JPH049448B2 - - Google Patents

Info

Publication number
JPH049448B2
JPH049448B2 JP59022892A JP2289284A JPH049448B2 JP H049448 B2 JPH049448 B2 JP H049448B2 JP 59022892 A JP59022892 A JP 59022892A JP 2289284 A JP2289284 A JP 2289284A JP H049448 B2 JPH049448 B2 JP H049448B2
Authority
JP
Japan
Prior art keywords
light
light source
transfer surface
illuminance distribution
optical system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59022892A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60168026A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP59022892A priority Critical patent/JPS60168026A/ja
Publication of JPS60168026A publication Critical patent/JPS60168026A/ja
Priority to US07/198,587 priority patent/US4799791A/en
Publication of JPH049448B2 publication Critical patent/JPH049448B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems
    • G03F7/70133—Measurement of illumination distribution, in pupil plane or field plane
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J1/00—Photometry, e.g. photographic exposure meter
    • G01J1/42—Photometry, e.g. photographic exposure meter using electric radiation detectors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)
JP59022892A 1984-02-13 1984-02-13 投影露光装置 Granted JPS60168026A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP59022892A JPS60168026A (ja) 1984-02-13 1984-02-13 投影露光装置
US07/198,587 US4799791A (en) 1984-02-13 1988-05-23 Illuminance distribution measuring system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59022892A JPS60168026A (ja) 1984-02-13 1984-02-13 投影露光装置

Publications (2)

Publication Number Publication Date
JPS60168026A JPS60168026A (ja) 1985-08-31
JPH049448B2 true JPH049448B2 (enrdf_load_stackoverflow) 1992-02-20

Family

ID=12095307

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59022892A Granted JPS60168026A (ja) 1984-02-13 1984-02-13 投影露光装置

Country Status (1)

Country Link
JP (1) JPS60168026A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0652699B2 (ja) * 1984-09-13 1994-07-06 株式会社ニコン 露光装置
JPS62152433U (enrdf_load_stackoverflow) * 1986-03-19 1987-09-28
JP2571054B2 (ja) * 1987-04-28 1997-01-16 キヤノン株式会社 露光装置及び素子製造方法
JP4641873B2 (ja) * 2005-06-22 2011-03-02 小糸工業株式会社 発光状態測定装置

Also Published As

Publication number Publication date
JPS60168026A (ja) 1985-08-31

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term