JPH03182973A - Picture processor - Google Patents

Abstract

PURPOSE:To improve the effective scanning rate of a galvano mirror and the performance of a picture processing by permitting a vibration control means to input pictures of conditions different in the going and returning routes of the galvano mirror. CONSTITUTION:A galvano drive control circuit 21 controls the vibration operation of the galvano mirror 3. It generates a control signal so that a precise picture is normally inputted in the going route and the speed of the galvano mirror 3 is improved and a coarse picture is inputted in the returning route for inputting the pictures different in the conditions in the going and returning routes of the galvano mirror 3 and it outputs the signal to a galvano drive 2. Thus, the effective scanning rate improves since the pictures are inputted in any scanning procedures of the galvano mirror 3, and the pictures of different kinds are inputted in the going/returning routes. Thus, the performance of picture recognition can be improved.

Description

[Detailed Description of the Invention] [Summary] An object of the present invention is to provide an image processing device that can increase the effective scanning rate and improve the image processing performance, and is capable of processing a target object placed on a stage. , irradiate the light from the light source in a scanning manner by vibrating the galvanometer mirror,
In an image processing apparatus that generates an input image of a target object from the reflected light by an image input means and processes the image of the target object by an image recognition means based on the input image, vibration control controls the vibration operation of the galvanomirror. A means is provided, and the vibration control means is configured to perform control such that images can be input under at least different conditions on the forward and backward paths of the galvanometer mirror.

[Industrial application field]

The present invention relates to an image processing device, and particularly to an image processing device that measures and recognizes the shape of an object in a non-contact manner.

In recent years, methods of measuring and recognizing the shape and position of an object in a non-contact manner by irradiating the object with light and detecting the reflected light have become popular. Among these, there is a need for a photodetection method that measures the three-dimensional shape of an object, but a photodetection method that is satisfactory for a wide variety of objects has not yet been developed. If such a light detection method is developed, it can be applied to, for example, shape measurement of surface-mounted components on which a wide variety of objects are mounted.

That is, surface mount components (SMD: 5urfa
ceM.

Unted Devices are soldered while placed on the board, so if there is a slight build-up, loose parts, or unsoldered parts, this can easily cause a failure, and reliable mounting inspection is not possible. desired. Such mounting inspections were generally performed visually. However, since human error is inevitable in visual inspection, there is a need for an apparatus that can automatically perform mounting inspection.

[Conventional technology]

Conventionally, two-dimensional measurement has been performed to measure the outer shape and position of an object. In this measurement method, light is irradiated from a predetermined direction, the reflected light is detected by a photodetector installed vertically above, a grayscale image is collected, and the shape is measured by image processing.

In addition, methods to measure three-dimensional shapes have been tried in the past.
There are multiple methods for 3D shape detection. Among the conventional 3D shape measurements, there is a detection method that irradiates the object with light such as Sposo i light or Surin 1 and measures the height using the principle of triangulation. teeth,
Targets from several mm to several tens of centimeters can be detected at high speed with a resolution of several tens of micrometers.
It is suitable as a method for measuring with high precision.

An example of a recognition apparatus in which a conventional image processing apparatus using this method is applied is one using a laser scanning optical system as shown in FIG. 6, for example.

In the figure, a collimated laser beam from a laser light source 1 is incident on a galvano mirror 3 that vibrates due to the drive of a galvano driver (for example, a morph) 2, and is scanned by this galvano mirror 3 as a reflected laser beam. The light is focused by a lens or the like and irradiated onto the target object 5 on the stage 4. Then, the reflected light from the target object 5 is imaged on a height sensor (for example, PSD) 6 installed in an oblique direction,
The height sensor 6 detects the reflected light and simultaneously measures the height and shade (brightness) of the target object 5. Note that the galvanometer mirror 3 moves back and forth in the scanning direction shown in the figure, and the stage 4 moves in the sub-scanning direction.

