JPH0320758Y2 - - Google Patents
Info
- Publication number
- JPH0320758Y2 JPH0320758Y2 JP18702885U JP18702885U JPH0320758Y2 JP H0320758 Y2 JPH0320758 Y2 JP H0320758Y2 JP 18702885 U JP18702885 U JP 18702885U JP 18702885 U JP18702885 U JP 18702885U JP H0320758 Y2 JPH0320758 Y2 JP H0320758Y2
- Authority
- JP
- Japan
- Prior art keywords
- sample
- sample chamber
- gas
- low
- heat exchange
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 38
- 238000001816 cooling Methods 0.000 claims description 24
- 239000012535 impurity Substances 0.000 claims description 24
- 238000001179 sorption measurement Methods 0.000 claims description 17
- 238000001073 sample cooling Methods 0.000 claims description 14
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 claims description 6
- 229910002092 carbon dioxide Inorganic materials 0.000 claims description 3
- 239000001569 carbon dioxide Substances 0.000 claims description 3
- 238000007654 immersion Methods 0.000 claims 1
- 239000007921 spray Substances 0.000 claims 1
- 239000007789 gas Substances 0.000 description 65
- 239000003463 adsorbent Substances 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 6
- 238000009833 condensation Methods 0.000 description 5
- 230000005494 condensation Effects 0.000 description 5
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 239000001307 helium Substances 0.000 description 4
- 229910052734 helium Inorganic materials 0.000 description 4
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 150000002843 nonmetals Chemical class 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
- Optical Measuring Cells (AREA)
- Investigating Or Analysing Materials By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18702885U JPH0320758Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-12-04 | 1985-12-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18702885U JPH0320758Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-12-04 | 1985-12-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6293745U JPS6293745U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-06-15 |
| JPH0320758Y2 true JPH0320758Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-05-07 |
Family
ID=31137127
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18702885U Expired JPH0320758Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-12-04 | 1985-12-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0320758Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH087120B2 (ja) * | 1990-03-26 | 1996-01-29 | 長瀬産業株式会社 | 試料特性の測定装置及びその測定方法 |
| JP3212367B2 (ja) * | 1992-06-18 | 2001-09-25 | 三菱重工業株式会社 | 太陽光吸収率及びふく射率測定装置 |
| JP6857293B2 (ja) * | 2017-03-16 | 2021-04-14 | 大陽日酸株式会社 | 凍結保存容器 |
| WO2021131056A1 (ja) * | 2019-12-27 | 2021-07-01 | 株式会社エムダップ | 真空断熱二重容器に用いる輸送試料の固定装置 |
-
1985
- 1985-12-04 JP JP18702885U patent/JPH0320758Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6293745U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1987-06-15 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US5753791A (en) | Multisample dynamic headspace sampler | |
| US9885696B2 (en) | System for analyzing mercury | |
| CN108352345B (zh) | 测量用于基片的气氛输送和存储的运输箱的污染物的方法和系统 | |
| JP2006261675A (ja) | 基板ウエハの汚染を監視するための方法および装置 | |
| JPH0320758Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| US3826577A (en) | Gas analyzing apparatus | |
| US6248997B1 (en) | Method of analyzing substances existing in gas | |
| JP4893156B2 (ja) | 水質評価方法及びそれに用いられる基板接触器具 | |
| JPH07111393B2 (ja) | 水分測定装置 | |
| US5563330A (en) | Method and device for measuring the concentration of a detector gas in a measuring gas containing an interfering gas | |
| US3852604A (en) | Mercury analysis system and method | |
| JP4693268B2 (ja) | 試料水の水質評価方法 | |
| JP3571930B2 (ja) | 微量有機物捕集装置 | |
| US5092183A (en) | Device for cooling testing tubes | |
| CN110426245A (zh) | 水质挥发性有机物的自动定量取样器 | |
| US6609415B2 (en) | Method of evaluating adsorption of contaminant on solid surface | |
| JP2542208Y2 (ja) | 分析用サンプル冷却装置及びそのサンプルホルダー | |
| JPS6246265Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| KR20020094096A (ko) | 비색법을 이용한 대기나 배기가스 중의 질소산화물의측정장치 및 측정방법 | |
| US2758470A (en) | Dew point tester | |
| CN217605768U (zh) | 气质联用快速温控装置 | |
| JPH041735Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | ||
| CN108240967B (zh) | 一种带外罩的气敏特性响应曲线测试装置 | |
| JPH06503887A (ja) | 水分に敏感な装置あるいは手法に使用される汚染材料の負インパクトを減少するための対向流装置および方法 | |
| CA2130854C (en) | Apparatus and method for producing a reference gas |