JPH0318500Y2 - - Google Patents

Info

Publication number
JPH0318500Y2
JPH0318500Y2 JP1985186992U JP18699285U JPH0318500Y2 JP H0318500 Y2 JPH0318500 Y2 JP H0318500Y2 JP 1985186992 U JP1985186992 U JP 1985186992U JP 18699285 U JP18699285 U JP 18699285U JP H0318500 Y2 JPH0318500 Y2 JP H0318500Y2
Authority
JP
Japan
Prior art keywords
substrate
thin film
film
forming apparatus
vacuum chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1985186992U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6293363U (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985186992U priority Critical patent/JPH0318500Y2/ja
Publication of JPS6293363U publication Critical patent/JPS6293363U/ja
Application granted granted Critical
Publication of JPH0318500Y2 publication Critical patent/JPH0318500Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Thermal Transfer Or Thermal Recording In General (AREA)
  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP1985186992U 1985-12-04 1985-12-04 Expired JPH0318500Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985186992U JPH0318500Y2 (enExample) 1985-12-04 1985-12-04

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985186992U JPH0318500Y2 (enExample) 1985-12-04 1985-12-04

Publications (2)

Publication Number Publication Date
JPS6293363U JPS6293363U (enExample) 1987-06-15
JPH0318500Y2 true JPH0318500Y2 (enExample) 1991-04-18

Family

ID=31137054

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985186992U Expired JPH0318500Y2 (enExample) 1985-12-04 1985-12-04

Country Status (1)

Country Link
JP (1) JPH0318500Y2 (enExample)

Also Published As

Publication number Publication date
JPS6293363U (enExample) 1987-06-15

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