JPH03217283A - 洗浄時に発生する微粒子の回収装置 - Google Patents

洗浄時に発生する微粒子の回収装置

Info

Publication number
JPH03217283A
JPH03217283A JP1024390A JP1024390A JPH03217283A JP H03217283 A JPH03217283 A JP H03217283A JP 1024390 A JP1024390 A JP 1024390A JP 1024390 A JP1024390 A JP 1024390A JP H03217283 A JPH03217283 A JP H03217283A
Authority
JP
Japan
Prior art keywords
introduction
cleaning
chamber
solvent
liquid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1024390A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0570514B2 (https=
Inventor
Masahide Uchino
正英 内野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JAPAN FUIRUDO KK
Japan Field Co Ltd
Original Assignee
JAPAN FUIRUDO KK
Japan Field Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JAPAN FUIRUDO KK, Japan Field Co Ltd filed Critical JAPAN FUIRUDO KK
Priority to JP1024390A priority Critical patent/JPH03217283A/ja
Publication of JPH03217283A publication Critical patent/JPH03217283A/ja
Publication of JPH0570514B2 publication Critical patent/JPH0570514B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Cleaning By Liquid Or Steam (AREA)
JP1024390A 1990-01-19 1990-01-19 洗浄時に発生する微粒子の回収装置 Granted JPH03217283A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1024390A JPH03217283A (ja) 1990-01-19 1990-01-19 洗浄時に発生する微粒子の回収装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1024390A JPH03217283A (ja) 1990-01-19 1990-01-19 洗浄時に発生する微粒子の回収装置

Publications (2)

Publication Number Publication Date
JPH03217283A true JPH03217283A (ja) 1991-09-25
JPH0570514B2 JPH0570514B2 (https=) 1993-10-05

Family

ID=11744867

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1024390A Granted JPH03217283A (ja) 1990-01-19 1990-01-19 洗浄時に発生する微粒子の回収装置

Country Status (1)

Country Link
JP (1) JPH03217283A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010022884A (ja) * 2008-07-15 2010-02-04 Shin Ootsuka Kk 被処理物洗浄装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010022884A (ja) * 2008-07-15 2010-02-04 Shin Ootsuka Kk 被処理物洗浄装置

Also Published As

Publication number Publication date
JPH0570514B2 (https=) 1993-10-05

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