JPH03192744A - Structure for mounting semiconductor device - Google Patents
Structure for mounting semiconductor deviceInfo
- Publication number
- JPH03192744A JPH03192744A JP1333408A JP33340889A JPH03192744A JP H03192744 A JPH03192744 A JP H03192744A JP 1333408 A JP1333408 A JP 1333408A JP 33340889 A JP33340889 A JP 33340889A JP H03192744 A JPH03192744 A JP H03192744A
- Authority
- JP
- Japan
- Prior art keywords
- board
- semiconductor device
- wire
- mounting
- wires
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 26
- 239000000758 substrate Substances 0.000 claims description 16
- 239000000853 adhesive Substances 0.000 claims description 8
- 230000001070 adhesive effect Effects 0.000 claims description 8
- 238000000034 method Methods 0.000 abstract description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 3
- 229910052782 aluminium Inorganic materials 0.000 abstract description 3
- 239000004411 aluminium Substances 0.000 abstract 1
- 239000007767 bonding agent Substances 0.000 abstract 1
- 239000010931 gold Substances 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000011347 resin Substances 0.000 description 2
- 229920005989 resin Polymers 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000012966 insertion method Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 230000005389 magnetism Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 230000035882 stress Effects 0.000 description 1
- 230000008646 thermal stress Effects 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L24/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
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- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/0401—Bonding areas specifically adapted for bump connectors, e.g. under bump metallisation [UBM]
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- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/0555—Shape
- H01L2224/05552—Shape in top view
- H01L2224/05554—Shape in top view being square
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- H01L2224/02—Bonding areas; Manufacturing methods related thereto
- H01L2224/04—Structure, shape, material or disposition of the bonding areas prior to the connecting process
- H01L2224/05—Structure, shape, material or disposition of the bonding areas prior to the connecting process of an individual bonding area
- H01L2224/0554—External layer
- H01L2224/05599—Material
- H01L2224/056—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof
- H01L2224/05617—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron [B], silicon [Si], germanium [Ge], arsenic [As], antimony [Sb], tellurium [Te] and polonium [Po], and alloys thereof the principal constituent melting at a temperature of greater than or equal to 400°C and less than 950°C
- H01L2224/05624—Aluminium [Al] as principal constituent
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- H01L2224/10—Bump connectors; Manufacturing methods related thereto
- H01L2224/11—Manufacturing methods
- H01L2224/113—Manufacturing methods by local deposition of the material of the bump connector
- H01L2224/1133—Manufacturing methods by local deposition of the material of the bump connector in solid form
- H01L2224/1134—Stud bumping, i.e. using a wire-bonding apparatus
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- H01L2224/10—Bump connectors; Manufacturing methods related thereto
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- H01L2224/161—Disposition
- H01L2224/16151—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/16221—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/16225—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
- H01L2224/16237—Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation the bump connector connecting to a bonding area disposed in a recess of the surface of the item
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
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- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
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- H01L2224/4805—Shape
- H01L2224/4809—Loop shape
- H01L2224/48091—Arched
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
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- H01L2224/48225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/481—Disposition
- H01L2224/48151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/48221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
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- H01L2224/48227—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
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- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/47—Structure, shape, material or disposition of the wire connectors after the connecting process
- H01L2224/48—Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
- H01L2224/485—Material
- H01L2224/48505—Material at the bonding interface
- H01L2224/48799—Principal constituent of the connecting portion of the wire connector being Copper (Cu)
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- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/81—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a bump connector
- H01L2224/818—Bonding techniques
- H01L2224/81801—Soldering or alloying
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- H01L2924/01013—Aluminum [Al]
Abstract
Description
【発明の詳細な説明】 [産業上の利用分野] 本発明は、半導体装置の実装構造に関するものである。[Detailed description of the invention] [Industrial application field] The present invention relates to a mounting structure for a semiconductor device.
