JPH0276837U - - Google Patents
Info
- Publication number
- JPH0276837U JPH0276837U JP15699088U JP15699088U JPH0276837U JP H0276837 U JPH0276837 U JP H0276837U JP 15699088 U JP15699088 U JP 15699088U JP 15699088 U JP15699088 U JP 15699088U JP H0276837 U JPH0276837 U JP H0276837U
- Authority
- JP
- Japan
- Prior art keywords
- substrate processing
- drain port
- processing
- perforated
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 11
- 239000007788 liquid Substances 0.000 claims description 6
- 238000007654 immersion Methods 0.000 claims 1
- 238000004140 cleaning Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15699088U JPH0650982Y2 (ja) | 1988-11-30 | 1988-11-30 | 浸漬型基板処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15699088U JPH0650982Y2 (ja) | 1988-11-30 | 1988-11-30 | 浸漬型基板処理装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0276837U true JPH0276837U (zh) | 1990-06-13 |
| JPH0650982Y2 JPH0650982Y2 (ja) | 1994-12-21 |
Family
ID=31436033
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15699088U Expired - Lifetime JPH0650982Y2 (ja) | 1988-11-30 | 1988-11-30 | 浸漬型基板処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0650982Y2 (zh) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0430729U (zh) * | 1990-07-10 | 1992-03-12 | ||
| JPH0492632U (zh) * | 1990-12-28 | 1992-08-12 | ||
| JPH0497336U (zh) * | 1990-09-10 | 1992-08-24 | ||
| JP2010091727A (ja) * | 2008-10-07 | 2010-04-22 | Dainippon Screen Mfg Co Ltd | 基板処理槽及びその製造方法 |
-
1988
- 1988-11-30 JP JP15699088U patent/JPH0650982Y2/ja not_active Expired - Lifetime
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0430729U (zh) * | 1990-07-10 | 1992-03-12 | ||
| JPH0497336U (zh) * | 1990-09-10 | 1992-08-24 | ||
| JPH0492632U (zh) * | 1990-12-28 | 1992-08-12 | ||
| JP2010091727A (ja) * | 2008-10-07 | 2010-04-22 | Dainippon Screen Mfg Co Ltd | 基板処理槽及びその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0650982Y2 (ja) | 1994-12-21 |