01-12 | 1993-01-12 | Method of manufacturing inkjet head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP300493A JP3224299B2 (en) | 1993-01-12 | 1993-01-12 | Method of manufacturing inkjet head |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH06206314A JPH06206314A (en) | 1994-07-26 |
| JP3224299B2 true JP3224299B2 (en) | 2001-10-29 |
Family
ID=11545215
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP300493A Expired - Fee Related JP3224299B2 (en) | 1993-01-12 | 1993-01-12 | Method of manufacturing inkjet head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP3224299B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4769367B2 (en) * | 2001-04-19 | 2011-09-07 | キヤノン株式会社 | Liquid discharge head and manufacturing method thereof |
| GB0113639D0 (en) * | 2001-06-05 | 2001-07-25 | Xaar Technology Ltd | Nozzle plate for droplet deposition apparatus |
| GB0316934D0 (en) * | 2003-07-19 | 2003-08-27 | Xaar Technology Ltd | Method of manufacturing a component for droplet deposition apparatus |
-
1993
- 1993-01-12 JP JP300493A patent/JP3224299B2/en not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH06206314A (en) | 1994-07-26 |
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