JPS6141911A - 形状検査装置 - Google Patents
形状検査装置Info
- Publication number
- JPS6141911A JPS6141911A JP16352184A JP16352184A JPS6141911A JP S6141911 A JPS6141911 A JP S6141911A JP 16352184 A JP16352184 A JP 16352184A JP 16352184 A JP16352184 A JP 16352184A JP S6141911 A JPS6141911 A JP S6141911A
- Authority
- JP
- Japan
- Prior art keywords
- signal
- carrier
- detection signal
- shape
- counter
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims abstract description 49
- 238000007689 inspection Methods 0.000 claims description 23
- 230000007547 defect Effects 0.000 claims description 12
- 238000012546 transfer Methods 0.000 claims description 6
- 238000012545 processing Methods 0.000 description 11
- 230000002950 deficient Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 7
- 238000000034 method Methods 0.000 description 7
- 238000012360 testing method Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000000903 blocking effect Effects 0.000 description 4
- 241000862969 Stella Species 0.000 description 3
- 241000951471 Citrus junos Species 0.000 description 2
- 235000019892 Stellar Nutrition 0.000 description 2
- 230000001133 acceleration Effects 0.000 description 2
- 239000013256 coordination polymer Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 240000006248 Broussonetia kazinoki Species 0.000 description 1
- 240000006394 Sorghum bicolor Species 0.000 description 1
- 235000011684 Sorghum saccharatum Nutrition 0.000 description 1
- 235000009430 Thespesia populnea Nutrition 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
- G01B21/16—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring distance of clearance between spaced objects
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16352184A JPS6141911A (ja) | 1984-08-03 | 1984-08-03 | 形状検査装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16352184A JPS6141911A (ja) | 1984-08-03 | 1984-08-03 | 形状検査装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6141911A true JPS6141911A (ja) | 1986-02-28 |
| JPH0321845B2 JPH0321845B2 (enrdf_load_stackoverflow) | 1991-03-25 |
Family
ID=15775446
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16352184A Granted JPS6141911A (ja) | 1984-08-03 | 1984-08-03 | 形状検査装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6141911A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08264621A (ja) * | 1988-02-12 | 1996-10-11 | Tokyo Electron Ltd | 処理方法及び処理装置 |
-
1984
- 1984-08-03 JP JP16352184A patent/JPS6141911A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH08264621A (ja) * | 1988-02-12 | 1996-10-11 | Tokyo Electron Ltd | 処理方法及び処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0321845B2 (enrdf_load_stackoverflow) | 1991-03-25 |
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