JPH03196512A - 露光方法 - Google Patents

露光方法

Info

Publication number
JPH03196512A
JPH03196512A JP2288367A JP28836790A JPH03196512A JP H03196512 A JPH03196512 A JP H03196512A JP 2288367 A JP2288367 A JP 2288367A JP 28836790 A JP28836790 A JP 28836790A JP H03196512 A JPH03196512 A JP H03196512A
Authority
JP
Japan
Prior art keywords
exposure
excimer laser
light
pulses
photosensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2288367A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0519293B2 (enrdf_load_stackoverflow
Inventor
Akiyoshi Suzuki
章義 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2288367A priority Critical patent/JPH03196512A/ja
Publication of JPH03196512A publication Critical patent/JPH03196512A/ja
Publication of JPH0519293B2 publication Critical patent/JPH0519293B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP2288367A 1990-10-29 1990-10-29 露光方法 Granted JPH03196512A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2288367A JPH03196512A (ja) 1990-10-29 1990-10-29 露光方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2288367A JPH03196512A (ja) 1990-10-29 1990-10-29 露光方法

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP59015044A Division JPS60162258A (ja) 1984-02-01 1984-02-01 露光装置

Publications (2)

Publication Number Publication Date
JPH03196512A true JPH03196512A (ja) 1991-08-28
JPH0519293B2 JPH0519293B2 (enrdf_load_stackoverflow) 1993-03-16

Family

ID=17729289

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2288367A Granted JPH03196512A (ja) 1990-10-29 1990-10-29 露光方法

Country Status (1)

Country Link
JP (1) JPH03196512A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0519293B2 (enrdf_load_stackoverflow) 1993-03-16

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term