JPH0321842U - - Google Patents
Info
- Publication number
- JPH0321842U JPH0321842U JP8219489U JP8219489U JPH0321842U JP H0321842 U JPH0321842 U JP H0321842U JP 8219489 U JP8219489 U JP 8219489U JP 8219489 U JP8219489 U JP 8219489U JP H0321842 U JPH0321842 U JP H0321842U
- Authority
- JP
- Japan
- Prior art keywords
- chip
- wafer
- chips
- projection exposure
- alignment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000034 method Methods 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims 3
- 238000005259 measurement Methods 0.000 claims 2
- 230000003287 optical effect Effects 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8219489U JPH0321842U (fr) | 1989-07-14 | 1989-07-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8219489U JPH0321842U (fr) | 1989-07-14 | 1989-07-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0321842U true JPH0321842U (fr) | 1991-03-05 |
Family
ID=31628786
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8219489U Pending JPH0321842U (fr) | 1989-07-14 | 1989-07-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0321842U (fr) |
-
1989
- 1989-07-14 JP JP8219489U patent/JPH0321842U/ja active Pending
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