JPH0321847U - - Google Patents
Info
- Publication number
- JPH0321847U JPH0321847U JP8293589U JP8293589U JPH0321847U JP H0321847 U JPH0321847 U JP H0321847U JP 8293589 U JP8293589 U JP 8293589U JP 8293589 U JP8293589 U JP 8293589U JP H0321847 U JPH0321847 U JP H0321847U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- side wall
- discharge path
- upper edge
- cleaning tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 10
- 239000007788 liquid Substances 0.000 claims description 6
- 238000005406 washing Methods 0.000 claims 2
- 238000001816 cooling Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8293589U JPH0321847U (zh) | 1989-07-14 | 1989-07-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8293589U JPH0321847U (zh) | 1989-07-14 | 1989-07-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0321847U true JPH0321847U (zh) | 1991-03-05 |
Family
ID=31630184
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8293589U Pending JPH0321847U (zh) | 1989-07-14 | 1989-07-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0321847U (zh) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0680509U (ja) * | 1993-04-26 | 1994-11-15 | 大昭和精機株式会社 | サイドロック式工具チャック |
| JP2009266597A (ja) * | 2008-04-24 | 2009-11-12 | Sanyo Electric Co Ltd | パック電池 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6222440A (ja) * | 1985-07-22 | 1987-01-30 | Toshiba Corp | 半導体ウエハ用純水流水槽 |
| JPS6414923A (en) * | 1987-07-08 | 1989-01-19 | Mitsubishi Electric Corp | Wafer cleaning device |
-
1989
- 1989-07-14 JP JP8293589U patent/JPH0321847U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6222440A (ja) * | 1985-07-22 | 1987-01-30 | Toshiba Corp | 半導体ウエハ用純水流水槽 |
| JPS6414923A (en) * | 1987-07-08 | 1989-01-19 | Mitsubishi Electric Corp | Wafer cleaning device |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0680509U (ja) * | 1993-04-26 | 1994-11-15 | 大昭和精機株式会社 | サイドロック式工具チャック |
| JP2009266597A (ja) * | 2008-04-24 | 2009-11-12 | Sanyo Electric Co Ltd | パック電池 |
| JP4540723B2 (ja) * | 2008-04-24 | 2010-09-08 | 三洋電機株式会社 | パック電池 |