FIG. 7 is a block diagram of the recognition device, and in this figure, the output signal of the height sensor 6 is converted into an A/D converter 7.
The image is converted into D and input to the image input circuit 8. On the other hand, the movement of the stage 4 is controlled by a stage driver 9,
Control data for the stage driver 9 (corresponding to the movement position of the stage 4) is input to the image input circuit 8. The image input circuit 8 obtains scanning data of the target object 5 from the moving position of the stage 4, and calculates the scanning data of the target object 5 corresponding to the scanning data at that time.
The input image is subjected to digital processing and sent to the frame memory 10, which stores it as image data. Then, the recognition circuit 11 recognizes the height, shape, etc. of the target object 5 based on the image data in the frame memory 10, and performs, for example, an inspection.

[Problem to be solved by the invention]

However, in such a conventional image processing device, as shown in the drive waveform of the galvano mirror 3 in FIG. Therefore, the effective scanning rate (image input time/scanning time) in the scanning process of the galvanometer mirror 3 was low, and there was a problem that the performance of image processing (for example, recognition) could not be further improved.

SUMMARY OF THE INVENTION Therefore, an object of the present invention is to provide an image processing apparatus that can increase the effective scanning rate and improve image processing performance.

[Means to solve the problem]

In order to achieve the above-mentioned object, the image processing apparatus according to the present invention irradiates a target object placed on a stage with light from a light source in a scanning manner by vibrating a galvanometer mirror, In an image processing apparatus, an input image of a target object is generated by an image input means from the reflected light, and an image of the target object is processed by an image recognition means based on the input image. A control means is provided, and the vibration control means is configured to perform control such that images can be input under at least different conditions on the forward and return paths of the galvanometer mirror.

In the invention as set forth in claim 2, the vibration control means performs control such that the intensity of the light source is changed during the reciprocating vibration operation of the galvanomirror. is characterized in that the speed is changed in the reciprocating motion of the galvanometer mirror, and the image input means is controlled so that a fine image is input on the forward path and a coarse image is input on the return path.

[Effect]

In the present invention, the vibration control means performs image input under at least different conditions during the forward and return passes of the galvanometer mirror, and input images are also obtained during the return pass.

Therefore, the effective scanning rate of the galvanomirror is improved, and since different types of images are input on the forward and backward passes, the performance of image processing is improved.

〔Example〕

Hereinafter, the present invention will be explained based on the drawings.

FIG. 1.2 is a diagram showing a first embodiment of the image processing device according to the present invention, and is an example applied to an object recognition device. In describing this embodiment, the same components as those in the conventional example are given the same numbers and redundant explanation will be omitted.

In FIG. 1, 21 is a galvano drive control circuit (corresponding to the vibration control means t), and the galvano drive 21 controls the vibration operation of the galvanometer mirror 3, and the galvano drive 21 is used to control the vibration operation of the galvano mirror 3. Normal precision image input is performed on the forward path so that image input of 2 is possible, and a control signal is generated and output to the galvano driver 2 so that the speed of the galvano mirror 3 is increased to perform rough image input on the return path. The galvano driver 2 drives the galvano mirror 3 based on a control signal from the galvano drive control circuit 21.

On the other hand, the control signal of the galvano drive control circuit 21 is also input to an image input circuit (corresponding to an image input means) 22, and the image input circuit 22 synchronizes with the reciprocating movement of the galvano 1-3 in the forward direction, Image input processing is performed on both the return trip and the results are output to the frame memory 10. The frame memory 10 stores input images of reciprocating motion, and recognizes the image of the target object 5 based on the stored image of the recognition port III. In this embodiment, the frame memory lO and the recognition circuit 11 constitute an image recognition means 23.

In the above configuration, in this embodiment, when image recognition is started, the galvano drive control circuit 21 generates a galvanoid live signal (corresponding to a control signal) as shown in FIG.
is generated, thereby driving the galvano mirror 3 via the galvano driver 2. Therefore, the speed of the galvanometer mirror 3 is slow on the outward path, and fast on the return path. In the image input circuit 22, image input processing is performed on both the outbound and return trips, with fine image input being performed on the outbound trip and coarse image input on the return trip. Thereafter, image recognition of the target object 5 is performed by the image recognition means 23.

Therefore, since images are input during every scanning stroke of the galvanometer mirror 3, the effective scanning rate is improved by 0. Moreover, different types of images are input on the forward and return passes, which improves the performance of image recognition. can be improved.

