JPH0318725Y2 - - Google Patents

Info

Publication number
JPH0318725Y2
JPH0318725Y2 JP1984148667U JP14866784U JPH0318725Y2 JP H0318725 Y2 JPH0318725 Y2 JP H0318725Y2 JP 1984148667 U JP1984148667 U JP 1984148667U JP 14866784 U JP14866784 U JP 14866784U JP H0318725 Y2 JPH0318725 Y2 JP H0318725Y2
Authority
JP
Japan
Prior art keywords
air
cylinder
flow rate
alarm
rate sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984148667U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6163003U (no
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984148667U priority Critical patent/JPH0318725Y2/ja
Publication of JPS6163003U publication Critical patent/JPS6163003U/ja
Application granted granted Critical
Publication of JPH0318725Y2 publication Critical patent/JPH0318725Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Actuator (AREA)
  • Fluid-Pressure Circuits (AREA)
  • Gear-Shifting Mechanisms (AREA)
  • Control Of Transmission Device (AREA)
JP1984148667U 1984-09-30 1984-09-30 Expired JPH0318725Y2 (no)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984148667U JPH0318725Y2 (no) 1984-09-30 1984-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984148667U JPH0318725Y2 (no) 1984-09-30 1984-09-30

Publications (2)

Publication Number Publication Date
JPS6163003U JPS6163003U (no) 1986-04-28
JPH0318725Y2 true JPH0318725Y2 (no) 1991-04-19

Family

ID=30706871

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984148667U Expired JPH0318725Y2 (no) 1984-09-30 1984-09-30

Country Status (1)

Country Link
JP (1) JPH0318725Y2 (no)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5252307B2 (ja) * 2009-07-01 2013-07-31 Smc株式会社 流体圧システムの漏れ検出機構及び検出方法

Also Published As

Publication number Publication date
JPS6163003U (no) 1986-04-28

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