JPH0321845B2 - - Google Patents
Info
- Publication number
- JPH0321845B2 JPH0321845B2 JP16352184A JP16352184A JPH0321845B2 JP H0321845 B2 JPH0321845 B2 JP H0321845B2 JP 16352184 A JP16352184 A JP 16352184A JP 16352184 A JP16352184 A JP 16352184A JP H0321845 B2 JPH0321845 B2 JP H0321845B2
- Authority
- JP
- Japan
- Prior art keywords
- signal
- detection signal
- counter
- pilot
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 48
- 238000007689 inspection Methods 0.000 claims description 22
- 230000002950 deficient Effects 0.000 claims description 9
- 238000012360 testing method Methods 0.000 claims description 7
- 238000012546 transfer Methods 0.000 claims description 4
- 230000032258 transport Effects 0.000 description 16
- 230000007547 defect Effects 0.000 description 13
- 238000000034 method Methods 0.000 description 10
- 238000012545 processing Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 7
- 230000008569 process Effects 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000000903 blocking effect Effects 0.000 description 4
- 230000008859 change Effects 0.000 description 4
- 238000005259 measurement Methods 0.000 description 2
- 230000004044 response Effects 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/16—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring distance of clearance between spaced objects
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16352184A JPS6141911A (ja) | 1984-08-03 | 1984-08-03 | 形状検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16352184A JPS6141911A (ja) | 1984-08-03 | 1984-08-03 | 形状検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6141911A JPS6141911A (ja) | 1986-02-28 |
| JPH0321845B2 true JPH0321845B2 (enrdf_load_stackoverflow) | 1991-03-25 |
Family
ID=15775446
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16352184A Granted JPS6141911A (ja) | 1984-08-03 | 1984-08-03 | 形状検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6141911A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2926703B2 (ja) * | 1988-02-12 | 1999-07-28 | 東京エレクトロン株式会社 | 基板処理方法及び装置 |
-
1984
- 1984-08-03 JP JP16352184A patent/JPS6141911A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6141911A (ja) | 1986-02-28 |
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