〔従来の技術]
第4図は従来例を示すもので、基板1上にペーストなど
の接着剤2を介してグイボンドされた半導体装置3のア
ルミニウム・パッド4と、基板1上のインナーリード5
とは、金(Au)等のワイヤ6でワイヤボンディングさ
れている。[Prior Art] FIG. 4 shows a conventional example, in which an aluminum pad 4 of a semiconductor device 3 is bonded onto a substrate 1 via an adhesive 2 such as paste, and an inner lead 5 on the substrate 1.
is wire-bonded with a wire 6 made of gold (Au) or the like.
[発明が解決しようとする課題〕
しかしながら、上述の如きワイヤボンディングの場合、
ワイヤループが有るため、実装高さが高くなり、装置の
薄型化を阻害する要因となっている。また、インナーリ
ード5の先端に、セカンド・ワイヤボンディングを行う
ためのパッド7を設けなければならず、実装面積が大き
くなり、小型化できないという欠点が有る。[Problem to be solved by the invention] However, in the case of wire bonding as described above,
The presence of the wire loop increases the mounting height, which is a factor that prevents the device from being made thinner. Furthermore, it is necessary to provide a pad 7 at the tip of the inner lead 5 for second wire bonding, which increases the mounting area and has the disadvantage that miniaturization is not possible.
本発明は、上記欠点に鑑みなされたもので、その目的と
するところは、半導体装置の実装高さを低くでき、しか
も、実装面積を小さくできる半導体装置の実装構造を提
供することにある。The present invention has been made in view of the above-mentioned drawbacks, and an object of the present invention is to provide a mounting structure for a semiconductor device that can reduce the mounting height of the semiconductor device and also reduce the mounting area.
[課題を解決するための手段]
本発明に係る実装構造は、半導体装置のパッドに略垂直
にボンディングされ、実装基板の板厚と略同寸法の長さ
を有するワイヤを、前記パッドに対応する位置に形成さ
れ、前記基板上のインナーリードと接続されたスルーホ
ールに挿入するとともに、前記ワイヤを導電性接着剤を
介して前記スルーホールに電気的接続したことを特徴と
するものである。[Means for Solving the Problems] A mounting structure according to the present invention includes a wire that is bonded substantially perpendicularly to a pad of a semiconductor device and has a length that is substantially the same as the thickness of a mounting board, and is bonded to a pad of a semiconductor device in a manner corresponding to the pad. The wire is inserted into a through hole formed at a position connected to an inner lead on the substrate, and the wire is electrically connected to the through hole via a conductive adhesive.
[実施例]
第1図は本発明の一実施例を示すもので、半導体装置1
0のアルミニウム・パッド11には金または銅のワイヤ
12が略垂直にボンディングされており、ワイヤ12の
長さは後述の実装基板13の板厚と略同寸法に切断され
ている。このワイヤ12は、ガラスエポキシ等のプラス
チック系あるいはアルミナ等のセラミック系材料より成
る実装基板13に形成されたスルーホール14に挿入さ
れ、導電性ペースト(接着剤)15で固定されるととも
に、電気的に接続されている。また、スルーホール14
は、基板13上に形成されたインナーリード16と接続
されている。[Embodiment] FIG. 1 shows an embodiment of the present invention, in which a semiconductor device 1
A gold or copper wire 12 is bonded approximately perpendicularly to the aluminum pad 11 of No. 0, and the length of the wire 12 is cut to approximately the same dimension as the thickness of a mounting board 13, which will be described later. This wire 12 is inserted into a through hole 14 formed in a mounting board 13 made of a plastic material such as glass epoxy or a ceramic material such as alumina, fixed with a conductive paste (adhesive) 15, and electrically connected. It is connected to the. Also, through hole 14
are connected to inner leads 16 formed on the substrate 13.
ここで、導電性ペースト15は粘性の高いものが好まし
く、基板13がプラスチック系であれば、硬化温度の低
い(約150℃)ものが好ましい。なお、スルーホール
14の位置は上記パッド11の位置に対応して形成され
ることは言うまでもないことである。また、半導体装置
10の荷重がワイヤ12に加わらないように、半導体装
置10と基板13は、パッド11部分を除外して、絶縁
性接着剤17等で接着されている。Here, the conductive paste 15 preferably has high viscosity, and if the substrate 13 is made of plastic, it preferably has a low curing temperature (approximately 150° C.). It goes without saying that the position of the through hole 14 is formed corresponding to the position of the pad 11. Further, the semiconductor device 10 and the substrate 13 are bonded together with an insulating adhesive 17 or the like, except for the pad 11 portion, so that the load of the semiconductor device 10 is not applied to the wire 12.
