JPS63102231U - - Google Patents
Info
- Publication number
- JPS63102231U JPS63102231U JP19747586U JP19747586U JPS63102231U JP S63102231 U JPS63102231 U JP S63102231U JP 19747586 U JP19747586 U JP 19747586U JP 19747586 U JP19747586 U JP 19747586U JP S63102231 U JPS63102231 U JP S63102231U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- tank
- cleaning tank
- degree
- angle
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 10
- 239000004065 semiconductor Substances 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 2
- 239000007788 liquid Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19747586U JPS63102231U (zh) | 1986-12-24 | 1986-12-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19747586U JPS63102231U (zh) | 1986-12-24 | 1986-12-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63102231U true JPS63102231U (zh) | 1988-07-02 |
Family
ID=31157248
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19747586U Pending JPS63102231U (zh) | 1986-12-24 | 1986-12-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63102231U (zh) |
-
1986
- 1986-12-24 JP JP19747586U patent/JPS63102231U/ja active Pending