Next, FIG. 3 is a diagram showing a second embodiment of the present invention. In this embodiment, two height sensors 6a and 6b are provided.
They are usually placed facing each other. For the height sensors 6a and Gb installed diagonally, the back side of the target object 5 becomes a blind spot, and there are cases where it is not possible to measure all three-dimensional objects of the target object 5 with only one sensor. Sensors can help solve that problem. Also,
In this embodiment, the sensor switching circuit 32 is switched to the height sensor 6i by the switching control signal from the galvano drive control circuit 31.
a, 6b are selected, and the image input circuit 22 performs image input processing by position control Nobuo of the galvano drive control circuit 31, which has the advantage of enabling three-dimensional measurement without blind spots in a round trip.

FIG. 4.5 is a diagram showing a third embodiment of the present invention, in which the intensity of the laser light source 11 is changed by the forward and backward signals (control signals) of the galvano drive control circuit 41. The outgoing and incoming path signals from the galvano mirror 1 and f control circuit 41 are input to the laser beam tJ,1, and the intensity of the light is reduced during the outgoing path of the laser light source 1 and the galvano mirror 3, and the light intensity is reduced during the outgoing path of the galvano mirror 3. Increase the strength of The rest is the same as the second embodiment. Therefore, in this embodiment, as shown in FIG. 5, low-luminance scanning is performed on the outgoing path of the galvanometer mirror 3, and high-intensity scanning is performed on the outgoing path. This has the following effects.

In other words, in the conventional method, brightness modulation of a laser light source was performed through feedbank control based on the sensor output number, but in the conventional method, a feedback control circuit was required and there was a delay time for feedback. It was unsuitable for high-speed three-dimensional measurement. On the other hand, according to the method of the present embodiment, brightness modulation without the need for fee 1 is performed, and the optical dyna≧range for the brightness of the target object 5 is improved (for example, by 100 times).As a result, , it is possible to realize high-speed three-dimensional measurement.

It should be noted that although the above embodiment is an example in which the present invention is applied to a recognition device, the present invention is not limited thereto, and can also be applied to devices for ground purposes such as a height inspection device.

〔Effect of the invention〕

According to the present invention, it is possible to increase the effective scanning rate and improve image processing performance.

[Brief explanation of drawings]

Fig. 1.2 is a diagram showing a first embodiment of the image processing device according to the present invention, Fig. 1 is a block diagram thereof, Fig. 2 is a waveform diagram of the galvano drive, and Fig. 3 is a diagram showing a waveform diagram of the galvano drive. FIG. 4.5 is a block diagram showing a second embodiment of the image processing device according to the present invention, and FIG. 4 is a block diagram showing a third embodiment of the image processing device according to the present invention. Waveform diagrams of the galvano drive, Figures 6 to 8 are diagrams showing a conventional image processing device, 3 Figure 6 is its configuration diagram, Figure 7 is its block diagram, and Figure 8 is the waveform of the galvano drive. It is a diagram. 1... Laser light source, 2... Galvano driver, 3... Galvano mirror 4... Stage, 5... Target object, 6. 5a, b...height sensor, 7...
・A/D converter, 9... Stage driver, 10... Frame memory, 11... Recognition circuit, 213L 41... Galvano drive control circuit (vibration control means), 22... image input circuit, 23... image recognition means, 32... sensor switching control circuit. 4

Claims (3)

[Claims] (1) A target object (5) placed on a stage (4) is irradiated with light from a light source (1) in a scanning manner by vibrating a galvanometer mirror (3), and an image is input from the reflected light. An image processing device that generates an input image of a target object (5) by a means (22), and processes an image of the target object (5) by an image recognition means (23) based on the input image, the galvanometer mirror (3) ) is provided with vibration control means (21, 31, 41) for controlling the vibration operation of the vibration control means (
21, 31, 41) are image processing apparatuses characterized in that they are configured to perform control such that images can be input under at least different conditions in the forward and backward paths of the galvanometer mirror (3). (2) The vibration control means (41) includes a galvanometer mirror (
2. The image processing apparatus according to claim 1, wherein control is performed to change the intensity of the light source (1) during the reciprocating vibration operation of step 3). (3) The vibration control means (21, 31) changes the speed of the vibration operation of the galvano mirror (3) in a reciprocating manner, and inputs a fine image on the outward journey and coarse image input on the return journey. The image processing apparatus according to claim 1, characterized in that it controls input means (22).