次に、ワイヤ12をスルーホール14に挿入する方法に
ついて説明する。第2図に示すものはエアー吸引装置を
使用するもので、エアー吸引装置18は、例えば真空ポ
ンプであり、基板13の裏面から半導体装置IOにボン
ディングされたワイヤ12を吸引する。このとき、ワイ
ヤ12の先端に樹脂等の錘19を付着すれば、ワイヤ1
2が乱流に流されることな(吸引できる。また、第3図
に示すものは磁石を用いるもので、磁石20による挿入
方法では、ワイヤ12の先端に帯磁性樹脂(例えば鉄粉
等を混入したペースI−)21を付着し、この磁性を利
用して基板13の裏面から磁石20によりワイヤ12を
吸引する。Next, a method for inserting the wire 12 into the through hole 14 will be explained. The device shown in FIG. 2 uses an air suction device, and the air suction device 18 is, for example, a vacuum pump, and sucks the wire 12 bonded to the semiconductor device IO from the back surface of the substrate 13. At this time, if a weight 19 made of resin or the like is attached to the tip of the wire 12, the wire 12
In addition, the wire 12 shown in FIG. 3 uses a magnet, and in the insertion method using the magnet 20, the tip of the wire 12 is mixed with magnetic resin (for example, iron powder). Then, the wire 12 is attracted by the magnet 20 from the back surface of the substrate 13 using this magnetism.
このように、ワイヤ12を基板13のスルーホール14
に挿入することにより、実装高さを極めて低くすること
ができる。また、従来のようなインナーリードのセカン
ド・ワイヤボンディングも不要であるため、半導体装置
10の下方に位置する基板13のスペースが有効に活用
でき、小面積化できる。従って、非常に薄型化・小型化
が要求されるような商品、例えば、ICカードや液晶テ
レビ、電卓等に用いれば極めて効果的である。In this way, the wire 12 is connected to the through hole 14 of the board 13.
By inserting it into the holder, the mounting height can be made extremely low. Further, since there is no need for second wire bonding of the inner leads as in the conventional case, the space of the substrate 13 located below the semiconductor device 10 can be effectively utilized and the area can be reduced. Therefore, it is extremely effective when used in products that require extremely thin and compact size, such as IC cards, liquid crystal televisions, and calculators.
また、半導体装置10にボンディングされたワイヤ12
は、スルーホール14内で導電性ペースト15で固定さ
れるが、このとき導電性ペースト15は低温(約150
°C)で硬化させるため、熱的な影響をほとんど与えず
、安価なプラスチック系基板13を使用することができ
、製造コストを低減できる。Further, the wire 12 bonded to the semiconductor device 10
is fixed in the through hole 14 with conductive paste 15, but at this time, the conductive paste 15 is kept at a low temperature (approximately 150
C), there is almost no thermal influence, and an inexpensive plastic substrate 13 can be used, reducing manufacturing costs.
さらに、半導体装置10と、素材の異なる基板13との
間で、熱膨張率の差から発生する応力はワイヤ12の弾
力により吸収される。従って、熱的ストレスに強く、広
範囲の温度での使用が可能となる。Further, the stress generated due to the difference in coefficient of thermal expansion between the semiconductor device 10 and the substrate 13 made of different materials is absorbed by the elasticity of the wire 12. Therefore, it is resistant to thermal stress and can be used in a wide range of temperatures.
基板13上の回路パターンと接続するために設ける半導
体装置10上の電極は、ワイヤボンディングにより容易
に形成でき、半導体装置に電極バンブを作成するフリッ
プチップや、インナーリードの先端に電極バンブを作成
するTAB (テープ・オートメーテツド・ボンディン
グ)などのように、バンブを作成する複雑な工程が不要
となる。The electrodes on the semiconductor device 10 that are provided for connection to the circuit pattern on the substrate 13 can be easily formed by wire bonding, such as flip-chip to create electrode bumps on the semiconductor device or electrode bumps to be created at the tips of inner leads. A complicated process for creating bumps, such as TAB (tape automated bonding), becomes unnecessary.
