JPH0321847U - - Google Patents

Info

Publication number
JPH0321847U
JPH0321847U JP8293589U JP8293589U JPH0321847U JP H0321847 U JPH0321847 U JP H0321847U JP 8293589 U JP8293589 U JP 8293589U JP 8293589 U JP8293589 U JP 8293589U JP H0321847 U JPH0321847 U JP H0321847U
Authority
JP
Japan
Prior art keywords
cleaning
side wall
discharge path
upper edge
cleaning tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8293589U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8293589U priority Critical patent/JPH0321847U/ja
Publication of JPH0321847U publication Critical patent/JPH0321847U/ja
Pending legal-status Critical Current

Links

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図は本考案に係る洗浄槽の平面図、第２図
は第１図中の―線断面図、第３図は側壁周辺
の要部平面図、第４図は排出路の変更実施例であ
る。 符号の説明、１…洗浄槽本体、２…洗浄液、３
…開放部、４…冷却管、５…洗浄液供給管、６…
洗浄槽本体、７…排出口、８…排出管、９…凹凸
、１０…排出路。 Fig. 1 is a plan view of the cleaning tank according to the present invention, Fig. 2 is a sectional view taken along the line - - in Fig. 1, Fig. 3 is a plan view of the main parts around the side wall, and Fig. 4 is an example of a modified discharge path. It is. Explanation of symbols, 1...Cleaning tank body, 2...Cleaning liquid, 3
...Opening part, 4...Cooling pipe, 5...Cleaning liquid supply pipe, 6...
Cleaning tank body, 7...Discharge port, 8...Discharge pipe, 9...Irregularities, 10...Discharge path.

Claims (1)

【実用新案登録請求の範囲】 (1) 内部に収容される洗浄液を供給管から供給
すると共に側壁上部よりオーバーフローさせて排
出管から排出するように構成され、被洗浄物を前
記洗浄液内に沈めて洗浄する洗浄槽において、前
記側壁の上縁部の少なくとも一部にオーバーフロ
ーする前記洗浄液を誘導するための排出路を設け
たことを特徴とする洗浄槽。 (2) 請求項１において、前記側壁の上縁を切り
欠いて凹凸を形成し、この凹凸によつて前記排出
路を形成したことを特徴とする洗浄槽。[Claims for Utility Model Registration] (1) The washing liquid contained in the cleaning liquid is supplied from a supply pipe, and is made to overflow from the upper part of the side wall and is discharged from a discharge pipe, and the object to be cleaned is immersed in the washing liquid. A cleaning tank for cleaning, characterized in that a discharge path for guiding the overflowing cleaning liquid is provided in at least a part of the upper edge of the side wall. (2) The cleaning tank according to claim 1, wherein the upper edge of the side wall is cut out to form unevenness, and the discharge path is formed by the unevenness.
JP8293589U 1989-07-14 1989-07-14 Pending JPH0321847U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8293589U JPH0321847U (en) 1989-07-14 1989-07-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8293589U JPH0321847U (en) 1989-07-14 1989-07-14

Publications (1)

Publication Number Publication Date
JPH0321847U true JPH0321847U (en) 1991-03-05

Family

ID=31630184

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8293589U Pending JPH0321847U (en) 1989-07-14 1989-07-14

Country Status (1)

Country Link
JP (1) JPH0321847U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0680509U (en) * 1993-04-26 1994-11-15 大昭和精機株式会社 Side lock type tool chuck
JP2009266597A (en) * 2008-04-24 2009-11-12 Sanyo Electric Co Ltd Battery pack

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6222440A (en) * 1985-07-22 1987-01-30 Toshiba Corp Pure water flowing tank for semiconductor wafer
JPS6414923A (en) * 1987-07-08 1989-01-19 Mitsubishi Electric Corp Wafer cleaning device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6222440A (en) * 1985-07-22 1987-01-30 Toshiba Corp Pure water flowing tank for semiconductor wafer
JPS6414923A (en) * 1987-07-08 1989-01-19 Mitsubishi Electric Corp Wafer cleaning device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0680509U (en) * 1993-04-26 1994-11-15 大昭和精機株式会社 Side lock type tool chuck
JP2009266597A (en) * 2008-04-24 2009-11-12 Sanyo Electric Co Ltd Battery pack
JP4540723B2 (en) * 2008-04-24 2010-09-08 三洋電機株式会社 Pack battery

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