JPH0318342B2 - - Google Patents
Info
- Publication number
- JPH0318342B2 JPH0318342B2 JP56065029A JP6502981A JPH0318342B2 JP H0318342 B2 JPH0318342 B2 JP H0318342B2 JP 56065029 A JP56065029 A JP 56065029A JP 6502981 A JP6502981 A JP 6502981A JP H0318342 B2 JPH0318342 B2 JP H0318342B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- element isolation
- insulating film
- isolation region
- region
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B62—LAND VEHICLES FOR TRAVELLING OTHERWISE THAN ON RAILS
- B62D—MOTOR VEHICLES; TRAILERS
- B62D1/00—Steering controls, i.e. means for initiating a change of direction of the vehicle
- B62D1/02—Steering controls, i.e. means for initiating a change of direction of the vehicle vehicle-mounted
- B62D1/16—Steering columns
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/76—Making of isolation regions between components
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Combustion & Propulsion (AREA)
- Transportation (AREA)
- Mechanical Engineering (AREA)
- Local Oxidation Of Silicon (AREA)
- Drying Of Semiconductors (AREA)
- Element Separation (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56065029A JPS57180143A (en) | 1981-04-28 | 1981-04-28 | Manufacture of semiconductor device |
| US06/307,877 US4560421A (en) | 1980-10-02 | 1981-10-02 | Semiconductor device and method of manufacturing the same |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56065029A JPS57180143A (en) | 1981-04-28 | 1981-04-28 | Manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS57180143A JPS57180143A (en) | 1982-11-06 |
| JPH0318342B2 true JPH0318342B2 (cg-RX-API-DMAC7.html) | 1991-03-12 |
Family
ID=13275135
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56065029A Granted JPS57180143A (en) | 1980-10-02 | 1981-04-28 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS57180143A (cg-RX-API-DMAC7.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59201440A (ja) * | 1983-04-30 | 1984-11-15 | Toshiba Corp | 半導体装置及びその製造方法 |
-
1981
- 1981-04-28 JP JP56065029A patent/JPS57180143A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS57180143A (en) | 1982-11-06 |