従って、大幅な工程の簡易化が図れる。Therefore, the process can be significantly simplified.
また、基板13上に接合された半導体装置10をリペア
する場合、導電性ペースト15を溶剤で溶解することに
より容易に基板13から分離できる。従って、半導体装
置10のリペアは容易で、基板13は半永久的に使用で
きる。Further, when repairing the semiconductor device 10 bonded on the substrate 13, it can be easily separated from the substrate 13 by dissolving the conductive paste 15 with a solvent. Therefore, repair of the semiconductor device 10 is easy, and the substrate 13 can be used semi-permanently.
[発明の効果]
本発明に係る半導体装置の実装構造は、上記のように、
半導体装置のパッドに略垂直にボンディングされ、実装
基板の板厚と略同寸法の長さを有するワイヤを、前記パ
ッドに対応する位置に形成され、前記基板上のインナー
リードと接続されたスルーホールに挿入するとともに、
前記ワイヤを導電性接着剤を介して前記スルーホールに
電気的接続してなるので、半導体装置の実装高さを低く
でき、しかも、実装面積を小さくできるという効果があ
る。[Effects of the Invention] As described above, the mounting structure of the semiconductor device according to the present invention has the following features.
A wire bonded approximately perpendicularly to the pad of the semiconductor device and having a length approximately the same as the board thickness of the mounting board is formed at a position corresponding to the pad and connected to an inner lead on the board through a through hole. and insert it into
Since the wire is electrically connected to the through hole via a conductive adhesive, the mounting height of the semiconductor device can be lowered, and the mounting area can also be reduced.
第1図は本発明の一実施例を示す断面図、第2図及び第
3図はそれぞれ本発明に係る実装方法を示す簡略図、第
4図は従来例を示すもので、(a)は側面図、(ロ)は
平面図である。
10・・・半導体装置、11・・・パッド、12・・・
ワイヤ、13・・・実装基板、14・・・スルーホール
、15・・・導電性接着剤、16・・・インナーリード
、17・・・絶縁性接着剤。FIG. 1 is a cross-sectional view showing an embodiment of the present invention, FIGS. 2 and 3 are simplified diagrams showing the mounting method according to the present invention, and FIG. 4 shows a conventional example. A side view, and (b) a plan view. 10... Semiconductor device, 11... Pad, 12...
Wire, 13... Mounting board, 14... Through hole, 15... Conductive adhesive, 16... Inner lead, 17... Insulating adhesive.
Claims (1)
、実装基板の板厚と略同寸法の長さを有するワイヤを、
前記パッドに対応する位置に形成され、前記基板上のイ
ンナーリードと接続されたスルーホールに挿入するとと
もに、前記ワイヤを導電性接着剤を介して前記スルーホ
ールに電気的接続してなる半導体装置の実装構造。(1) A wire that is bonded approximately perpendicularly to the pad of the semiconductor device and has a length that is approximately the same as the thickness of the mounting board,
The semiconductor device is formed by inserting the wire into a through hole formed at a position corresponding to the pad and connected to an inner lead on the substrate, and electrically connecting the wire to the through hole via a conductive adhesive. Implementation structure.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1333408A JPH03192744A (en) | 1989-12-21 | 1989-12-21 | Structure for mounting semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1333408A JPH03192744A (en) | 1989-12-21 | 1989-12-21 | Structure for mounting semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH03192744A true JPH03192744A (en) | 1991-08-22 |
Family
ID=18265780
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1333408A Pending JPH03192744A (en) | 1989-12-21 | 1989-12-21 | Structure for mounting semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH03192744A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008277825A (en) * | 2007-04-26 | 2008-11-13 | Infineon Technologies Ag | Chip module, and manufacturing method thereof |
-
1989
- 1989-12-21 JP JP1333408A patent/JPH03192744A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008277825A (en) * | 2007-04-26 | 2008-11-13 | Infineon Technologies Ag | Chip module, and manufacturing method thereof |
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