JPH0319211B2 - - Google Patents

Info

Publication number
JPH0319211B2
JPH0319211B2 JP57119387A JP11938782A JPH0319211B2 JP H0319211 B2 JPH0319211 B2 JP H0319211B2 JP 57119387 A JP57119387 A JP 57119387A JP 11938782 A JP11938782 A JP 11938782A JP H0319211 B2 JPH0319211 B2 JP H0319211B2
Authority
JP
Japan
Prior art keywords
ruthenium
tungsten
catalyst
fraction
supported
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP57119387A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5910526A (ja
Inventor
Tomohiro Yoshinari
Masahiro Wakui
Hiroaki Taniguchi
Hiroshi Fujiwara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SHINNENRYOYU KAIHATSU GIJUTSU KENKYU KUMIAI
Original Assignee
SHINNENRYOYU KAIHATSU GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SHINNENRYOYU KAIHATSU GIJUTSU KENKYU KUMIAI filed Critical SHINNENRYOYU KAIHATSU GIJUTSU KENKYU KUMIAI
Priority to JP57119387A priority Critical patent/JPS5910526A/ja
Publication of JPS5910526A publication Critical patent/JPS5910526A/ja
Publication of JPH0319211B2 publication Critical patent/JPH0319211B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Low-Molecular Organic Synthesis Reactions Using Catalysts (AREA)
  • Production Of Liquid Hydrocarbon Mixture For Refining Petroleum (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
JP57119387A 1982-07-09 1982-07-09 炭化水素類の製造方法 Granted JPS5910526A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57119387A JPS5910526A (ja) 1982-07-09 1982-07-09 炭化水素類の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57119387A JPS5910526A (ja) 1982-07-09 1982-07-09 炭化水素類の製造方法

Publications (2)

Publication Number Publication Date
JPS5910526A JPS5910526A (ja) 1984-01-20
JPH0319211B2 true JPH0319211B2 (enrdf_load_html_response) 1991-03-14

Family

ID=14760234

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57119387A Granted JPS5910526A (ja) 1982-07-09 1982-07-09 炭化水素類の製造方法

Country Status (1)

Country Link
JP (1) JPS5910526A (enrdf_load_html_response)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7049226B2 (en) 2001-09-26 2006-05-23 Applied Materials, Inc. Integration of ALD tantalum nitride for copper metallization
US7115494B2 (en) 2000-06-28 2006-10-03 Applied Materials, Inc. Method and system for controlling the presence of fluorine in refractory metal layers
US7494908B2 (en) 2001-09-26 2009-02-24 Applied Materials, Inc. Apparatus for integration of barrier layer and seed layer
US7595263B2 (en) 2003-06-18 2009-09-29 Applied Materials, Inc. Atomic layer deposition of barrier materials

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS621783A (ja) * 1985-06-28 1987-01-07 Res Assoc Petroleum Alternat Dev<Rapad> 炭化水素の製造方法
JPS62109888A (ja) * 1985-11-06 1987-05-21 Res Assoc Petroleum Alternat Dev<Rapad> 炭化水素の製造法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4151190A (en) * 1976-05-21 1979-04-24 The Dow Chemical Company Process for producing C2 -C4 hydrocarbons from carbon monoxide and hydrogen
DE3201457A1 (de) * 1982-01-19 1983-07-28 Basf Ag, 6700 Ludwigshafen Verfahren zur herstellung von olefinen

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7115494B2 (en) 2000-06-28 2006-10-03 Applied Materials, Inc. Method and system for controlling the presence of fluorine in refractory metal layers
US7235486B2 (en) 2000-06-28 2007-06-26 Applied Materials, Inc. Method for forming tungsten materials during vapor deposition processes
US7465666B2 (en) 2000-06-28 2008-12-16 Applied Materials, Inc. Method for forming tungsten materials during vapor deposition processes
US7049226B2 (en) 2001-09-26 2006-05-23 Applied Materials, Inc. Integration of ALD tantalum nitride for copper metallization
US7494908B2 (en) 2001-09-26 2009-02-24 Applied Materials, Inc. Apparatus for integration of barrier layer and seed layer
US7595263B2 (en) 2003-06-18 2009-09-29 Applied Materials, Inc. Atomic layer deposition of barrier materials

Also Published As

Publication number Publication date
JPS5910526A (ja) 1984-01-20

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